JP6687652B2 - エレクトロクロミックデバイス前駆体、エレクトロクロミックデバイス前記体を製造するための装置、および、エレクトロクロミックデバイスの製造方法 - Google Patents
エレクトロクロミックデバイス前駆体、エレクトロクロミックデバイス前記体を製造するための装置、および、エレクトロクロミックデバイスの製造方法 Download PDFInfo
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- JP6687652B2 JP6687652B2 JP2018028971A JP2018028971A JP6687652B2 JP 6687652 B2 JP6687652 B2 JP 6687652B2 JP 2018028971 A JP2018028971 A JP 2018028971A JP 2018028971 A JP2018028971 A JP 2018028971A JP 6687652 B2 JP6687652 B2 JP 6687652B2
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- oxide
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- OLFCLHDBKGQITG-UHFFFAOYSA-N chromium(3+) nickel(2+) oxygen(2-) Chemical compound [Ni+2].[O-2].[Cr+3] OLFCLHDBKGQITG-UHFFFAOYSA-N 0.000 description 1
- KAGOZRSGIYZEKW-UHFFFAOYSA-N cobalt(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Co+3].[Co+3] KAGOZRSGIYZEKW-UHFFFAOYSA-N 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
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- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 1
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 1
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- DCYOBGZUOMKFPA-UHFFFAOYSA-N iron(2+);iron(3+);octadecacyanide Chemical compound [Fe+2].[Fe+2].[Fe+2].[Fe+3].[Fe+3].[Fe+3].[Fe+3].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] DCYOBGZUOMKFPA-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
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- PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 description 1
- NMHMDUCCVHOJQI-UHFFFAOYSA-N lithium molybdate Chemical compound [Li+].[Li+].[O-][Mo]([O-])(=O)=O NMHMDUCCVHOJQI-UHFFFAOYSA-N 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910001947 lithium oxide Inorganic materials 0.000 description 1
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- 239000011777 magnesium Substances 0.000 description 1
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- BXNFVPMHMPQBRO-UHFFFAOYSA-N magnesium nickel(2+) oxygen(2-) Chemical compound [O--].[O--].[Mg++].[Ni++] BXNFVPMHMPQBRO-UHFFFAOYSA-N 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- BLYYANNQIHKJMU-UHFFFAOYSA-N manganese(2+) nickel(2+) oxygen(2-) Chemical compound [O--].[O--].[Mn++].[Ni++] BLYYANNQIHKJMU-UHFFFAOYSA-N 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
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- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
- QWDUNBOWGVRUCG-UHFFFAOYSA-N n-(4-chloro-2-nitrophenyl)acetamide Chemical compound CC(=O)NC1=CC=C(Cl)C=C1[N+]([O-])=O QWDUNBOWGVRUCG-UHFFFAOYSA-N 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- GNMQOUGYKPVJRR-UHFFFAOYSA-N nickel(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ni+3].[Ni+3] GNMQOUGYKPVJRR-UHFFFAOYSA-N 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- VVRQVWSVLMGPRN-UHFFFAOYSA-N oxotungsten Chemical group [W]=O VVRQVWSVLMGPRN-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000306 polymethylpentene Polymers 0.000 description 1
- 239000011116 polymethylpentene Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 229960003351 prussian blue Drugs 0.000 description 1
- 239000013225 prussian blue Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910001427 strontium ion Inorganic materials 0.000 description 1
- PWYYWQHXAPXYMF-UHFFFAOYSA-N strontium(2+) Chemical compound [Sr+2] PWYYWQHXAPXYMF-UHFFFAOYSA-N 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 1
- BHZCMUVGYXEBMY-UHFFFAOYSA-N trilithium;azanide Chemical compound [Li+].[Li+].[Li+].[NH2-] BHZCMUVGYXEBMY-UHFFFAOYSA-N 0.000 description 1
- CMPGARWFYBADJI-UHFFFAOYSA-L tungstic acid Chemical compound O[W](O)(=O)=O CMPGARWFYBADJI-UHFFFAOYSA-L 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1525—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material characterised by a particular ion transporting layer, e.g. electrolyte
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1524—Transition metal compounds
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1524—Transition metal compounds
- G02F1/15245—Transition metal compounds based on iridium oxide or hydroxide
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
- G02F2001/1555—Counter electrode
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Description
本出願は、それぞれが「Electrochromic Devices」という名称である、それぞれ2010年4月30日に出願された米国特許出願第12/772,055号および第12/772,075号、ならびにそれぞれ2010年6月11日に出願された米国特許出願第12/814,277号および第12/814,279号の、利益およびこれらに対する優先権を主張するものであり、これらの内容は、参照によりその全体が本明細書に組み込まれる。
Claims (28)
- (a)基板と、
(b)前記基板上の第1の透明伝導性酸化物層と、
(c)前記第1の透明伝導性酸化物層上の積層体であって、前記積層体が(i)エレクトロクロミック材料を含むエレクトロクロミック層および(ii)イオンの貯蔵部としての役割を果たす対向電極材料を含む対向電極層を含む、積層体と、
(d)前記積層体の上の第2の透明伝導性酸化物層と、
を備え、
前記エレクトロクロミック材料および前記対向電極材料のうちの少なくとも1つが、リチウムを含有し、
前記エレクトロクロミック層と前記対向電極層との間の領域に、(i)前記エレクトロクロミック層が、超化学量論的酸素の形態の前記エレクトロクロミック材料を有するか、または、(ii)前記エレクトロクロミック層が、超化学量論的酸素の形態の前記対向電極材料を有する、
エレクトロクロミックデバイス前駆体。 - 前記エレクトロクロミック層が、前記エレクトロクロミック層と前記対向電極層との間の界面領域に超化学量論的酸素の形態の前記エレクトロクロミック材料を有する、請求項1に記載のエレクトロクロミックデバイス前駆体。
- 前記対向電極層が、前記エレクトロクロミック層と前記対向電極層との間の界面領域に超化学量論的酸素の形態の前記対向電極材料を有する、請求項1に記載のエレクトロクロミックデバイス前駆体。
- 前記エレクトロクロミック材料が、モリブデン、ニオブ、バナジウムおよびチタンにおける1つ以上でドープされた酸化タングステンを有する、請求項1に記載のエレクトロクロミックデバイス前駆体。
- 前記エレクトロクロミック材料が、モリブデンおよびチタンでドープされた酸化タングステンを有する、請求項4に記載のエレクトロクロミックデバイス前駆体。
- 前記対向電極材料が、タンタルでドープされたニッケルタングステン酸化物を有する、請求項1に記載のエレクトロクロミックデバイス前駆体。
- 前記エレクトロクロミック材料は、モリブデン、ニオブ、バナジウムおよびチタンにおける1つ以上でドープされた酸化タングステンを有する、請求項6に記載のエレクトロクロミックデバイス前駆体。
- 前記エレクトロクロミック層は、300〜600nmの厚さであり、前記対向電極層は、150〜300nmの厚さである、請求項7に記載のエレクトロクロミックデバイス前駆体。
- エレクトロクロミックデバイス前駆体を製造するための装置であって、
(a)基板が第1の成膜ステーションに位置する場合に、前記基板上にエレクトロクロミック材料を有するエレクトロクロミック層を成膜するための第1材料を有する第1ターゲットを含む前記第1の成膜ステーションと、
(b)前記基板が第2の成膜ステーションに位置する場合に、前記基板上に対向電極材料を有する対向電極層を成膜するための第2材料を有する第2ターゲットを含む前記第2の成膜ステーションと、
(c)前記基板上に積層体を逐次的に成膜する様式で、前記第1の成膜ステーションおよび前記第2の成膜ステーションに前記基板を通過させるためのプログラム命令を含むコントローラと、
を備え、
前記対向電極層はイオンの貯蔵部としての役割を果たし、
前記積層体は、前記対向電極層と直接接触する前記エレクトロクロミック層を有し、
前記積層体および前記基板が、前記エレクトロクロミックデバイス前駆体を、共に形成し、
前記エレクトロクロミック層と前記対向電極層との間の領域に、(i)前記エレクトロクロミック層が、超化学量論的酸素の形態の前記エレクトロクロミック材料を有するか、または、(ii)前記エレクトロクロミック層が、超化学量論的酸素の形態の前記対向電極材料を有する、
装置。 - 前記コントローラが、超化学量論的形態の前記エレクトロクロミック材料を成膜する様式で前記第1の成膜ステーションに前記基板を通過させるためのプログラム命令を含み、
前記超化学量論的形態の前記エレクトロクロミック材料が、前記エレクトロクロミックデバイス前駆体において前記対向電極層と共に界面領域にある、請求項9に記載の装置。 - 前記コントローラが、超化学量論的形態の前記対向電極材料を成膜する様式で前記第2の成膜ステーションに前記基板を通過させるためのプログラム命令を含み、
前記超化学量論的形態の前記対向電極材料が、前記エレクトロクロミックデバイス前駆体において前記エレクトロクロミック層と共に界面領域にある、請求項9に記載の装置。 - 前記エレクトロクロミック材料が、モリブデン、ニオブ、バナジウムおよびチタンにおける1つ以上でドープされた酸化タングステンを有する、請求項9に記載の装置。
- 前記対向電極材料が、タンタルでドープされたニッケルタングステン酸化物を有する、請求項9に記載の装置。
- 前記エレクトロクロミック材料が、モリブデン、ニオブ、バナジウムおよびチタンにおける1つ以上でドープされた酸化タングステンを有する、請求項13に記載の装置。
- 前記コントローラは、前記エレクトロクロミック層を300〜600nmの厚さに成膜し、かつ、前記対向電極層を150〜300nmの厚さで成膜するための命令を有する、請求項14に記載の装置。
- エレクトロクロミックデバイスの製造方法であって、
(a)エレクトロクロミックデバイス前駆体を受け取る段階を備え、
前記エレクトロクロミックデバイス前駆体は、(i)エレクトロクロミック材料を有するエレクトロクロミック層と、(ii)イオンの貯蔵部としての役割を果たす対向電極材料を有する対向電極層とを有し、
前記エレクトロクロミック層および前記対向電極層のうちの少なくとも1つは、リチウムを含有し、
前記エレクトロクロミック層と前記対向電極層との間の領域に、(i)前記エレクトロクロミック層が、超化学量論的酸素の形態の前記エレクトロクロミック材料を有するか、または、(ii)前記エレクトロクロミック層が、超化学量論的酸素の形態の前記対向電極材料を有し、
前記製造方法が、
(b)前記エレクトロクロミックデバイス前駆体を受け取った後、前記エレクトロクロミック層における前記エレクトロクロミック材料と前記対向電極層における前記対向電極材料との間に、実質的にイオン伝導でかつ実質的に電子絶縁性の材料を形成することにより、前記エレクトロクロミックデバイスを形成する段階を更に備える、
エレクトロクロミックデバイスの製造方法。 - 前記エレクトロクロミック層および前記対向電極層が、積層体を共に形成し、
前記エレクトロクロミックデバイスを形成する段階(b)が、前記積層体を100℃から450℃の間の温度に加熱する段階を有する、請求項16に記載のエレクトロクロミックデバイスの製造方法。 - エレクトロクロミック材料を有するエレクトロクロミック層を形成する段階と、
前記エレクトロクロミック層と接触する対向電極層を、前記エレクトロクロミック層と前記対向電極層との間にイオン伝導性かつ電子絶縁性の層を最初に設けることなく、形成する段階であって、前記対向電極層が対向電極材料を有し、前記エレクトロクロミック層および前記対向電極層が積層体を共に形成する、形成する段階と、
前記対向電極層の上にリチウムを成膜する段階と、
100℃から450℃の間の温度に前記積層体を加熱する段階と、
を備える、
エレクトロクロミックデバイスの製造方法。 - エレクトロクロミックデバイスの製造方法であって、
金属酸化物およびドーパントを有するエレクトロクロミック材料を有するエレクトロクロミック層を形成する段階
を備え、
前記金属酸化物が、酸化タングステン、酸化モリブデン、酸化ニオブ、酸化チタン、酸化銅、酸化イリジウム、酸化クロム、酸化マンガン、酸化バナジウム、酸化ニッケル、酸化コバルトから成る群から選択される1または複数の材料を有し、
前記ドーパントが、モリブデン、ニオブ、バナジウム、チタンから成る群から選択される1または複数の材料を有し、
前記製造方法が、
前記エレクトロクロミック層と接触する対向電極層を、前記エレクトロクロミック層と前記対向電極層との間に、イオン伝導性かつ電子絶縁性の層を最初に設けることなく、形成する段階であって、前記対向電極層が対向電極材料を有し、前記エレクトロクロミック層および前記対向電極層が積層体を形成する、形成する段階と、
前記エレクトロクロミック層および前記対向電極層の一方または双方の成分を使用して、前記エレクトロクロミック層および前記対向電極層の間に実質的にイオン伝導性でかつ実質的に電子絶縁性の領域を形成する段階と、
を更に備え、
前記領域を形成する段階が、
前記対向電極層の上にリチウムを成膜する段階と、
100℃から450℃の間の温度に前記積層体を加熱する段階と、
のうちの少なくとも1つの段階を有する、
エレクトロクロミックデバイスの製造方法。 - 前記エレクトロクロミック層が、前記エレクトロクロミック層と前記対向電極層との間の界面領域に超化学量論的酸素の形態の前記エレクトロクロミック材料を有する、請求項16から19の何れか1項に記載のエレクトロクロミックデバイスの製造方法。
- 前記対向電極層が、前記エレクトロクロミック層と前記対向電極層との間の界面領域に超化学量論的酸素の形態の前記対向電極材料を有する、請求項16から19の何れか1項に記載のエレクトロクロミックデバイスの製造方法。
- 前記エレクトロクロミック材料が、モリブデン、ニオブ、バナジウムおよびチタンにおける1つ以上でドープされた酸化タングステンを有する、請求項16から19の何れか1項に記載のエレクトロクロミックデバイスの製造方法。
- 前記エレクトロクロミック材料が、モリブデンおよびチタンでドープされた酸化タングステンを有する、請求項22に記載のエレクトロクロミックデバイスの製造方法。
- 前記対向電極材料が、タンタルでドープされたニッケルタングステン酸化物を有する、請求項16から19の何れか1項に記載のエレクトロクロミックデバイスの製造方法。
- 前記エレクトロクロミック材料が、モリブデン、ニオブ、バナジウムおよびチタンにおける1つ以上でドープされた酸化タングステンを有する、請求項24に記載のエレクトロクロミックデバイスの製造方法。
- 前記エレクトロクロミック層が、300〜600nmの厚さであり、前記対向電極層が、150〜300nmの厚さである、請求項25に記載のエレクトロクロミックデバイスの製造方法。
- 前記積層体は、多段解熱化学的調整プロセスに従って加熱され、
前記多段解熱化学的調整プロセスが、
(i)不活性雰囲気下で前記積層体を加熱する段階と、
(ii)酸素雰囲気下で前記積層体を加熱する段階と、
(iii)空気中で前記積層体を加熱する段階と、
を有する、請求項17から19の何れか1項に記載のエレクトロクロミックデバイスの製造方法。 - 前記加熱する段階(i)は、前記積層体を前記不活性雰囲気下で、10分から30分間、150℃から450℃の間の温度に加熱する段階を有し、
前記加熱する段階(ii)は、前記積層体を前記酸素雰囲気下で、1分から15分間、150℃から450℃の間の温度に加熱する段階を有し、
前記加熱する段階(iii)は、前記積層体を前記空気中で、20分から40分間、250℃から350℃の間の温度に加熱する段階を有する、請求項27に記載のエレクトロクロミックデバイスの製造方法。
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