JP6707386B2 - めっき処理装置、めっき処理方法及び記憶媒体 - Google Patents
めっき処理装置、めっき処理方法及び記憶媒体 Download PDFInfo
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- 238000007747 plating Methods 0.000 title claims description 287
- 238000000034 method Methods 0.000 title claims description 24
- 239000000758 substrate Substances 0.000 claims description 195
- 239000002904 solvent Substances 0.000 claims description 134
- 239000007788 liquid Substances 0.000 claims description 54
- 230000002093 peripheral effect Effects 0.000 claims description 28
- 238000003672 processing method Methods 0.000 claims description 3
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- 238000005137 deposition process Methods 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
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- 239000010931 gold Substances 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
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- 235000019253 formic acid Nutrition 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000012487 rinsing solution Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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- C23C18/31—Coating with metals
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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Description
図1を参照して、本発明の一実施形態に係るめっき処理装置の構成を説明する。図1は、本発明の一実施形態に係るめっき処理装置の構成を示す概略図である。
図1を参照して、めっき処理ユニット2の構成を説明する。図1は、めっき処理ユニット2の構成を示す概略平面図である。
次に図2を参照して、めっき処理部5の構成を説明する。図2は、めっき処理部5の構成を示す概略断面図である。
次に、めっき処理装置1を用いためっき処理方法について説明する。めっき処理装置1によって実施されるめっき処理方法は、基板Wに対するめっき処理を含む。めっき処理は、めっき処理部5により実施される。以下に示すめっき処理部5の動作は、制御部3によって制御される。
以下、本実施形態の各種変形例について説明する。
2 めっき処理ユニット
3 制御部
5 めっき処理部
52 基板保持部
53 めっき液供給部
54 ノズル移動機構
55a 溶媒供給部
55b 洗浄液供給部
55c リンス液供給部
56 ノズル移動機構
57 カップ
58 昇降機構
531 めっき液ノズル
541 アーム
542 移動体
551a 溶媒ノズル
Claims (13)
- 基板を保持する基板保持部と、
前記基板に対して、めっき液を供給するめっき液供給部と、
前記基板に対して、前記めっき液の温度と異なる温度の前記めっき液を構成する溶媒を供給する溶媒供給部と、
前記めっき液供給部と前記溶媒供給部とを制御する制御部と、を備え、
前記制御部は、前記めっき液供給部から前記基板にめっき液を供給したのち、前記溶媒供給部から前記基板の所定の位置に溶媒を供給し、
前記めっき液供給部は、前記めっき液を供給するめっき液ノズルを含み、
前記制御部は、
前記めっき液供給部が前記めっき液を供給するとともに前記溶媒供給部からの前記溶媒の供給を停止した状態で、前記めっき液ノズルが前記基板の中心部側から前記基板の周縁部側に向けて移動するようにし、
前記めっき液ノズルが前記基板の中心部側から前記基板の周縁部側に向けて移動している途中で、前記めっき液供給部が前記めっき液を引き続き供給するとともに前記溶媒供給部が前記溶媒の供給を開始するようにすることを特徴とするめっき処理装置。 - 前記溶媒の温度は、前記めっき液の温度よりも高いことを特徴とする請求項1記載のめっき処理装置。
- 前記めっき液供給部は、前記めっき液を供給するめっき液ノズルを含み、前記溶媒供給部は、前記溶媒を供給する溶媒ノズルを含むことを特徴とする請求項1又は2記載のめっき処理装置。
- 前記めっき液ノズルと前記溶媒ノズルとが、一体となって前記基板上を移動可能となっていることを特徴とする請求項3記載のめっき処理装置。
- 前記溶媒ノズルは、前記めっき液ノズルの周囲を取り囲むように配置されていることを特徴とする請求項4記載のめっき処理装置。
- 前記めっき液ノズルと前記溶媒ノズルとが、側方から見て互いに異なる方向に傾斜していることを特徴とする請求項3又は4記載のめっき処理装置。
- 前記めっき液ノズルと前記溶媒ノズルとが、前記基板上を別個に移動可能となっていることを特徴とする請求項3記載のめっき処理装置。
- 前記溶媒ノズルは、前記基板上の定位置に配置されていることを特徴とする請求項3記載のめっき処理装置。
- 前記めっき液ノズルおよび前記溶媒ノズルの少なくとも一方が、2本以上設けられていることを特徴とする請求項3記載のめっき処理装置。
- 基板を保持する基板保持工程と、
めっき液供給部から前記基板に対してめっき液を供給する工程と、
溶媒供給部から前記基板の所定の位置に対して前記めっき液の温度と異なる温度の溶媒を供給する液供給工程とを備え、
前記めっき液供給部は、前記めっき液を供給するめっき液ノズルを含み、
前記液供給工程は、
前記めっき液供給部が前記めっき液を供給するとともに前記溶媒供給部からの前記溶媒の供給を停止した状態で、前記めっき液ノズルが前記基板の中心部側から前記基板の周縁部側に向けて移動する第1供給工程と、
前記めっき液ノズルが前記基板の中心部側から前記基板の周縁部側に向けて移動している途中で、前記めっき液供給部が前記めっき液を引き続き供給するとともに前記溶媒供給部が前記溶媒の供給を開始する第2供給工程とを有することを特徴とするめっき処理方法。 - 前記溶媒の温度は、前記めっき液の温度よりも高いことを特徴とする請求項10記載のめっき処理方法。
- 前記液供給工程において、少なくとも一定の時間、前記めっき液と前記溶媒とが同時に供給されることを特徴とする請求項10又は11記載のめっき処理方法。
- めっき処理装置の動作を制御するためのコンピュータにより実行されたときに、前記コンピュータが前記めっき処理装置を制御して請求項10乃至12のいずれか一項記載のめっき処理方法を実行させるプログラムが記録された記憶媒体。
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