TWI677265B - 用於在ｒｆ產生器中進行頻率調諧的設備 - Google Patents

用於在ｒｆ產生器中進行頻率調諧的設備 Download PDF

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Publication number
TWI677265B
TWI677265B TW106112173A TW106112173A TWI677265B TW I677265 B TWI677265 B TW I677265B TW 106112173 A TW106112173 A TW 106112173A TW 106112173 A TW106112173 A TW 106112173A TW I677265 B TWI677265 B TW I677265B
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TW
Taiwan
Prior art keywords
frequency
generate
reflection coefficient
impedance
complex reflection
Prior art date
Application number
TW106112173A
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English (en)
Chinese (zh)
Other versions
TW201801574A (zh
Inventor
崔旻烈
Myeong Yeol Choi
丹尼 尙
Dennis Shaw
麥可 穆勒
Mike Mueller
傑夫 羅柏格
Jeffrey ROBERG
史帝夫 喬登
Steve Jordan
Original Assignee
新加坡商Ａｅｓ全球公司
Aes Global Holdings, Ptd. Ltd.
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Application filed by 新加坡商Ａｅｓ全球公司, Aes Global Holdings, Ptd. Ltd. filed Critical 新加坡商Ａｅｓ全球公司
Publication of TW201801574A publication Critical patent/TW201801574A/zh
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Publication of TWI677265B publication Critical patent/TWI677265B/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
TW106112173A 2016-04-20 2017-04-12 用於在ｒｆ產生器中進行頻率調諧的設備 TWI677265B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/133,461 2016-04-20
US15/133,461 US9748076B1 (en) 2016-04-20 2016-04-20 Apparatus for frequency tuning in a RF generator

Publications (2)

Publication Number Publication Date
TW201801574A TW201801574A (zh) 2018-01-01
TWI677265B true TWI677265B (zh) 2019-11-11

Family

ID=59654812

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106112173A TWI677265B (zh) 2016-04-20 2017-04-12 用於在ｒｆ產生器中進行頻率調諧的設備

Country Status (6)

Country Link
US (2) US9748076B1 (enExample)
JP (1) JP6666470B2 (enExample)
KR (1) KR102099033B1 (enExample)
CN (1) CN109156075B (enExample)
TW (1) TWI677265B (enExample)
WO (1) WO2017184425A1 (enExample)

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Also Published As

Publication number Publication date
CN109156075B (zh) 2020-08-07
CN109156075A (zh) 2019-01-04
KR20180132901A (ko) 2018-12-12
US20170323771A1 (en) 2017-11-09
KR102099033B1 (ko) 2020-04-08
TW201801574A (zh) 2018-01-01
JP6666470B2 (ja) 2020-03-13
JP2019515429A (ja) 2019-06-06
US9748076B1 (en) 2017-08-29
WO2017184425A1 (en) 2017-10-26
US10026595B2 (en) 2018-07-17

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