JP6807829B2 - 暗視野および位相コントラストの同時検査のためのシステムおよび方法 - Google Patents

暗視野および位相コントラストの同時検査のためのシステムおよび方法 Download PDF

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JP6807829B2
JP6807829B2 JP2017503491A JP2017503491A JP6807829B2 JP 6807829 B2 JP6807829 B2 JP 6807829B2 JP 2017503491 A JP2017503491 A JP 2017503491A JP 2017503491 A JP2017503491 A JP 2017503491A JP 6807829 B2 JP6807829 B2 JP 6807829B2
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signal
sample
illumination
sensor
path
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JP2017531162A5 (enExample
JP2017531162A (ja
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チュアンヨン ファン
チュアンヨン ファン
チン リー
チン リー
ドナルド ペティボーン
ドナルド ペティボーン
バズ グレイヴス
バズ グレイヴス
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KLA Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field

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  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2017503491A 2014-07-22 2015-07-21 暗視野および位相コントラストの同時検査のためのシステムおよび方法 Active JP6807829B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462027393P 2014-07-22 2014-07-22
US62/027,393 2014-07-22
US14/804,296 2015-07-20
US14/804,296 US9726615B2 (en) 2014-07-22 2015-07-20 System and method for simultaneous dark field and phase contrast inspection
PCT/US2015/041409 WO2016014590A1 (en) 2014-07-22 2015-07-21 System and method for simultaneous dark field and phase contrast inspection

Publications (3)

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JP2017531162A JP2017531162A (ja) 2017-10-19
JP2017531162A5 JP2017531162A5 (enExample) 2018-08-30
JP6807829B2 true JP6807829B2 (ja) 2021-01-06

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US (1) US9726615B2 (enExample)
JP (1) JP6807829B2 (enExample)
KR (1) KR102241899B1 (enExample)
CN (1) CN106575631B (enExample)
DE (1) DE112015003394B4 (enExample)
SG (1) SG11201610820YA (enExample)
TW (1) TWI639822B (enExample)
WO (1) WO2016014590A1 (enExample)

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US9726615B2 (en) 2014-07-22 2017-08-08 Kla-Tencor Corporation System and method for simultaneous dark field and phase contrast inspection
TWI606101B (zh) 2016-12-28 2017-11-21 財團法人工業技術研究院 塗佈組合物及其製備方法
US10422984B2 (en) * 2017-05-12 2019-09-24 Applied Materials, Inc. Flexible mode scanning optical microscopy and inspection system
CN108022849B (zh) * 2017-11-30 2020-06-16 上海华力微电子有限公司 一种亮场缺陷检测设备自动优化光强条件的方法及系统
US10845187B2 (en) * 2018-03-02 2020-11-24 Drexel University Multiscale deformation measurements leveraging tailorable and multispectral speckle patterns
US11067389B2 (en) * 2018-03-13 2021-07-20 Kla Corporation Overlay metrology system and method
US10732130B2 (en) * 2018-06-19 2020-08-04 Kla-Tencor Corporation Embedded particle depth binning based on multiple scattering signals
US11017520B2 (en) * 2018-09-04 2021-05-25 Kla Corporation Multi-wavelength interferometry for defect classification
US10705026B2 (en) * 2018-10-26 2020-07-07 Kla Corporation Scanning differential interference contrast in an imaging system design
US10948423B2 (en) * 2019-02-17 2021-03-16 Kla Corporation Sensitive particle detection with spatially-varying polarization rotator and polarizer
JP7511013B2 (ja) * 2020-02-12 2024-07-04 深▲セン▼華大智造科技股▲ふん▼有限公司 光学結像系及びそれを適用した生化物質検出系
US20240280483A1 (en) * 2021-07-14 2024-08-22 Hitachi High-Tech Corporation Defect inspection device

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US6999183B2 (en) 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
US6809808B2 (en) * 2002-03-22 2004-10-26 Applied Materials, Inc. Wafer defect detection system with traveling lens multi-beam scanner
US20030215791A1 (en) 2002-05-20 2003-11-20 Applied Spectral Imaging Ltd. Method of and system for multiplexed analysis by spectral imaging
JP3878107B2 (ja) * 2002-11-06 2007-02-07 株式会社日立ハイテクノロジーズ 欠陥検査方法及びその装置
US7957066B2 (en) * 2003-02-21 2011-06-07 Kla-Tencor Corporation Split field inspection system using small catadioptric objectives
US20050254065A1 (en) * 2004-05-12 2005-11-17 Stokowski Stanley E Method and apparatus for detecting surface characteristics on a mask blank
WO2007016682A2 (en) * 2005-08-02 2007-02-08 Kla-Tencor Technologies Corporation Systems configured to generate output corresponding to defects on a specimen
US7345754B1 (en) 2005-09-16 2008-03-18 Kla-Tencor Technologies Corp. Fourier filters and wafer inspection systems
WO2008048612A2 (en) 2006-10-17 2008-04-24 Hnuphotonics Miniature microscope camera
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DE102007047935A1 (de) 2007-03-19 2008-09-25 Vistec Semiconductor Systems Gmbh Vorrichtung und Verfahren zur Inspektion von Defekten am Randbereich eines Wafers und Verwendung der Vorrichtung in einer Inspektionseinrichtung für Wafer
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JP5104346B2 (ja) * 2008-01-29 2012-12-19 株式会社ニコン 表面欠陥検査方法及びその装置
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US9726615B2 (en) 2014-07-22 2017-08-08 Kla-Tencor Corporation System and method for simultaneous dark field and phase contrast inspection

Also Published As

Publication number Publication date
DE112015003394B4 (de) 2023-04-27
KR102241899B1 (ko) 2021-04-16
DE112015003394T5 (de) 2017-03-30
US9726615B2 (en) 2017-08-08
KR20170033884A (ko) 2017-03-27
SG11201610820YA (en) 2017-02-27
CN106575631B (zh) 2019-02-01
TW201617603A (zh) 2016-05-16
US20160025645A1 (en) 2016-01-28
TWI639822B (zh) 2018-11-01
JP2017531162A (ja) 2017-10-19
CN106575631A (zh) 2017-04-19
WO2016014590A1 (en) 2016-01-28

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