JP6740015B2 - 半導体装置及び半導体装置の製造方法 - Google Patents
半導体装置及び半導体装置の製造方法 Download PDFInfo
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- JP6740015B2 JP6740015B2 JP2016116131A JP2016116131A JP6740015B2 JP 6740015 B2 JP6740015 B2 JP 6740015B2 JP 2016116131 A JP2016116131 A JP 2016116131A JP 2016116131 A JP2016116131 A JP 2016116131A JP 6740015 B2 JP6740015 B2 JP 6740015B2
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- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
Description
なお、実施形態の説明において、上(または上方)とは、方向Zの矢印の向きに相当し、下(または下方)とは、方向Zの矢印とは逆の向きに相当するものとする。
半導体装置1は、絶縁基板10と、アンダーコート層UCと、半導体層SC1と、絶縁膜11と、ゲート電極ML1と、金属層SLと、絶縁膜12と、絶縁膜13と、半導体層SC2と、絶縁膜14と、ゲート電極ML2と、絶縁膜15と、を備えている。以下で、絶縁基板10上に、積層されたアンダーコート層UC、絶縁膜11、絶縁膜12、絶縁膜13、絶縁膜14、及び絶縁膜15をまとめて絶縁層ILと称する場合もある。また、絶縁層ILにおいて、半導体層SC1と、半導体層SC2との間に位置する絶縁膜11、12、及び13を層間絶縁層と称する場合もある。
ゲート電極ML1は、絶縁膜11の上に位置しており、絶縁膜11を介して半導体層SC1に対向している。ゲート電極ML1は、半導体層SC1の高抵抗領域SCc1に対向している。金属層SLは、絶縁膜11の上に位置しており、ゲート電極ML1から離間している。ゲート電極ML1及び金属層SLは、それぞれ、導電性の金属材料で形成されている。図示した例では、ゲート電極ML1及び金属層SLは、同一層に位置しているため、同じ材料で一括に形成することもできる。ゲート電極ML1は、図示しない第1走査線と電気的に接続されている。金属層SLは、半導体層SC2の直下に位置している。金属層SLは、絶縁基板10及びアンダーコート層UCを介して入射した光の半導体層SC2への照射を阻止する遮光膜として機能してもよい。金属層SLは、ゲート電極として機能してもよい。金属層SLは、蓄積容量の電極として機能してもよい。金属層SLは、用途によりパターン面積を変更してもよい。また、金属層SLは、遮光膜として機能する場合には、金属材料以外の物質で形成された層と置換されてもよい。なお、半導体装置1が有機エレクトロルミネッセンス(EL)表示装置に適用される場合には、金属層SLは、省略しても良い。
絶縁膜13は、絶縁膜12の上に位置している。図示した例では、絶縁膜13は、絶縁膜12と絶縁膜14との間に位置している。絶縁膜13は、一例ではシリコン酸化物で形成されている。
ゲート電極ML2は、絶縁膜14の上に位置しており、絶縁膜14を介して半導体層SC2に対向している。ゲート電極ML2は、半導体層SC2の高抵抗領域SCc2に対向している。ゲート電極ML2は、導電性の金属材料で形成されている。ゲート電極ML2は、図示しない第2走査線と電気的に接続されている。絶縁膜15は、ゲート電極ML2を覆っている。図示した例では、絶縁膜15は、絶縁膜14の上にも位置する。絶縁膜15は、単層構造であっても良いし、多層構造であっても良い。一例では、絶縁膜15は、シリコン窒化物やシリコン酸化膜で形成されている。
端子T1a及びT1bは、それぞれ、絶縁膜11、12、13、14、及び15を貫通したコンタクトホールCH1a及びCH1b内を覆い、半導体層SC1に電気的に接続されている。図示した例では、端子T1a及びT1bにおいて、バリア層BC1a及びBC1bは、それぞれ、絶縁膜15(又は、絶縁層IL)の上面に位置し、コンタクトホールCH1a及びCH1b内において半導体層SC1上にはない。導電層MC1a及びMC1bは、それぞれ、絶縁膜15の上面において、バリア層BC1a及びBC1bの上に位置し、且つコンタクトホールCH1a及びCH1b内で、半導体層SC1を覆っている。導電層MC1aは、コンタクトホールCH1aにおいて低抵抗領域SCa1に接触し、導電層MC1bは、コンタクトホールCH1bにおいて低抵抗領域SCb1に接触している。なお、端子T1a及びT1bは、それぞれ、絶縁膜15の上面と、コンタクトホールCH1a及びCH1b内とで層の厚みが異なっていてもよい。
図2Aは、本実施形態に係るコンタクトホールCH2a及びCH2bの形成工程を示す断面図であり、図2Bは、本実施形態に係るバリア層BCの成膜工程を示す断面図であり、図2Cは、本実施形態に係るコンタクトホールCH1a及びCH1bの形成工程を示す断面図であり、図2Dは、本実施形態に係る導電層MCの成膜工程を示す断面図である。
次に、図2Bに図示するように、バリア層BCが、図2Aに図示した状態の絶縁層ILの上と、コンタクトホールCH2a及びCH2bを介して半導体層SC2の上とに成膜される。バリア層BCは、前述したバリア層BC1a、BC1b、BC2a、BC2b、及びBC3に加工する以前の状態の層である。
図4Aは、本実施形態に係るコンタクトホールCH1a及びCH1bの形成工程を示す断面図であり、図4Bは、本実施形態に係るバリア層BCの成膜工程を示す断面図であり、図4Cは、本実施形態に係るコンタクトホールCH2a及びCH2bの形成工程を示す断面図であり、図4Dは、本実施形態に係る導電層MCの成膜工程を示す断面図である。
次に、図4Bに図示するように、バリア層BCが、半導体層SC1の酸化を防止するために、図4Aに図示した状態の絶縁層ILの上とコンタクトホールCH1a及びCH1bを介して半導体層SC1の上とに成膜される。
さらに、図4Dに図示するように、導電層MCが、図4Cに図示した状態のバリア層BCの上とコンタクトホールCH1a及びCH2bを介して半導体層SC2の上とに成膜される。最後に、図4Dに図示したバリア層BC及び導電層MCが、例えば、フォトエッチングにより一括にパターニングされ、一例として、図3に図示した半導体装置1の端子T1a、T1b、T2a、及びT2bが形成される。
このような第2実施形態においても、第1実施形態と同様の効果が得られる。
第3実施形態に係る半導体装置1は、前述の実施形態に係る半導体装置1と比較して、薄膜トランジスタTR1及びTR2の離間距離が前述の実施形態よりも近い点で相違している。
図6に図示すように、コンタクトホールCH1b及びCH2aは、平面視した場合に重なるように形成されている。なお、コンタクトホールCH1b及びCH2aは、平面視した場合に全領域で重なるように形成する必要はなく、少なくとも一部の領域が重なるように形成されていればよい。また、図6に図示すように、端子T12において、バリア層BC12と導電層MC12との端面は、平面視した場合に重なるように形成されている。
図7Aは、本実施形態に係るコンタクトホールCH2aの形成工程を示す断面図であり、図7Bは、本実施形態に係るバリア層BCの成膜工程を示す断面図であり、図7Cは、本実施形態に係るコンタクトホールCH1bの形成工程を示す断面図であり、図7Dは、本実施形態に係る導電層MCの成膜工程を示す断面図である。
次に、図7Cに図示するように、コンタクトホールCH1bが、例えば、フォトエッチングにより、コンタクトホールCH2aのエッジの内側の底部で、バリア層BC及び絶縁層ILを半導体層SC1まで一括でエッチングすることで形成される。この後、半導体層SC1の自然酸化膜を除去するために、洗浄が実行される。
以上説明したように、本実施形態によれば、信頼性の低下を抑制可能、且つ効率的に生産可能な半導体装置を提供することができる。
Claims (11)
- 絶縁基板と、
前記絶縁基板の上方に位置する第1半導体層と、
前記絶縁基板の上方に位置し、前記第1半導体層と異なる物質で形成された第2半導体層と、
前記第1半導体層と前記第2半導体層とを覆い、前記第1半導体層まで貫通する第1コンタクトホールと前記第2半導体層まで貫通する第2コンタクトホールとが形成された絶縁層と、
前記第1コンタクトホール、又は前記第2コンタクトホール内で前記第1半導体層、及び前記第2半導体層の内のいずれか一方を覆い、導電性を有するバリア層と、
前記第1コンタクトホール、又は前記第2コンタクトホール内で前記バリア層に接触する第1導電層と、
前記絶縁層の上面に位置するとともに、前記第1コンタクトホール、又は前記第2コンタクトホールの内で前記第1半導体層及び前記第2半導体層の内の前記バリア層で覆われていない一方を覆う第2導電層と、
前記バリア層と同一材料によって形成され、前記絶縁層の上面において前記第2導電層との間に位置する第3導電層と、備える半導体装置。 - 前記第1半導体層に対向する第1ゲート電極と、
前記第2半導体層に対向する第2ゲート電極と、を備える請求項1に記載の半導体装置。 - 前記第1半導体層及び前記第2半導体層の内の少なくとも一方の下方で対向する金属層を備える請求項1又は2に記載の半導体装置。
- 前記第1半導体層及び前記第2半導体層の内のいずれか一方は、多結晶シリコンで形成され、他方は、酸化物半導体で形成されている請求項1乃至3のいずれか1項に記載の半導体装置。
- 前記絶縁層は、前記第1半導体層と前記第2半導体層との間に層間絶縁層を備える請求項1乃至4のいずれか1項に記載の半導体装置。
- 前記バリア層と前記第1導電層との端面は、重なっている請求項1乃至5のいずれか1項に記載の半導体装置。
- 前記第2導電層と前記第3導電層との端面は、重なっている請求項1乃至6のいずれか1項に記載の半導体装置。
- 前記第1コンタクトホール及び前記第2コンタクトホールのいずれか一方は、他方のエッジの内側に形成されている、請求項1乃至7のいずれか1に記載の半導体装置。
- 絶縁基板と、前記絶縁基板の上方に位置する第1半導体層と、前記絶縁基板の上方に位置し、前記第1半導体層と異なる物質で形成された第2半導体層と、前記第1半導体層と
前記第2半導体層とを覆う絶縁層と、を備える半導体装置の製造方法であって、
前記絶縁層を前記第1半導体層まで貫通する第1コンタクトホールを形成し、
前記絶縁層と前記第1半導体層との上に導電性のバリア層を成膜し、
前記バリア層及び前記絶縁層を前記第2半導体層まで貫通する第2コンタクトホールを形成し、
前記第1コンタクトホール内で前記バリア層に接触する第1導電層を形成する、半導体装置の製造方法。 - 前記第1コンタクトホール、又は前記第2コンタクトホールを形成した後に、フッ化水素酸で洗浄する、請求項9に記載の半導体装置の製造方法。
- 前記第2コンタクトホールは、前記第1コンタクトホールのエッジの内側に形成する、請求項9、又は10に記載の半導体装置の製造方法。
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