JP6721949B2 - ガラス基板の製造方法、およびガラス基板製造装置 - Google Patents
ガラス基板の製造方法、およびガラス基板製造装置 Download PDFInfo
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- JP6721949B2 JP6721949B2 JP2015132136A JP2015132136A JP6721949B2 JP 6721949 B2 JP6721949 B2 JP 6721949B2 JP 2015132136 A JP2015132136 A JP 2015132136A JP 2015132136 A JP2015132136 A JP 2015132136A JP 6721949 B2 JP6721949 B2 JP 6721949B2
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- glass substrate
- cleaning
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- glass
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
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- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
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Images
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- Liquid Crystal (AREA)
- Cleaning In General (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
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JP2015132136A JP6721949B2 (ja) | 2015-06-30 | 2015-06-30 | ガラス基板の製造方法、およびガラス基板製造装置 |
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JP2015132136A JP6721949B2 (ja) | 2015-06-30 | 2015-06-30 | ガラス基板の製造方法、およびガラス基板製造装置 |
Publications (3)
Publication Number | Publication Date |
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JP2017014060A JP2017014060A (ja) | 2017-01-19 |
JP2017014060A5 JP2017014060A5 (enrdf_load_stackoverflow) | 2018-08-09 |
JP6721949B2 true JP6721949B2 (ja) | 2020-07-15 |
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JP2015132136A Expired - Fee Related JP6721949B2 (ja) | 2015-06-30 | 2015-06-30 | ガラス基板の製造方法、およびガラス基板製造装置 |
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JP (1) | JP6721949B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6905684B2 (ja) | 2017-10-02 | 2021-07-21 | 日本電気硝子株式会社 | ガラス板の洗浄装置およびガラス板の製造方法 |
CN111315700A (zh) | 2017-12-22 | 2020-06-19 | 日本电气硝子株式会社 | 玻璃板的制造方法 |
JP7081351B2 (ja) | 2018-07-10 | 2022-06-07 | 日本電気硝子株式会社 | ガラス板の製造方法およびガラス板の洗浄装置 |
JP2021004149A (ja) * | 2019-06-26 | 2021-01-14 | 日本電気硝子株式会社 | ガラス板の洗浄装置及びガラス板の製造方法 |
JP7557717B2 (ja) | 2019-07-16 | 2024-09-30 | 日本電気硝子株式会社 | ガラス板の製造方法及びガラス板の洗浄装置 |
WO2021193477A1 (ja) | 2020-03-25 | 2021-09-30 | 日本電気硝子株式会社 | ガラス板の製造方法 |
CN112731697B (zh) * | 2021-01-04 | 2022-09-27 | 河北光兴半导体技术有限公司 | 液晶显示面板的加工系统及其加工方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003112951A (ja) * | 2001-10-05 | 2003-04-18 | Dainippon Printing Co Ltd | ガラス板洗浄装置 |
JP4092683B2 (ja) * | 2001-12-26 | 2008-05-28 | 井和工業株式会社 | 洗浄・剥離用スポンジローラ |
JP2009223084A (ja) * | 2008-03-18 | 2009-10-01 | Hitachi High-Technologies Corp | 基板洗浄装置、フラットパネルディスプレイの製造装置及びフラットパネルディスプレイ |
JP5569685B2 (ja) * | 2010-07-28 | 2014-08-13 | ステイト工業株式会社 | スポンジロール |
JP2012213748A (ja) * | 2011-04-01 | 2012-11-08 | Nippon Electric Glass Co Ltd | ガラス基板の製造方法および製造設備 |
JP5886108B2 (ja) * | 2012-03-30 | 2016-03-16 | Hoya株式会社 | 情報記録媒体用ガラス基板の製造方法 |
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- 2015-06-30 JP JP2015132136A patent/JP6721949B2/ja not_active Expired - Fee Related
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