JP6670786B2 - ダイシング方法及びレーザー加工装置 - Google Patents
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- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/263—Bombardment with radiation with high-energy radiation
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- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
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- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
Description
j(x)=f(x)−g(x+2L) ・・(式3)
ただし、基板の第1部分及び第2部分はそれぞれ、加工用レンズ位置からL及び2L離れており、図6の第1の基板情報検出部241及び第2の基板情報検出部242に対応している。Lは例えば、70mmである。
h(x)=f(x)−g(x+L)+g(x+L)−g(x)
=i(x)+g(x+L)−g(x)
=i(x)+i(x−L)−j(x−L) ・・(式4)
(式4)の右辺の各項は、測定により求めることが可能である。例えば、図8のように基板の第1部分及び第2部分における基板情報i(x)及びj(x)に相当する信号から、差分回路、遅延回路及び加算回路を用いてh(x)を求めることが出来る。よって、このように、基板上の2か所の基板情報i(x)及びj(x)を得ることで、うねり成分f(x)を除いた加工用レンズと基板間の距離h(x)を求めることが出来る。
10 チャックテーブル
20 SDエンジン
21 加工用レーザー光源
22 加工用レンズ
23 CCDカメラ
24 基板情報検出部
241 第1の基板情報検出部
242 第2の基板情報検出部
243 第3の基板情報検出部
244 第4の基板情報検出部
25 算出部
26 圧電素子
30 基板移動手段
100 レーザー加工装置
Claims (8)
- 基板の表面に沿った方向である第1方向におけるある位置を位置xとし、
加工用レンズと、前記加工用レンズから前記第1方向に沿って距離L離れて設けられ前記基板の表面に垂直な方向である第2方向に沿って前記基板との間の距離を測定可能な第1基板情報検出部及び前記第1基板情報検出部から前記第1方向に沿って距離L離れて設けられ前記第2方向に沿って前記基板との間の距離を測定可能な第2基板情報検出部とを用い、
前記基板を第1方向に移動しつつ、
前記第2方向に沿って、前記基板の第1部分と、第1基板情報検出部との間の距離を第1距離i(x)として取得する工程と、
前記第1方向に沿って前記第1部分から距離L離れた前記基板の第2部分と、第2基板情報検出部との間の距離を第2距離j(x)として取得する工程と、
前記加工用レンズと、前記基板との間の前記第2方向に沿った距離h(x)を式(1)に基づいて算出する工程と、
h(x)=i(x)+i(x−L)−j(x−L)・・・(1)
前記h(x)に基づいて、前記加工用レンズからレーザー光を前記基板に照射する工程と、を含むダイシング方法。 - 前記第1距離i(x)検出する工程、前記第2距離j(x)検出する工程、前記h(x)を算出する工程及び前記レーザー光を照射する工程を複数回繰り返すことを特徴とする請求項1に記載のダイシング方法。
- 前記第1距離i(x)を検出する工程、前記第2距離j(x)検出する工程及び、前記h(x)を算出する工程を繰り返したのち、前記レーザー光を照射する工程を行うことを特徴とする請求項1に記載のダイシング方法。
- 前記h(x)に基づいて、前記加工用レンズ位置を調整することを特徴とする請求項1に記載のダイシング方法。
- 前記加工用レンズは圧電素子を備えており、前記h(x)に基づいて、前記圧電素子に印加される電圧を変化させることを特徴とする請求項1に記載のダイシング方法。
- 前記第1距離i(x)及び前記第2距離j(x)を同時に検出することを特徴とする請求項1に記載のダイシング方法。
- 基板を保持可能なチャックテーブルと、
前記基板を第1方向に移動可能な移動手段と、
レーザー光を出射する加工用レーザー光源と、
前記レーザー光を前記基板に照射可能な加工用レンズと、
前記第1方向に沿って前記加工用レンズと距離Lだけ離れて設けられ、前記加工用レンズが前記基板上において前記第1方向に沿って位置xにあるとき前記基板との距離情報をi(x)として測定可能な第1の基板情報検出部と、
前記第1方向に沿って前記加工用レンズと距離2Lだけ離れて設けられ、前記加工用レンズが前記基板上において前記第1方向に沿って位置xにあるとき前記基板との距離情報をj(x)として測定可能な第2の基板情報検出部と、
前記i(x)と前記j(x)との情報に基づいて、前記基板と、前記加工用レンズ間の距離h(x)を式(1)に基づいて算出する算出部と、
h(x)=i(x)+i(x−L)−j(x−L)・・・(1)
を備えることを特徴とするレーザー加工装置。 - h(x)に基づいて電圧を変化させることで前記加工用レンズの位置を調整させる圧電素子をさらに備える請求項7に記載のレーザー加工装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2017057716A JP6670786B2 (ja) | 2017-03-23 | 2017-03-23 | ダイシング方法及びレーザー加工装置 |
TW106124481A TWI698301B (zh) | 2017-03-23 | 2017-07-21 | 切割方法及雷射加工裝置 |
CN201710712095.3A CN108620743B (zh) | 2017-03-23 | 2017-08-18 | 切割方法及激光加工装置 |
US15/694,984 US10153206B2 (en) | 2017-03-23 | 2017-09-04 | Dicing method and laser processing apparatus |
US16/169,466 US11004743B2 (en) | 2017-03-23 | 2018-10-24 | Dicing method and laser processing apparatus |
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JP2017057716A JP6670786B2 (ja) | 2017-03-23 | 2017-03-23 | ダイシング方法及びレーザー加工装置 |
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JP6670786B2 true JP6670786B2 (ja) | 2020-03-25 |
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US11305377B2 (en) * | 2019-12-23 | 2022-04-19 | Precitec Gmbh & Co. Kg | Add-on module for interposing between a control device and a laser machining head of a laser machining system |
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DE102010011253B4 (de) * | 2010-03-12 | 2013-07-11 | Precitec Kg | Laserbearbeitungskopf, Robotervorrichtung und Verfahren zur Bearbeitung eines Werkstücks mittels eines Laserstrahls |
DE102011001710A1 (de) | 2011-03-31 | 2012-10-04 | Thyssenkrupp Steel Europe Ag | Verfahren und Vorrichtung zur Laserstrahlbearbeitung eines Werkstücks |
TW201315554A (zh) * | 2011-09-15 | 2013-04-16 | Panasonic Corp | 雷射加工裝置及雷射加工方法 |
DE112012004174B4 (de) * | 2011-10-07 | 2016-06-16 | Mitsubishi Electric Corporation | Laserbearbeitungsvorrichtung |
KR101445832B1 (ko) * | 2012-11-15 | 2014-09-30 | 주식회사 이오테크닉스 | 레이저 가공장치 및 레이저 가공방법 |
JP6138556B2 (ja) * | 2013-04-05 | 2017-05-31 | 株式会社ディスコ | レーザー加工装置 |
TWI611854B (zh) * | 2013-05-02 | 2018-01-21 | n萊特股份有限公司 | 光學處理系統和用於光學處理的方法 |
JP6328518B2 (ja) * | 2014-08-04 | 2018-05-23 | 株式会社ディスコ | レーザー加工装置 |
CN106197248B (zh) * | 2016-07-21 | 2018-05-29 | 威海华菱光电股份有限公司 | 膜厚的检测装置 |
CN106097553B (zh) * | 2016-08-10 | 2019-04-09 | 威海华菱光电股份有限公司 | 厚度检测装置 |
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TWI698301B (zh) | 2020-07-11 |
US10153206B2 (en) | 2018-12-11 |
US11004743B2 (en) | 2021-05-11 |
CN108620743B (zh) | 2021-02-12 |
TW201834777A (zh) | 2018-10-01 |
US20190057902A1 (en) | 2019-02-21 |
US20180277435A1 (en) | 2018-09-27 |
JP2018160595A (ja) | 2018-10-11 |
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