JP6867393B2 - 基板のドーピング方法、半導体デバイスのドーピング方法及び基板をドーピングするシステム - Google Patents
基板のドーピング方法、半導体デバイスのドーピング方法及び基板をドーピングするシステム Download PDFInfo
- Publication number
- JP6867393B2 JP6867393B2 JP2018532148A JP2018532148A JP6867393B2 JP 6867393 B2 JP6867393 B2 JP 6867393B2 JP 2018532148 A JP2018532148 A JP 2018532148A JP 2018532148 A JP2018532148 A JP 2018532148A JP 6867393 B2 JP6867393 B2 JP 6867393B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- helium
- annealing
- dopant
- dose
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims description 146
- 238000000034 method Methods 0.000 title claims description 50
- 239000004065 semiconductor Substances 0.000 title claims description 17
- 239000002019 doping agent Substances 0.000 claims description 77
- 239000001307 helium Substances 0.000 claims description 77
- 229910052734 helium Inorganic materials 0.000 claims description 77
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 74
- 238000002347 injection Methods 0.000 claims description 64
- 239000007924 injection Substances 0.000 claims description 64
- 238000000137 annealing Methods 0.000 claims description 61
- 229910052785 arsenic Inorganic materials 0.000 claims description 42
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 42
- 238000000151 deposition Methods 0.000 claims description 25
- 230000004913 activation Effects 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 19
- 239000010703 silicon Substances 0.000 claims description 19
- 230000008021 deposition Effects 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 229910000927 Ge alloy Inorganic materials 0.000 claims description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 78
- 238000009792 diffusion process Methods 0.000 description 25
- 230000008569 process Effects 0.000 description 19
- 239000000463 material Substances 0.000 description 14
- 230000007547 defect Effects 0.000 description 12
- 238000005530 etching Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 11
- 239000013078 crystal Substances 0.000 description 7
- 230000014759 maintenance of location Effects 0.000 description 7
- 239000002344 surface layer Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000002513 implantation Methods 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 230000000717 retained effect Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- -1 helium ions Chemical class 0.000 description 4
- 230000001976 improved effect Effects 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 238000004151 rapid thermal annealing Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/02554—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3215—Doping the layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823431—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
- H01L29/66803—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with a step of doping the vertical sidewall, e.g. using tilted or multi-angled implants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
Description
Claims (13)
- 300℃以上の注入温度で、基板の表面を通って、ヘリウム種のドーズを基板の中へ注入するステップであって、ヘリウム種の前記ドーズは、5×10 15 /cm 2 から2×10 17 /cm 2 のヘリウムのドーズを含み、前記ヘリウム種は、200eVから20keVのエネルギーを含むステップと、
ドーパントを含むドーピング層を前記基板の前記表面に堆積するステップと、
アニール温度で前記基板のアニーリングをするステップであって、前記アニール温度は前記注入温度より高い、ステップと、
前記注入するステップの前に、及び、前記堆積するステップの前に、酸化物層を除去するステップと、
前記アニーリングをするステップの前に、前記ドーピング層にキャッピング層を堆積するステップと、を有する、基板のドーピング方法。 - 前記注入温度は、300℃と600℃との間である、請求項1記載の方法。
- 前記ヘリウム種は、200eVから5000eVのエネルギーを含む、請求項1記載の方法。
- ヘリウム種の前記ドーズは、5×1015/cm2から1×1017/cm2のヘリウムのドーズを含む、請求項1記載の方法。
- 前記ドーピング層は、0.1nmと3nmとの間の厚さを有する、請求項1記載の方法。
- 前記ドーパントは、ヒ素、ホウ素、リン又はシリコンを含むフィルムを含む、請求項1記載の方法。
- 前記基板は、シリコン、ゲルマニウム、炭化ケイ素(SiC)、シリコン:ゲルマニウム合金、III−V族化合物半導体、又は、II−VI族化合物半導体の内の1つを含む、請求項1記載の方法。
- 前記ドーピング層を前記堆積するステップは、ヘリウム種の前記ドーズを前記基板の中へ前記注入するステップの前に行われる、請求項1記載の方法。
- 前記基板の前記アニーリングをするステップは、高速熱アニーリングを実施するステップを有し、温度上昇の速度は50℃/sより速く、アニール温度は900℃より高く、アニール時間は10秒より短い、請求項1記載の方法。
- 前記ドーパントを含む前記ドーピング層を前記基板の前記表面に前記堆積するステップ、ヘリウム種の前記ドーズを前記基板の中へ前記注入するステップ及び前記アニール温度で前記基板の前記アニーリングをするステップを有する動作は、動作の間に真空を破壊しないで、クラスターツールの中で行われ、前記方法は、さらに、
ヘリウム種の前記ドーズを前記基板の中へ前記注入するステップ及び前記ドーパントを含む前記ドーピング層を前記基板の前記表面に前記堆積するステップの前に、酸化物層を除去するステップと、
ヘリウム種の前記ドーズを前記基板の中へ前記注入するステップの後に、及び、前記ドーパントを含む前記ドーピング層を前記基板の前記表面に前記堆積するステップの後に、及び、前記アニール温度で前記基板の前記アニーリングをするステップの前に、前記基板にキャッピング層を堆積するステップと、を有し、前記酸化物層を前記除去するステップ及び前記キャッピング層を該堆積するステップは、さらに、動作の間に真空を破壊しないで、前記クラスターツールの中で実施される、請求項1記載の方法。 - 300℃を超える注入温度で、基板の表面を通って、ヘリウムのドーズを基板の中へ注入するステップであって、ヘリウムの前記ドーズは5×1015/cm2以上を含み、前記ヘリウム種は、200eVから20keVのエネルギーを含む、ステップと、
ドーパントを含むドーピング層を前記基板の前記表面に堆積するステップであって、前記ドーピング層は1nmより薄い厚さを有する、ステップと、
600℃より高いアニール温度で前記基板のアニーリングをするステップと、
前記注入するステップの前に、及び、前記堆積するステップの前に、酸化物層を除去するステップと、
前記アニーリングをするステップの前に、前記ドーピング層にキャッピング層を堆積するステップと、を有する、半導体デバイスのドーピング方法。 - 前記基板の中の前記ドーパントの1番目の活性化レベルは、前記注入温度が室温のときの、前記基板の中の前記ドーパントの2番目の活性化レベルより少なくとも5倍である、請求項11記載の方法。
- 前記基板はフィン型トランジスタデバイスを備え、前記フィン型トランジスタデバイスの隣接するフィン構造間の間隔は10nmより小さく、前記ドーピング層の厚さは0.5nm以下である、請求項11記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/977,849 US9589802B1 (en) | 2015-12-22 | 2015-12-22 | Damage free enhancement of dopant diffusion into a substrate |
US14/977,849 | 2015-12-22 | ||
PCT/US2016/063841 WO2017112353A1 (en) | 2015-12-22 | 2016-11-28 | Damage free enhancement of dopant diffusion into a substrate |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2019504493A JP2019504493A (ja) | 2019-02-14 |
JP2019504493A5 JP2019504493A5 (ja) | 2020-01-09 |
JP6867393B2 true JP6867393B2 (ja) | 2021-04-28 |
Family
ID=58163488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018532148A Active JP6867393B2 (ja) | 2015-12-22 | 2016-11-28 | 基板のドーピング方法、半導体デバイスのドーピング方法及び基板をドーピングするシステム |
Country Status (6)
Country | Link |
---|---|
US (3) | US9589802B1 (ja) |
JP (1) | JP6867393B2 (ja) |
KR (1) | KR20180087426A (ja) |
CN (1) | CN108431925B (ja) |
TW (1) | TWI721033B (ja) |
WO (1) | WO2017112353A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10985677B2 (en) | 2017-04-10 | 2021-04-20 | Face International Corporation | Systems and devices powered by autonomous electrical power sources |
US11605770B2 (en) | 2017-04-10 | 2023-03-14 | Face International Corporation | Autonomous electrical power sources |
US10079561B1 (en) | 2016-04-09 | 2018-09-18 | Face International Corporation | Energy harvesting components and devices |
US9793317B1 (en) | 2016-04-09 | 2017-10-17 | Face International Corporation | Devices and systems incorporating energy harvesting components/devices as autonomous energy sources and as energy supplementation, and methods for producing devices and systems incorporating energy harvesting components/devices |
US10109781B1 (en) | 2017-04-10 | 2018-10-23 | Face International Corporation | Methods for fabrication, manufacture and production of an autonomous electrical power source |
US10056538B1 (en) | 2016-04-09 | 2018-08-21 | Face International Corporation | Methods for fabrication, manufacture and production of energy harvesting components and devices |
US11957922B2 (en) | 2016-04-09 | 2024-04-16 | Face International Corporation | Structurally embedded and inhospitable environment systems having autonomous electrical power sources |
US9786718B1 (en) | 2016-04-09 | 2017-10-10 | Face International Corporation | Integrated circuit components incorporating energy harvesting components/devices, and methods for fabrication, manufacture and production of integrated circuit components incorporating energy harvesting components/devices |
US9893261B1 (en) | 2017-04-10 | 2018-02-13 | Face International Corporation | Structurally embedded and inhospitable environment systems and devices having autonomous electrical power sources |
US11980102B2 (en) | 2016-04-09 | 2024-05-07 | Face International Corporation | Systems and devices powered by autonomous electrical power sources |
US10032628B2 (en) * | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
DE102016112139B3 (de) * | 2016-07-01 | 2018-01-04 | Infineon Technologies Ag | Verfahren zum Reduzieren einer Verunreinigungskonzentration in einem Halbleiterkörper |
KR102550651B1 (ko) * | 2018-06-22 | 2023-07-05 | 삼성전자주식회사 | 반도체 소자 및 그의 제조 방법 |
KR102577262B1 (ko) * | 2018-08-14 | 2023-09-11 | 삼성전자주식회사 | 확산 방지 영역을 갖는 반도체 소자 |
KR102251234B1 (ko) | 2019-08-21 | 2021-05-13 | 주식회사 시노펙스 | 스트로크 거리가 증가된 포스 센서 스위치 |
US20220231144A1 (en) * | 2021-01-15 | 2022-07-21 | Institute of Microelectronics, Chinese Academy of Sciences | Semiconductor structure, method for manufacturing the same, and transistor |
US20230187222A1 (en) * | 2021-12-13 | 2023-06-15 | Applied Materials, Inc. | Adapting electrical, mechanical, and thermal properties of package substrates |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3718502A (en) * | 1969-10-15 | 1973-02-27 | J Gibbons | Enhancement of diffusion of atoms into a heated substrate by bombardment |
JP3464247B2 (ja) * | 1993-08-24 | 2003-11-05 | 株式会社東芝 | 半導体装置の製造方法 |
EP0897594B1 (en) * | 1996-05-08 | 2004-07-28 | Advanced Micro Devices, Inc. | Control of junction depth and channel length using generated interstitial gradients to oppose dopant diffusion |
US6153524A (en) * | 1997-07-29 | 2000-11-28 | Silicon Genesis Corporation | Cluster tool method using plasma immersion ion implantation |
JP2001189288A (ja) * | 1999-12-20 | 2001-07-10 | Ind Technol Res Inst | イオン注入利用の基板ダイシング法 |
US6436614B1 (en) * | 2000-10-20 | 2002-08-20 | Feng Zhou | Method for the formation of a thin optical crystal layer overlying a low dielectric constant substrate |
US20080194086A1 (en) * | 2004-06-04 | 2008-08-14 | Yuichiro Sasaki | Method of Introducing Impurity |
TW200703462A (en) * | 2005-04-13 | 2007-01-16 | Univ California | Wafer separation technique for the fabrication of free-standing (Al, In, Ga)N wafers |
TW200707799A (en) * | 2005-04-21 | 2007-02-16 | Aonex Technologies Inc | Bonded intermediate substrate and method of making same |
JP5528515B2 (ja) * | 2006-07-28 | 2014-06-25 | 一般財団法人電力中央研究所 | SiCバイポーラ型半導体素子 |
JP5155536B2 (ja) * | 2006-07-28 | 2013-03-06 | 一般財団法人電力中央研究所 | SiC結晶の質を向上させる方法およびSiC半導体素子の製造方法 |
US8450193B2 (en) * | 2006-08-15 | 2013-05-28 | Varian Semiconductor Equipment Associates, Inc. | Techniques for temperature-controlled ion implantation |
FR2905801B1 (fr) * | 2006-09-12 | 2008-12-05 | Soitec Silicon On Insulator | Procede de transfert d'une couche a haute temperature |
WO2009034699A1 (ja) * | 2007-09-10 | 2009-03-19 | Panasonic Corporation | 半導体装置の製造方法 |
US20090162966A1 (en) * | 2007-12-21 | 2009-06-25 | The Woodside Group Pte Ltd | Structure and method of formation of a solar cell |
US8372735B2 (en) | 2008-08-14 | 2013-02-12 | Varian Semiconductor Equipment Associates, Inc. | USJ techniques with helium-treated substrates |
KR20110089291A (ko) * | 2008-10-29 | 2011-08-05 | 이노바라이트, 잉크. | 기판에 다중 도핑된 접합을 형성하는 방법 |
US9685186B2 (en) * | 2009-02-27 | 2017-06-20 | Applied Materials, Inc. | HDD pattern implant system |
FR2949606B1 (fr) * | 2009-08-26 | 2011-10-28 | Commissariat Energie Atomique | Procede de detachement par fracture d'un film mince de silicium mettant en oeuvre une triple implantation |
US20110300696A1 (en) * | 2010-06-02 | 2011-12-08 | Varian Semiconductor Equipment Associates, Inc. | Method for damage-free junction formation |
US9076719B2 (en) * | 2013-08-21 | 2015-07-07 | The Regents Of The University Of California | Doping of a substrate via a dopant containing polymer film |
US20150214339A1 (en) * | 2014-01-24 | 2015-07-30 | Varian Semiconductor Equipment Associates, Inc. | Techniques for ion implantation of narrow semiconductor structures |
US10249498B2 (en) | 2015-06-19 | 2019-04-02 | Tokyo Electron Limited | Method for using heated substrates for process chemistry control |
-
2015
- 2015-12-22 US US14/977,849 patent/US9589802B1/en active Active
-
2016
- 2016-11-11 TW TW105136772A patent/TWI721033B/zh active
- 2016-11-28 WO PCT/US2016/063841 patent/WO2017112353A1/en active Application Filing
- 2016-11-28 JP JP2018532148A patent/JP6867393B2/ja active Active
- 2016-11-28 KR KR1020187020175A patent/KR20180087426A/ko not_active Application Discontinuation
- 2016-11-28 CN CN201680074876.8A patent/CN108431925B/zh active Active
-
2017
- 2017-01-23 US US15/412,837 patent/US9953835B2/en active Active
-
2018
- 2018-04-16 US US15/953,922 patent/US20180240670A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2017112353A1 (en) | 2017-06-29 |
CN108431925B (zh) | 2022-08-02 |
TWI721033B (zh) | 2021-03-11 |
JP2019504493A (ja) | 2019-02-14 |
CN108431925A (zh) | 2018-08-21 |
US9953835B2 (en) | 2018-04-24 |
US20180240670A1 (en) | 2018-08-23 |
US20170178908A1 (en) | 2017-06-22 |
US9589802B1 (en) | 2017-03-07 |
TW201732868A (zh) | 2017-09-16 |
KR20180087426A (ko) | 2018-08-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6867393B2 (ja) | 基板のドーピング方法、半導体デバイスのドーピング方法及び基板をドーピングするシステム | |
TWI533357B (zh) | 藉由固相擴散形成超淺硼摻雜區域之方法 | |
TWI478215B (zh) | 藉由固相擴散形成超淺摻雜區域之方法 | |
US9773675B2 (en) | 3D material modification for advanced processing | |
US8114761B2 (en) | Method for doping non-planar transistors | |
US10043890B2 (en) | Method of forming spacers for a gate of a transistor | |
TWI609413B (zh) | 在基板上形成分子摻雜物單層之方法 | |
JP2019504493A5 (ja) | 基板のドーピング方法、半導体デバイスのドーピング方法及び基板をドーピングするシステム | |
CN107949918B (zh) | 使用保形掺杂物沉积的3D Si结构中的保形掺杂 | |
KR20140012727A (ko) | 컨포멀한 도핑을 위한 방법들 및 장치 | |
TWI668730B (zh) | 用於源極/汲極工程的整合系統及方法 | |
US9379021B2 (en) | Method to reduce K value of dielectric layer for advanced FinFET formation | |
US20140159120A1 (en) | Conformal Doping | |
CN112385046A (zh) | 利用先进控制的整合cmos源极漏极形成 | |
Baik et al. | Conformal and ultra shallow junction formation achieved using a pulsed-laser annealing process integrated with a modified plasma assisted doping method | |
CN112885716B (zh) | 半导体结构的形成方法 | |
CN108630535B (zh) | 半导体结构及其形成方法 | |
US11424164B2 (en) | Enhanced etch resistance for insulator layers implanted with low energy ions | |
TWI559373B (zh) | 對低阻抗原位摻雜的矽磊晶添加碳 | |
TWI834755B (zh) | 用於結合的選擇性單層摻雜的方法和設備 | |
TW201203375A (en) | Method for damage-free junction formation | |
TW202024363A (zh) | 用於結合的選擇性單層摻雜的方法和設備 | |
KR20080064450A (ko) | 반도체 소자 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191122 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191122 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20201111 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201201 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210226 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210323 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210408 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6867393 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |