JP6766328B2 - 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法 - Google Patents

圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法 Download PDF

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JP6766328B2
JP6766328B2 JP2015150424A JP2015150424A JP6766328B2 JP 6766328 B2 JP6766328 B2 JP 6766328B2 JP 2015150424 A JP2015150424 A JP 2015150424A JP 2015150424 A JP2015150424 A JP 2015150424A JP 6766328 B2 JP6766328 B2 JP 6766328B2
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Japan
Prior art keywords
piezoelectric
electrode
drive device
vibrating
vibrating body
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JP2015150424A
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English (en)
Japanese (ja)
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JP2017034784A (ja
JP2017034784A5 (enExample
Inventor
友寿 岩▲崎▼
友寿 岩▲崎▼
豊 荒川
豊 荒川
晃雄 小西
晃雄 小西
幸一郎 露木
幸一郎 露木
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2015150424A priority Critical patent/JP6766328B2/ja
Priority to US15/748,382 priority patent/US11107969B2/en
Priority to PCT/JP2016/003213 priority patent/WO2017017907A1/ja
Publication of JP2017034784A publication Critical patent/JP2017034784A/ja
Publication of JP2017034784A5 publication Critical patent/JP2017034784A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2015150424A 2015-07-30 2015-07-30 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法 Active JP6766328B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015150424A JP6766328B2 (ja) 2015-07-30 2015-07-30 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法
US15/748,382 US11107969B2 (en) 2015-07-30 2016-07-06 Piezoelectric drive device, robot, and method for driving piezoelectric drive device
PCT/JP2016/003213 WO2017017907A1 (ja) 2015-07-30 2016-07-06 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015150424A JP6766328B2 (ja) 2015-07-30 2015-07-30 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法

Publications (3)

Publication Number Publication Date
JP2017034784A JP2017034784A (ja) 2017-02-09
JP2017034784A5 JP2017034784A5 (enExample) 2018-09-06
JP6766328B2 true JP6766328B2 (ja) 2020-10-14

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Country Status (3)

Country Link
US (1) US11107969B2 (enExample)
JP (1) JP6766328B2 (enExample)
WO (1) WO2017017907A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10601397B2 (en) * 2017-03-24 2020-03-24 Zhuhai Crystal Resonance Technologies Co., Ltd. RF resonator electrode and membrane combinations and method of fabrication
DE102017009542B3 (de) * 2017-10-13 2019-01-03 Marco Systemanalyse Und Entwicklung Gmbh Positioniervorrichtung
KR102486154B1 (ko) * 2018-11-02 2023-01-10 엘지디스플레이 주식회사 초음파 센서, 초음파 센싱 장치 및 디스플레이 장치

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07108102B2 (ja) * 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
US5389849A (en) * 1993-01-20 1995-02-14 Olympus Optical Co., Ltd. Tactility providing apparatus and manipulating device using the same
JPH09182468A (ja) 1995-12-28 1997-07-11 Nikon Corp 振動アクチュエータ
JP3124514B2 (ja) * 1997-08-01 2001-01-15 セイコーインスツルメンツ株式会社 超音波モータ、電子機器、及びアナログ式時計
JP2003008094A (ja) * 2001-06-19 2003-01-10 Seiko Instruments Inc 圧電体装置及びその製造方法
JP2003134861A (ja) * 2001-10-26 2003-05-09 Taiheiyo Cement Corp 圧電アクチュエータ
JP4454930B2 (ja) * 2002-11-29 2010-04-21 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器
JP2004320979A (ja) 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP6020022B2 (ja) * 2012-10-17 2016-11-02 セイコーエプソン株式会社 圧電アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置
JP6296227B2 (ja) * 2013-11-22 2018-03-20 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び圧電素子
CN104887364B (zh) * 2014-03-03 2018-11-02 精工爱普生株式会社 指关节驱动装置
CN105267007B (zh) * 2014-05-29 2019-03-08 精工爱普生株式会社 驱动装置以及其驱动方法
JP6485118B2 (ja) * 2015-03-04 2019-03-20 セイコーエプソン株式会社 圧電駆動装置及びロボット

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Publication number Publication date
US11107969B2 (en) 2021-08-31
JP2017034784A (ja) 2017-02-09
WO2017017907A1 (ja) 2017-02-02
US20180226561A1 (en) 2018-08-09

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