JP2017034784A5 - - Google Patents

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Publication number
JP2017034784A5
JP2017034784A5 JP2015150424A JP2015150424A JP2017034784A5 JP 2017034784 A5 JP2017034784 A5 JP 2017034784A5 JP 2015150424 A JP2015150424 A JP 2015150424A JP 2015150424 A JP2015150424 A JP 2015150424A JP 2017034784 A5 JP2017034784 A5 JP 2017034784A5
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JP
Japan
Prior art keywords
piezoelectric
electrode
driving device
drive device
respect
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JP2015150424A
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English (en)
Japanese (ja)
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JP2017034784A (ja
JP6766328B2 (ja
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Priority to JP2015150424A priority Critical patent/JP6766328B2/ja
Priority claimed from JP2015150424A external-priority patent/JP6766328B2/ja
Priority to PCT/JP2016/003213 priority patent/WO2017017907A1/ja
Priority to US15/748,382 priority patent/US11107969B2/en
Publication of JP2017034784A publication Critical patent/JP2017034784A/ja
Publication of JP2017034784A5 publication Critical patent/JP2017034784A5/ja
Application granted granted Critical
Publication of JP6766328B2 publication Critical patent/JP6766328B2/ja
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JP2015150424A 2015-07-30 2015-07-30 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法 Active JP6766328B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015150424A JP6766328B2 (ja) 2015-07-30 2015-07-30 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法
PCT/JP2016/003213 WO2017017907A1 (ja) 2015-07-30 2016-07-06 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法
US15/748,382 US11107969B2 (en) 2015-07-30 2016-07-06 Piezoelectric drive device, robot, and method for driving piezoelectric drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015150424A JP6766328B2 (ja) 2015-07-30 2015-07-30 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法

Publications (3)

Publication Number Publication Date
JP2017034784A JP2017034784A (ja) 2017-02-09
JP2017034784A5 true JP2017034784A5 (enExample) 2018-09-06
JP6766328B2 JP6766328B2 (ja) 2020-10-14

Family

ID=57884407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015150424A Active JP6766328B2 (ja) 2015-07-30 2015-07-30 圧電駆動装置、ロボット、及び圧電駆動装置の駆動方法

Country Status (3)

Country Link
US (1) US11107969B2 (enExample)
JP (1) JP6766328B2 (enExample)
WO (1) WO2017017907A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10601397B2 (en) * 2017-03-24 2020-03-24 Zhuhai Crystal Resonance Technologies Co., Ltd. RF resonator electrode and membrane combinations and method of fabrication
DE102017009542B3 (de) * 2017-10-13 2019-01-03 Marco Systemanalyse Und Entwicklung Gmbh Positioniervorrichtung
KR102486154B1 (ko) 2018-11-02 2023-01-10 엘지디스플레이 주식회사 초음파 센서, 초음파 센싱 장치 및 디스플레이 장치

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07108102B2 (ja) * 1990-05-01 1995-11-15 日本碍子株式会社 圧電／電歪膜型アクチュエータの製造方法
US5389849A (en) * 1993-01-20 1995-02-14 Olympus Optical Co., Ltd. Tactility providing apparatus and manipulating device using the same
JPH09182468A (ja) 1995-12-28 1997-07-11 Nikon Corp 振動アクチュエータ
JP3124514B2 (ja) * 1997-08-01 2001-01-15 セイコーインスツルメンツ株式会社 超音波モータ、電子機器、及びアナログ式時計
JP2003008094A (ja) 2001-06-19 2003-01-10 Seiko Instruments Inc 圧電体装置及びその製造方法
JP2003134861A (ja) 2001-10-26 2003-05-09 Taiheiyo Cement Corp 圧電アクチュエータ
JP4454930B2 (ja) 2002-11-29 2010-04-21 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器
JP2004320979A (ja) 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP6020022B2 (ja) 2012-10-17 2016-11-02 セイコーエプソン株式会社 圧電アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置
JP6296227B2 (ja) * 2013-11-22 2018-03-20 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び圧電素子
CN104887364B (zh) * 2014-03-03 2018-11-02 精工爱普生株式会社 指关节驱动装置
CN105267007B (zh) * 2014-05-29 2019-03-08 精工爱普生株式会社 驱动装置以及其驱动方法
JP6485118B2 (ja) * 2015-03-04 2019-03-20 セイコーエプソン株式会社 圧電駆動装置及びロボット

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