JP6676637B2 - 金属導体のエッチングに用いる薬液更新用ノズル及びエッチング装置 - Google Patents
金属導体のエッチングに用いる薬液更新用ノズル及びエッチング装置 Download PDFInfo
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- JP6676637B2 JP6676637B2 JP2017530515A JP2017530515A JP6676637B2 JP 6676637 B2 JP6676637 B2 JP 6676637B2 JP 2017530515 A JP2017530515 A JP 2017530515A JP 2017530515 A JP2017530515 A JP 2017530515A JP 6676637 B2 JP6676637 B2 JP 6676637B2
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- 238000005530 etching Methods 0.000 title claims description 96
- 239000004020 conductor Substances 0.000 title claims description 94
- 239000000126 substance Substances 0.000 title claims description 92
- 239000002184 metal Substances 0.000 title claims description 91
- 229910052751 metal Inorganic materials 0.000 title claims description 91
- 239000000758 substrate Substances 0.000 claims description 42
- 239000007788 liquid Substances 0.000 claims description 39
- 238000007654 immersion Methods 0.000 claims description 5
- 239000000243 solution Substances 0.000 description 75
- 238000000034 method Methods 0.000 description 11
- 239000000047 product Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 238000007599 discharging Methods 0.000 description 8
- 239000007921 spray Substances 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000006722 reduction reaction Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 229960003280 cupric chloride Drugs 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
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- 229920005989 resin Polymers 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/068—Apparatus for etching printed circuits
Description
また、本発明は、請求項1記載の金属導体のエッチングに用いる薬液更新用ノズルを用いたエッチング装置であって、吐出及び吸引に使用する薬液更新用ノズルは、それらが金属導体基板を挟んで、かつ、それぞれの開口部が金属導体基板に面するように上下に配置し、エッチング液を扱うエッチング液槽が、金属導体がエッチングされる上部槽と、エッチング液を貯溜する下部槽とから構成され、上部槽と下部槽が、上部槽からの戻り配管によって接続され、上記配管の末端に薬液更新用ノズルが取り付けられているという構成を有するエッチング装置を含むものである。
<エッチング装置と方法>
本発明において金属導体のエッチングを実施するには、図4に示したエッチング装置を使用する。具体的には、薬液を満たすエッチング液槽25に、吐出側ノズル27a、27bと吸引側ノズル28a、28bを、金属導体基板22を挟んで、かつ、それぞれの開口部が金属導体基板22に面するように上下に配置する。よって、薬液中に上記の薬液更新用ノズル27a、27b、28a、28bが浸漬した状態にて、薬液の吐出、吸引を行ない、上記の薬液更新用ノズル27a、27b、28a、28bを用いた吐出、吸引を同時に行なって、均一な応力を薬液に加えることにより薬液の更新が促進されるように構成されている。
以下、実施例を記載して本発明をより詳細に説明する。
金属導体15には9μmの電解銅箔を用いる。
これにレジストパターンを、間隔:4.0 4.5 5.0 5.5 6.5 7.0 7.5 8.0 8.5 9.0(単位:μm)、レジスト幅:20.0μm、に統一した銅導体を金属導体15として、CuCl2・2H2O 35.0wt%、35.0%塩酸 8%、比重1.31(25℃、塩酸濃度36.7g/l、銅濃度170g/l)の塩化第二銅塩酸水溶液にて、30℃の温度条件下にてエッチングを行なった(各装置条件は表1のとおりである。)。
まず、エッチバックは、図6に図示したように、レジスト導体幅w、仕上がりトップ導体幅tとして、m≒(w−t)/2で表される。エッチバックmは、数値が小さい程良好である。
また、エッチファクターFaは、Fa=h/l(但し、l=(n−t)/2) で表され、数値が大きい程良好である。
12 液面
13 レジスト
14 開口部
15 金属導体
16 基材
17 金属蒸着膜
20 薬液更新用ノズル
21 スリット状開口部の例
22 金属導体基板
23 製品
24 コンベア
25 エッチング液槽
26 エジェクター
27 吐出側配管
28 吸引側配管
29 戻り配管
31 吸引板
32 円形状の孔
P1 吐出側ポンプ
P2 吸引側ポンプ
Claims (3)
- エッチング液槽、薬液更新用ノズル、エッチングの対象である金属導体基板を搬送するコンベアを備え、
上記薬液更新用ノズルはスリット状開口部を備えており、
上記スリット状開口部の、上記コンベアの搬送方向に対して垂直方向の長さM(上記スリット状開口部の、上記コンベアで移動する金属導体基板の搬送幅方向長さM)は、上記コンベアで移動する金属導体基板の、上記コンベアの搬送方向に対して垂直方向の長さN(上記金属導体基板の搬送幅方向長さN)以上であり、
上記薬液更新用ノズルは、上記エッチング液槽内に、対向する吐出側ノズルと対向する吸引側ノズルとして配置され、
上記対向する吐出側ノズルは、上記エッチング液槽の薬液中でそれぞれのスリット状開口部が上記コンベアによって移動する金属導体基板に面するように、上記コンベアの搬送面を挟んで上下に配置され、
上記対向する吸引側ノズルは、上記エッチング液槽の薬液中でそれぞれのスリット状開口部が上記コンベアによって移動する金属導体基板に面するように、上記コンベアの搬送面を挟んで上下に配置されており、
上記吐出側ノズルのスリット状開口部がただ1個のスリット状開口部であり、
上記吸引側ノズルのスリット状開口部が数個に分かれている、
エッチングの対象が金属導体基板である、
浸漬型エッチング装置。 - 吐出側ノズルのスリット状開口部が幅0.5〜3mmのただ1個のスリット状開口部であり、
吸引側ノズルのスリット状開口部が幅0.6〜8mmに加工した吸引板で封止され、上記吸引板に開口した円形状の孔径が0.5〜3mmである、
請求項1に記載の浸漬型エッチング装置。 - エッチング液槽が、金属導体がエッチングされる上部槽と、エッチング液を貯溜する下部槽とからなり、上記上部槽と上記下部槽とが上記上部槽からの戻り配管によって接続されており、上記戻り配管の末端に薬液更新用ノズルが取り付けられている、
請求項1または2に記載の浸漬型エッチング装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2015/071363 WO2017017782A1 (ja) | 2015-07-28 | 2015-07-28 | 金属導体のエッチングに用いる薬液更新用ノズル及びエッチング装置 |
Publications (2)
Publication Number | Publication Date |
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JPWO2017017782A1 JPWO2017017782A1 (ja) | 2018-05-24 |
JP6676637B2 true JP6676637B2 (ja) | 2020-04-08 |
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JP2017530515A Active JP6676637B2 (ja) | 2015-07-28 | 2015-07-28 | 金属導体のエッチングに用いる薬液更新用ノズル及びエッチング装置 |
Country Status (4)
Country | Link |
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JP (1) | JP6676637B2 (ja) |
KR (1) | KR20180019191A (ja) |
CN (1) | CN107709618B (ja) |
WO (1) | WO2017017782A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109041423A (zh) * | 2018-09-21 | 2018-12-18 | 郑州云海信息技术有限公司 | 一种pcb板及一种电子设备 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3002883U (ja) * | 1994-04-08 | 1994-10-04 | 株式会社荏原電産 | プリント回路基板エッチング処理装置 |
JPH10162728A (ja) * | 1996-11-29 | 1998-06-19 | Toppan Printing Co Ltd | シャドウマスクの製造方法 |
JP3120073B2 (ja) * | 1999-02-22 | 2000-12-25 | 東京化工機株式会社 | 薬液処理装置 |
JP3232070B2 (ja) * | 1999-10-20 | 2001-11-26 | 株式会社オーケープリント | エッチング装置 |
JP4189141B2 (ja) * | 2000-12-21 | 2008-12-03 | 株式会社東芝 | 基板処理装置及びこれを用いた基板処理方法 |
JP4076755B2 (ja) * | 2001-11-02 | 2008-04-16 | アルプス電気株式会社 | ウエット処理装置およびウエット処理方法 |
CN2608156Y (zh) * | 2003-03-14 | 2004-03-31 | 上海新亚医用橡胶厂有限公司 | 医用或药用橡胶塞的清洗处理装置 |
JP2006019525A (ja) * | 2004-07-01 | 2006-01-19 | Future Vision:Kk | 基板処理装置 |
JP2008294251A (ja) * | 2007-05-25 | 2008-12-04 | Cmk Corp | プリント配線板及びその製造方法 |
KR20100096524A (ko) * | 2009-02-24 | 2010-09-02 | 삼성테크윈 주식회사 | 습식 식각 장치 및 회로 기판 제조 장치 |
WO2014091561A1 (ja) * | 2012-12-11 | 2014-06-19 | 富士技研工業株式会社 | 液晶ガラスのエッチング装置に用いる薬液の更新方法、薬液更新用ノズル及び更新用薬液 |
CN203760432U (zh) * | 2013-12-20 | 2014-08-06 | 昆山国显光电有限公司 | 一种湿法刻蚀设备 |
-
2015
- 2015-07-28 CN CN201580081108.0A patent/CN107709618B/zh active Active
- 2015-07-28 KR KR1020187001477A patent/KR20180019191A/ko not_active Application Discontinuation
- 2015-07-28 WO PCT/JP2015/071363 patent/WO2017017782A1/ja active Application Filing
- 2015-07-28 JP JP2017530515A patent/JP6676637B2/ja active Active
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Publication number | Publication date |
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CN107709618B (zh) | 2019-08-27 |
JPWO2017017782A1 (ja) | 2018-05-24 |
WO2017017782A1 (ja) | 2017-02-02 |
KR20180019191A (ko) | 2018-02-23 |
CN107709618A (zh) | 2018-02-16 |
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