JP6651050B2 - 薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置、及び、薄膜トランジスタ基板の製造方法 - Google Patents
薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置、及び、薄膜トランジスタ基板の製造方法 Download PDFInfo
- Publication number
- JP6651050B2 JP6651050B2 JP2019500183A JP2019500183A JP6651050B2 JP 6651050 B2 JP6651050 B2 JP 6651050B2 JP 2019500183 A JP2019500183 A JP 2019500183A JP 2019500183 A JP2019500183 A JP 2019500183A JP 6651050 B2 JP6651050 B2 JP 6651050B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- electrode
- thin film
- film transistor
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims description 141
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 239000010409 thin film Substances 0.000 title claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 383
- 239000010408 film Substances 0.000 claims description 232
- 229920002120 photoresistant polymer Polymers 0.000 claims description 66
- 238000000034 method Methods 0.000 claims description 57
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 265
- 239000000463 material Substances 0.000 description 34
- 239000011229 interlayer Substances 0.000 description 26
- 230000008569 process Effects 0.000 description 24
- 230000004048 modification Effects 0.000 description 22
- 238000012986 modification Methods 0.000 description 22
- 238000000206 photolithography Methods 0.000 description 20
- 230000005684 electric field Effects 0.000 description 16
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 13
- 238000005530 etching Methods 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 12
- 238000001039 wet etching Methods 0.000 description 12
- 239000000126 substance Substances 0.000 description 11
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 10
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 239000011701 zinc Substances 0.000 description 9
- 239000000956 alloy Substances 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 235000006408 oxalic acid Nutrition 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 4
- 229910007541 Zn O Inorganic materials 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N acetic acid Substances CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 210000002858 crystal cell Anatomy 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 108091006149 Electron carriers Proteins 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000002542 deteriorative effect Effects 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910018503 SF6 Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- -1 or Al Inorganic materials 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- 229960000909 sulfur hexafluoride Drugs 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018509 Al—N Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- NIFHFRBCEUSGEE-UHFFFAOYSA-N oxalic acid Chemical compound OC(=O)C(O)=O.OC(=O)C(O)=O NIFHFRBCEUSGEE-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052696 pnictogen Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
Description
図1は、本発明の実施の形態1に係るTFT基板100の全体構成を模式的に説明する平面図である。図1(a)に示すように、TFT基板100は、画素TFT30を含む画素がマトリクス状に配列されてなる表示領域24と、表示領域24を囲むように表示領域24に隣接する額縁領域23とに大きく分けられる。
図2は、本実施の形態1のTFTの平面構造を示す平面図であり、図3は、図2のA−A線での断面構造を示す断面図である。なお、図2及び図3にはそれぞれXYZ直交座標系を併せて示している。本実施の形態1のTFTは、図1における画素TFT30及び駆動用TFT40(NMOSトランジスタT1,T2,T3)の基本構成として適用することができる。以下、図2及び図3を参照して、例えばガラス等の透明性絶縁性の基板1上に配設されたTFTの構造を説明する。
以下に、図面を参照して本実施の形態1のTFTの製造方法を説明する。図4〜図7は本実施の形態1のTFTの製造方法を示す断面工程図である。なお、最終工程を示す断面図は、図3に相当する。
本実施の形態1のTFTは、第1半導体層4及び第2半導体層5の構成材料を酸化物半導体としているため、移動度の高いチャネルパスを有するトランジスタ構造を得ることができる。また、本実施の形態1のTFTによれば、ソース電極16及びドレイン電極17下の第1半導体層4a,4bにゲート電極2からゲート電界が印加されるため、ソース電極16及びドレイン電極17と第1半導体層4a,4bとが平面視して重なった領域に電流パスが形成される。したがって、第2半導体層5のチャネル主要領域に加え、電流パスが形成される第1半導体層4a,4bの一部が、画素TFT30のチャネル領域として機能する。その結果、ソース電極16及びドレイン電極17とチャネル領域との間の接触抵抗が低減でき、従来の逆コプレーナ構造のTFTよりも高いオン電流を有する高性能なTFTを実現できる。さらに、本実施の形態1のTFTは、ES構造と比べて、半導体層とソース電極及びドレイン電極とのオーバーラップ領域が小さい構造であるため、TFTのサイズ及び寄生容量をそれぞれ小さくすることができる。
図10及び図11は、それぞれ実施の形態1の変形例1であるTFTの平面構造及び断面構造を示す図であり、実施の形態1の構成要素と対応する構成要素には同一符号を付してある。図10及び図11に示すように、変形例1のTFTでは、ドレイン電極17下にのみ第1半導体層4(4b)が配設されている。
上記実施の形態1のTFTでは、ソース電極16は第1半導体層4a上に重なるように配設され、ドレイン電極17は第1半導体層4b上に重なるように配設されていた。そして、チャネル開口部19側の第1半導体層4a,4bの端面部の形状が、ソース電極16及びドレイン電極17の端面部の形状とほぼ同一であった。しかし、第1半導体層4は、ソース電極16及びドレイン電極17からはみ出した領域を有してもよい。
本発明の実施の形態2では実施の形態1のTFT基板100上に、FFS方式のLCDに用いられる画素TFT30が配設されている。以下、図面を参照して、本実施の形態2に係るFFS方式の画素TFT30について、画素電極構造も含めて詳しく説明する。
以下に、図面を参照して本実施の形態2に係るFFS方式のTFT基板100の製造方法について詳しく説明する。図16〜図19は、本実施の形態2のTFT基板100の製造方法を示す平面工程図である。なお、最終工程を示す平面図は、図14に相当する。また、図20〜図28は、本実施の形態2のTFT基板100の製造方法を示す断面工程図である。なお、最終工程を示す断面図は、図15に相当する。
本実施の形態2に係る画素TFT30を有するTFT基板100においては、実施の形態1やその変形例において説明したTFT特性の向上効果を有する。また、画素電極15を、第1半導体層4a,4bを形成する工程と並行して形成することができ、対向電極115を、第2半導体層5を形成する工程と並行して形成することができる。これにより、画素TFT30を有するFFS方式用のTFT基板100の製造工程において、写真製版工程の回数を低減することができる。この結果、高移動度の酸化物半導体を備えたTFT基板の製造工程の簡略化、ひいては当該TFT基板を有し、広い視野角と明るい表示特性とを兼ね備えたLCDの製造工程の簡略化を図ることができ、LEDの生産効率を向上させ、製造コストを低減することができる。
Claims (13)
- 基板上に配設されたゲート電極と、
前記ゲート電極を覆う第1絶縁膜と、
前記ゲート電極上の前記第1絶縁膜上に配設され、平面視にて前記ゲート電極上の前記第1絶縁膜の一部である部分領域と隣接する第1半導体層と、
少なくとも一方が前記第1絶縁膜及び前記第1半導体層上に配設され、前記部分領域を平面視にて挟むソース電極及びドレイン電極と、
前記ソース電極の一部及び前記ドレイン電極の一部を除いて前記ソース電極及び前記ドレイン電極上に配設され、前記部分領域上方に開口部が設けられた第2絶縁膜と、
前記第2絶縁膜上に配設され、前記ソース電極の前記一部、及び、前記ドレイン電極の前記一部と接触され、かつ、前記開口部を通して前記部分領域及び前記第1半導体層と接触された第2半導体層と
を備える、薄膜トランジスタ。 - 請求項1に記載の薄膜トランジスタであって、
前記第1半導体層及び前記第2半導体層は、酸化物半導体を含む、薄膜トランジスタ。 - 請求項1または請求項2に記載の薄膜トランジスタであって、
前記第1半導体層のキャリア密度が、前記第2半導体層のキャリア密度よりも高い、薄膜トランジスタ。 - 請求項1から請求項3のうちのいずれか1項に記載の薄膜トランジスタであって、
前記第2半導体層上に配設された第3絶縁膜をさらに備える、薄膜トランジスタ。 - 請求項1から請求項4のうちのいずれか1項に記載の薄膜トランジスタであって、
前記第1半導体層が前記ソース電極下に配設されている場合には、前記第1半導体層は、平面視にて前記ソース電極から前記部分領域側にはみ出して配設され、
前記第1半導体層が前記ドレイン電極下に配設されている場合には、前記第1半導体層は、平面視にて前記ドレイン電極から前記部分領域側にはみ出して配設されている、薄膜トランジスタ。 - 請求項1から請求項4のうちのいずれか1項に記載の薄膜トランジスタと、
前記基板と、
前記基板上にて交差され、前記薄膜トランジスタと接続されたゲート配線及びソース配線と、
前記ゲート配線と前記ソース配線とで規定された領域に配設され、前記ドレイン電極と接触された、第3半導体層を含む画素電極と、
前記画素電極上方に前記画素電極と絶縁された状態で配設された、第4半導体層を含む対向電極と
を備え、
前記画素電極の前記第3半導体層は、前記第1半導体層と同層であり、
前記対向電極の前記第4半導体層は、前記第2半導体層と同層である、薄膜トランジスタ基板。 - 請求項6に記載の薄膜トランジスタ基板であって
前記ソース配線下に配設され、前記第3半導体層と同層の半導体層をさらに備える、薄膜トランジスタ基板。 - 請求項6または請求項7に記載の薄膜トランジスタ基板であって、
前記対向電極は、
複数のスリット開口部を有するか、または、櫛歯形状を有する、薄膜トランジスタ基板。 - 請求項6から請求項8のうちのいずれか1項に記載の薄膜トランジスタ基板と、
前記薄膜トランジスタ基板との間に液晶層を挟持する対向基板と
を備える、液晶表示装置。 - 請求項9に記載の液晶表示装置であって、
前記薄膜トランジスタ基板上に配設され、前記薄膜トランジスタと同様の薄膜トランジスタを含む駆動回路をさらに備える、液晶表示装置。 - (a)基板上に互いに接続されたゲート電極及びゲート配線を形成する工程と、
(b)前記ゲート電極を覆う第1絶縁膜を形成する工程と、
(c)前記ゲート電極上の前記第1絶縁膜上に、平面視にて前記ゲート電極上の前記第1絶縁膜の一部である部分領域を平面視にて挟む一対の第1半導体層を形成し、かつ、前記第1絶縁膜上に、前記一対の第1半導体層と分離されて、前記一対の第1半導体層を平面視にて挟む一対の第3半導体層を形成する工程と、
(d)前記一対の第3半導体層に、電気抵抗を低減する導体化を選択的に行う工程と、
(e)前記一対の第1半導体層の一方の少なくとも一部及び前記一対の第3半導体層の一方の少なくとも一部の上にソース電極を形成し、前記一対の第1半導体層の他方の少なくとも一部及び前記一対の第3半導体層の他方の少なくとも一部の上に、前記ソース電極と協働して前記部分領域を平面視にて挟むドレイン電極を形成し、かつ、前記一対の第3半導体層の前記一方上に、前記ソース電極と接続されたソース配線を形成する工程と、
(f)前記ソース電極の一部及び前記ドレイン電極の一部を除いて前記ソース電極及び前記ドレイン電極上に、前記部分領域上方に開口部が設けられた第2絶縁膜を形成する工程と、
(g)前記第2絶縁膜上に、前記ソース電極の前記一部、及び、前記ドレイン電極の前記一部と接触され、かつ、前記開口部を通して前記部分領域及び前記一対の第1半導体層と接触された第2半導体層を形成し、かつ、前記一対の第3半導体層の前記他方上に、前記第2絶縁膜を介して第4半導体層を形成する工程と、
(h)前記第4半導体層に、電気抵抗を低減する導体化を選択的に行う工程と
を備える、薄膜トランジスタ基板の製造方法。 - 請求項11に記載の薄膜トランジスタ基板の製造方法であって、
前記工程(d)は、前記基板の下側から紫外線を照射する工程を含む、薄膜トランジスタ基板の製造方法。 - 請求項11または請求項12に記載の薄膜トランジスタ基板の製造方法であって、
前記工程(g)は、前記第2半導体層及び前記第4半導体層上にフォトレジストパターンを形成する工程を含み、
前記工程(h)は、
(h−1)前記第4半導体層上の前記フォトレジストパターンを除去することと、前記第2半導体層上の前記フォトレジストパターンを残すこととを並行して行う工程と、
(h−2)前記第2半導体層が前記フォトレジストパターンによって覆われている状態で、前記基板の上側から前記基板に紫外線を照射する工程と
を含む、薄膜トランジスタ基板の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017026651 | 2017-02-16 | ||
JP2017026651 | 2017-02-16 | ||
PCT/JP2017/034634 WO2018150620A1 (ja) | 2017-02-16 | 2017-09-26 | 薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置、及び、薄膜トランジスタ基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018150620A1 JPWO2018150620A1 (ja) | 2019-06-27 |
JP6651050B2 true JP6651050B2 (ja) | 2020-02-19 |
Family
ID=63170222
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019500183A Active JP6651050B2 (ja) | 2017-02-16 | 2017-09-26 | 薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置、及び、薄膜トランジスタ基板の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10741690B2 (ja) |
JP (1) | JP6651050B2 (ja) |
CN (1) | CN110268529A (ja) |
WO (1) | WO2018150620A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022139554A (ja) * | 2021-03-12 | 2022-09-26 | セイコーエプソン株式会社 | 電気光学装置および電子機器 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62235784A (ja) | 1986-04-07 | 1987-10-15 | Sharp Corp | 薄膜トランジスタの製造方法 |
JP3208658B2 (ja) | 1997-03-27 | 2001-09-17 | 株式会社アドバンスト・ディスプレイ | 電気光学素子の製法 |
US6449026B1 (en) | 1999-06-25 | 2002-09-10 | Hyundai Display Technology Inc. | Fringe field switching liquid crystal display and method for manufacturing the same |
JP4951834B2 (ja) | 2001-09-19 | 2012-06-13 | 日本電気株式会社 | 薄膜トランジスタ |
JP4164562B2 (ja) | 2002-09-11 | 2008-10-15 | 独立行政法人科学技術振興機構 | ホモロガス薄膜を活性層として用いる透明薄膜電界効果型トランジスタ |
JP4483235B2 (ja) | 2003-09-01 | 2010-06-16 | カシオ計算機株式会社 | トランジスタアレイ基板の製造方法及びトランジスタアレイ基板 |
JP5037808B2 (ja) | 2005-10-20 | 2012-10-03 | キヤノン株式会社 | アモルファス酸化物を用いた電界効果型トランジスタ、及び該トランジスタを用いた表示装置 |
EP2924498A1 (en) | 2006-04-06 | 2015-09-30 | Semiconductor Energy Laboratory Co, Ltd. | Liquid crystal desplay device, semiconductor device, and electronic appliance |
WO2010029865A1 (en) | 2008-09-12 | 2010-03-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
KR101812935B1 (ko) | 2008-09-12 | 2018-01-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 디스플레이 장치 |
KR101432764B1 (ko) * | 2008-11-13 | 2014-08-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치의 제조방법 |
US8441007B2 (en) * | 2008-12-25 | 2013-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
CN104285286A (zh) * | 2012-05-14 | 2015-01-14 | 夏普株式会社 | 半导体装置及其制造方法 |
JP6103854B2 (ja) | 2012-08-10 | 2017-03-29 | 三菱電機株式会社 | 薄膜トランジスタ基板 |
US20140306219A1 (en) | 2013-04-10 | 2014-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
KR20220047897A (ko) | 2013-12-02 | 2022-04-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
US9876039B2 (en) * | 2015-01-08 | 2018-01-23 | Mitsubishi Electric Corporation | Thin-film transistor substrate, thin-film transistor substrate manufacturing method, and liquid crystal display |
CN104617115A (zh) * | 2015-03-02 | 2015-05-13 | 深圳市华星光电技术有限公司 | Ffs型薄膜晶体管阵列基板及其制备方法 |
JP6478819B2 (ja) * | 2015-06-04 | 2019-03-06 | 三菱電機株式会社 | 薄膜トランジスタ基板およびその製造方法 |
JP6584157B2 (ja) * | 2015-06-08 | 2019-10-02 | 三菱電機株式会社 | 薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置及び薄膜トランジスタの製造方法 |
CN106252362B (zh) * | 2016-08-31 | 2019-07-12 | 深圳市华星光电技术有限公司 | 一种阵列基板及其制备方法 |
-
2017
- 2017-09-26 US US16/465,227 patent/US10741690B2/en active Active
- 2017-09-26 JP JP2019500183A patent/JP6651050B2/ja active Active
- 2017-09-26 WO PCT/JP2017/034634 patent/WO2018150620A1/ja active Application Filing
- 2017-09-26 CN CN201780083065.9A patent/CN110268529A/zh not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US10741690B2 (en) | 2020-08-11 |
JPWO2018150620A1 (ja) | 2019-06-27 |
WO2018150620A1 (ja) | 2018-08-23 |
US20200012132A1 (en) | 2020-01-09 |
CN110268529A (zh) | 2019-09-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10937816B2 (en) | Switching element, manufacturing method thereof, array substrate and display device | |
JP7245871B2 (ja) | 表示装置 | |
US9059296B2 (en) | Oxide thin film transistor and method of fabricating the same | |
JP6437126B2 (ja) | 薄膜トランジスタ基板およびその製造方法 | |
WO2018180723A1 (ja) | アクティブマトリクス基板およびその製造方法 | |
US20180277661A1 (en) | Thin film transistor substrate, manufacturing method for thin film transistor substrate, and liquid crystal display | |
US9159867B2 (en) | Array substrate, manufacturing method thereof, and display device | |
JP2018049919A (ja) | 表示装置 | |
US11721704B2 (en) | Active matrix substrate | |
JP2019169660A (ja) | 薄膜トランジスタ基板、表示装置、および、薄膜トランジスタ基板の製造方法 | |
JP6025595B2 (ja) | 薄膜トランジスタの製造方法 | |
US9947798B2 (en) | Display device | |
JP7471075B2 (ja) | アクティブマトリクス基板およびその製造方法 | |
JP6651050B2 (ja) | 薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置、及び、薄膜トランジスタ基板の製造方法 | |
JP6584157B2 (ja) | 薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置及び薄膜トランジスタの製造方法 | |
JP2020096095A (ja) | 薄膜トランジスタ基板、表示装置および液晶表示装置 | |
JP6120794B2 (ja) | 薄膜トランジスタ基板およびその製造方法 | |
JP2020031107A (ja) | 薄膜トランジスタ、薄膜トランジスタ基板及びその製造方法 | |
US20230178561A1 (en) | Active matrix substrate and method for manufacturing same | |
US20230135065A1 (en) | Active matrix substrate | |
JP6671155B2 (ja) | 薄膜トランジスタ基板 | |
US9929186B2 (en) | Thin film transistor substrate and method for manufacturing the same | |
JP2020043252A (ja) | 薄膜トランジスタ基板及びその製造方法並びに表示装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190128 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190128 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191224 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200121 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6651050 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |