JP2017127057A5 - - Google Patents
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- Publication number
- JP2017127057A5 JP2017127057A5 JP2016003481A JP2016003481A JP2017127057A5 JP 2017127057 A5 JP2017127057 A5 JP 2017127057A5 JP 2016003481 A JP2016003481 A JP 2016003481A JP 2016003481 A JP2016003481 A JP 2016003481A JP 2017127057 A5 JP2017127057 A5 JP 2017127057A5
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- JP
- Japan
- Prior art keywords
- layer
- electrode layer
- piezoelectric
- diaphragm
- provided above
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007788 liquid Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016003481A JP6645195B2 (ja) | 2016-01-12 | 2016-01-12 | 圧電駆動装置、モーター、ロボット、ならびにポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016003481A JP6645195B2 (ja) | 2016-01-12 | 2016-01-12 | 圧電駆動装置、モーター、ロボット、ならびにポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017127057A JP2017127057A (ja) | 2017-07-20 |
| JP2017127057A5 true JP2017127057A5 (enExample) | 2019-02-14 |
| JP6645195B2 JP6645195B2 (ja) | 2020-02-14 |
Family
ID=59364255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016003481A Expired - Fee Related JP6645195B2 (ja) | 2016-01-12 | 2016-01-12 | 圧電駆動装置、モーター、ロボット、ならびにポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6645195B2 (enExample) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006005433A (ja) * | 2004-06-15 | 2006-01-05 | Seiko Epson Corp | 集積回路素子の製造方法および集積回路素子 |
| JP4033204B2 (ja) * | 2004-12-01 | 2008-01-16 | セイコーエプソン株式会社 | 弾性表面波素子の製造方法 |
| JP5298999B2 (ja) * | 2009-03-19 | 2013-09-25 | Ｔｄｋ株式会社 | 積層型圧電素子 |
| JP2011029239A (ja) * | 2009-07-21 | 2011-02-10 | Fujitsu Ltd | 圧電発電モジュール、圧電発電モジュールの製造方法及び圧電発電装置 |
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2016
- 2016-01-12 JP JP2016003481A patent/JP6645195B2/ja not_active Expired - Fee Related