JP6820775B2 - エッチング方法及びプラズマ処理装置 - Google Patents
エッチング方法及びプラズマ処理装置 Download PDFInfo
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Description
Claims (6)
- 被エッチング材料の表面にガスを吸着させて反応層を形成する反応層形成工程と、
前記反応層形成工程後、前記反応層を脱離させる脱離工程と、
前記被エッチング材料の上方に配置されたマスクに堆積した堆積膜または前記反応層を除去する除去工程とを有し、
前記反応層形成工程と前記脱離工程により前記被エッチング材料をエッチングし、
前記除去工程は、光学的手法により前記堆積膜の厚さまたは前記反応層の厚さをモニタし、前記モニタされた前記堆積膜の厚さまたは前記反応層の厚さが所定量より厚くなった場合に行われることを特徴とするエッチング方法。 - 請求項1に記載のエッチング方法において、
前記モニタされた前記堆積膜の厚さまたは前記反応層の厚さを基に前記除去工程の処理条件を決めることを特徴とするエッチング方法。 - 被エッチング材料の表面にガスを吸着させて反応層を形成する反応層形成工程と、
前記反応層形成工程後、前記反応層を脱離させる脱離工程と、
前記被エッチング材料の上方に配置されたマスクに堆積した堆積膜または前記反応層を除去する除去工程とを有し、
前記反応層形成工程と前記脱離工程により前記被エッチング材料をエッチングし、
前記反応層形成工程と前記脱離工程と前記除去工程は、全てプラズマを用いて行われ、
前記被エッチング材料を有する試料が載置された試料台に供給される前記除去工程の高周波電力は、前記試料台に供給される前記脱離工程の高周波電力より小さく、
前記反応層形成工程のプラズマは、HBrガスと所定のガスの混合ガス、BCl 3 ガスと前記所定のガスの混合ガスまたはHBrガスとBCl 3 ガスと所定のガスの混合ガスを用いて生成され、
前記所定のガスは、希ガスとCl 2 ガスとO 2 ガスとCO 2 ガスとN 2 ガスの中から少なくとも一つ選択されたガスであることを特徴とするエッチング方法。 - 請求項3に記載のエッチング方法において、
前記除去工程に用いるガスは、前記脱離工程に用いるガスと異なることを特徴とするエッチング方法。 - 被エッチング材料を有する試料がプラズマ処理される処理室と、プラズマを生成するための高周波電力を供給する高周波電源と、前記試料が載置される試料台とを備えるプラズマ処理装置において、
反応層形成工程と脱離工程によりエッチングされた前記被エッチング材料をモニタして得られた干渉スペクトルの中で前記反応層形成工程に増加し前記脱離工程に減少する波長の信号を前記反応層形成工程時に求め、前記求められた信号とモニタされた前記信号との差分に基づいて除去工程を実施する制御を行う制御部をさらに備え、
前記反応層形成工程は、前記被エッチング材料表面にガスを吸着させて反応層を形成する工程であり、
前記脱離工程は、前記反応層形成工程後、前記反応層を脱離させる工程であり、
前記除去工程は、前記被エッチング材料の上方に配置されたマスクに堆積した堆積膜または前記反応層を除去する工程であることを特徴とするプラズマ処理装置。 - 被エッチング材料の表面にガスを吸着させて反応層を形成する反応層形成工程と、
前記反応層形成工程後、前記反応層を脱離させる脱離工程と、
前記被エッチング材料の上方に配置されたマスクに堆積した堆積膜または前記反応層を除去する除去工程とを有し、
前記反応層形成工程と前記脱離工程により前記被エッチング材料をエッチングし、
前記反応層形成工程に用いるガスは、HBrガスと所定のガスの混合ガス、BCl 3 ガスと前記所定のガスの混合ガスまたはHBrガスとBCl 3 ガスと所定のガスの混合ガスであり、
前記所定のガスは、希ガスとCl 2 ガスとO 2 ガスとCO 2 ガスとN 2 ガスの中から少なくとも一つ選択されたガスであることを特徴とするエッチング方法。
Priority Applications (4)
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JP2017052066A JP6820775B2 (ja) | 2017-03-17 | 2017-03-17 | エッチング方法及びプラズマ処理装置 |
KR1020170091300A KR101990331B1 (ko) | 2017-03-17 | 2017-07-19 | 에칭 방법 및 플라스마 처리 장치 |
TW106125570A TWI672741B (zh) | 2017-03-17 | 2017-07-28 | 蝕刻方法及電漿處理裝置 |
US15/690,660 US10665516B2 (en) | 2017-03-17 | 2017-08-30 | Etching method and plasma processing apparatus |
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JP6846387B2 (ja) * | 2018-06-22 | 2021-03-24 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
US11276579B2 (en) * | 2018-11-14 | 2022-03-15 | Hitachi High-Tech Corporation | Substrate processing method and plasma processing apparatus |
WO2020121540A1 (ja) | 2019-02-04 | 2020-06-18 | 株式会社日立ハイテク | プラズマ処理方法及びプラズマ処理装置 |
JP7339032B2 (ja) * | 2019-06-28 | 2023-09-05 | 東京エレクトロン株式会社 | 基板処理方法および基板処理装置 |
JP7336365B2 (ja) * | 2019-11-19 | 2023-08-31 | 東京エレクトロン株式会社 | 膜をエッチングする方法及びプラズマ処理装置 |
US20230118576A1 (en) * | 2019-12-20 | 2023-04-20 | Hitachi High-Tech Corporation | Wafer processing method and plasma processing apparatus |
WO2021130798A1 (ja) * | 2019-12-23 | 2021-07-01 | 株式会社日立ハイテク | プラズマ処理方法およびプラズマ処理に用いる波長選択方法 |
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US20210407776A1 (en) * | 2020-06-25 | 2021-12-30 | Hitachi High-Tech Corporation | Vacuum processing apparatus and vacuum processing method |
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