JP2012023735A5 - Ultrasonic probe and ultrasonic imaging apparatus - Google Patents

Ultrasonic probe and ultrasonic imaging apparatus Download PDF

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JP2012023735A5
JP2012023735A5 JP2011162766A JP2011162766A JP2012023735A5 JP 2012023735 A5 JP2012023735 A5 JP 2012023735A5 JP 2011162766 A JP2011162766 A JP 2011162766A JP 2011162766 A JP2011162766 A JP 2011162766A JP 2012023735 A5 JP2012023735 A5 JP 2012023735A5
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diaphragm
ultrasonic
ultrasonic probe
probe according
electrode
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本発明は、超音波探触子および超音波撮像装置に関する。 The present invention relates to an ultrasonic probe and an ultrasonic imaging apparatus.

そこで、本発明は、前記問題点に鑑みてなされたものであり、簡単な構造で超音波送受信の性能を向上させることができる超音波探触子および超音波撮像装置を提供することを目的とする。 Accordingly, the present invention, the has been made in view of the problems, it aims to provide a can be that the ultrasonic probe and an ultrasonic imaging apparatus to improve the performance of the ultrasonic wave transmission and reception in a simple structure And

本発明に係る超音波探触子は、その内部または表面に第1の電極を有する基板と、その内部または表面に第2の電極を有するダイヤフラムとを、空隙を介して配置し
前記ダイヤフラムまたは前記第2の電極の表面または内部に、梁をそれぞれ具備した複数の超音波トランスデューサを平面状または曲面状に複数配列した超音波トランスデューサアレイを具備し、前記梁は、前記ダイヤフラムの形状に合わせて形成されている。
その他の手段については、後記する実施の形態で説明する。
An ultrasonic probe according to the present invention includes a substrate having a first electrode inside or on a surface thereof, and a diaphragm having a second electrode inside or on the surface, with a gap interposed therebetween ,
An ultrasonic transducer array in which a plurality of ultrasonic transducers each having a beam are arranged in a planar shape or a curved shape is provided on the surface or inside of the diaphragm or the second electrode, and the beam has a shape of the diaphragm. It is formed according to.
Other means will be described in an embodiment described later.

本発明によれば、簡単な構造で超音波送受信の性能を向上させることができる超音波探触子および超音波撮像装置を提供することができる。 According to the present invention, it is possible to provide an ultrasonic probe and an ultrasonic imaging apparatus that can improve the performance of the ultrasonic wave transmission and reception in a simple structure.

本実施形態においても、図15に示すように、アレイの長軸方向の素子幅をモードによって自由に変えられるように設定することは、本発明の超音波探触子が有する広帯域特性を十分に使いこなすという観点から有益である。なお、図15においては、複数の超音波トランスデューサをアレイ化方向と垂直な方向にのみ結線して多数の副素子を構成しておき、副素子の束ね方を変更することによってアレイの長軸方向の素子幅を変更するものであるが、図13(a)あるいは図13(b)に示すように結線された複数のダイヤフラム型の超音波トランスデューサからなる素子14を1つの副素子とし、副素子の束ね方を束ねスイッチによって変更することによって、アレイの長軸方向の素子幅をモードに応じて変更するようにしてもよい。 In this embodiment, as shown in FIG. 15, be configured to be freely changed by the mode of the long axis direction of the element width of the array is sufficiently wide band characteristic of the ultrasonic feeler element of the present invention It is useful from the viewpoint of mastering. In FIG. 15, a plurality of ultrasonic transducers are connected only in a direction perpendicular to the arraying direction to form a large number of subelements, and by changing how the subelements are bundled, the major axis direction of the array However, the element 14 composed of a plurality of diaphragm type ultrasonic transducers connected as shown in FIG. 13 (a) or 13 (b) is used as one sub-element. The element width in the long axis direction of the array may be changed according to the mode by changing the way of bundling with a bundling switch.

Claims (9)

その内部または表面に第1の電極を有する基板と、その内部または表面に第2の電極を有するダイヤフラムとを、空隙を介して配置し
前記ダイヤフラムまたは前記第2の電極の表面または内部に、梁をそれぞれ具備した複数の超音波トランスデューサを平面状または曲面状に複数配列した超音波トランスデューサアレイを具備し、前記梁は、前記ダイヤフラムの形状に合わせて形成されていることを特徴とする超音波探触子
A substrate having a first electrode in its interior or surface and a diaphragm having a second electrode in its interior or surface are disposed via a gap ,
An ultrasonic transducer array in which a plurality of ultrasonic transducers each having a beam are arranged in a planar shape or a curved shape is provided on the surface or inside of the diaphragm or the second electrode, and the beam has a shape of the diaphragm. Ultrasonic probe characterized by being formed according to .
前記梁は、長方形のダイヤフラムを横切るように複数形成されていることを特徴とする請求項1に記載の超音波探触子The ultrasonic probe according to claim 1, wherein a plurality of the beams are formed so as to cross a rectangular diaphragm . 長方形のダイヤフラムには、矩形の梁が形成されることを特徴とする請求項1に記載の超音波探触子。The ultrasonic probe according to claim 1, wherein a rectangular beam is formed on the rectangular diaphragm. 前記梁は、前記ダイヤフラムの内縁に沿って形成されることを特徴とする請求項1に記載の超音波探触子The ultrasonic probe according to claim 1, wherein the beam is formed along an inner edge of the diaphragm. 六角形のダイヤフラムには、六角形状の梁が形成されることを特徴とする請求項4に記載の超音波探触子。The ultrasonic probe according to claim 4, wherein a hexagonal beam is formed on the hexagonal diaphragm. 前記各々の超音波トランスデューサに、複数の梁を具備していることを特徴とする請求項1に記載の超音波探触子。The ultrasonic probe according to claim 1, wherein each of the ultrasonic transducers includes a plurality of beams. 前記結線で一纏まりに接続された複数の前記超音波トランスデューサを単位として、同じ単位に属する超音波トランスデューサの前記ダイヤフラム及び前記梁は、With the plurality of ultrasonic transducers connected together by the connection as a unit, the diaphragm and the beam of the ultrasonic transducers belonging to the same unit are:
同じ平面形状の多角形のダイヤフラムとされ、かつ、同じ梁構造とされることを特徴とする請求項1乃至請求項6のいずれか一項に記載の超音波探触子。  The ultrasonic probe according to any one of claims 1 to 6, wherein the ultrasonic probe has a polygonal diaphragm having the same planar shape and has the same beam structure.
請求項1乃至請求項7のいずれか一項に記載の超音波探触子を備えた超音波撮像装置。An ultrasonic imaging apparatus comprising the ultrasonic probe according to any one of claims 1 to 7. 基板と、該基板上に設けられた複数の超音波トランスデューサとを有する超音波探触子であって、An ultrasonic probe having a substrate and a plurality of ultrasonic transducers provided on the substrate,
前記複数の超音波トランスデューサは、下部電極と、上部電極と、該上部電極と共に振動するダイヤフラムと、前記下部電極と前記上部電極との間に設けられた空隙とを有し、当該ダイヤフラムはその表面又は内部に梁を有し、該梁は前記ダイヤフラムの形状に合わせて形成されていることを特徴とする超音波探触子。The plurality of ultrasonic transducers include a lower electrode, an upper electrode, a diaphragm that vibrates together with the upper electrode, and a gap provided between the lower electrode and the upper electrode, and the diaphragm Alternatively, the ultrasonic probe having a beam inside, the beam being formed in accordance with the shape of the diaphragm.
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