JP6645195B2 - 圧電駆動装置、モーター、ロボット、ならびにポンプ - Google Patents
圧電駆動装置、モーター、ロボット、ならびにポンプ Download PDFInfo
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- JP6645195B2 JP6645195B2 JP2016003481A JP2016003481A JP6645195B2 JP 6645195 B2 JP6645195 B2 JP 6645195B2 JP 2016003481 A JP2016003481 A JP 2016003481A JP 2016003481 A JP2016003481 A JP 2016003481A JP 6645195 B2 JP6645195 B2 JP 6645195B2
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016003481A JP6645195B2 (ja) | 2016-01-12 | 2016-01-12 | 圧電駆動装置、モーター、ロボット、ならびにポンプ |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016003481A JP6645195B2 (ja) | 2016-01-12 | 2016-01-12 | 圧電駆動装置、モーター、ロボット、ならびにポンプ |
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| Publication Number | Publication Date |
|---|---|
| JP2017127057A JP2017127057A (ja) | 2017-07-20 |
| JP2017127057A5 JP2017127057A5 (enExample) | 2019-02-14 |
| JP6645195B2 true JP6645195B2 (ja) | 2020-02-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2016003481A Expired - Fee Related JP6645195B2 (ja) | 2016-01-12 | 2016-01-12 | 圧電駆動装置、モーター、ロボット、ならびにポンプ |
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| JP (1) | JP6645195B2 (enExample) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006005433A (ja) * | 2004-06-15 | 2006-01-05 | Seiko Epson Corp | 集積回路素子の製造方法および集積回路素子 |
| JP4033204B2 (ja) * | 2004-12-01 | 2008-01-16 | セイコーエプソン株式会社 | 弾性表面波素子の製造方法 |
| JP5298999B2 (ja) * | 2009-03-19 | 2013-09-25 | Ｔｄｋ株式会社 | 積層型圧電素子 |
| JP2011029239A (ja) * | 2009-07-21 | 2011-02-10 | Fujitsu Ltd | 圧電発電モジュール、圧電発電モジュールの製造方法及び圧電発電装置 |
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| JP2017127057A (ja) | 2017-07-20 |
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