JP2017118625A5

JP2017118625A5 -

Info

Publication number: JP2017118625A5
Application number: JP2015249646A
Authority: JP
Filing date: 2015-12-22
Publication date: 2019-01-31
Anticipated expiration: 2035-12-22

Claims

A piezoelectric drive device including two vibration units,
The two vibration units are:
A diaphragm,
A structure,
The structure is
A first electrode provided on the diaphragm;
A piezoelectric layer provided on the first electrode;
A second electrode provided on the piezoelectric layer;
A contact hole provided so as to penetrate to the upper surface of the first electrode at a position where the second electrode of the piezoelectric layer is not provided;
And electrically connected to the wiring layer and the first electrode or the second electrode through the contact hole,
Including
The two vibration units are arranged in such a manner that the two structures overlap with each other in the thickness direction of the diaphragm in the facing direction .

In claim 1,
The piezoelectric layer is
An active part located between the first electrode and the second electrode;
An inactive portion that is continuous with the active portion and is located between the first electrode and the second electrode;
Have
The contact hole is provided in the inactive portion, the piezoelectric driving device.

In claim 1 or 2,
A protective layer provided to cover the upper and side surfaces of the second electrode, the upper surface of the piezoelectric layer, and the inner surface of the contact hole;
The piezoelectric driving device, wherein the protective layer is an inorganic insulating layer.

A method of manufacturing a piezoelectric drive device including two vibration units,
Arranging the structure on the diaphragm to form the vibrating unit;
The forming step includes
Forming a first electrode on the diaphragm,
A step of forming a piezoelectric layer on the first electrode,
Forming a second electrode on the piezoelectric layer,
Wherein the second electrode is not formed position of the piezoelectric layer, so as to penetrate to the upper surface of the first electrode, and forming a contact hole,
And forming the first electrode or the second electrode and the wiring layer are electrically connected via the contact hole,
A method of manufacturing a piezoelectric drive device, wherein two vibration units are arranged so as to overlap each other in a thickness direction of the diaphragm in a direction in which the two structures are opposed to each other.

In claim 4,
The piezoelectric layer is
An active portion between the first electrode and the second electrode;
An inactive portion that is continuous with the active portion and is between the first electrode and the second electrode;
Formed to have
The method for manufacturing a piezoelectric driving device, wherein the contact hole is formed in the inactive portion.

In claim 4 or 5,
Forming a protective layer so as to cover the upper and side surfaces of the second electrode, the upper surface of the piezoelectric layer, and the inner surface of the contact hole;
The method for manufacturing a piezoelectric driving device, wherein the material of the protective layer is an inorganic insulating layer.

A piezoelectric driving device according to any one of claims 1 to 3,
A rotor rotated by the piezoelectric drive device;
Including a motor.

A plurality of links,
A joint part connecting a plurality of the link parts;
The piezoelectric drive device according to any one of claims 1 to 3, wherein a plurality of the link portions are rotated by the joint portions;
Including the robot.

A piezoelectric driving device according to any one of claims 1 to 3,
A tube that transports the liquid;
A plurality of fingers for closing the tube by driving the piezoelectric driving device;
Including a pump.