JP7339032B2 - 基板処理方法および基板処理装置 - Google Patents
基板処理方法および基板処理装置 Download PDFInfo
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- JP7339032B2 JP7339032B2 JP2019122068A JP2019122068A JP7339032B2 JP 7339032 B2 JP7339032 B2 JP 7339032B2 JP 2019122068 A JP2019122068 A JP 2019122068A JP 2019122068 A JP2019122068 A JP 2019122068A JP 7339032 B2 JP7339032 B2 JP 7339032B2
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- silicon
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- 238000003672 processing method Methods 0.000 title claims description 72
- 238000000034 method Methods 0.000 claims description 143
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- 238000005530 etching Methods 0.000 claims description 71
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 claims description 18
- 238000003860 storage Methods 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000011737 fluorine Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
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- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
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- 230000005856 abnormality Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
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- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
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- 230000007423 decrease Effects 0.000 description 2
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 2
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- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Description
実施形態について説明する前に、半導体装置の製造工程において発生する形状異常について説明する。図15Aは、半導体装置の製造工程において形成される積層構造について説明するための図である。図15B,図15C,図15Dはそれぞれ、半導体装置の製造工程において形成されるフォトレジストのパターン、シリコン含有膜のパターン、マスクパターンについて説明するための図である。
そこで、以下に説明する実施形態では、シリコン含有膜をハードマスクとして有機膜をエッチングする際に、シリコン含有膜のスパッタにより生じる生成物(堆積物)を有機膜の保護膜として利用する。第1の実施形態に係る基板処理方法では、保護膜を形成する領域を、たとえば有機膜に形成するパターンのうち少なくともアスペクト比5、たとえば、アスペクト比5~7程度の領域とする。また、第1の実施形態に係る基板処理方法では、複数の処理工程を組み合わせることにより、エッチングにより基板に形成されるパターンの形状を制御する。工程の1つにおいて、たとえば、スパッタにより生じるスパッタ生成物によるパターンの側壁保護を実現する。
(1)保護膜形成工程
(2)エッチング工程
(3)マスク積層工程
(4)閉塞物除去工程
保護膜形成工程では、処理ガスをプラズマ化して、シリコン含有膜33をスパッタしつつ有機膜32をエッチングする。スパッタにより生じたシリコン含有膜33のスパッタ生成物は、有機膜32に形成される凹部の側壁に堆積し保護膜40を形成する。保護膜形成工程で使用する処理ガスは、第1の処理ガスの一例である。また、保護膜形成工程は、第1工程の一例である。
図4は、一実施形態に係る基板処理方法のエッチング工程を説明するための図である。エッチング工程においては、処理ガスをプラズマ化して、シリコン含有膜33をマスクとして有機膜32を深さ方向にエッチングする。エッチング工程において使用する処理ガスは、第2の処理ガスの一例である。また、エッチング工程は、第2工程の一例である。有機膜32のエッチングは、O2(酸素)ガスとCOS(硫化カルボニル)ガスの混合ガスを用いて実行する。なお、処理ガスに、Cl2(塩素)、HBr(臭化水素)等を添加しても良い。処理ガスは、主として有機膜32をエッチングするよう調製する。エッチング工程を実行することで、ハードマスクであるシリコン含有膜33が徐々に除去され、シリコン含有膜33の開口に応じた凹部が有機膜32に形成され、徐々に凹部が深くなる。
マスク積層工程では、たとえば異方性成膜により、シリコン含有膜33の膜厚を増加させる。マスク積層工程は、第3工程の一例である。図5Aおよび図5Bは、一実施形態に係る基板処理方法のマスク積層工程を説明するための図である。図5Aに示すように、保護膜形成工程の保護膜形成や、エッチング工程のエッチングを実行すると、シリコン含有膜33の膜厚は徐々に減少していく。有機膜32に形成するパターンのアスペクト比が高い場合、パターン底部が絶縁膜31に達する前にハードマスクであるシリコン含有膜33が消失する可能性がある。そこで、マスク積層工程は、シリコン含有膜33上から第3の処理ガスのプラズマを用いて成膜を行う。成膜条件は異方性に設定する。すなわち、シリコン含有膜33の頂部に主に成膜し、開口が閉塞しないように条件を設定する(図5B参照)。
図6Aおよび図6Bは、一実施形態に係る基板処理方法の閉塞物除去工程を説明するための図である。閉塞物除去工程では、フッ素(F)を含む処理ガスにより、保護膜形成工程、エッチング工程及びマスク積層工程のいずれかで生じた開口および/またはパターンの上部を閉塞する閉塞物を除去する。閉塞物除去工程で使用する処理ガスは、第4の処理ガスの一例である。また、閉塞物除去工程は、第4工程の一例である。図6Aに示すように、パターンが積層構造S上に形成される過程で、開口の側壁にエッチングにより生じた生成物(図6A(1)のD)が付着して開口が徐々に閉塞される場合がある。または、マスク積層において生成物(図6A(2)のD’)が水平方向にも成長し、開口やパターン上部が徐々に閉塞される場合がある。そこで、閉塞物除去工程では、開口やパターンを閉塞する閉塞物(生成物)をフッ素含有ガスのプラズマにより除去する。生成物Dまたは生成物D’の一部を除去することで、シリコン含有膜33の開口寸法が回復し(図6B(1)および(2))、後続する工程(たとえばエッチング工程)において処理ガスをパターン底部まで行き渡らせることができる。なお、閉塞物除去工程において使用する処理ガスは、たとえば、CHF3、CF4等のフッ素含有ガスと、N2ガスまたはアルゴン(Ar)ガス等の希ガスと、の混合ガスであってよい。
図12は、一実施形態に係る基板処理方法により得られる効果について説明するための図である。図12中、(A)は、有機膜32上のシリコン含有膜33にパターンが形成された状態を示す(図2に対応)。(A)においては、絶縁膜31、有機膜32、シリコン含有膜33の位置を矢印で表示している。また、(B)は、(A)に示す積層構造に対して保護膜(図3の40)を形成せず、エッチング工程を実行した場合の被処理体(比較例)の状態を示す。また、(C)は、(A)に示す積層構造に対して上記実施形態に係る基板処理方法により有機膜のパターンを形成した場合の被処理体(実施例)の状態を示す。
保護膜形成工程:
チャンバ内圧力:20mTorr
上部電極および下部電極の電圧0W+900W
H2ガス流量:250sccm
チャンバ内温度:T/W/B=120℃/100℃/10℃
処理時間:120秒
エッチング工程:
チャンバ内圧力:20mTorr
処理ガス流量:O2/CO2/=250sccm/50sccm
チャンバ内温度:T/W/B=120℃/100℃/10℃
処理時間:100秒
マスク積層工程:
チャンバ内圧力:20mTorr
上部電極および下部電極の電圧:800W+0W
処理ガス流量:Ar/O2/SiCl4=500sccm/100sccm/20sccm
チャンバ内温度:T/W/B=120℃/100℃/10℃
閉塞物除去工程:
チャンバ内圧力:30mTorr
上部電極および下部電極の電圧:300W+140W
処理ガス流量:CHF3/CF4/N2=300sccm/100sccm/150sccm
チャンバ内温度T/W/B=120℃/100℃/10℃
処理時間:30秒
発明者らは、また、保護膜形成工程の実行要否判定に用いる条件について検討した。図13は、一実施形態に係る基板処理方法において、処理実行要否を判定する際に用いる条件について説明するための図である。図13を参照し、保護膜形成工程の実行要否判定の条件Bについて説明する。
(A)積層構造Sのシリコン含有膜33にパターンが形成された直後の状態1
(B)状態1のパターンに対して、保護膜形成工程を30秒間実行した後の状態2
(C)状態2のパターンに対して、エッチング工程を300秒間実行した後の状態3
(D)状態1のパターンに対して、保護膜形成工程を120秒間実行した後の状態4
(E)状態4のパターンに対して、エッチング工程を300秒間実行した後の状態5
(F)状態1のパターンに対して、保護膜形成工程を600秒間実行した後の状態6
なお、図13の例において、保護膜形成工程およびエッチング工程の処理条件は以下の通りである。
保護膜形成工程:
チャンバ内圧力:20mTorr
上部電極および下部電極の電圧:0W+900W
処理ガス流量:H2=250
チャンバ内温度T/W/B=120℃/100℃/10℃
エッチング工程:
チャンバ内圧力:20mTorr
上部電極および下部電極の電圧:1400W+500W
処理ガス流量:O2/CO2=250sccm/50sccm
チャンバ内温度T/W/B=120℃/100℃/10℃
図14は、一実施形態にかかる基板処理装置100の概略構成を示す断面図である。基板処理装置100は、金属製(例えばアルミニウム製)の筒状(例えば円筒状)に形成された処理室(チャンバ)102を備える。
上記実施形態に係る基板処理方法は、基板を提供する工程と、第1工程と、を有する。基板を提供する工程において、第1膜と、当該第1膜上に形成され、かつ、開口が形成された第2膜と、を有する基板を提供する。第1工程において、第1の処理ガスをプラズマ化して第2膜のスパッタリングと同時に第1膜をエッチングしつつ、第1膜の側壁に前記スパッタリングにより発生した生成物で保護膜を形成する。実施形態に係る基板処理方法は、第2膜のスパッタリングによる保護膜形成と、第1膜のエッチングと、を並行して進行させることができる。このため、実施形態によれば、第1膜(有機膜)のボーイングを抑制しつつ、第1膜をエッチングできる。また、実施形態に係る基板処理方法によれば、ボーイングが発生しやすい箇所に保護膜を形成できるため、効果的にボーイングを抑制できる。第1工程はたとえば、第1膜に形成されるパターンのアスペクト比が少なくとも5になるまで実行してもよい。
32 有機膜(被エッチング膜)
33 シリコン含有膜
40 保護膜
100 基板処理装置
102 処理室
110 載置台
S 積層構造
D 生成物
W ウエハ
Claims (21)
- 第1膜と、当該第1膜上に形成され、かつ、開口が形成された第2膜と、を有する基板を提供する工程と、
第1の処理ガスをプラズマ化して前記第2膜のスパッタリングと同時に前記第1膜をエッチングしつつ、前記第1膜の側壁に前記スパッタリングにより発生した生成物で保護膜を形成する第1工程と、
前記第1の処理ガスと異なる第2の処理ガスをプラズマ化して前記第2膜を介して前記第1膜をエッチングする第2工程と、
を備える基板処理方法。 - 前記第1工程を前記第1膜に形成されるパターンのアスペクト比が少なくとも5になるまで実行する、請求項1に記載の基板処理方法。
- 第1膜と、当該第1膜上に形成され、かつ、開口が形成された第2膜と、を有する基板を提供する工程と、
第1の処理ガスをプラズマ化して前記第2膜のスパッタリングと同時に前記第1膜をエッチングしつつ、前記第1膜の側壁に前記スパッタリングにより発生した生成物で保護膜を形成する第1工程と、
を備え、
前記第1工程を前記第1膜に形成されるパターンのアスペクト比が5~7になるまで実行する、基板処理方法。 - 第2の処理ガスをプラズマ化して前記第2膜を介して前記第1膜をエッチングする第2工程をさらに含む、請求項3に記載の基板処理方法。
- 前記第2の処理ガスは、O2(酸素)ガスとCOS(硫化カルボニル)ガスの混合ガスである請求項1、2または4に記載の基板処理方法。
- 第3の処理ガスをプラズマ化して前記第2膜の頂部にシリコン含有膜を成膜する第3工程をさらに含む、請求項1から5のいずれか1項に記載の基板処理方法。
- 第4の処理ガスをプラズマ化して、前記開口および/または前記第1膜に形成されるパターン上部を閉塞する閉塞物を除去する、第4工程をさらに含む、請求項1から6のいずれか1項に記載の基板処理方法。
- 第1膜と、当該第1膜上に形成され、かつ、開口が形成された第2膜と、を有する基板を提供する工程と、
第1の処理ガスをプラズマ化して前記第2膜のスパッタリングと同時に前記第1膜をエッチングしつつ、前記第1膜の側壁に前記スパッタリングにより発生した生成物で保護膜を形成する第1工程と、
第3の処理ガスをプラズマ化して前記第2膜の頂部にシリコン含有膜を成膜する第3工程と、
第4の処理ガスをプラズマ化して、前記第3工程で生じた前記開口および/または前記第1膜に形成されるパターン上部を閉塞する閉塞物を除去する、第4工程と、
を備える基板処理方法。 - 前記第3の処理ガスは、ハロゲン化ケイ素ガスを含む請求項6または8に記載の基板処理方法。
- 前記第4の処理ガスは、フッ素を含む請求項7または8に記載の基板処理方法。
- 第2の処理ガスをプラズマ化して前記第2膜を介して前記第1膜をエッチングする第2工程と、
第3の処理ガスをプラズマ化して前記第2膜の頂部にシリコン含有膜を成膜する第3工程と、
第4の処理ガスをプラズマ化して、前記第1工程、前記第2工程および前記第3工程のいずれかで生じた前記開口および/または前記第1膜に形成されるパターン上部を閉塞する閉塞物を除去する、第4工程と、
から選択される1以上の任意の工程を組み合わせた複数のサイクルを所定の順序および回数で実行する、請求項2に記載の基板処理方法。 - 前記第2の処理ガスは、O2(酸素)ガスとCOS(硫化カルボニル)ガスの混合ガスである請求項11に記載の基板処理方法。
- 前記第3の処理ガスは、ハロゲン化ケイ素ガスを含む請求項11に記載の基板処理方法。
- 前記第4の処理ガスは、フッ素を含む請求項11に記載の基板処理方法。
- 20以上のアスペクト比を有するパターンを前記第1膜に形成する、請求項1から14のいずれか1項に記載の基板処理方法。
- 水素含有ガスである前記第1の処理ガスをプラズマ化して、反射防止膜である前記第2膜をスパッタリングする、請求項1から15のいずれか1項に記載の基板処理方法。
- 前記第1膜を介して、酸化シリコン膜と酸化窒化シリコン膜の交互積層部をエッチングする工程をさらに含む、請求項1から16のいずれか1項に記載の基板処理方法。
- 前記第1膜は、有機膜であり、
前記第2膜は、シリコン含有膜である請求項1から17のいずれか1項に記載の基板処理方法。 - 前記第1の処理ガスは、水素含有ガスである請求項1から18のいずれか1項に記載の基板処理方法。
- 有機膜と、当該有機膜上に形成され、かつ、開口が形成されたシリコン含有膜と、を有する基板を提供する工程と、
水素含有ガスをプラズマ化して前記シリコン含有膜のスパッタリングと同時に前記有機膜をエッチングしつつ、前記有機膜の側壁に前記スパッタリングにより発生した生成物で保護膜を形成する第1工程と、
O2(酸素)ガスとCOS(硫化カルボニル)ガスの混合ガスをプラズマ化して前記シリコン含有膜を介して前記有機膜をエッチングする第2工程と、
を備える基板処理方法。 - 請求項1から20のいずれか1項に記載の基板処理方法を実行するプログラムを記憶する記憶部と、当該プログラムを実行するよう制御する制御部と、
を備える基板処理装置。
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