JP6676191B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP6676191B2 JP6676191B2 JP2018557734A JP2018557734A JP6676191B2 JP 6676191 B2 JP6676191 B2 JP 6676191B2 JP 2018557734 A JP2018557734 A JP 2018557734A JP 2018557734 A JP2018557734 A JP 2018557734A JP 6676191 B2 JP6676191 B2 JP 6676191B2
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- JP
- Japan
- Prior art keywords
- electromagnetic wave
- semiconductor device
- absorbing layer
- wave absorbing
- semiconductor package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910000859 α-Fe Inorganic materials 0.000 description 5
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
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- 239000010931 gold Substances 0.000 description 4
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- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical group C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
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Description
図1は、本発明の実施の形態1に係る半導体装置101の断面図である。図1において半導体装置101は、半導体パッケージ1、回路基板2、はんだ3、アンダーフィル樹脂4、電磁波吸収層5、および電磁波反射層6を備えて構成される。本明細書では、シリコンまたは化合物半導体からなる半導体素子、および半導体素子を樹脂などでパッケージ化したものを半導体パッケージと称する。半導体パッケージ1は、例えば、高周波機器で用いられる増幅用ICまたはハイパワーモジュールなどである。
図9は、本発明の実施の形態2に係る半導体装置102の断面図である。半導体装置102は、電磁波吸収層5が半導体パッケージ1の上面において開孔51を有し、開孔51に放熱用ビア61が形成される点が実施の形態1に係る半導体装置101とは異なる。放熱用ビア61は電磁波反射層6および半導体パッケージ1と接触している。従って、電磁波反射層6は電磁波吸収層5の開孔51において放熱用ビア61を介して半導体パッケージ1と接触している。なお、開孔51のサイズは例えば直径0,1mmとする。
図18は、本発明の実施の形態3に係る半導体装置103の断面図である。半導体装置103は、実施の形態2に係る半導体装置102の構成と比較すると、電磁波吸収層5の開孔51に金属膜7が形成される点が異なり、それ以外の構成は半導体装置102と同様である。
図19は、本発明の実施の形態4に係る半導体装置104の断面図である。半導体装置104は、電磁波吸収層5の開孔51を有する面と電磁波反射層6との間に金属板8を備えている。すなわち、電磁波反射層6は半導体パッケージ1の上方では金属板8を介して電磁波吸収層5を覆い、半導体パッケージ1の側方では電磁波吸収層5と接触してこれを覆っている。上記以外の半導体装置104の構成は実施の形態2に係る半導体装置102と同様である。金属板8には、金、銀、銅またはアルミなど熱伝導率の高い金属が用いられる。
図28は、本発明の実施の形態5に係る半導体装置105の断面図である。半導体装置105は、半導体パッケージ1の上面1aが凹凸形状であるという点が実施の形態1に係る半導体装置101と異なり、それ以外の点は半導体装置101と同様である。
図37は、本発明の実施の形態6に係る半導体装置106の断面図である。半導体装置106は、電磁波反射層6が半導体パッケージ1の上面において湿度調整用開孔71を有する点が、実施の形態1,2,3,4および5に係る半導体装置とは異なる。湿度調整用開孔71は電磁波反射層6を貫通しており、湿度調整用開孔71において電磁波吸収層5が露出する。なお、湿度調整用開孔71の直径は例えば0,1mmである。
Claims (6)
- 回路基板上に接合された半導体パッケージと、
前記半導体パッケージの回路基板に対する接合面以外の面を覆う電磁波吸収層と、
前記電磁波吸収層の前記半導体パッケージとは反対側において前記電磁波吸収層を覆う電磁波反射層と、を備え、
前記電磁波吸収層は、磁性粒子またはカーボンを含む樹脂で構成され、開孔を有し、
前記開孔には導電性粒子を含有する樹脂からなる放熱用ビアが設けられ、
前記電磁波反射層は、導電性粒子を含む樹脂で構成される、
半導体装置。 - 前記電磁波吸収層を構成する樹脂と、前記電磁波反射層を構成する樹脂は、溶解性パラメータの差が2以内である、
請求項1に記載の半導体装置。 - 前記電磁波吸収層の厚みは、前記半導体パッケージから前記電磁波吸収層に入射する電磁波の位相と、前記電磁波反射層に反射して前記電磁波吸収層に再入射する電磁波の位相とが180°ずれるように設定される、
請求項1又は2に記載の半導体装置。 - 前記開孔において前記半導体パッケージと前記放熱用ビアとの間に配置された金属膜をさらに備える、
請求項1から3のいずれか1項に記載の半導体装置。 - 前記電磁波吸収層の前記開孔を有する面と前記電磁波反射層との間に配置された金属板をさらに備える、
請求項1から4のいずれか1項に記載の半導体装置。 - 前記半導体パッケージの前記回路基板に対する接合面と反対側の面は凹凸形状を有する、
請求項1から5のいずれか1項に記載の半導体装置。
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