JP6742523B2 - 可撓性アレイ基板の製造方法 - Google Patents
可撓性アレイ基板の製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 143
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- 238000000034 method Methods 0.000 title claims description 24
- 239000012790 adhesive layer Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 16
- 239000011241 protective layer Substances 0.000 claims description 16
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 229920000089 Cyclic olefin copolymer Polymers 0.000 claims description 6
- 239000004713 Cyclic olefin copolymer Substances 0.000 claims description 6
- 239000004695 Polyether sulfone Substances 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 229920006393 polyether sulfone Polymers 0.000 claims description 6
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- 238000005553 drilling Methods 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 5
- -1 polyethylene terephthalate Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/189—Printed circuits structurally associated with non-printed electric components characterised by the use of a flexible or folded printed circuit
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
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- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
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- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133305—Flexible substrates, e.g. plastics, organic film
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13452—Conductors connecting driver circuitry and terminals of panels
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0277—Bendability or stretchability details
- H05K1/028—Bending or folding regions of flexible printed circuits
- H05K1/0281—Reinforcement details thereof
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/007—Manufacture or processing of a substrate for a printed circuit board supported by a temporary or sacrificial carrier
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/13613—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit the semiconductor element being formed on a first substrate and thereafter transferred to the final cell substrate
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/42—Arrangements for providing conduction through an insulating substrate
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/311—Flexible OLED
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Description
剛性支持板及び可撓性基板を提供して、可撓性基板の裏面が剛性支持板から離れるように、粘着層を利用して可撓性基板を剛性支持板に貼り付けるステップ1と、
可撓性基板の裏面に裏面駆動回路を製造して、裏面駆動回路に保護層を被覆するステップ2と、
可撓性基板と剛性支持板を分離して、可撓性基板を反転させ、可撓性基板の正面が剛性支持板から離れて、保護層が粘着層と接触するように、再度粘着層を利用して可撓性基板を剛性支持板に貼り付けるステップ3と、
可撓性基板の正面の所定の非表示領域に可撓性基板を貫通するビアホールを形成して、可撓性基板の裏面における裏面駆動回路を露出させるステップ4と、
可撓性基板の正面の所定の非表示領域と表示領域それぞれに正面駆動回路と表示回路を形成し、正面駆動回路と表示回路を電気的に接続し、裏面駆動回路を、ビアホールを介して表示回路に電気的に接続するステップ5と、
可撓性基板と剛性支持板を分離して、可撓性アレイ基板を得るステップ6とを含む可撓性アレイ基板の製造方法を提供する。
剛性支持板及び可撓性基板を提供して、可撓性基板の裏面が剛性支持板から離れるように、粘着層を利用して可撓性基板を剛性支持板に貼り付けるステップ1と、
可撓性基板の裏面に裏面駆動回路を製造して、裏面駆動回路に保護層を被覆するステップ2と、
可撓性基板と剛性支持板を分離して、可撓性基板を反転させ、可撓性基板の正面が剛性支持板から離れて、保護層が粘着層と接触するように、再度粘着層を利用して可撓性基板を剛性支持板に貼り付けるステップ3と、
可撓性基板の正面の所定の非表示領域に可撓性基板を貫通するビアホールを形成して、可撓性基板の裏面における裏面駆動回路を露出させるステップ4と、
可撓性基板の正面の所定の非表示領域と表示領域それぞれに正面駆動回路と表示回路を形成し、正面駆動回路と表示回路を電気的に接続し、裏面駆動回路を、ビアホールを介して表示回路に電気的に接続するステップ5と、
可撓性基板と剛性支持板を分離して、可撓性アレイ基板を得るステップ6とを含み、
剛性支持板の材料がガラスであり、
可撓性基板の材料がポリイミド、ポリエチレンテレフタレート、環状オレフィン共重合体、又はポリエーテルスルホン樹脂であり、
可撓性基板の厚さが10〜300ミクロンである可撓性アレイ基板の製造方法を提供する。
2 粘着層
3 可撓性基板
4 裏面駆動回路
5 保護層
6 ビアホール
100 表示パネル
101 表示領域
102 非表示領域
200 ソース駆動チップ
400 ゲート駆動チップ
500 WOAワイヤー
Claims (17)
- 可撓性アレイ基板の製造方法であって、
剛性支持板及び可撓性基板を提供して、前記可撓性基板の裏面が前記剛性支持板から離れるように、粘着層を利用して前記可撓性基板を前記剛性支持板に貼り付けるステップ1と、
前記可撓性基板の裏面に裏面駆動回路を製造して、前記裏面駆動回路に保護層を被覆するステップ2と、
前記可撓性基板と前記剛性支持板を分離して、前記可撓性基板を反転させ、前記可撓性基板の正面が前記剛性支持板から離れて、前記保護層が前記粘着層と接触するように、再度前記粘着層を利用して前記可撓性基板を前記剛性支持板に貼り付けるステップ3と、
前記可撓性基板の正面の所定の非表示領域に前記可撓性基板を貫通するビアホールを形成して、前記可撓性基板の裏面における前記裏面駆動回路を露出させるステップ4と、
前記可撓性基板の正面の所定の非表示領域と表示領域それぞれに正面駆動回路と表示回路を形成し、前記正面駆動回路と前記表示回路を電気的に接続し、前記裏面駆動回路が前記ビアホールを介して前記表示回路に電気的に接続するステップ5と、
前記可撓性基板と前記剛性支持板を分離して、可撓性アレイ基板を得るステップ6とを含む可撓性アレイ基板の製造方法。 - 前記剛性支持板の材料がガラスである請求項1に記載の可撓性アレイ基板の製造方法。
- 前記可撓性基板の材料がポリイミド、ポリエチレンテレフタレート、環状オレフィン共重合体、又はポリエーテルスルホン樹脂である請求項1に記載の可撓性アレイ基板の製造方法。
- 前記可撓性基板の厚さが10〜300ミクロンである請求項1に記載の可撓性アレイ基板の製造方法。
- 前記ステップ4においてレーザー穴あけ又は化学腐食の方法により前記ビアホールが製造される請求項1に記載の可撓性アレイ基板の製造方法。
- 前記ビアホールの直径が5〜100ミクロンである請求項1に記載の可撓性アレイ基板の製造方法。
- 前記ステップ3及び前記ステップ6において、レーザー剥離方式により前記可撓性基板と前記剛性支持板を分離する請求項1に記載の可撓性アレイ基板の製造方法。
- 前記粘着層は感温性接着剤材料で製造され、前記ステップ3及び前記ステップ6において、前記粘着層の温度を変えることによって前記可撓性基板と前記剛性支持板を分離する請求項1に記載の可撓性アレイ基板の製造方法。
- 前記正面駆動回路と前記裏面駆動回路は共に前記可撓性アレイ基板のWOAワイヤーを形成する請求項1に記載の可撓性アレイ基板の製造方法。
- 前記正面駆動回路と前記裏面駆動回路は共に前記可撓性アレイ基板のWOAワイヤー及びGOA回路を形成する請求項1に記載の可撓性アレイ基板の製造方法。
- 可撓性アレイ基板の製造方法であって、
剛性支持板及び可撓性基板を提供して、前記可撓性基板の裏面が前記剛性支持板から離れるように、粘着層を利用して前記可撓性基板を前記剛性支持板に貼り付けるステップ1と、
前記可撓性基板の裏面に裏面駆動回路を製造して、前記裏面駆動回路に保護層を被覆するステップ2と、
前記可撓性基板と前記剛性支持板を分離して、前記可撓性基板を反転させ、前記可撓性基板の正面が前記剛性支持板から離れて、前記保護層が前記粘着層と接触するように、再度前記粘着層を利用して前記可撓性基板を前記剛性支持板に貼り付けるステップ3と、
前記可撓性基板の正面の所定の非表示領域に前記可撓性基板を貫通するビアホールを形成して、前記可撓性基板の裏面における前記裏面駆動回路を露出させるステップ4と、
前記可撓性基板の正面の所定の非表示領域と表示領域それぞれに正面駆動回路と表示回路を形成し、前記正面駆動回路と前記表示回路を電気的に接続し、前記裏面駆動回路が前記ビアホールを介して前記表示回路に電気的に接続するステップ5と、
前記可撓性基板と前記剛性支持板を分離して、可撓性アレイ基板を得るステップ6とを含み、
前記剛性支持板の材料がガラスであり、
前記可撓性基板の材料がポリイミド、ポリエチレンテレフタレート、環状オレフィン共重合体、又はポリエーテルスルホン樹脂であり、
前記可撓性基板の厚さが10〜300ミクロンである可撓性アレイ基板の製造方法。 - 前記ステップ4においてレーザー穴あけ、又は化学腐食の方法により前記ビアホールが製造される請求項11に記載の可撓性アレイ基板の製造方法。
- 前記ビアホールの直径が5〜100ミクロンである請求項11に記載の可撓性アレイ基板の製造方法。
- 前記ステップ3及び前記ステップ6において、レーザー剥離方式により前記可撓性基板と前記剛性支持板を分離する請求項11に記載の可撓性アレイ基板の製造方法。
- 前記粘着層は感温性接着剤材料で製造され、前記ステップ3及び前記ステップ6において、前記粘着層の温度を変えることによって前記可撓性基板と前記剛性支持板を分離する請求項11に記載の可撓性アレイ基板の製造方法。
- 前記正面駆動回路と前記裏面駆動回路は共に前記可撓性アレイ基板のWOAワイヤーを形成する請求項11に記載の可撓性アレイ基板の製造方法。
- 前記正面駆動回路と前記裏面駆動回路は共に前記可撓性アレイ基板のWOAワイヤー及びGOA回路を形成する請求項11に記載の可撓性アレイ基板の製造方法。
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CN106952583B (zh) * | 2017-05-23 | 2019-04-30 | 深圳市华星光电技术有限公司 | 柔性阵列基板的制作方法 |
CN107731102A (zh) * | 2017-10-31 | 2018-02-23 | 云谷(固安)科技有限公司 | 一种曲面显示屏的组立方法及曲面显示屏 |
CN108122497B (zh) * | 2018-02-02 | 2023-11-14 | 京东方科技集团股份有限公司 | 一种柔性阵列基板、柔性显示装置及组装方法 |
CN109192077B (zh) * | 2018-11-07 | 2019-09-03 | 深圳秋田微电子股份有限公司 | 柔性液晶显示装置的制作方法 |
CN111383522B (zh) * | 2018-12-29 | 2022-12-02 | 北京小米移动软件有限公司 | 显示屏和电子设备 |
CN110473965A (zh) * | 2019-08-27 | 2019-11-19 | 深圳市华星光电半导体显示技术有限公司 | 柔性oled显示面板的制备方法及柔性oled显示面板 |
CN110890050B (zh) * | 2019-11-21 | 2022-07-12 | 武汉华星光电半导体显示技术有限公司 | 阵列基板及其制作方法、显示装置 |
CN111445803B (zh) * | 2020-05-14 | 2023-04-14 | 京东方科技集团股份有限公司 | 显示装置 |
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KR20080043507A (ko) * | 2006-11-14 | 2008-05-19 | 엘지디스플레이 주식회사 | 플렉서블 표시장치 및 그 제조 방법 |
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