JP7245871B2 - 表示装置 - Google Patents
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- JP7245871B2 JP7245871B2 JP2021104136A JP2021104136A JP7245871B2 JP 7245871 B2 JP7245871 B2 JP 7245871B2 JP 2021104136 A JP2021104136 A JP 2021104136A JP 2021104136 A JP2021104136 A JP 2021104136A JP 7245871 B2 JP7245871 B2 JP 7245871B2
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Images
Classifications
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
- G09G3/3655—Details of drivers for counter electrodes, e.g. common electrodes for pixel capacitors or supplementary storage capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1251—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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Description
図1(a)は本実施の形態におけるTFT基板100の全体構成を模式的に示す平面図である。同図に示すように、TFT基板100の面内は、表示領域150と、その表示領域150の周辺を囲んで設けられた額縁領域160(周辺領域)とに大きく分けられる。表示領域150は、複数の画素(画素領域)がマトリクス状に配列されてなり、各画素は第1薄膜トランジスタである画素TFT30を含む。
次に、図面を参照して、画素TFT30および駆動TFT40の構成について詳しく説明する。なお、駆動TFT41および42は、駆動TFT40と基本構成は同じであるので説明は省略する。また、本実施の形態1において、画素TFT30と駆動TFT40とが形成されるTFT基板100は、光透過型の液晶パネルを構成するためのTFT基板であり、FFS方式の横電界液晶駆動仕様を有する。
以下に、図面を参照して本実施の形態1のTFT基板100上に形成されるTFTの製造方法を説明する。図5から図10は、実施の形態1におけるTFT基板100の製造方法を示す断面工程図である。なお、最終工程を示す断面図は、図4に相当する。図5から図10のそれぞれに図示するX-X’部及びY-Y’部は、それぞれ図2に示すX-X’部および図3に示すY-Y’部の断面部に対応している。
本実施の形態1のTFT基板100は、表示領域150に設けられる画素表示用のTFTを光劣化の少ないa-Si膜6からなる半導体層を含む画素TFT30(第1TFT)で構成する。TFT基板100は、表示領域150の周辺に位置する額縁領域160には画素TFT30を駆動するための駆動回路を内蔵し、その駆動回路に設けられるTFTをa-Si膜6に比べて高い移動度を有する酸化物膜8aからなる半導体層を含む駆動TFT40(第2TFT)で構成する。FFS方式の横電界液晶駆動用の画素電極16と対向電極25のふたつの電極のうち、画素電極16を導電体化させた酸化物膜8bを用いて構成する。これらにより、高表示品質で信頼性が高く、かつ狭額縁のLCDを低コストで製造することができるようになる。
実施の形態1の変形例1に係るTFT基板は、上記の実施の形態1にて示したTFT基板の構成のうち駆動TFTの構成が異なる。以下、本変形例1におけるTFT基板の構成について、図面を参照して詳細に説明する。なお、上記の実施の形態1と同様の構成は説明を省略する。
上記の実施の形態1およびその変形例1では、平面視で第1ソース電極17またはソース配線117と重なる領域の下層に、導電特性を有する酸化物膜8bからなる第1ソース電極下層配線11およびソース下層配線217を形成するようにしたが、これらは適宜省略することもできる。同様に、平面視で第2ソース電極19および第2ドレイン電極20と重なる領域の下層にも、導電特性を有する酸化物膜8bからなる第2ソース電極下層配線14および第2ドレイン電極下層配線15をそれぞれ形成するようにしたが、これらも適宜省略することができる。
上記の実施の形態1およびその変形例1においては、ソースコンタクト層9は、第1ソース電極下層配線11またはソース下層配線217とは分離されて配設されていた。さらに、ドレインコンタクト層10は、画素電極16とは分離されて配設されていた。また、駆動TFT40の第2半導体層13は、第2ソース電極下層配線14または第2ドレイン電極下層配線15とは分離されて配設されていた。
実施の形態1のTFT基板は、6回の写真製版工程で作製することができるが、本変形例3におけるTFT基板は、さらに工程数を1回減らし5回の写真製版工程で作製することができる。
次に、図面を参照して、本実施の形態1の変形例4のTFT基板に配設される画素TFTと駆動TFTの構成について詳しく説明する。
以下に、図面を参照して本実施の形態1の変形例4に係るTFT基板の製造方法を説明する。図17から図25は本実施の形態1の変形例4におけるTFT基板の製造方法を示す断面工程図である。なお、最終工程を示す断面図は、図16に相当する。各工程図中のX-X’部及びY-Y’部は、それぞれ図14に示すX-X’部および図15に示すY-Y’部の断面部に対応している。
以上のように、本実施の形態1の変形例4によれば、上記実施の形態1と同じ効果に加えて、a-Si膜6を半導体チャネル層とする画素TFT30c(第1TFT)と、酸化物膜8aを半導体チャネル層とする駆動回路用の駆動TFT40c(第2TFT)との両方が、ひとつの基板1上に形成された構成を有するFFS仕様のTFT基板を、実施の形態1よりもさらに少ない5回の写真製版工程で作製することができるようになる。したがって、生産性をさらに向上させることができる。
本実施の形態2のTFT基板101の平面構成は、図1(a)に示される実施の形態1のTFT基板100の平面構成と同様であり、TFT基板101の面内は、表示領域150と、その表示領域150の周辺を囲んで設けられた額縁領域160(周辺領域)とに大きく分けられる。表示領域150は、複数の画素(画素領域)がマトリクス状に配列されてなり、各画素は第1薄膜トランジスタである画素TFT30dを含む。ただし、実施の形態2のTFT基板101に設けられる画素TFT30dの構成は、実施の形態1にて示したTFT基板100に設けられる画素TFT30の構成と異なる。
以下に図面を参照して、本実施の形態2におけるTFT基板101に設けられる第1薄膜トランジスタである画素TFT30dと、第2薄膜トランジスタである駆動TFT40dの構成について詳しく説明する。なお、TFT基板101は、光透過型の液晶パネルを構成するためのTFT基板であり、FFS方式の横電界液晶駆動仕様を有する。
以下に、図面を参照して本実施の形態2のTFT基板101の製造方法を説明する。図27から図32は実施の形態2におけるTFT基板101の製造方法を示す断面工程図である。なお、最終工程を示す断面図は、図26に相当する。図27から図32に図示する画素TFT30dを含む断面は、図2のX-X’部における断面に対応し、駆動TFT40dを含む断面は、図3のY-Y’部における断面と同様の位置における断面に対応する。
以上のように、本実施の形態2によれば、a-Si膜6を半導体層とする画素TFT30d(第1TFT)と、酸化物膜8aを半導体層とする駆動回路用の駆動TFT40d(第2TFT)との両方が、ひとつの基板1上に形成されたFFS仕様のTFT基板101を、6回の写真製版工程で作製することができる。
実施の形態2では、平面視で第1ソース電極17またはソース配線117と重なる領域の下層に、導電特性を有する酸化物膜8bからなる第1ソース電極下層配線11およびソース下層配線217を形成するようにしたが、実施の形態1の変形例2と同様に、これは適宜省略することもできる。同様に、平面視で第2ソース電極19および第2ドレイン電極20と重なる領域の下層にも、導電特性を有する酸化物膜8bからなる第2ソース電極下層配線14および第2ドレイン電極下層配線15をそれぞれ形成するようにしたが、これらも適宜省略することができる。
また実施の形態2では、ソースコンタクト層9は、第1ソース電極下層配線11およびソース下層配線217のパターンと分離されて配設されていた。また、ドレインコンタクト層10は、画素電極16のパターンと分離されて配設されていた。さらに、第2半導体層13は、第2ソース電極下層配線14および第2ドレイン電極下層配線15と分離されて配設されていた。
上記の実施の形態2におけるFFS仕様のTFT基板101は、a-Si膜6を半導体層とする画素TFT30d(第1TFT)と、酸化物膜8aを半導体層とする駆動回路用の駆動TFT40d(第2TFT)との両方が、ひとつの基板1上に配設された構成を有する。そのTFT基板101も、実施の形態1の変形例4に示すTFT基板100と同様に、ハーフトーンプロセスを用いて5回の写真製版で製造することができる。
以下に図面を参照して、本実施の形態2の変形例3のTFT基板に形成される画素TFTと駆動TFTの構成について詳しく説明する。
以下に、図面を参照して本実施の形態2の変形例3のTFT基板の製造方法を説明する。図35から図43は本実施の形態2の変形例3のTFT基板の製造方法を示す断面工程図である。なお、最終工程を示す断面図は、図34に相当する。各工程図中のX-X’部及びY-Y’部は、それぞれ図14に示すX-X’および図15に示すY-Y’部の断面部に対応している。
以上のように、本実施の形態2の変形例3によれば、上記の実施の形態2と同じ効果に加えて、a-Si膜6を半導体層とする画素TFT30f(第1TFT)と、酸化物膜8aを半導体層とする駆動回路用の駆動TFT40f(第2TFT)との両方が、ひとつの基板1上に形成されたFFS仕様のTFT基板100を、実施の形態2よりもさらに少ない5回の写真製版工程で作製することができる。そのため、生産性をより向上させることができる。
Claims (4)
- 基板上に、表示領域と、前記表示領域の周辺に設けられた額縁領域と、を有し、
前記表示領域に配置された第1ゲート電極と、
前記額縁領域に配置され、前記第1ゲート電極と同一組成の第2ゲート電極と、
前記第1ゲート電極と前記第2ゲート電極とを覆うゲート絶縁層と、
前記第1ゲート電極に平面視で重なり、かつ、前記ゲート絶縁層上に配置されたアモルファスシリコン層と、
一部が前記アモルファスシリコン層に接して配置され、半導体特性を有する酸化物からなる第1コンタクト層と、
前記第1コンタクト層とは離間して配置され、かつ、一部が前記アモルファスシリコン層に接して配置され、前記第1コンタクト層と同一組成の第2コンタクト層と、
前記第1コンタクト層に接続する第1電極と、
前記第2コンタクト層に接続し、前記第1電極と同一組成の第2電極と、
前記第2ゲート電極に平面視で重なり、かつ、前記ゲート絶縁層上に配置され、前記第1コンタクト層と同一組成の酸化物半導体層と、
一部が前記酸化物半導体層に接して配置され、前記第1電極と同一組成の第3電極と、
前記第3電極と離間して配置され、かつ、一部が前記酸化物半導体層に接して配置され、前記第1電極と同一組成の第4電極と、
前記表示領域内で、かつ前記第1ゲート電極が形成されていない領域に配置された電極と、を備え、
前記電極は、前記第2電極に接続し、前記第1コンタクト層と同一組成である、表示装置。 - 前記第1コンタクト層は、少なくとも1種類以上の金属酸化物を含む、請求項1に記載の表示装置。
- 前記電極は、前記第2コンタクト層から延在され、連続一体化されたパターンを有する、請求項1または請求項2に記載の表示装置。
- 前記電極を覆って配置された絶縁層と、
前記電極に平面視で重なり、かつ、前記絶縁層上に配置された対向電極と、をさらに備える、請求項1から請求項3のいずれか一項に記載の表示装置。
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