JP6686834B2 - 物品搬送設備 - Google Patents
物品搬送設備 Download PDFInfo
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- JP6686834B2 JP6686834B2 JP2016201210A JP2016201210A JP6686834B2 JP 6686834 B2 JP6686834 B2 JP 6686834B2 JP 2016201210 A JP2016201210 A JP 2016201210A JP 2016201210 A JP2016201210 A JP 2016201210A JP 6686834 B2 JP6686834 B2 JP 6686834B2
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- 239000000428 dust Substances 0.000 claims description 31
- 230000002093 peripheral effect Effects 0.000 claims description 20
- 238000007789 sealing Methods 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 description 48
- 238000009434 installation Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
- B60L5/00—Current collectors for power supply lines of electrically-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
- B60L5/00—Current collectors for power supply lines of electrically-propelled vehicles
- B60L5/005—Current collectors for power supply lines of electrically-propelled vehicles without mechanical contact between the collector and the power supply line
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
- B61B13/04—Monorail systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
- B61B13/12—Systems with propulsion devices between or alongside the rails, e.g. pneumatic systems
- B61B13/127—Systems with propulsion devices between or alongside the rails, e.g. pneumatic systems the propulsion device consisting of stationary driving wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61D—BODY DETAILS OR KINDS OF RAILWAY VEHICLES
- B61D27/00—Heating, cooling, ventilating, or air-conditioning
- B61D27/009—Means for ventilating only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
- B60L2200/00—Type of vehicles
- B60L2200/26—Rail vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60M—POWER SUPPLY LINES, AND DEVICES ALONG RAILS, FOR ELECTRICALLY- PROPELLED VEHICLES
- B60M7/00—Power lines or rails specially adapted for electrically-propelled vehicles of special types, e.g. suspension tramway, ropeway, underground railway
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02T90/10—Technologies relating to charging of electric vehicles
- Y02T90/16—Information or communication technologies improving the operation of electric vehicles
Description
前記走行レールが、前記走行面が形成される面を含む周壁と、当該周壁に囲まれた内側に形成されて前記走行経路に沿って延在する内部空間とを有した中空構造であり、
前記走行面が、前記周壁を貫通して前記走行面に開口部が形成され、前記内部空間と外部空間とを連通する複数の貫通孔を有し、
さらに、前記内部空間と連通して、前記内部空間の空気を吸引する吸引装置を備え、
前記内部空間が、前記吸引装置の接続部と前記貫通孔とを除いて閉塞されている。
以下、その他の実施形態について説明する。尚、以下に説明する各実施形態の構成は、それぞれ単独で適用されるものに限られず、矛盾が生じない限り、他の実施形態の構成と組み合わせて適用することも可能である。
以下、上記において説明した物品搬送設備の概要について簡単に説明する。
前記走行レールが、前記走行面が形成される面を含む周壁と、当該周壁に囲まれた内側に形成されて前記走行経路に沿って延在する内部空間とを有した中空構造であり、
前記走行面が、前記周壁を貫通して前記走行面に開口部が形成され、前記内部空間と外部空間とを連通する複数の貫通孔を有し、
さらに、前記内部空間と連通して、前記内部空間の空気を吸引する吸引装置を備え、
前記内部空間が、前記吸引装置の接続部と前記貫通孔とを除いて閉塞されている。
2 走行レール
2P 走行レール対
2a レール部材
2b 封止部材
3 物品搬送車
15 車輪
20 結合部
21 走行面
23 外側面(幅方向外側の側壁面)
24 周壁
28 内部空間
29 吸引孔(接続部)
30 貫通孔
31 開口部
50 吸引装置、ファンフィルタユニット
51 ファン
53 フィルタ
100 物品搬送設備
H1 車輪幅
R1 走行領域
W 幅方向
W1 幅方向内側
W2 幅方向外側
φ1 直径
Claims (6)
- 物品搬送車の走行経路に沿って走行レールが配置され、前記物品搬送車の車輪が前記走行レールの上面に設けられた走行面を転動して前記物品搬送車が走行する物品搬送設備であって、
前記走行レールは、前記走行面が形成される面を含む周壁と、当該周壁に囲まれた内側に形成されて前記走行経路に沿って延在する内部空間とを有した中空構造であり、
前記走行面は、前記周壁を貫通して前記走行面に開口部が形成され、前記内部空間と外部空間とを連通する複数の貫通孔を有し、
さらに、前記内部空間と連通して、前記内部空間の空気を吸引する吸引装置を備え、
前記内部空間は、前記吸引装置の接続部と前記貫通孔とを除いて閉塞されている、物品搬送設備。 - 前記吸引装置は、前記周壁の内、前記走行面が形成されない壁面に設置され、当該壁面は、前記吸引装置と前記内部空間とを連通する吸引孔を有する、請求項1に記載の物品搬送設備。
- 前記走行レールは、前記走行経路に沿った方向において複数のレール部材が結合されて形成され、前記走行経路に沿って隣接する2つの前記レール部材が結合される結合部には、前記内部空間と前記外部空間との連通を封止する封止部材を備える請求項1又は2に記載の物品搬送設備。
- 前記走行面における前記貫通孔の前記開口部の直径は、前記車輪が前記走行面と接する接触面の回転軸方向の長さである車輪幅よりも短い請求項1から3の何れか一項に記載の物品搬送設備。
- 2本の前記走行レールが平行して配置された走行レール対を備え、
前記走行経路に直交する方向を幅方向、前記幅方向において前記走行レールが対向するそれぞれの側を幅方向内側、前記幅方向において前記幅方向内側とは反対側の方向をそれぞれ幅方向外側として、
前記車輪が走行する走行領域は、前記走行面において前記幅方向内側に設けられ、前記貫通孔の前記開口部は、前記走行面において前記走行領域よりも前記幅方向外側に設けられている請求項1から4の何れか一項に記載の物品搬送設備。 - 前記吸引装置は、吸引用のファンと、塵を捕獲するフィルタとが一体化されたファンフィルタユニットであり、当該ファンフィルタユニットは、前記周壁の前記幅方向外側の側壁面に設置されている請求項5に記載の物品搬送設備。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016201210A JP6686834B2 (ja) | 2016-10-12 | 2016-10-12 | 物品搬送設備 |
TW106131755A TWI736674B (zh) | 2016-10-12 | 2017-09-15 | 物品搬送設備 |
US15/730,140 US10640132B2 (en) | 2016-10-12 | 2017-10-11 | Article transport facility |
KR1020170129755A KR102418305B1 (ko) | 2016-10-12 | 2017-10-11 | 물품 반송 설비 |
CN201710946868.4A CN107934416B (zh) | 2016-10-12 | 2017-10-12 | 物品搬运设备 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2016201210A JP6686834B2 (ja) | 2016-10-12 | 2016-10-12 | 物品搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018064024A JP2018064024A (ja) | 2018-04-19 |
JP6686834B2 true JP6686834B2 (ja) | 2020-04-22 |
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JP2016201210A Active JP6686834B2 (ja) | 2016-10-12 | 2016-10-12 | 物品搬送設備 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10640132B2 (ja) |
JP (1) | JP6686834B2 (ja) |
KR (1) | KR102418305B1 (ja) |
CN (1) | CN107934416B (ja) |
TW (1) | TWI736674B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015111124A1 (de) * | 2015-05-08 | 2016-11-10 | AFT Automatisierungs- und Fördertechnik GmbH & Co. KG | Mechanisch-elektrischer Antrieb |
KR102406665B1 (ko) * | 2015-11-11 | 2022-06-08 | 삼성전자주식회사 | 기판 이송 장치 |
JP6677187B2 (ja) * | 2017-01-31 | 2020-04-08 | 株式会社ダイフク | 物品搬送設備 |
IT201800005990A1 (it) * | 2018-06-04 | 2019-12-04 | Dispositivo di trasporto per il trasporto di carichi sospesi su rotaie sopraelevate rispetto al suolo | |
WO2020110522A1 (ja) * | 2018-11-28 | 2020-06-04 | 村田機械株式会社 | 走行車システム |
KR102238974B1 (ko) * | 2019-04-08 | 2021-04-13 | 현대중공업지주 주식회사 | 석션부를 구비한 기판 이송장치 |
KR102280034B1 (ko) * | 2019-07-22 | 2021-07-21 | 세메스 주식회사 | 반송 유닛 및 이를 가지는 기판 처리 장치 |
KR102344111B1 (ko) * | 2020-01-02 | 2021-12-29 | 세메스 주식회사 | 천장 이송 장치 |
CN212798644U (zh) * | 2020-07-31 | 2021-03-26 | 苏州康贝尔电子设备有限公司 | 一种无尘输送装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0541553Y2 (ja) * | 1986-11-04 | 1993-10-20 | ||
JPH07107914B2 (ja) * | 1987-06-04 | 1995-11-15 | 三菱電機株式会社 | クリ−ンル−ム内搬送装置 |
EP1140600A4 (en) * | 1999-01-14 | 2003-05-28 | Three One Systems Llc | CARRIER SYSTEM FOR MATERIAL HANDLING WITH PNEUMATIC AND ELECTRIC POWER SUPPLY CAPACITIES |
JP2001128303A (ja) | 1999-10-28 | 2001-05-11 | Murata Mach Ltd | 有軌道台車システム |
JP2008308267A (ja) * | 2007-06-13 | 2008-12-25 | Hitachi Plant Technologies Ltd | 気流制御方法および保管倉庫設備 |
TWM329039U (en) * | 2007-09-26 | 2008-03-21 | Tera Autotech Corp | Assembled track structure for clean room delivery cart |
JP5585236B2 (ja) * | 2010-06-23 | 2014-09-10 | 村田機械株式会社 | 有軌道台車システム |
JP5495070B2 (ja) * | 2011-06-10 | 2014-05-21 | 株式会社ダイフク | 天井搬送設備の清掃装置 |
KR102279408B1 (ko) * | 2015-04-06 | 2021-07-20 | 현대중공업지주 주식회사 | 멀티 암 반송 로봇 |
-
2016
- 2016-10-12 JP JP2016201210A patent/JP6686834B2/ja active Active
-
2017
- 2017-09-15 TW TW106131755A patent/TWI736674B/zh active
- 2017-10-11 US US15/730,140 patent/US10640132B2/en active Active
- 2017-10-11 KR KR1020170129755A patent/KR102418305B1/ko active IP Right Grant
- 2017-10-12 CN CN201710946868.4A patent/CN107934416B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TWI736674B (zh) | 2021-08-21 |
US10640132B2 (en) | 2020-05-05 |
KR102418305B1 (ko) | 2022-07-06 |
KR20180040490A (ko) | 2018-04-20 |
CN107934416A (zh) | 2018-04-20 |
TW201816923A (zh) | 2018-05-01 |
CN107934416B (zh) | 2021-04-20 |
JP2018064024A (ja) | 2018-04-19 |
US20180099680A1 (en) | 2018-04-12 |
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