JP6297658B2 - エレクトロクロミックデバイス、エレクトロクロミックデバイスを製作する方法、および、エレクトロクロミックデバイスを製作するための装置 - Google Patents
エレクトロクロミックデバイス、エレクトロクロミックデバイスを製作する方法、および、エレクトロクロミックデバイスを製作するための装置 Download PDFInfo
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- KAGOZRSGIYZEKW-UHFFFAOYSA-N cobalt(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Co+3].[Co+3] KAGOZRSGIYZEKW-UHFFFAOYSA-N 0.000 description 1
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- 229910052805 deuterium Inorganic materials 0.000 description 1
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 1
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 1
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- DCYOBGZUOMKFPA-UHFFFAOYSA-N iron(2+);iron(3+);octadecacyanide Chemical compound [Fe+2].[Fe+2].[Fe+2].[Fe+3].[Fe+3].[Fe+3].[Fe+3].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] DCYOBGZUOMKFPA-UHFFFAOYSA-N 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 description 1
- NMHMDUCCVHOJQI-UHFFFAOYSA-N lithium molybdate Chemical compound [Li+].[Li+].[O-][Mo]([O-])(=O)=O NMHMDUCCVHOJQI-UHFFFAOYSA-N 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
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- BXNFVPMHMPQBRO-UHFFFAOYSA-N magnesium nickel(2+) oxygen(2-) Chemical compound [O--].[O--].[Mg++].[Ni++] BXNFVPMHMPQBRO-UHFFFAOYSA-N 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- BLYYANNQIHKJMU-UHFFFAOYSA-N manganese(2+) nickel(2+) oxygen(2-) Chemical compound [O--].[O--].[Mn++].[Ni++] BLYYANNQIHKJMU-UHFFFAOYSA-N 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
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- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
- QWDUNBOWGVRUCG-UHFFFAOYSA-N n-(4-chloro-2-nitrophenyl)acetamide Chemical compound CC(=O)NC1=CC=C(Cl)C=C1[N+]([O-])=O QWDUNBOWGVRUCG-UHFFFAOYSA-N 0.000 description 1
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- GNMQOUGYKPVJRR-UHFFFAOYSA-N nickel(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ni+3].[Ni+3] GNMQOUGYKPVJRR-UHFFFAOYSA-N 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
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- 229920000306 polymethylpentene Polymers 0.000 description 1
- 239000011116 polymethylpentene Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 229960003351 prussian blue Drugs 0.000 description 1
- 239000013225 prussian blue Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910001427 strontium ion Inorganic materials 0.000 description 1
- PWYYWQHXAPXYMF-UHFFFAOYSA-N strontium(2+) Chemical compound [Sr+2] PWYYWQHXAPXYMF-UHFFFAOYSA-N 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 1
- BHZCMUVGYXEBMY-UHFFFAOYSA-N trilithium;azanide Chemical compound [Li+].[Li+].[Li+].[NH2-] BHZCMUVGYXEBMY-UHFFFAOYSA-N 0.000 description 1
- CMPGARWFYBADJI-UHFFFAOYSA-L tungstic acid Chemical compound O[W](O)(=O)=O CMPGARWFYBADJI-UHFFFAOYSA-L 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1524—Transition metal compounds
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1524—Transition metal compounds
- G02F1/15245—Transition metal compounds based on iridium oxide or hydroxide
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
- G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
- G02F1/1525—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material characterised by a particular ion transporting layer, e.g. electrolyte
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
- G02F1/153—Constructional details
- G02F1/155—Electrodes
- G02F2001/1555—Counter electrode
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Description
本出願は、それぞれが「Electrochromic Devices」という名称である、それぞれ2010年4月30日に出願された米国特許出願第12/772,055号および第12/772,075号、ならびにそれぞれ2010年6月11日に出願された米国特許出願第12/814,277号および第12/814,279号の、利益およびこれらに対する優先権を主張するものであり、これらの内容は、参照によりその全体が本明細書に組み込まれる。
Claims (45)
- エレクトロクロミック材料を含み陰極で着色する1または複数のエレクトロクロミック層と、対向電極材料を含み陽極で着色する1または複数の対向電極層とを有する積層体を備えるエレクトロクロミックデバイスを製造する方法であって、
(a)前記陰極で着色する1または複数のエレクトロクロミック層、あるいは前記陽極で着色する1または複数の対向電極層を基板に堆積する段階と、
(b)前記段階(a)において堆積された前記陰極で着色する1または複数のエレクトロクロミック層および前記陽極で着色する1または複数の対向電極層のうちの他方の層を、それらの層の間に電子絶縁性かつイオン伝導性の材料層を堆積することなく、堆積する段階と、次に、
(c)前記陰極で着色する1または複数のエレクトロクロミック層および前記陽極で着色する1または複数の対向電極層のうちの少なくとも1つをリチウムへ曝露すべく、前記積層体にリチウム金属を堆積する段階と、
を備える、方法。 - 前記堆積する段階(a)は、前記エレクトロクロミック材料または前記対向電極材料の第1副層を形成する段階と、その次に、同じ材料の第2副層を形成する段階とを有し、
前記第2副層は、前記同じ材料を酸素に富む形態で有し、かつ前記段階(b)で形成された前記陰極で着色する1または複数のエレクトロクロミック層および前記陽極で着色する1または複数の対向電極層のうちの前記他方の層と接触する、請求項1に記載の方法。 - (d)前記エレクトロクロミック材料または前記対向電極材料の前記第2副層の少なくとも一部を前記電子絶縁性かつイオン伝導性の材料層へ変換する段階、
を更に備える、請求項2に記載の方法。 - 前記電子絶縁性かつイオン伝導性の材料層が、前記エレクトロクロミック材料または前記対向電極材料を有する、請求項3に記載の方法。
- 前記堆積する段階(a)は、前記エレクトロクロミック材料または前記対向電極材料のいずれかの単一層を形成する段階を有し、
前記単一層は、前記単一層のエリアと同じ領域にある超化学量論的酸素部分を含んだ勾配組成を有し、
前記超化学量論的酸素部分は、前記段階(b)で形成された前記陰極で着色する1または複数のエレクトロクロミック層および前記陽極で着色する1または複数の対向電極層のうちの前記他方の層と接触する、請求項1に記載の方法。 - (d)前記単一層の前記エリアと同じ領域にある前記超化学量論的酸素部分の少なくとも一部を前記電子絶縁性かつイオン伝導性の材料層へ変換する段階、
を更に備える、請求項5に記載の方法。 - 前記電子絶縁性かつイオン伝導性の材料層が、前記エレクトロクロミック材料または前記対向電極材料を有する、請求項6に記載の方法。
- 前記エレクトロクロミック材料が、酸化タングステンを有する、請求項1に記載の方法。
- 前記対向電極材料が、酸化ニッケルを有する、請求項1に記載の方法。
- 前記対向電極材料が、ニッケルタングステン酸化物を有する、請求項9に記載の方法。
- 前記対向電極材料が、タンタルを有する、請求項10に記載の方法。
- 前記ニッケルタングステン酸化物が、実質的に非晶質である、請求項10に記載の方法。
- 前記陰極で着色する1または複数のエレクトロクロミック層および前記陽極で着色する1または複数の対向電極層のうちの前記他方の層に透明伝導性酸化物層を堆積する段階、
を更に備える、請求項1に記載の方法。 - 前記透明伝導性酸化物が、インジウムスズ酸化物を有する、請求項13に記載の方法。
- リチウム金属を前記積層体に堆積する段階は、前記透明伝導性酸化物層を堆積した後に実施される、請求項13または14に記載の方法。
- エレクトロクロミックデバイスを製造する方法であって、
(a)エレクトロクロミック材料を含むエレクトロクロミック層または対向電極材料を含む対向電極層のいずれかを形成する段階と、
(b)前記エレクトロクロミック層または前記対向電極層の上に中間層を形成する段階であって、前記中間層は、酸素に富む形態の、前記エレクトロクロミック材料および前記対向電極材料のうちの少なくとも1つを含み、前記中間層は電子絶縁性かつイオン伝導性ではない、形成する段階と、
(c)前記中間層の少なくとも一部を、前記中間層のエリアと同じ領域にあり、電子絶縁性かつイオン伝導性の材料と前記中間層の前記材料とを有する領域へ変換する段階と、
を備える、方法。 - 前記段階(c)の前または後に、
(d)前記エレクトロクロミック層および前記対向電極層のうちの他方の層を前記中間層に形成する段階、
を更に備える、請求項16に記載の方法。 - 前記段階(d)で形成された前記エレクトロクロミック層および前記対向電極層のうちの前記他方の層にリチウム金属をスパッタリングする段階(e)、
を更に備える、請求項17に記載の方法。 - (d)前記中間層をリチウムへ曝露する段階、
を更に備える、請求項16に記載の方法。 - 前記中間層の少なくとも一部を前記領域へ変換する前記段階は、前記エレクトロクロミックデバイスを、約100℃から約450℃の間まで加熱する段階を有する、請求項16に記載の方法。
- 前記エレクトロクロミック層が、酸化タングステンを有する、請求項16に記載の方法。
- 前記対向電極層が、酸化ニッケルを有する、請求項16に記載の方法。
- 前記対向電極層が、ニッケルタングステン酸化物を有する、請求項22に記載の方法。
- 前記対向電極が、タンタルを有する、請求項23に記載の方法。
- 前記ニッケルタングステン酸化物が、実質的に非晶質である、請求項23に記載の方法。
- 前記エレクトロクロミック層および前記対向電極層のうちの他方の層に透明伝導性酸化物層を堆積する段階、
を更に備える、請求項16に記載の方法。 - 前記透明伝導性酸化物がインジウムスズ酸化物を有する、請求項26に記載の方法。
- 前記段階(a)および前記段階(b)により形成された前記複数の層は、前記中間層において超化学量論的酸素を含んだ勾配組成を有する、請求項16に記載の方法。
- エレクトロクロミック材料を含み陰極で着色するエレクトロクロミック層と、対向電極材料を含み陽極で着色する対向電極層とを有するエレクトロクロミックデバイスを製造する方法であって、
(a)前記エレクトロクロミック層および前記対向電極層のうちの一方の層を基板に堆積する段階と、
(b)前記段階(a)において堆積された層に、前記エレクトロクロミック層および前記対向電極層のうちの他方の層を直接堆積する段階であって、前記エレクトロクロミック層および前記対向電極層は互いに接触する、堆積する段階と、次に、
(c)前記段階(a)および前記段階(b)の後に、前記エレクトロクロミック層および前記対向電極層の間の界面領域に、電子絶縁性かつイオン伝導性の材料を形成する段階と、
を備える、方法。 - 前記段階(c)の前に、前記段階(b)で形成された前記エレクトロクロミック層および前記対向電極層のうちの前記他方の層にリチウム金属をスパッタリングする段階、
を更に備える、請求項29に記載の方法。 - 前記堆積する段階(a)は、前記エレクトロクロミック層または前記対向電極層の第1層と、前記エレクトロクロミック層または前記対向電極層の第2層とを形成する段階を有し、
前記第2層は、前記エレクトロクロミック材料または前記対向電極材料を酸素に富む形態で有し、
前記第2層は、前記段階(a)で形成された前記エレクトロクロミック層または前記対向電極層の前記第1層と物理的に接触する、請求項30に記載の方法。 - (d)前記段階(c)の間に、前記第2層の少なくとも一部を前記第2層と同じ領域にあるイオン伝導領域へ変換する段階であって、前記イオン伝導領域が、前記界面領域の前記電子絶縁性かつイオン伝導性の材料を有する、段階を更に備える、請求項31に記載の方法。
- 前記段階(d)は、前記第2層の前記少なくとも一部を前記イオン伝導領域へ変換すべく前記エレクトロクロミックデバイスを約100℃から約450℃の間まで加熱する段階を有する、請求項32に記載の方法。
- 前記イオン伝導領域が、前記電子絶縁性かつイオン伝導性の材料および前記第2層の前記材料の混合体を有する、請求項32に記載の方法。
- 前記エレクトロクロミック層が、酸化タングステンを有する、請求項29に記載の方法。
- 前記対向電極層が、酸化ニッケルを有する、請求項29に記載の方法。
- 前記対向電極層が、ニッケルタングステン酸化物を有する、請求項36に記載の方法。
- 前記対向電極が、タンタルを有する、請求項37に記載の方法。
- 前記ニッケルタングステン酸化物が、実質的に非晶質である、請求項37に記載の方法。
- 前記エレクトロクロミック層および前記対向電極層のうちの前記他方の層に透明伝導性酸化物層を堆積する段階、
を更に備える、請求項29に記載の方法。 - 前記透明伝導性酸化物がインジウムスズ酸化物を有する、請求項40に記載の方法。
- 前記エレクトロクロミック層および前記対向電極層のいずれかまたは両方の層が、前記エレクトロクロミック層および前記対向電極層の間の前記界面領域において超化学量論的酸素を含んだ勾配組成を有する、請求項29に記載の方法。
- 前記エレクトロクロミック層および前記対向電極層のうちの第1の堆積層にリチウム金属を堆積する段階、
を更に備える、請求項29に記載の方法。 - 前記エレクトロクロミック層および前記対向電極層のうちの第2の堆積層の堆積後に、前記エレクトロクロミック層および前記対向電極層のうちの前記第2の堆積層にリチウム金属を堆積する段階、
を更に備える、請求項43に記載の方法。 - 前記段階(a)で形成された前記層は勾配層または2つの副層を有し、前記勾配層、または、前記2つの副層の少なくとも1つが超化学量論的酸素部分を有する、請求項29に記載の方法。
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US12/772,075 US8582193B2 (en) | 2010-04-30 | 2010-04-30 | Electrochromic devices |
US12/814,279 | 2010-06-11 | ||
US12/814,277 US8764950B2 (en) | 2010-04-30 | 2010-06-11 | Electrochromic devices |
US12/814,277 | 2010-06-11 | ||
US12/814,279 US8764951B2 (en) | 2010-04-30 | 2010-06-11 | Electrochromic devices |
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