JP6713959B2 - 空隙配置構造体を用いた濾過方法 - Google Patents
空隙配置構造体を用いた濾過方法 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4077—Concentrating samples by other techniques involving separation of suspended solids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/0093—Making filtering elements not provided for elsewhere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/0095—Flat filtering elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition
- B01D29/56—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4077—Concentrating samples by other techniques involving separation of suspended solids
- G01N2001/4088—Concentrating samples by other techniques involving separation of suspended solids filtration
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Description
前記第2主面上の一部の領域であり、前記第2主面の法線方向から見た平面視において前記複数の空隙部のうち3つ以上と接する少なくとも1つの領域において、前記第2主面から前記第2主面の法線方向に突出した突起を有する、空隙配置構造体。
前記第1主面の法線方向から見た平面視において、前記複数の第1空隙部の各々は前記複数の第2空隙部のうちの3つ以上と重なっており、前記複数の第2空隙部の各々は前記複数の第1空隙部のうちの3つ以上と重なっており、
前記空隙部は、前記複数の第1空隙部と前記複数の第2空隙部との重複部分であり、
前記第1パターンと前記第2パターンとが重複する交差領域のみに前記突起を有する、[1]に記載の空隙配置構造体。
前記形状は、前記第1パターンと前記第2パターンとを前記第1主面に水平な方向の位置をずらして重ね合わせてなる形状である、[2]または[3]に記載の空隙配置構造体。
前記第1パターンに相当する第1構造体を形成する第1パターン形成工程と、
前記第2パターンに相当する第2構造体を形成し、前記第1構造体と前記第2構造体とが結合されてなる前記空隙配置構造体を得る、第2パターン形成工程とを含み、
前記第2構造体は、少なくとも前記第1パターンと前記第2パターンとが重複する交差領域において、前記第2主面上に前記第2主面の法線方向に突出した突起を含む、製造方法。
前記第2パターン形成工程において、第2レジストを用いたリソグラフィーにより前記第2構造体を形成する、[9]に記載の製造方法。
(空隙配置構造体)
本実施形態の空隙配置構造体1は、基本的には、図2(a)に示されるような、互いに対向する一対の主面(第1主面1aおよび第2主面1b)を有し、第1主面1aおよび第2主面1bを貫通する複数の空隙部1cを有する膜状の構造体である。
本実施形態の空隙配置構造体は、流体(検体)中に含まれる目的物を捕集するためのフィルタ(篩い)として用いることができる。
また、目的物を捕集した空隙配置構造体(フィルタ)に電磁波を照射し、空隙配置構造体の電磁波特性を用いて目的物(被測定物)の量または特性を測定するための測定デバイスとして用いることができる。
図4を参照して、本実施形態の空隙配置構造体1は、主面の法線方向に貫通する複数の第1空隙部11cを有する膜状の第1パターン11と、主面の法線方向に貫通する複数の第2空隙部12cを有する膜状の第2パターン12とを、同一平面(第1主面1a)上で重ね合わせてなる形状を有している。
上記のように、第1パターン11と第2パターン12との重複部分において突起を有する本実施形態の空隙配置構造体は、以下の製造方法により容易に製造することができる。
第1パターン11に相当する第1構造体110を形成する第1パターン形成工程と、
第2パターン12に相当する第2構造体120を形成し、第1構造体110と第2構造体120とが結合されてなる空隙配置構造体1を得る、第2パターン形成工程とを含む。
(第1パターン形成工程)
本工程では、金属膜3上に堆積法により、第1パターン11に相当する第1構造体110を所定のパターニングで形成する。
本工程では、第1構造体110上に堆積法により、第2パターン12に相当する第2構造体120を所定のパターニングで形成し、空隙配置構造体1を得る。
次に、図7(i)を参照して、金属膜3をエッチングにより除去する。エッチング方法としては、例えば、金属膜を溶解するエッチング液に上記の工程で得られた空隙配置構造体の前駆体を浸漬する方法が挙げられる。なお、エッチング液は、例えば、純水を用いたリンスによって洗浄し、その後に乾燥が行われる。
Claims (4)
- 空隙配置構造体を用いた、目的物を含む流体の濾過方法であって、
前記空隙配置構造体は、互いに対向する第1主面および第2主面を有し、前記第1主面および前記第2主面を貫通する複数の空隙部を有する膜状の空隙配置構造体であって、
前記第1主面に突起を有しておらず、
前記第2主面上の一部の領域であり、前記第2主面の法線方向から見た平面視において前記複数の空隙部のうち3つ以上と接する少なくとも1つの領域において、前記第2主面から前記第2主面の法線方向に突出した突起を有し、
前記空隙配置構造体は、前記突起を除いた部分の厚みが30μm以下であり、
前記目的物は前記第1主面側に捕捉される、濾過方法。 - 前記空隙配置構造体は、準周期構造体または周期構造体である、請求項1に記載の濾過方法。
- 前記空隙配置構造体は、前記複数の空隙部の孔サイズが0.5μm以下である、請求項1または2に記載の濾過方法。
- 前記流体は細胞を含む、請求項1〜3のいずれか1項に記載の濾過方法。
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WO2016117541A1 (ja) * | 2015-01-22 | 2016-07-28 | 株式会社村田製作所 | 空隙配置構造体およびその製造方法 |
DE102015205435B4 (de) * | 2015-03-25 | 2023-02-16 | Robert Bosch Gmbh | Sequenziervorrichtung und Verfahren zum Betreiben einer Sequenziervorrichtung |
JP6757888B2 (ja) * | 2017-09-04 | 2020-09-23 | パナソニックIpマネジメント株式会社 | 洗濯機 |
NL2021357A (en) * | 2018-01-31 | 2018-08-16 | Asml Netherlands Bv | Two-dimensional diffraction grating |
JP6927413B2 (ja) * | 2018-03-19 | 2021-08-25 | 株式会社村田製作所 | 濾過フィルタ及び濾過装置 |
JP7021704B2 (ja) * | 2018-08-23 | 2022-02-17 | 株式会社村田製作所 | 濾過フィルタ |
JP7253421B2 (ja) * | 2019-03-26 | 2023-04-06 | 東芝テック株式会社 | 検出センサ、及び測定装置 |
CN113008907B (zh) * | 2019-12-19 | 2024-04-12 | 华为技术有限公司 | 太赫兹感知系统和太赫兹感知阵列 |
KR102588287B1 (ko) * | 2021-01-25 | 2023-10-13 | 한국기계연구원 | 필터유닛 및 이를 포함하는 필터시스템 |
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DE1209856B (de) * | 1964-10-21 | 1966-01-27 | Albert Wehner | Siebboden |
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DE1758860A1 (de) * | 1968-08-22 | 1971-06-03 | Stahlgruber Gruber & Co Otto | Elastischer Siebboden |
US3623614A (en) * | 1968-12-11 | 1971-11-30 | Industrial Filter Pump Mfg Co | Filter leaf core |
US3520803A (en) * | 1968-12-24 | 1970-07-21 | Ionics | Membrane fluid separation apparatus and process |
US3724671A (en) * | 1971-02-04 | 1973-04-03 | American Air Filter Co | Fluid treating filter |
US3970550A (en) * | 1972-01-28 | 1976-07-20 | Bba Group Limited | Moulded elastomeric screen mat for sieving devices |
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