JP6695348B2 - ポリマー鎖を光誘導架橋するためのモノアジド化合物 - Google Patents
ポリマー鎖を光誘導架橋するためのモノアジド化合物 Download PDFInfo
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Description
前記式中、Ra、RbおよびRcは各々互いに独立して、水素、ハロゲン、または、アルキル、アルケニル、アルキニル、ヘテロアルキル、ヘテロアルケニル、ヘテロアルキニル、アリール、アルカリール、アリールアルキル、ヘテロアリール、ヘテロアリールアルキルおよびヘテロアルカリールからなる群から選択される20個以下の炭素原子の非置換もしくは置換された基から選択され、
Rdは、20個以下の炭素原子の二価の基、好ましくは、アルキレン、アルケニレン、アルキニレン、ヘテロアルキレン、ヘテロアルケニレン、ヘテロアルキニレン、アリーレン、アルカリーレン、アリールアルキレン、ヘテロアリーレン、ヘテロアリールアルキレンおよびヘテロアルカリーレンからなる群から選択される非置換または置換された基であり、且つ
X-は対イオンである。
(i) (A) ポリマー鎖
(B) 式(I)のモノアジド化合物
(C) 随意に1つまたはそれより多くの溶剤
を含む組成物を提供する段階、
(ii) 段階(i)の前記組成物を、200nmから450nmの範囲の波長の光で照射する段階、
(iii) 随意に、1つまたはそれより多くの溶剤を試料から除去する段階、および
(iv) 架橋されたポリマー組成物を得る段階。
式(I)の残留モノアジド化合物、
式(I)のモノアジド化合物の反応生成物、および/または
低い程度に架橋されたもしくは未架橋のポリマー鎖
を除去する段階(v)をさらに含む。
PFPAおよびポリ(ビニルピリジン)(PVPyr)の配合
ポリ−4−ビニルピリジン(Mn=60000、2.60g)をc−ペンタノン(36.0mL)中に溶解して、濃度c=72.2mg/mL=1.20×10-6mol/mL=1.2mMを有するわずかに黄色の溶液をもたらす。該ポリマー溶液を各々4mLの試料に分け、以下のとおり、ニートPFPAで処理する。60秒の撹拌後、PVPyr/PFPAの均質な溶液が得られる。
薄膜試料の製造および評価
全ての製造段階を周囲空気下で行った。Si/SiO2ウェハの試料(2×2cm)およびITOの試料(2×2インチ)を、それらをイソプロパノールおよびアセトンに浸漬させ且つ引き続きN2流(55psi)中でブロー乾燥することにより洗浄した。前記の手順を3回繰り返した後、基板を90℃で5分間乾燥させた。得られた溶液を1500rpm(255asc、22℃)で30秒間、洗浄されたSi/SiO2ウェハおよびITO試料の上にそれぞれスピンコートした。ポリマー溶液150μLをSi/SiO2ウェハ試料について使用し、ITO試料については200μL使用した。90℃で30秒間の乾燥後、平滑、透明且つ硬質の膜が得られた。
表3 濯ぎ前後の膜の比較
k値および素子特性の測定
前記のスピンコートされたITO基板上での容量測定によって誘電率を測定した。蒸着されたAu(d〜70nm)の面積7.85×10-7m2を有するドットを対電極として使用した。全ての基板について5つのデータ点を記録し、且つ2つの基板は上述のPFPA濃度の全てについて評価した。膜厚を、90.0mg/mLのポリマー濃度を使用して少なくとも500nmに最適化した(上記参照)。図4および表4は、PVPyr/PFPA膜についての周波数範囲1kHz〜1MHzにおける代表的なk値を示す。
試料1
誘電体: PVPyr−PFPA
面積(m2) 7.85E−07
厚さ(nm) 572
ε0 8.85E−12
ボトムゲート・トップコンタクト型OFET素子の製造
全ての製造段階を周囲空気下で行った。全ての製造段階を周囲空気下で行った。Si/SiO2ウェハの試料(1×1cm)を、それらをイソプロパノールおよびアセトンに浸漬させ且つ引き続きN2流(55psi)中でブロー乾燥することにより洗浄した。前記の手順を3回繰り返した後、基板を90℃で5分間乾燥させた。得られた溶液を1500rpm(255asc、22℃)で30秒間、洗浄されたSi/SiO2ウェハ試料の上にスピンコートした。90℃で30秒間の乾燥後、平滑、透明且つ硬質の膜が得られた。254nmの淡色UV光を使用して2.97mW/cm2の一定の出力で10分間(エネルギー入力1785mJ/cm2に等しい)、光硬化を行った。その後、該試料を、c−ペンタノンに60秒間浸漬させ、次にN2流(55psi)でブロー乾燥させ、且つさらに基板を90℃で5分間乾燥させた。P1100ポリマー半導体(o−キシレン中で0.75質量)を誘電体の上部に1000rpm(255asc、22℃)で30秒間スピンコートし、次に90℃で30分間、乾燥させた。蒸着されたAu(d〜70nm)をソース電極およびドレイン電極として使用した。典型的な三電極の設定を使用して評価を行った。表7は代表的なBGTC型素子について得られた性能指数の概要を示す。
様々なポリマーの架橋の比較
以下の(コ)ポリマーを、PFPAにより架橋される能力について試験した。
ポリ(ビニルピリジン) (PVPyr)、Mw=60k;
ポリ(2−ビニルナフタレン) (PVN)、Mw=175k;
ポリ(ビニルベンジルクロリド) (PVBC)、Mw=40.5k;
ポリビニルトルエン (PVT)、Mw=72k;
ポリ(α−メチルスチレン) (PαMS)、Mn=1300;
ポリカプロラクトン (PCL)、Mn=45k;
ポリ(ビニルフェノール)/ポリ(メチルメタクリレート)コポリマー (PVP/PMMA);
ポリスチレン−co−マレイン酸無水物コポリマー (PS/MA);
ポリブタジエン (PBD)、Mw=20k;
ポリ(メチルメタクリレート) (PMMA)、Mw=996k;
ポリエチレングリコールメチルエーテル 5000 (PEGME); および
ポリ(エチレンオキシド) (PEO)、Mv=300k。
表8 様々なポリマーの架橋の比較結果
欧州特許出願公開第0019726号明細書
米国特許出願公開第2009/0004402号明細書
米国特許第3238230号明細書
国際公開第2011/068482号明細書
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Claims (13)
- 以下の段階:
(i) (A) ポリマー鎖
(B) 式(I)のモノアジド化合物
(C) 随意に1つまたはそれより多くの溶剤
を含む組成物を提供する段階、
(ii) 段階(i)の前記組成物を、200nmから450nmの範囲の波長の光で照射する段階、
(iii) 随意に、1つまたはそれより多くの溶剤を試料から除去する段階、および
(iv) 架橋されたポリマー組成物を得る段階
を含む、ポリマー鎖の架橋方法。 - Q1およびQ2が両方ともFである、請求項1に記載の方法。
- R 1 、R 2 およびR 3 の2つが各々互いに独立してハロゲンであり、残りの1つがハロゲン、−CN、−CO−O−Ra、−CO−Ra、水素、−Ra、−O−CO−Ra、−NO2、−N+RaRbRa+X-、−Rd−O−CO−Ra、−Rd−CO−O−Ra、−NRb−CO−Ra、−Rd−NRb−CO−Ra、−CO−NRb−Ra、−Rd−CO−NRb−Ra、−NRaRb、−Rd−NRaRb、−SiRaRbRc、−Rd−SiRaRbRc、−O−Ra、−Rd−O−Ra、−CO−Ra、−Rd−CO−Ra、−O−CO−O−Ra、−Rd−O−CO−O−Ra、−NRb−CO−O−Ra、−Rd−NRb−CO−O−Ra、−O−CO−NRb−Ra、−Rd−O−CO−NRb−Ra、−NRb−CO−NRc−Ra、−Rd−NRb−CO−NRc−Ra、−O−CS−Ra、−Rd−O−CS−Ra、−CS−O−Ra、−Rd−CS−O−Ra、−S−CO−Ra、−Rd−S−CO−Ra、−CO−S−Ra、−Rd−CO−S−Ra、−NRb−CS−Ra、−Rd−NRb−CS−Ra、−CS−NRb−Ra、−Rd−CS−NRb−Ra、−S−Ra、−Rd−S−Ra、−CS−Ra、−Rd−CS−Ra、−O−CS−O−Ra、−Rd−O−CS−O−Ra、−S−CO−O−Ra、−Rd−S−CO−O−Ra、−O−CO−S−Ra、−Rd−O−CO−S−Ra、−S−CO−S−Ra、−Rd−S−CO−S−Ra、−NRb−CS−O−Ra、−NRb−CO−S−Ra、−Rd−NRb−CS−O−Ra、−Rd−NRb−CO−S−Ra、−S−CO−NRb−Ra、−O−CS−NRb−Ra、−Rd−O−CS−NRb−Ra、−Rd−S−CO−NRb−Ra、−NRb−CS−NRc−Ra、−Rd−NRb−CS−NRc−Ra、−SO−Ra、−Rd−SO−Ra、−SO2−Ra、−SO2−O−Ra、−Rd−SO2−O−Raおよび−Rd−SO2−Raからなる群から選択され、
前記式中、Ra、RbおよびRcは各々互いに独立して、水素、ハロゲン、または、アルキル、アルケニル、アルキニル、ヘテロアルキル、ヘテロアルケニル、ヘテロアルキニル、アリール、アルカリール、アリールアルキル、ヘテロアリール、ヘテロアリールアルキルおよびヘテロアルカリールからなる群から選択される20個以下の炭素原子の非置換もしくは置換された基から選択され、
Rdは、20個以下の炭素原子の二価の基であり、且つ
X-は対イオンである、
請求項1または2に記載の方法。 - R 1 、R 2 およびR 3 の2つが各々互いに独立してハロゲンであり、残りの1つがハロゲン、シアノ基、−CH3CO、ハロゲン化されたメチル基、ハロゲン化されたエチル基、ハロゲン化されたまたはハロゲン化されていないメトキシ基、PhCOからなる群から選択される電子吸引性基である、請求項1から3までのいずれか1項に記載の方法。
- R 1、R2およびR3の全ては各々互いに独立してハロゲンである、請求項1から4までのいずれか1項に記載の方法。
- 前記ポリマー鎖は、ポリ(ビニルピリジン)、ポリ(ビニルベンジルクロリド)、ポリビニルトルエン、ポリ(2−ビニルナフタレン)、ポリ塩化ビニル、ポリ酢酸ビニル、ポリビニルアルコール、ポリアクリロニトリル、ポリ(ビニルフェノール)、ポリエチレン、ポリプロピレン、ポリメチルペンテン、ポリブタジエン、ポリブテン−1、ポリイソブチレン、エチレンプロピレンゴム、およびエチレンプロピレンジエンモノマーゴム、ポリエチレンオキシド、ポリエチレングリコールメチルエステル、ポリ(メタクリレート)、ポリ(メチルメタクリレート)ポリカプロラクトン、ポリ乳酸、ポリリンゴ酸、ポリスチレン、ポリ(α−メチルスチレン)、ポリスチレン−co−マレイン酸無水物、ポリ(エチレンオキシド)およびそれらの2つまたはそれより多くのコポリマーからなる群から選択される、請求項1から5までのいずれか1項に記載の方法。
- 段階(ii)の照射が、200nm〜400nmの範囲の波長の光での励起である、請求項1から6までのいずれか1項に記載の方法。
- 段階(ii)の照射前に、段階(i)の組成物を、1mm未満の厚さの層状に広げる、請求項1から7までのいずれか1項に記載の方法。
- 段階(i)の組成物を、スピンコーティング、溶液流延、噴霧、スロットダイコーティングおよび/または印刷によって層状に広げる、請求項8に記載の方法。
- 段階(ii)の照射が、100mJ/cm2〜100J/cm2の範囲の量の照射エネルギーの励起である、請求項1から9までのいずれか1項に記載の方法。
- 式(I)の残留モノアジド化合物、
式(I)のモノアジド化合物の反応生成物、および/または
低い程度に架橋されたもしくは未架橋のポリマー鎖
を除去する段階(v)をさらに含む、請求項1から10までのいずれか1項に記載の方法。 - 請求項1から11までのいずれか1項に記載の方法を用いる、架橋されたポリマー組成物の製造方法。
- 請求項12に記載の方法により得られた架橋されたポリマー組成物を含む電子素子の製造方法であって、前記架橋されたポリマー組成物が誘電体層、レジスト層、絶縁層、パッシベーション層、平坦化層、封止層またはコーティングのために使用される、前記電子素子の製造方法。
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