JP6666470B2 - Ｒｆ発生器における周波数同調のための装置 - Google Patents

Ｒｆ発生器における周波数同調のための装置 Download PDF

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Publication number
JP6666470B2
JP6666470B2 JP2018555490A JP2018555490A JP6666470B2 JP 6666470 B2 JP6666470 B2 JP 6666470B2 JP 2018555490 A JP2018555490 A JP 2018555490A JP 2018555490 A JP2018555490 A JP 2018555490A JP 6666470 B2 JP6666470 B2 JP 6666470B2
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frequency
generator
reflection coefficient
impedance
complex reflection
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JP2019515429A5 (enExample
JP2019515429A (ja
Inventor
ミョン ヨル チョイ，
ミョン ヨル チョイ，
デニス ショー，
デニス ショー，
マイク ミューラー，
マイク ミューラー，
ジェフリー ロバーグ，
ジェフリー ロバーグ，
スティーブ ジョーダン，
スティーブ ジョーダン，
Original Assignee
エーイーエス グローバル ホールディングス， プライベート リミテッド
エーイーエス グローバル ホールディングス， プライベート リミテッド
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
JP2018555490A 2016-04-20 2017-04-13 Ｒｆ発生器における周波数同調のための装置 Active JP6666470B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/133,461 2016-04-20
US15/133,461 US9748076B1 (en) 2016-04-20 2016-04-20 Apparatus for frequency tuning in a RF generator
PCT/US2017/027385 WO2017184425A1 (en) 2016-04-20 2017-04-13 Apparatus for frequency tuning in a rf generator

Publications (3)

Publication Number Publication Date
JP2019515429A JP2019515429A (ja) 2019-06-06
JP2019515429A5 JP2019515429A5 (enExample) 2020-02-27
JP6666470B2 true JP6666470B2 (ja) 2020-03-13

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JP2018555490A Active JP6666470B2 (ja) 2016-04-20 2017-04-13 Ｒｆ発生器における周波数同調のための装置

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US (2) US9748076B1 (enExample)
JP (1) JP6666470B2 (enExample)
KR (1) KR102099033B1 (enExample)
CN (1) CN109156075B (enExample)
TW (1) TWI677265B (enExample)
WO (1) WO2017184425A1 (enExample)

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Also Published As

Publication number Publication date
CN109156075B (zh) 2020-08-07
CN109156075A (zh) 2019-01-04
KR20180132901A (ko) 2018-12-12
US20170323771A1 (en) 2017-11-09
KR102099033B1 (ko) 2020-04-08
TWI677265B (zh) 2019-11-11
TW201801574A (zh) 2018-01-01
JP2019515429A (ja) 2019-06-06
US9748076B1 (en) 2017-08-29
WO2017184425A1 (en) 2017-10-26
US10026595B2 (en) 2018-07-17

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