JP6503940B2 - 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 - Google Patents
圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
- H02N2/006—Elastic elements, e.g. springs
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/009—Thermal details, e.g. cooling means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
図19(A),(B),(C)は、本発明の他の実施形態としての圧電振動部100bの平面図であり、本実施形態の図3(A)に対応する図である。図19(A),(B),(C)では、図示の便宜上、振動体210のみを図示し、支持部220や接続部230は、図示が省略されている。図19(A)の圧電振動部100gでは、一対の圧電素子110b,110cが省略されている。この圧電振動部100gも、図4に示すような1つの方向zにローター95を回転させることが可能である。なお、図19(A)の3つの圧電素子110a,110e,110dには同じ電圧が印加されるので、これらの3つの3つの圧電素子110a,110e,110dの第2電極(150a,150e,150d)を、連続する1つの電極層として形成してもよい。
上述した圧電駆動装置10は、共振を利用することで被駆動部材に対して大きな力を与えることができるものであり、各種の装置に適用可能である。圧電駆動装置10は、例えば、ロボット(電子部品搬送装置(ICハンドラー)も含む)、投薬用ポンプ、時計のカレンダー送り装置、印刷装置(例えば紙送り機構。ただし、ヘッドに利用される圧電駆動装置では、振動体を共振させないので、ヘッドには適用不可である。)等の各種の機器における駆動装置として用いることが出来る。以下、代表的な実施の形態について説明する。
2202A…突起部 2211…リザーバー 2212…チューブ 2213…フィンガー 2222…ローター 2223…減速伝達機構
Claims (11)
- 振動体と、前記振動体に配置された圧電素子、および前記振動体を支持する支持部と、を有する圧電振動部と、
前記振動体を被駆動部材に押圧する弾性部材と、
前記弾性部材と面接触状態を保ちつつ相互の位置関係を変更可能である熱伝導部材と、
を備える、圧電駆動装置。 - 請求項1に記載の圧電駆動装置において、
前記振動体と前記弾性部材との間に位置し、前記支持部と接触し前記振動体に配置された前記圧電素子と接触しない中間部材を備える、圧電駆動装置。 - 請求項1に記載の圧電駆動装置において、
前記弾性部材は、前記支持部と接触し、前記圧電素子と接触しない、圧電駆動装置。 - 請求項1〜3のいずれか一項に記載の圧電駆動装置において、
前記弾性部材は、前記圧電振動部に接触する面とは反対側の面で前記熱伝導部材と接触する、圧電駆動装置。 - 請求項1〜4のいずれか一項に記載の圧電駆動装置において、
前記振動体と、前記圧電素子と、前記支持部と、前記弾性部材とを収納する筐体を備え、
前記熱伝導部材は、前記筐体の一部を構成する、圧電駆動装置。 - 請求項1〜5のいずれか一項に記載の圧電駆動装置において、
前記熱伝導部材の熱伝導率は、0.1W/mK以上である、圧電駆動装置。 - 請求項1〜5のいずれか一項に記載の圧電駆動装置において、
前記熱伝導部材の熱伝導率は、10W/mK以上である、圧電駆動装置。 - 請求項1〜5のいずれか一項に記載の圧電駆動装置において、
前記熱伝導部材はシリコンで形成されている、圧電駆動装置。 - 請求項1〜8のいずれか一項に記載の圧電駆動装置において、
前記振動体と前記支持部とは、同一の材料で一体に形成されている、圧電駆動装置。 - 複数のリンク部と、
前記複数のリンク部を接続する関節部と、
前記リンク部を前記関節部において回動させる請求項1〜9のいずれか一項に記載の圧電駆動装置と、
を備えるロボット。 - 請求項1〜9のいずれか一項に記載の圧電駆動装置の駆動方法であって、
前記圧電素子に、周期的に変化する電圧であって、前記圧電素子の圧電体に印加する電界の方向が一方向である脈流電圧を印加する圧電駆動装置の駆動方法。
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CN201610528478.0A CN106452169A (zh) | 2015-07-08 | 2016-07-06 | 压电驱动装置、机器人以及压电驱动装置的驱动方法 |
US15/204,200 US20170008167A1 (en) | 2015-07-08 | 2016-07-07 | Piezoelectric drive device, robot, and method for driving piezoelectric drive device |
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CN108656091B (zh) * | 2018-07-20 | 2024-05-03 | 上海理工大学 | 一种基于压电复合材料可实现振动控制的工业机器人 |
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---|---|---|---|---|
JPH03253271A (ja) * | 1990-03-01 | 1991-11-12 | Canon Inc | 振動波モータ |
JP3481842B2 (ja) * | 1997-12-24 | 2003-12-22 | 京セラ株式会社 | 超音波駆動装置 |
JP4152098B2 (ja) * | 2001-12-06 | 2008-09-17 | 遠山 茂樹 | 球面アクチュエータ |
JP2004273608A (ja) * | 2003-03-06 | 2004-09-30 | Taiheiyo Cement Corp | 圧電トランス |
JP2005027402A (ja) * | 2003-06-30 | 2005-01-27 | Kyocera Corp | 圧電アクチュエータ及び液体吐出装置 |
JP2005304147A (ja) * | 2004-04-08 | 2005-10-27 | Seiko Epson Corp | 圧電アクチュエータおよび装置 |
JP2005318723A (ja) * | 2004-04-28 | 2005-11-10 | Nsk Ltd | 超音波モータ |
JP2006073447A (ja) * | 2004-09-06 | 2006-03-16 | Sony Corp | ランプの冷却装置及び電子機器 |
JP4529889B2 (ja) * | 2005-02-10 | 2010-08-25 | セイコーエプソン株式会社 | 圧電振動体、圧電振動体の調整方法、圧電アクチュエータ、時計、電子機器 |
JP5067727B2 (ja) * | 2005-04-05 | 2012-11-07 | 株式会社フコク | 超音波振動ユニット |
JP5769380B2 (ja) * | 2010-03-23 | 2015-08-26 | キヤノン株式会社 | 振動波モータ |
JP5942403B2 (ja) * | 2011-12-06 | 2016-06-29 | セイコーエプソン株式会社 | 圧電モーター、駆動装置、電子部品検査装置、電子部品搬送装置、印刷装置、ロボットハンド、およびロボット |
CN106877733B (zh) * | 2015-12-03 | 2020-12-04 | 精工爱普生株式会社 | 压电驱动装置、马达、机器人、以及泵 |
-
2015
- 2015-07-08 JP JP2015136780A patent/JP6503940B2/ja active Active
-
2016
- 2016-07-06 CN CN201610528478.0A patent/CN106452169A/zh active Pending
- 2016-07-07 US US15/204,200 patent/US20170008167A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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CN106452169A (zh) | 2017-02-22 |
US20170008167A1 (en) | 2017-01-12 |
JP2017022814A (ja) | 2017-01-26 |
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