JP2010187195A5

JP2010187195A5 -

Info

Publication number: JP2010187195A5
Application number: JP2009029879A
Authority: JP
Filing date: 2009-02-12
Publication date: 2012-03-01

Description

［適用例１］本適用例にかかる振動片は、３以上の奇数本の振動腕を有し、各前記振動腕が厚み方向に振動し、かつ隣り合う前記振動腕が互いに反対方向に振動する振動片であって、前記振動腕において前記振動腕の厚みを規定する対向する面の一方の面から少なくとも両側の側面にまで連続して設けられた下部電極と、前記振動腕の前記一方の面において前記下部電極の上に形成された圧電膜と、前記圧電膜の上に形成された上部電極と、を有することを特徴とする。また、他の態様では、互いに表裏関係にある第１面および第２面と、前記第１面および前記第２面を連結する側面と、を備えた振動腕と、前記振動腕の前記第１面および前記側面に連続して設けられた下部電極と、前記振動腕の前記下部電極の上に設けられた上部電極と、前記下部電極および前記上部電極の間に設けられた圧電膜と、を備えたことを特徴とする。
Application Example 1 A vibrating piece according to this application example has an odd number of three or more vibrating arms, each vibrating arm vibrates in the thickness direction, and adjacent vibrating arms vibrate in opposite directions. A lower electrode provided continuously from one surface of opposing surfaces defining the thickness of the vibrating arm to at least both side surfaces of the vibrating arm; and the one surface of the vibrating arm. And a piezoelectric film formed on the lower electrode and an upper electrode formed on the piezoelectric film. According to another aspect, a resonating arm comprising a first surface and a second surface that are in a front-back relationship with each other, and a side surface that connects the first surface and the second surface, and the first of the resonating arm. A lower electrode provided continuously on the surface and the side surface, an upper electrode provided on the lower electrode of the vibrating arm, and a piezoelectric film provided between the lower electrode and the upper electrode, It is characterized by having.

［適用例２］上記適用例にかかる振動片において、前記下部電極は、前記振動腕を囲んで設けられていることが望ましい。
Application Example 2 In the resonator element of the application example, the lower electrode is preferably is provided et surrounds the vibrating arm.

［適用例３］上記適用例にかかる振動片において、前記圧電膜は、前記振動腕の前記第１面および前記側面に連続して設けられていることが望ましい。
Application Example 3 In the resonator element according to the application example, it is preferable that the piezoelectric film is continuously provided on the first surface and the side surface of the vibrating arm.

［適用例７］本適用例にかかる振動片の製造方法は、３以上の奇数本の振動腕を有し、各前記振動腕が厚み方向に振動し、かつ隣り合う前記振動腕が互いに反対方向に振動する振動片の製造方法であって、振動片の外形をエッチングして形成する外形エッチング工程と、前記振動腕において前記振動腕の厚みを規定する対向する面の一方の面から少なくとも両側の側面にまで連続して下部電極を形成する下部電極形成工程と、前記振動腕の前記一方の面において前記下部電極の上に圧電膜を形成する圧電膜形成工程と、前記圧電膜の上に上部電極を形成する上部電極形成工程と、を有することを特徴とする。また、他の態様では、外形をエッチングして、互いに表裏関係にある第１面および第２面と前記第１面および前記第２面を連結する側面とを備えた振動腕を形成する外形エッチング工程と、前記振動腕において前記振動腕の前記第１面から前記側面に連続して下部電極を形成する下部電極形成工程と、前記振動腕の前記第１面の前記下部電極の上に圧電膜を形成する圧電膜形成工程と、前記圧電膜の上に上部電極を形成する上部電極形成工程と、を含むことを特徴とする。
Application Example 7 A method for manufacturing a resonator element according to this application example has an odd number of three or more vibrating arms, each vibrating arm vibrates in the thickness direction, and adjacent vibrating arms are in opposite directions. A method of manufacturing a vibrating piece that vibrates at a time, wherein an outer shape etching step is performed by etching an outer shape of the vibrating piece, and at least both sides of one face of the vibrating arm that defines a thickness of the vibrating arm. A lower electrode forming step of continuously forming a lower electrode up to a side surface; a piezoelectric film forming step of forming a piezoelectric film on the lower electrode on the one surface of the vibrating arm; and an upper portion on the piezoelectric film And an upper electrode forming step for forming an electrode. In another aspect, the outer shape is etched to form a vibrating arm having a first surface and a second surface, and a side surface connecting the first surface and the second surface. A lower electrode forming step of forming a lower electrode continuously from the first surface of the vibrating arm to the side surface of the vibrating arm, and a piezoelectric film on the lower electrode of the first surface of the vibrating arm. A piezoelectric film forming step for forming the upper electrode, and an upper electrode forming step for forming an upper electrode on the piezoelectric film.

［適用例８］上記適用例にかかる振動片の製造方法は、前記下部電極形成工程において、前記下部電極は、前記振動腕を囲んで形成されることが望ましい。
Manufacturing method of Application Example 8 In the resonator element of the application example, in the lower electrode forming step, the lower electrode, Rukoto formed surrounds the vibrating arms it is desirable.

［適用例９］上記適用例にかかる振動片の製造方法は、前記圧電膜形成工程において、
前記圧電膜は、前記振動腕を囲んで形成されることが望ましい。

[Application Example 9] A method for manufacturing a resonator element according to the application example described above includes:
The piezoelectric film, Rukoto formed surrounds the vibrating arms is desirable.

Claims

A resonating arm comprising a first surface and a second surface that are in a front-back relationship with each other; and a side surface that connects the first surface and the second surface;
A lower electrode provided continuously on the first surface and the side surface of the vibrating arm;
An upper electrode provided on the lower electrode of the vibrating arm;
Resonator element characterized by comprising a piezoelectric film provided between the lower electrode and the upper electrode.

The resonator element according to claim 1,
The resonator element , wherein the lower electrode is provided so as to surround the vibrating arm.

The resonator element according to claim 2,
The resonator element according to claim 1 , wherein the piezoelectric film is continuously provided on the first surface and the side surface of the vibrating arm.

The resonator element according to claim 2,
The piezoelectric film resonator element, characterized in that are provided et surrounds the vibrating arm.

In the resonator element according to any one of claims 1 to 4,
A resonator element comprising an insulating film between the piezoelectric film and the upper electrode.

In the resonator element according to any one of claims 1 to 5,
The vibrating arm includes an odd number of 3 or more,
Each of the vibrating arms vibrates in the thickness direction, and the adjacent vibrating arms vibrate in directions opposite to each other.

A resonating piece according to any one of claims 1 to 6 , and a container that houses the resonating piece,
The vibrator, wherein the vibrating piece is housed in the container in an airtight manner.

An outer shape etching step of etching an outer shape to form a vibrating arm having a first surface and a second surface and a side surface connecting the first surface and the second surface, the first surface and the second surface being in reverse relation to each other ;
A lower electrode forming step of forming a lower electrode continuously to the side surface from the first surface of the vibrating arm in the vibration arm,
Forming a piezoelectric film on the lower electrode of the first surface of the vibrating arm; and
Method of manufacturing a resonator element which comprises a an upper electrode forming step of forming an upper electrode on the piezoelectric film.

A method for manufacturing the resonator element according to claim 8 ,
In the lower electrode forming step,
The lower electrode, manufacturing method of the vibrator element, characterized in Rukoto formed surrounds the vibrating arm.

A method for manufacturing the resonator element according to claim 9 ,
In the piezoelectric film forming step,
The piezoelectric film, a manufacturing method of the vibrator element, characterized in Rukoto formed surrounds the vibrating arm.

The method of manufacturing a resonator element according to any one of claims 8 to 10 ,
A method of manufacturing a resonator element, comprising: an insulating film forming step of forming an insulating film between the piezoelectric film and the upper electrode.