JP6685932B2 - バリア層スタック、バリア層スタックを製造するための方法、並びに超高バリア層及び反射防止システム - Google Patents
バリア層スタック、バリア層スタックを製造するための方法、並びに超高バリア層及び反射防止システム Download PDFInfo
- Publication number
- JP6685932B2 JP6685932B2 JP2016567405A JP2016567405A JP6685932B2 JP 6685932 B2 JP6685932 B2 JP 6685932B2 JP 2016567405 A JP2016567405 A JP 2016567405A JP 2016567405 A JP2016567405 A JP 2016567405A JP 6685932 B2 JP6685932 B2 JP 6685932B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- layers
- layer stack
- antireflection
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000004888 barrier function Effects 0.000 title claims description 105
- 238000000034 method Methods 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 52
- 238000000151 deposition Methods 0.000 claims description 27
- 230000005540 biological transmission Effects 0.000 claims description 13
- -1 NbOx Inorganic materials 0.000 claims description 12
- 229910004205 SiNX Inorganic materials 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 229910020286 SiOxNy Inorganic materials 0.000 claims description 9
- 239000011368 organic material Substances 0.000 claims description 9
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 9
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 9
- 230000003667 anti-reflective effect Effects 0.000 claims description 8
- 238000002834 transmittance Methods 0.000 claims description 8
- 229910017107 AlOx Inorganic materials 0.000 claims description 6
- 229910017105 AlOxNy Inorganic materials 0.000 claims description 6
- 229910003070 TaOx Inorganic materials 0.000 claims description 6
- 229910003087 TiOx Inorganic materials 0.000 claims description 6
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910004541 SiN Inorganic materials 0.000 claims description 5
- 229920000089 Cyclic olefin copolymer Polymers 0.000 claims description 4
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 claims description 3
- 229920002845 Poly(methacrylic acid) Polymers 0.000 claims description 3
- UHPJWJRERDJHOJ-UHFFFAOYSA-N ethene;naphthalene-1-carboxylic acid Chemical compound C=C.C1=CC=C2C(C(=O)O)=CC=CC2=C1 UHPJWJRERDJHOJ-UHFFFAOYSA-N 0.000 claims description 3
- 229920000515 polycarbonate Polymers 0.000 claims description 3
- 239000004417 polycarbonate Substances 0.000 claims description 3
- 229920002284 Cellulose triacetate Polymers 0.000 claims description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 356
- 230000008021 deposition Effects 0.000 description 22
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000002310 reflectometry Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- MFHHXXRRFHXQJZ-UHFFFAOYSA-N NONON Chemical compound NONON MFHHXXRRFHXQJZ-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 230000008033 biological extinction Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 235000012846 chilled/fresh pasta Nutrition 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 235000011869 dried fruits Nutrition 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000011888 snacks Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
- H10K50/8445—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/858—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laminated Bodies (AREA)
- Electroluminescent Light Sources (AREA)
- Surface Treatment Of Optical Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2014/060134 WO2015172847A1 (en) | 2014-05-16 | 2014-05-16 | Barrier layer stack, method for manufacturing a barrier layer stack, and ultra-high barrier layer and antireflection system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017518204A JP2017518204A (ja) | 2017-07-06 |
JP6685932B2 true JP6685932B2 (ja) | 2020-04-22 |
Family
ID=50732193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016567405A Active JP6685932B2 (ja) | 2014-05-16 | 2014-05-16 | バリア層スタック、バリア層スタックを製造するための方法、並びに超高バリア層及び反射防止システム |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6685932B2 (ko) |
KR (1) | KR101985923B1 (ko) |
CN (1) | CN106415873B (ko) |
TW (1) | TW201611371A (ko) |
WO (1) | WO2015172847A1 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108666438A (zh) * | 2017-04-01 | 2018-10-16 | 上海和辉光电有限公司 | 显示面板以及显示装置 |
KR102448325B1 (ko) | 2017-11-16 | 2022-09-30 | 삼성디스플레이 주식회사 | 표시패널 및 이를 포함하는 전자장치 |
CN108511614B (zh) * | 2018-03-21 | 2020-02-07 | 武汉华星光电半导体显示技术有限公司 | 一种oled面板及oled显示器 |
JPWO2019187981A1 (ja) * | 2018-03-28 | 2021-02-25 | 富士フイルム株式会社 | ガスバリアフィルム |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6888305B2 (en) * | 2001-11-06 | 2005-05-03 | Universal Display Corporation | Encapsulation structure that acts as a multilayer mirror |
JP2003151761A (ja) * | 2001-11-14 | 2003-05-23 | Osaka Industrial Promotion Organization | 有機el素子を含む発光素子およびそれを用いた光インターコネクション装置 |
JP4539178B2 (ja) * | 2003-06-06 | 2010-09-08 | 東レ株式会社 | 反射防止膜、その製造方法、および反射防止用積層体 |
CN1568110A (zh) * | 2003-06-19 | 2005-01-19 | 铼宝科技股份有限公司 | 有机电激发光组件及其制造方法 |
JP4295588B2 (ja) * | 2003-09-22 | 2009-07-15 | 大日本印刷株式会社 | 反射防止ガスバリア性基板 |
DE502005009415D1 (de) * | 2005-05-27 | 2010-05-27 | Novaled Ag | Transparente organische Leuchtdiode |
US20070212498A1 (en) * | 2006-02-24 | 2007-09-13 | Fujifilm Corporation | Optical film, antireflection film, polarizing plate, display apparatus and method for manufacturing optical film |
JP2007280901A (ja) * | 2006-04-12 | 2007-10-25 | Hitachi Displays Ltd | 有機el表示装置 |
EP2034826A2 (en) * | 2006-06-02 | 2009-03-18 | The Dial Corporation | Method of inhibiting the transmission of influenza virus |
JP5482656B2 (ja) * | 2008-08-25 | 2014-05-07 | コニカミノルタ株式会社 | 耐候性物品、耐候性フィルム及び光学部材 |
FR2949775B1 (fr) * | 2009-09-10 | 2013-08-09 | Saint Gobain Performance Plast | Substrat de protection pour dispositif collecteur ou emetteur de rayonnement |
FR2973946B1 (fr) * | 2011-04-08 | 2013-03-22 | Saint Gobain | Dispositif électronique a couches |
-
2014
- 2014-05-16 JP JP2016567405A patent/JP6685932B2/ja active Active
- 2014-05-16 WO PCT/EP2014/060134 patent/WO2015172847A1/en active Application Filing
- 2014-05-16 CN CN201480078901.0A patent/CN106415873B/zh active Active
- 2014-05-16 KR KR1020167035063A patent/KR101985923B1/ko active IP Right Grant
-
2015
- 2015-05-15 TW TW104115467A patent/TW201611371A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR20170003999A (ko) | 2017-01-10 |
TW201611371A (zh) | 2016-03-16 |
CN106415873B (zh) | 2018-02-16 |
WO2015172847A1 (en) | 2015-11-19 |
JP2017518204A (ja) | 2017-07-06 |
KR101985923B1 (ko) | 2019-06-04 |
CN106415873A (zh) | 2017-02-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5595190B2 (ja) | 機能性フィルムおよび機能性フィルムの製造方法 | |
JP5978206B2 (ja) | タッチパネルで使用される透明体を製造するための方法およびシステム | |
JP6685932B2 (ja) | バリア層スタック、バリア層スタックを製造するための方法、並びに超高バリア層及び反射防止システム | |
KR101622816B1 (ko) | 기능성 필름의 제조 방법 | |
KR102197243B1 (ko) | 적층체 및 가스 배리어 필름 | |
KR101656629B1 (ko) | 기능성 필름 및 유기 el 디바이스 | |
CN110168135B (zh) | 硬涂层系统以及用于以连续卷绕式工艺制造硬涂层系统的方法 | |
JP2009196155A (ja) | ガスバリアフィルム、ガスバリア膜の作製方法及び作製装置 | |
KR20140127882A (ko) | 가스 배리어 필름 및 가스 배리어 필름의 제조 방법 | |
JP2016155352A (ja) | ガスバリア性フィルムの製造方法及びガスバリア性フィルム | |
JP2012051061A (ja) | 機能性フィルムの製造方法 | |
WO2018180487A1 (ja) | ガスバリアフィルムおよび成膜方法 | |
JP6744487B2 (ja) | ガスバリアフィルムおよびガスバリアフィルムの製造方法 | |
JP7109554B2 (ja) | 成膜方法 | |
CN110177683B (zh) | 阻挡层系统、具有阻挡层系统的光电装置以及用于以连续卷绕式工艺制造阻挡层系统的方法 | |
WO2019187981A1 (ja) | ガスバリアフィルム | |
JP6317681B2 (ja) | 機能性フィルムおよび機能性フィルムの製造方法 | |
JP2012041582A (ja) | 原反ロール、原反ロールの製造方法、および、基材処理方法 | |
JP6790445B2 (ja) | ガスバリア性フィルム | |
JP6756148B2 (ja) | 積層フィルムおよびその製造方法 | |
TW201836138A (zh) | 適用於使用在光電裝置中的層系統、具有其之光電裝置、以及在連續捲繞式製程中製造層系統的方法 | |
CN111065515A (zh) | 阻气性膜、水蒸气阻隔性评价试验片及阻气性膜的水蒸气阻隔性评价方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170515 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170515 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180305 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180424 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20180720 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180925 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190305 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190510 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190708 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190904 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200303 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200401 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6685932 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |