JP2017127057A5 - - Google Patents
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- JP2017127057A5 JP2017127057A5 JP2016003481A JP2016003481A JP2017127057A5 JP 2017127057 A5 JP2017127057 A5 JP 2017127057A5 JP 2016003481 A JP2016003481 A JP 2016003481A JP 2016003481 A JP2016003481 A JP 2016003481A JP 2017127057 A5 JP2017127057 A5 JP 2017127057A5
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- electrode layer
- piezoelectric
- diaphragm
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- 239000007788 liquid Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Claims (7)
前記振動板の上方に設けられた第１電極層と、
前記第１電極層の上方に設けられた圧電体層と、
前記圧電体層の上方に設けられた第２電極層と、
前記第２電極層の上方に設けられた第１絶縁層と、
前記第１絶縁層に設けられたコンタクトホールを介して、前記第１電極層または前記第２電極層と電気的に接続されている配線層と、
前記第１絶縁層の上方に設けられた第２絶縁層と、
を含み、
前記第２絶縁層の上面と前記配線層の上面とは、同一平面内にあり、
前記コンタクトホールは、前記振動板の平面視において、前記振動板の節部に設けられている、圧電駆動装置。 A diaphragm,
A first electrode layer provided above the diaphragm;
A piezoelectric layer provided above the first electrode layer;
A second electrode layer provided above the piezoelectric layer ;
A first insulating layer provided above the front Stories second electrode layer,
A wiring layer electrically connected to the first electrode layer or the second electrode layer through a contact hole provided in the first insulating layer;
A second insulating layer provided above the first insulating layer;
Including
The upper surface of the second insulating layer and the upper surface of the wiring layer are in the same plane ,
The contact hole is a piezoelectric driving device provided in a node portion of the diaphragm in a plan view of the diaphragm.
前記振動板の上方に設けられた第１電極層と、
前記第１電極層の上方に設けられた圧電体層と、
前記圧電体層の上方に設けられた第２電極層と、
前記第２電極層の上方に設けられた第１絶縁層と、
前記第１絶縁層に設けられたコンタクトホールを介して、前記第２電極層と電気的に接続されている配線層と、
前記第１絶縁層の上方に設けられた第２絶縁層と、
前記第１電極層と前記第２電極層との間に設けられている能動部と、
前記第２電極層の上方に設けられているコンタクトホールと、
を含み、
前記配線層の上面と前記第２絶縁層の上面とは、同一平面内にあり、
平面視において、前記コンタクトホールの前記振動板の長手方向の大きさは、前記コンタクトホールの前記長手方向と直交する方向の大きさよりも小さい、圧電駆動装置。 A diaphragm,
A first electrode layer provided above the diaphragm;
A piezoelectric layer provided above the first electrode layer;
A second electrode layer provided above the piezoelectric layer ;
A first insulating layer provided above the front Stories second electrode layer,
A wiring layer electrically connected to the second electrode layer through a contact hole provided in the first insulating layer;
A second insulating layer provided above the first insulating layer;
An active portion provided between the first electrode layer and the second electrode layer;
A contact hole provided above the second electrode layer;
Including
The upper surface of the wiring layer and the upper surface of the second insulating layer are in the same plane,
In the flat plane view, the longitudinal size of the diaphragm of the contact hole is smaller than the direction of the size orthogonal to the longitudinal direction of the contact hole, the piezoelectric drive device.
前記圧電体層は、
前記振動板を前記長手方向に伸縮させる運動に寄与する第１能動部と、
前記振動板を前記長手方向と直交する方向に屈曲させる運動に寄与する第２能動部と、を有し、
前記コンタクトホールは、前記第１能動部の上方および前記第２能動部の上方に設けられている、圧電駆動装置。 In claim 2,
The piezoelectric layer,
A first active portion contributes to the movement to stretch the front Symbol diaphragm in the longitudinal direction,
The pre-Symbol diaphragm and a second active portion contributes to the movement to bend in a direction perpendicular to the longitudinal direction,
The piezoelectric drive device, wherein the contact hole is provided above the first active part and above the second active part.
前記振動板、前記第１電極層、前記圧電体層、前記第２電極層、前記第１絶縁層、前記配線層、および前記第２絶縁層は、振動ユニットを構成し、
前記振動ユニットは、複数設けられ、
複数の前記振動ユニットは、前記振動板の板面に垂直な方向に重なるように配置されている、圧電駆動装置。 In any one of Claims 1 thru | or 3,
The diaphragm, the first electrode layer, the piezoelectric layer, the second electrode layer, the first insulating layer, the wiring layer, and the second insulating layer constitute a vibration unit,
A plurality of the vibration units are provided,
The piezoelectric drive device, wherein the plurality of vibration units are arranged to overlap in a direction perpendicular to a plate surface of the diaphragm.
前記圧電駆動装置によって回転されるローターと、
を含む、モーター。 A piezoelectric driving device according to any one of claims 1 to 4,
A rotor rotated by the piezoelectric drive device;
Including a motor.
複数の前記リンク部を接続する関節部と、
複数の前記リンク部を前記関節部で回動させる請求項１ないし４のいずれか１項に記載の圧電駆動装置と、
を含む、ロボット。 A plurality of link parts;
A joint part connecting a plurality of the link parts;
The piezoelectric drive device according to any one of claims 1 to 4, wherein a plurality of the link portions are rotated by the joint portions;
Including robots.
液体を輸送するチューブと、
前記圧電駆動装置の駆動によって前記チューブを閉塞する複数のフィンガーと、
を含む、ポンプ。 A piezoelectric driving device according to any one of claims 1 to 4,
A tube that transports the liquid;
A plurality of fingers for closing the tube by driving the piezoelectric driving device;
Including a pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016003481A JP6645195B2 (en) | 2016-01-12 | 2016-01-12 | Piezo drives, motors, robots and pumps |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016003481A JP6645195B2 (en) | 2016-01-12 | 2016-01-12 | Piezo drives, motors, robots and pumps |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017127057A JP2017127057A (en) | 2017-07-20 |
| JP2017127057A5 true JP2017127057A5 (en) | 2019-02-14 |
| JP6645195B2 JP6645195B2 (en) | 2020-02-14 |
Family
ID=59364255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016003481A Active JP6645195B2 (en) | 2016-01-12 | 2016-01-12 | Piezo drives, motors, robots and pumps |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6645195B2 (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006005433A (en) * | 2004-06-15 | 2006-01-05 | Seiko Epson Corp | Integrated circuit element and method of manufacturing the same |
| JP4033204B2 (en) * | 2004-12-01 | 2008-01-16 | セイコーエプソン株式会社 | Manufacturing method of surface acoustic wave device |
| JP5298999B2 (en) * | 2009-03-19 | 2013-09-25 | Ｔｄｋ株式会社 | Multilayer piezoelectric element |
| JP2011029239A (en) * | 2009-07-21 | 2011-02-10 | Fujitsu Ltd | Piezoelectric power generation module, method of manufacturing the same, and piezoelectric generator |
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2016
- 2016-01-12 JP JP2016003481A patent/JP6645195B2/en active Active