JP6825251B2 - 発光素子 - Google Patents
発光素子 Download PDFInfo
- Publication number
- JP6825251B2 JP6825251B2 JP2016137342A JP2016137342A JP6825251B2 JP 6825251 B2 JP6825251 B2 JP 6825251B2 JP 2016137342 A JP2016137342 A JP 2016137342A JP 2016137342 A JP2016137342 A JP 2016137342A JP 6825251 B2 JP6825251 B2 JP 6825251B2
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- light
- emitting element
- layer
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 claims description 42
- 239000004065 semiconductor Substances 0.000 claims description 35
- 238000005468 ion implantation Methods 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 125
- 230000000903 blocking effect Effects 0.000 description 53
- 238000000926 separation method Methods 0.000 description 26
- 230000003287 optical effect Effects 0.000 description 17
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 16
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 16
- 230000008878 coupling Effects 0.000 description 16
- 238000010168 coupling process Methods 0.000 description 16
- 238000005859 coupling reaction Methods 0.000 description 16
- 230000001590 oxidative effect Effects 0.000 description 16
- 238000001514 detection method Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 125000006850 spacer group Chemical group 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 230000001902 propagating effect Effects 0.000 description 8
- 208000031481 Pathologic Constriction Diseases 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000010355 oscillation Effects 0.000 description 7
- 230000036262 stenosis Effects 0.000 description 7
- 208000037804 stenosis Diseases 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
- H01L31/14—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the light source or sources being controlled by the semiconductor device sensitive to radiation, e.g. image converters, image amplifiers or image storage devices
- H01L31/147—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the light source or sources being controlled by the semiconductor device sensitive to radiation, e.g. image converters, image amplifiers or image storage devices the light sources and the devices sensitive to radiation all being semiconductor devices characterised by potential barriers
- H01L31/153—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the light source or sources being controlled by the semiconductor device sensitive to radiation, e.g. image converters, image amplifiers or image storage devices the light sources and the devices sensitive to radiation all being semiconductor devices characterised by potential barriers formed in, or on, a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022416—Electrodes for devices characterised by at least one potential jump barrier or surface barrier comprising ring electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035209—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions comprising a quantum structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/03529—Shape of the potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0265—Intensity modulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18311—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation
- H01S5/18313—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation by oxidizing at least one of the DBR layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18322—Position of the structure
- H01S5/18327—Structure being part of a DBR
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
- H01S5/0207—Substrates having a special shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
- H01S5/04257—Electrodes, e.g. characterised by the structure characterised by the configuration having positive and negative electrodes on the same side of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18322—Position of the structure
- H01S5/1833—Position of the structure with more than one structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18344—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] characterized by the mesa, e.g. dimensions or shape of the mesa
- H01S5/18347—Mesa comprising active layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18344—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] characterized by the mesa, e.g. dimensions or shape of the mesa
- H01S5/1835—Non-circular mesa
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Lasers (AREA)
Description
また、電流阻止領域がイオン注入領域以外の方法で形成されている場合と比較して、発光部と受光部との電気的な分離がより簡易になされる、という効果を奏する。
図1を参照して、本実施の形態に係る発光素子10の構成の一例について説明する。本実施の形態では、本発明に係る発光素子を面発光型半導体レーザ(VCSEL:Vertical Cavity Surface Emitting Laser)に適用した形態を例示して説明する。図1(a)は本実施の形態に係る発光素子10の断面図であり、図1(b)は発光素子10の平面図である。図1(a)に示す断面図は、図1(b)に示す平面図においてA−A’で切断した断面図である。
p側電極配線36の他端側はメサMの側面から基板12の表面まで延伸され、p側電極パッド42−1を構成している。p側電極配線36は、例えば、Ti(チタン)/Au(金)の積層膜を着膜して形成される。なお、以下ではp側電極パッド42−1及びp側電極パッド42−2(図1(b)参照)を総称する場合は、「p側電極パッド42」という。
発光素子10では、p側電極がアノード電極を構成している。
そのため、非酸化領域32aの幅が、図2(b)に示す発光部50から受光部52にかけて、「広い」→「狭い」→「広い」となっている。
図8を参照して、本実施の形態に係る発光素子10aについて説明する。発光素子10aは、上記実施の形態に係る発光素子10の電流阻止領域60を電流阻止領域60aに置き換えた形態である。従って、電流阻止領域以外の構成は発光素子10と同様なので、同様の構成には同じ符号を付し、詳細な説明を省略する。
図9を参照して、本実施の形態に係る発光素子10bについて説明する。発光素子10bは、上記実施の形態に係る発光素子10aの電流阻止領域60aを電流阻止領域60bに置き換えた形態である。従って、電流阻止領域以外の構成は発光素子10aと同様なので、同様の構成には同じ符号を付し、詳細な説明を省略する。
図10を参照して、本実施の形態に係る発光素子10cについて説明する。発光素子10cは、上記実施の形態に係る発光素子10の電流阻止領域60に加えて基板12の裏面側に素子分離溝62を設けた形態である。素子分離溝62は製造工程において、例えばエッチング等によって形成される。発光素子10cにおける電流阻止領域60cは、発光面から活性領域24の上部まで至る領域に形成されており、発光素子10における電流阻止領域60と同じ構成である。従って、素子分離溝62以外の構成は発光素子10と同様なので、同様の構成には同じ符号を付し、詳細な説明を省略する。
図11を参照して、本実施の形態に係る発光素子10dについて説明する。発光素子10dは、上記実施の形態に係る発光素子10の電流阻止領域60に代えて基板12の表面側に素子分離溝64(凹部)を設けた形態である。素子分離溝64は製造工程において、例えばエッチング等によって形成される。従って、素子分離溝64以外の構成は発光素子10と同様なので、同様の構成には同じ符号を付し、詳細な説明を省略する。
図12を参照して、本実施の形態に係る発光素子10eについて説明する。上記各実施の形態では、発光部と受光部との間の少なくとも一部を電気的に分離して光出力の検出精度を向上させる(S/N比を改善する)ために電流阻止領域(電流阻止領域60、60a〜60c)、あるいは素子分離溝(素子分離溝62、64)を設けていた。しかしながら、上述したように、検出精度の許容度によっては必ずしも電流阻止領域、あるいは素子分離溝を用いなくともよい。
図13ないし図15を参照して、本実施の形態に係る発光素子10fないし10jについて説明する。本実施の形態は、上記各実施の形態において、メサMの形状、及び結合部の形状を変えた形態である。
12 基板
14 コンタクト層
16 下部DBR
18 境界
24 活性領域
26 上部DBR
28 コンタクト層
30 n側電極配線
32 酸化狭窄層
32a 非酸化領域
32b 酸化領域
34 層間絶縁膜
36 p側電極配線
38 出射面保護層
40、40f〜40j 結合部
42、42−1、42−2 p側電極パッド
44、44−1、44−2 n側電極パッド
50 発光部
52 受光部
54 APC制御部
60、60a〜60c、60f〜60j 電流阻止領域
62、64 素子分離溝
100 発光素子
102 基板
104 下部DBR
106 活性領域
108 上部DBR
110 p側電極配線
112 発光部
114 受光部
116 電流阻止領域
118 裏面電極
CMp、CMn コンタクトメタル
Ds 駆動源
Ith 閾値電流
Iv 駆動電流
Im モニタ電流
Ix クロストーク電流
Lo 出射光
Lv 発振光
Lm 伝播光
M、M1、M2 メサ
MS1、MS2、MS3 メサ
Po 光出力
Vpd 電源
Claims (6)
- 半絶縁性基板の表面側に形成され、量子層を含む半導体層を備える発光部と、
前記発光部から連続する前記半導体層によって構成され、前記発光部から当該半導体層を介して横方向に伝播する光を受光する受光部と、
前記発光部と前記受光部とを分離する、予め定められたイオンを前記半導体層に注入して形成されたイオン注入領域と、を備え、
前記発光部と前記受光部のアノード電極同士及びカソード電極同士は、お互いに分離された状態で前記表面側に形成されており、
前記発光部と前記受光部との間には、前記半絶縁性基板の裏面側から当該半絶縁性基板の厚みを越え、前記量子層は越えない深さの溝が形成されている
発光素子。 - 前記イオン注入領域は、前記表面側から前記量子層に至らない深さまで形成されている
請求項1に記載の発光素子。 - 前記イオン注入領域は、前記表面側から前記量子層を越える深さまで形成されている
請求項1に記載の発光素子。 - 前記イオン注入領域は、前記表面側から前記半絶縁性基板に達する深さまで形成されている
請求項1に記載の発光素子。 - 前記発光部及び前記受光部の少なくとも一部はお互いに電気的に分離されている
請求項1〜請求項4のいずれか1項に記載の発光素子。 - 前記受光部に接続され、前記受光部で受光された光により発生した電流を電圧に変換する電圧変換部を有する
請求項1〜請求項5のいずれか1項に記載の発光素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016137342A JP6825251B2 (ja) | 2016-07-12 | 2016-07-12 | 発光素子 |
US15/581,686 US10193010B2 (en) | 2016-07-12 | 2017-04-28 | Light emitting element |
CN201710431945.2A CN107611778A (zh) | 2016-07-12 | 2017-06-09 | 光发射元件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016137342A JP6825251B2 (ja) | 2016-07-12 | 2016-07-12 | 発光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018010914A JP2018010914A (ja) | 2018-01-18 |
JP6825251B2 true JP6825251B2 (ja) | 2021-02-03 |
Family
ID=60941367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016137342A Active JP6825251B2 (ja) | 2016-07-12 | 2016-07-12 | 発光素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10193010B2 (ja) |
JP (1) | JP6825251B2 (ja) |
CN (1) | CN107611778A (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6926414B2 (ja) * | 2016-08-10 | 2021-08-25 | 富士フイルムビジネスイノベーション株式会社 | 発光素子アレイ、及び光伝送装置 |
US10748881B2 (en) * | 2017-12-05 | 2020-08-18 | Seoul Viosys Co., Ltd. | Light emitting device with LED stack for display and display apparatus having the same |
JP2020092256A (ja) * | 2018-11-27 | 2020-06-11 | 株式会社リコー | 光源、光源装置、光学装置、計測装置、ロボット、電子機器、移動体、および造形装置 |
US20210074880A1 (en) * | 2018-12-18 | 2021-03-11 | Bolb Inc. | Light-output-power self-awareness light-emitting device |
CN110416874B (zh) * | 2019-09-18 | 2020-01-17 | 常州纵慧芯光半导体科技有限公司 | 一种小间距垂直腔面发射激光器阵列的制备方法 |
CN114914310B (zh) * | 2021-02-07 | 2024-04-09 | 中移(苏州)软件技术有限公司 | 氮化镓器件及其制造方法、水下通信系统 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62291987A (ja) * | 1986-06-12 | 1987-12-18 | Mitsubishi Electric Corp | 光集積化素子 |
US5404373A (en) * | 1991-11-08 | 1995-04-04 | University Of New Mexico | Electro-optical device |
US5283447A (en) * | 1992-01-21 | 1994-02-01 | Bandgap Technology Corporation | Integration of transistors with vertical cavity surface emitting lasers |
JP3206080B2 (ja) * | 1992-03-05 | 2001-09-04 | セイコーエプソン株式会社 | 半導体レーザ |
JPH0669491A (ja) * | 1992-08-18 | 1994-03-11 | Fujitsu Ltd | 光送受信装置 |
JPH0793419B2 (ja) * | 1992-11-04 | 1995-10-09 | 日本電気株式会社 | 受光発光集積素子 |
US6001664A (en) * | 1996-02-01 | 1999-12-14 | Cielo Communications, Inc. | Method for making closely-spaced VCSEL and photodetector on a substrate |
US5748661A (en) * | 1996-07-19 | 1998-05-05 | Motorola, Inc. | Integrated lateral detector and laser device and method of fabrication |
JPH11330609A (ja) * | 1998-03-11 | 1999-11-30 | Seiko Epson Corp | モニタ付き面発光レーザおよびその製造方法 |
JP2000106471A (ja) | 1998-09-28 | 2000-04-11 | Nippon Telegr & Teleph Corp <Ntt> | 面発光レーザ |
JP3652252B2 (ja) * | 2001-01-17 | 2005-05-25 | キヤノン株式会社 | 半導体光装置 |
JP2002344079A (ja) * | 2001-05-11 | 2002-11-29 | Canon Inc | 半導体リングレーザ装置及びその作製方法 |
JP4058633B2 (ja) * | 2003-07-10 | 2008-03-12 | セイコーエプソン株式会社 | 面発光型発光素子、光モジュール、光伝達装置 |
JP4934271B2 (ja) * | 2004-06-11 | 2012-05-16 | 日本オプネクスト株式会社 | 単一電源駆動光集積装置 |
JP4940600B2 (ja) | 2005-08-26 | 2012-05-30 | セイコーエプソン株式会社 | 電気光学素子および光伝送モジュール、電子機器 |
JP4741336B2 (ja) | 2005-10-14 | 2011-08-03 | 秀明 柿田 | 巻取り器 |
US8687664B2 (en) * | 2006-03-08 | 2014-04-01 | Agere Systems Llc | Laser assembly with integrated photodiode |
US20080240196A1 (en) | 2007-04-02 | 2008-10-02 | Seiko Epson Corporation | Surface emitting laser array, method for manufacturing the same, and semiconductor device |
JP2008277780A (ja) | 2007-04-02 | 2008-11-13 | Seiko Epson Corp | 面発光レーザアレイおよびその製造方法ならびに半導体装置 |
JP2009283859A (ja) * | 2008-05-26 | 2009-12-03 | Fuji Xerox Co Ltd | 光モジュール |
JP6316210B2 (ja) * | 2012-02-28 | 2018-04-25 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 交流ledのためのシリコン基板上における窒化ガリウムledの窒化アルミニウムガリウム/窒化ガリウムデバイスとの集積化 |
-
2016
- 2016-07-12 JP JP2016137342A patent/JP6825251B2/ja active Active
-
2017
- 2017-04-28 US US15/581,686 patent/US10193010B2/en active Active
- 2017-06-09 CN CN201710431945.2A patent/CN107611778A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN107611778A (zh) | 2018-01-19 |
US20180019362A1 (en) | 2018-01-18 |
US10193010B2 (en) | 2019-01-29 |
JP2018010914A (ja) | 2018-01-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6825251B2 (ja) | 発光素子 | |
JP6790529B2 (ja) | 発光デバイス | |
JP5387671B2 (ja) | 半導体レーザ及び集積素子 | |
US10431722B2 (en) | Light emitting element, light emitting element array, and light transmission device | |
JP5391240B2 (ja) | 面発光レーザ、光源、および光モジュール | |
JP5273516B2 (ja) | トンネル接合発光素子 | |
US20120300796A1 (en) | Hybrid lasers | |
US10348059B2 (en) | Light emitting element array and optical transmission device | |
JP5590829B2 (ja) | 面発光レーザ、面発光レーザアレイ及び画像形成装置 | |
JP2000196189A (ja) | 面発光型半導体レーザ | |
JP5902267B1 (ja) | 半導体発光素子 | |
JP7106820B2 (ja) | 光半導体素子 | |
JP7239920B2 (ja) | 半導体光増幅素子、半導体光増幅器、光出力装置、および距離計測装置 | |
JP2000106471A (ja) | 面発光レーザ | |
JP7255332B2 (ja) | 発光素子、および発光素子の製造方法 | |
JP7415329B2 (ja) | 発光素子、および発光素子の製造方法 | |
JP3043797B2 (ja) | 半導体光素子 | |
JPH0433386A (ja) | 端面出射型半導体発光素子およびその駆動方法 | |
JP2020177966A (ja) | 半導体光増幅器、光出力装置、および距離計測装置 | |
JP2009088445A (ja) | 光素子 | |
JPH07142697A (ja) | 光半導体装置 | |
JPH07312457A (ja) | 半導体レーザ装置 | |
JP2011082245A (ja) | 光半導体装置及びそれを用いた光モジュール |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190520 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200324 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200407 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200529 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200609 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200811 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20201215 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201228 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6825251 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |