JP6397600B1 - POSITION CONTROL DEVICE, POSITION CONTROL METHOD, AND ULTRASONIC VIDEO SYSTEM - Google Patents

Abstract

An ultrasonic imaging system capable of acquiring a high-resolution inspection image on a desired inspection target surface even when inspecting a thick subject. A position control device is disposed opposite to a first ultrasonic probe that transmits ultrasonic waves to a subject and the first ultrasonic probe, and transmits a transmission signal transmitted through the subject. A processing unit for determining the position of the second ultrasonic probe to receive is provided. When the direction perpendicular to the surface of the subject is the ± Z direction, the direction orthogonal to the ± Z direction is the ± X direction, and the direction orthogonal to the ± Z direction and the ± X direction is the ± Y direction, The processing unit determines a position of the first ultrasonic probe in the ± Z direction, and determines a position of the second ultrasonic probe in the ± Z direction. [Selection] Figure 1

Description

  The present invention relates to a position control device, a position control method, and an ultrasound imaging system.

  2. Description of the Related Art Conventionally, an ultrasonic imaging device (SAT) that scans a subject (for example, a semiconductor element) by an ultrasonic probe and visualizes an inspection target surface (for example, a surface or an internal interface) based on a received signal. : Scanning Acoustic Tomograph).

  For example, in the reflection method, an ultrasonic probe is used to transmit ultrasonic waves from the ultrasonic probe to the subject, and the reflected waves reflected from the subject are transmitted by the ultrasonic probe. This is a method of receiving and visualizing the inspection target surface based on the displacement of the reflected wave (see FIG. 8). Japanese Patent Application Laid-Open No. 2004-228688 discloses an ultrasonic wave that can simultaneously image a plurality of bonding surfaces by adjusting the height of the probe so that the probe is focused between two predetermined bonding surfaces in a multi-junction semiconductor. A video device is disclosed.

  For example, in the transmission method, two ultrasonic probe units are used to transmit ultrasonic waves from one ultrasonic probe unit to the subject, and the transmitted waves transmitted through the subject are transmitted to the other ultrasonic probe. This is a method of visualizing the inspection object surface based on the displacement of the transmitted wave received by the touch portion (see FIG. 9). In Cited Document 2, by providing an ultrasonic shielding member in close contact with the end surface of the inspection object, the ultrasonic wave transmitted from the ultrasonic transmission surface diffracts on the ultrasonic reception surface, bypassing the inspection object. An ultrasonic inspection apparatus that suppresses arrival as a wave and improves inspection accuracy is disclosed.

Japanese Patent No. 5979861 JP 2013-127400 A

However, the reflection method described in Patent Document 1 has a problem in that as the inspection target surface moves away from the ultrasonic probe, the attenuation and multiple reflection of the ultrasonic wave inside the subject increase, and the resolution of the inspection image decreases. is there. Further, in the transmission method described in Patent Document 2, since the focal point of the ultrasonic probe is fixed to a specific inspection target surface, it is difficult to acquire a clear inspection image on the inspection target surface that is not in focus. There is a problem.
That is, the conventional ultrasonic imaging apparatus has a problem that it is difficult to obtain a high-resolution inspection image on a desired inspection target surface, particularly when inspecting a thick subject such as a semiconductor element having a multilayer structure.

  The present invention has been made to solve the above-described problems, and an ultrasonic imaging system capable of acquiring a high-resolution inspection image on a desired inspection target surface even when a thick subject is inspected. It is an issue to provide.

In order to solve the above problems, an ultrasonic imaging system of the present invention includes a first ultrasonic probe that transmits ultrasonic waves to a subject, and the first ultrasonic probe and the subject sandwiched between the first ultrasonic probe and the subject. Alternatively, a second ultrasonic probe unit that is arranged facing down and receives a transmission signal transmitted through the subject, and positions of the first ultrasonic probe unit and the second ultrasonic probe unit are determined. A position control device for controlling the first ultrasonic probe and the second ultrasonic probe to a position determined by the position control device, and imaging an examination target surface of the subject A direction perpendicular to the surface of the subject, the direction perpendicular to the ± Z direction, the direction perpendicular to the ± Z direction, the direction perpendicular to the ± Z direction, and the direction ± X Is set in the ± Y direction, the position control device, in the ± Z direction, the first ultrasonic probe A process of determining the position, in the ± Z direction, and processing for determining the position of the second ultrasonic probe unit, and performing. Other aspects of the present invention will be described in the embodiments described later.

  ADVANTAGE OF THE INVENTION According to this invention, even when it is a case where a thick test object is test | inspected, the ultrasonic image system which can acquire a high-resolution test | inspection image in a desired test object surface can be provided.

It is a figure which shows the structural example of the ultrasound imaging system which concerns on this embodiment. It is a figure which shows an example of a structure of the pulser and receiver which concern on this embodiment. It is a perspective view which shows a part of ultrasonic imaging system which concerns on this embodiment. It is sectional drawing which shows a part of ultrasonic imaging system which concerns on this embodiment. It is a figure which shows an example of a structure of the pulser and receiver which concern on this embodiment. It is a flowchart which shows an example of the control method by the position control apparatus which concerns on this embodiment. It is a figure which shows an example of the scanning method by the 1st ultrasonic probe part which concerns on this embodiment, and a 2nd ultrasonic probe part. It is a figure for demonstrating the reflection method. It is a figure for demonstrating the transmission method. It is a figure which shows an example of the positional relationship of the position of the defect with respect to the interface which concerns on this embodiment, and the position of a lens focus. It is a figure which shows an example of the waveform of the transmitted signal which concerns on this embodiment.

Embodiments of the present invention will be described below with reference to the drawings. The drawings referred to in the following description schematically show the embodiment, and therefore, the scale, interval, positional relationship, etc. of each member are exaggerated, or some of the members are not shown. There is a case. In addition, the scale and interval of each member may not match in the plan view and the cross-sectional view thereof. Moreover, in the following description, the same name and the code | symbol are showing the same or the same member in principle, and suppose that detailed description is abbreviate | omitted suitably. Further, in this specification, “upper”, “lower” and the like indicate relative positions between components, and are not intended to indicate absolute positions.
Embodiments of the present invention will be described below with reference to the drawings.
≪Configuration of ultrasound imaging system≫
First, the configuration of an ultrasound imaging system 100 according to the present embodiment will be described with reference to FIG. The ultrasound imaging system 100 is a system that visualizes the examination target surface of the subject 101 using a transmission method. Examples of the subject 101 include a semiconductor element having a multilayer structure having a plurality of stacked interfaces. In this specification, the direction perpendicular to the surface of the subject 101 is the ± Z direction, the direction orthogonal to the ± Z direction is the ± X direction, the ± Z direction, and the direction orthogonal to the ± X direction is the ± Y direction. To do.

  As shown in FIG. 1, the ultrasound imaging system 100 includes a first ultrasound probe unit 1, a second ultrasound probe unit 2, a position control device 3, a control device 4, a drive device 5, Is provided.

  The first ultrasonic probe 1 includes an encoder 11 that detects the scanning position of the first ultrasonic probe 1, a piezoelectric element 12 that mutually converts an electrical signal and an ultrasonic signal, and a lens (first lens). , Etc. The first ultrasonic probe 1 is immersed in water 6 having at least a tip portion filled in the water tank 7 and is arranged at a predetermined interval from the upper surface A of the subject 101. The first ultrasonic probe 1 functions as both a transmission probe and a reception probe. If the ultrasonic probe section has the same frequency and the same focal length, the first ultrasonic probe section 1 may be used as a transmission probe and the second ultrasonic probe section 2 may be used as a reception probe. Even if the ultrasonic probe 2 is used as a transmission probe and the first ultrasonic probe 1 is used as a reception probe, the characteristics of the ultrasonic imaging system 100 are not changed.

  The encoder 11 detects the scanning position (± X direction scanning position, ± Y direction scanning position, ± Z direction scanning position) of the first ultrasonic probe unit 1, and the first ultrasonic probe unit 1 A signal indicating the scanning position is output to the control device 4.

  The piezoelectric element 12 is, for example, a single focus type ultrasonic sensor. The piezoelectric element 12 is provided so as to face the upper surface A of the subject 101, and includes a piezoelectric film and electrodes formed on both surfaces of the piezoelectric film. When a voltage is applied between both electrodes, the piezoelectric film vibrates and an ultrasonic signal having a predetermined frequency is transmitted to the subject 101.

For example, when the piezoelectric film receives a reflected signal reflected by the upper surface A of the subject 101, a voltage is generated between both electrodes, converted into an electric signal (reflected signal), and transmitted to the position control device 3. Is done. When the intensity of the reflected signal received by the position control device 3 becomes maximum, the focal point of the first lens is focused on the upper surface A.
Further, for example, when the piezoelectric film receives a transmission signal transmitted through the subject 101 from the lower surface B to the upper surface A, a voltage is generated between both electrodes, and is converted into an electric signal (transmission signal). It is transmitted to the position control device 3.

  The second ultrasonic probe 2 includes an encoder 21 that detects the scanning position of the second ultrasonic probe 2, a piezoelectric element 22 that mutually converts an electrical signal and an ultrasonic signal, and a lens (second lens). , Etc. The second ultrasonic probe 2 is immersed in the water 6 filled in the water tank 7 and is arranged at a predetermined interval from the lower surface B of the subject 101. The second ultrasonic probe 2 functions as both a transmission probe and a reception probe.

  The second ultrasonic probe 2 is disposed to face the first ultrasonic probe 1. Specifically, the center point O1 of the first lens in the first ultrasound probe unit 1 and the center point O2 of the second lens in the second ultrasound probe unit 2 are arranged coaxially in the ± Z direction. The ultrasonic transmission (reception) surface of the first lens and the ultrasonic transmission (reception) surface of the second lens are arranged to face each other.

  The encoder 21 detects the scanning position (± X direction scanning position, ± Y direction scanning position, ± Z direction scanning position) of the second ultrasonic probe unit 2, and the second ultrasonic probe unit 2 detects the scanning position of the second ultrasonic probe unit 2. A signal indicating the scanning position is output to the control device 4.

  The piezoelectric element 22 is, for example, a single focus type ultrasonic sensor. The piezoelectric element 22 is provided so as to face the lower surface B of the subject 101, and includes a piezoelectric film and electrodes formed on both surfaces of the piezoelectric film. When a voltage is applied between both electrodes, the piezoelectric film vibrates and an ultrasonic signal having a predetermined frequency is transmitted to the subject 101.

For example, when the piezoelectric film receives a reflected signal reflected from the lower surface B of the subject 101, a voltage is generated between both electrodes and converted into an electric signal (reflected signal). Sent. When the intensity of the reflected signal received by the position control device 3 becomes maximum, the focus of the second lens is focused on the lower surface B.
Further, for example, when the piezoelectric film receives a transmission signal that has passed through the subject 101 from the upper surface A to the lower surface B, a voltage is generated between both electrodes, and is converted into an electric signal (transmission signal). It is transmitted to the position control device 3.

  Note that the frequencies of the transmission probe and the reception probe are preferably the same, and the frequency of the transmission probe is higher than the frequency of the reception probe (for example, the frequency of the transmission probe: 50 MHz, the frequency of the reception probe). : 25 MHz) is more preferable. When the inspection is performed by the ultrasonic imaging system using the transmission method, the inspection sensitivity can be increased by making the frequency of the reception probe lower than the frequency of the transmission probe. This is because when the ultrasonic wave passes through the subject, the high frequency component is more easily attenuated than the low frequency component, and the peak frequency of the ultrasonic wave that has passed through the subject is shifted to the lower side.

  The position control device 3 includes a scanning control unit 31, a timing control unit 32, a pulser 33, a receiver 34, a processing unit 35, an image generation unit 36, a storage unit 37, and a display unit (display device) 38. .

The position control device 3 determines the positions of the first ultrasonic probe 1 and the second ultrasonic probe 2 in the ± X direction, ± Y direction, and ± Z direction.
For example, the position control device 3 transmits a voltage pulse signal for ultrasonic excitation to the first ultrasonic probe 1, and based on the reflection signal received from the first ultrasonic probe 1, the first The position of the first ultrasonic probe 1 is determined so that the focal point F1 of the lens is aligned with the upper surface A of the subject 101.
Further, for example, the position control device 3 transmits a voltage pulse signal for ultrasonic excitation to the second ultrasonic probe 2, and based on the reflected signal received from the second ultrasonic probe 2, The position of the second ultrasonic probe 2 is determined so that the focal point F2 of the second lens is aligned with the lower surface B of the subject 101.
In addition, for example, the position control device 3 includes the first ultrasonic probe 1 and the second ultrasonic probe 2 so that the focal point F1 of the first lens and the focal point F2 of the second lens are in alignment with the inspection target surface. Determine the position. The inspection target surface is a predetermined interface in the subject 101 and is set in advance by the operator. For example, the operator can appropriately set a surface on which a fine pattern is formed, a surface on which a clear inspection image is desired, and the like as inspection target surfaces.

  Based on the signal input from the processing unit 35, the scanning control unit 31 controls the position signal for controlling the position of the first ultrasonic probe unit 1 in the ± X direction and the second ultrasonic probe in the ± X direction. A position signal for controlling the position of the touch part 2 is output to the control device 4. Similarly, the scanning control unit 31 is based on a signal input from the processing unit 35, and a position signal for controlling the position of the first ultrasonic probe unit 1 in the ± Y direction and a second signal in the ± Y direction. A position signal for controlling the position of the ultrasonic probe 2 is output to the control device 4. Similarly, the scanning control unit 31 is configured to control the position of the first ultrasonic probe unit 1 in the ± Z direction based on the signal input from the processing unit 35 and the second signal in the ± Z direction. A position signal for controlling the position of the ultrasonic probe 2 is output to the control device 4.

  Based on a signal input from the control device 4, the scanning control unit 31 detects the current scanning position (± X direction scanning position, ± Y direction scanning position, ± Z direction scanning direction) of the first ultrasonic probe unit 1. A signal indicating the scanning position (current scanning position information of the first ultrasonic probe 1) is output to the timing controller 32. The scanning control unit 31 also determines the current scanning position (± X direction scanning position, ± Y direction scanning position, ± Z direction) of the second ultrasonic probe 2 based on the signal input from the control device 4. (A scanning position in the direction) (current scanning position information of the second ultrasonic probe 2) is output to the timing controller 32.

  The timing control unit 32 controls the timing at which the first ultrasonic probe unit 1 and the second ultrasonic probe unit 2 transmit ultrasonic waves to the subject 101 based on the signal input from the scan control unit 31. Timing signal to be generated and output to the pulser 33.

The timing control unit 32 controls the timing at which the reflected signal reflected from the subject 101 and the transmitted signal transmitted through the subject 101 are received from the first ultrasonic probe 1 and the second ultrasonic probe 2. A timing signal is generated and output to the receiver 34.
For example, the timing control unit 32 generates a timing signal for controlling the timing at which the reflected signal reflected by the upper surface A of the subject 101 is received from the first ultrasonic probe 1 and outputs the timing signal to the receiver 34. . In addition, for example, the timing control unit 32 generates a timing signal for controlling the timing at which the reflected signal reflected by the lower surface B of the subject 101 is received from the second ultrasonic probe unit 2, and sends it to the receiver 34. Is output. Further, for example, the timing control unit 32 generates a timing signal for controlling the timing at which the transmission signal transmitted through the subject 101 from the upper surface A to the lower surface B is received from the second ultrasonic probe unit 2. And output to the receiver 34. Further, for example, the timing control unit 32 generates a timing signal for controlling the timing at which the transmission signal transmitted through the subject 101 from the lower surface B to the upper surface A is received from the first ultrasonic probe unit 1. And output to the receiver 34.

  The pulser 33 transmits a voltage pulse signal to the first ultrasonic probe 1 based on the timing signal input from the timing controller 32. Further, the pulser 33 transmits a voltage pulse signal to the second ultrasonic probe 2 based on the timing signal input from the timing controller 32.

  For example, as shown in FIG. 2, the connection between the pulsar 33 and the first contact a connected to the first ultrasonic probe 1 or the second contact connected to the pulsar 33 and the second ultrasonic probe 2. The connection between the pulser 33 and the first ultrasonic probe unit 1 or the second ultrasonic probe unit 2 is controlled by the first changeover switch SW1 that switches the connection with b. When the first changeover switch SW1 is connected to the first contact a, the pulser 33 transmits a voltage pulse signal to the first ultrasonic probe section 1. When the first changeover switch SW1 is connected to the second contact b, the pulser 33 transmits a voltage pulse signal to the second ultrasonic probe unit 2.

The receiver 34 includes an amplifier and an A / D converter. The amplifier amplifies the reflected signal or the transmitted signal. The A / D converter converts the reflected signal or the transmitted signal from an analog signal to a digital signal. To do.
The receiver 34 receives the reflected signal reflected from the subject 101 and the transmitted signal transmitted through the subject 101 from the first ultrasonic probe 1 based on the timing signal input from the timing control unit 32. The receiver 34 also receives from the second ultrasonic probe 2 the reflected signal reflected from the subject 101 and the transmitted signal that has passed through the subject 101 based on the timing signal input from the timing control unit 32. To do.

For example, as shown in FIG. 2, the connection between the receiver 34 and the third contact c of the first ultrasonic probe 1 or the connection between the receiver 34 and the fourth contact d of the second ultrasonic probe 2. The connection between the receiver 34 and the first ultrasonic probe 1 or the second ultrasonic probe 2 is controlled by the second changeover switch SW2 for switching between the two.
When the first change-over switch SW1 is connected to the first contact a and the second change-over switch SW2 is connected to the third contact c, the receiver 34 moves from the first ultrasonic probe 1 to the upper surface of the subject 101. The reflected signal reflected by A is received.
When the first changeover switch SW1 is connected to the first contact a and the second changeover switch SW2 is connected to the fourth contact d, the receiver 34 passes through the subject 101 from the second ultrasonic probe 2 ( A transmission signal transmitted from the upper surface A to the lower surface B is received.
When the first changeover switch SW1 is connected to the second contact b and the second changeover switch SW2 is connected to the third contact c, the receiver 34 passes through the subject 101 from the first ultrasonic probe 1 ( A transmission signal transmitted from the lower surface B to the upper surface A is received.
When the first changeover switch SW1 is connected to the second contact b and the second changeover switch SW2 is connected to the fourth contact d, the receiver 34 moves from the second ultrasonic probe 2 to the lower side of the subject 101. A reflected signal reflected by the surface B is received.

  As shown in FIG. 2, in the ultrasonic imaging system 100 according to the present embodiment, an ultrasonic transmission pulsar 33 and an ultrasonic reception receiver 34 are connected to the first ultrasonic probe 1 and the second ultrasonic probe. It can be shared by the touch part 2. Thereby, even if it has two ultrasonic probe probes, the size increase of the ultrasonic imaging system 100 can be suppressed.

  In the ultrasound imaging system 100 according to the present embodiment, the examination target surface of the subject 101 is visualized using the transmission method. Therefore, for example, when the first ultrasonic probe unit 1 functions as a transmission probe and the second ultrasonic probe unit 2 functions as a reception probe, the first changeover switch SW1 is connected to the first contact a. The second changeover switch SW2 may be connected to the fourth contact d. When the first ultrasonic probe unit 1 functions as a reception probe and the second ultrasonic probe unit 2 functions as a transmission probe, the first changeover switch SW1 is connected to the second contact b, The two changeover switch SW2 may be connected to the third contact c.

  The processing unit 35 determines the position of the first ultrasonic probe unit 1 in the ± X direction, ± Y direction, and ± Z direction based on the reflection signal input from the receiver 34, and the position signal is sent to the scanning control unit. To 31. Similarly, the processing unit 35 determines the position of the second ultrasonic probe unit 2 in the ± X direction, the ± Y direction, and the ± Z direction based on the reflected signal input from the receiver 34, The data is output to the scanning control unit 31.

For example, the processing unit 35 includes the first ultrasonic probe unit in the ± X direction, the ± Y direction, and the ± Z direction so that the focus of the first ultrasonic probe unit 1 is on the upper surface A of the subject 101. 1 position (first set position) is determined. The first set position means that in the ± Z direction, the distance between the distal end surface of the first ultrasonic probe 1 and the upper surface A of the subject 101 coincides with the focal length D1 of the first lens, and ± In the X direction and ± Y direction, the first ultrasonic probe 1 is a position directly above the subject 101 (see FIG. 7A).
The processing unit 35 detects the intensity of the reflected signal input from the receiver 34. When the intensity of the reflected signal becomes maximum, the processing unit 35 exceeds the first value in the ± X direction, ± Y direction, and ± Z direction at this time. The position of the acoustic probe unit 1 is determined as the first set position, and a position signal is output to the scanning control unit 31.

For example, the processing unit 35 performs the second ultrasonic probe in the ± X direction, the ± Y direction, and the ± Z direction so that the focus of the second ultrasonic probe unit 2 is aligned with the lower surface B of the subject 101. The position of unit 2 (second set position) is determined. The second set position means that in the ± Z directions, the distance between the distal end surface of the second ultrasonic probe 2 and the lower surface B of the subject 101 coincides with the focal length D2 of the second lens, and In the ± X direction and ± Y direction, the second ultrasonic probe 2 is a position immediately below the subject 101 (see FIG. 7A).
The processing unit 35 detects the intensity of the reflected signal input from the receiver 34. When the intensity of the reflected signal becomes maximum, the processing unit 35 exceeds the second value in the ± X direction, ± Y direction, and ± Z direction. The position of the acoustic probe unit 2 is determined as the second set position, and a position signal is output to the scanning control unit 31.

In addition, the processing unit 35 performs the first in the ± X direction, the ± Y direction, and the ± Z direction so that the focus of the first ultrasonic probe unit 1 is aligned with the predetermined interface C (examination target surface) of the subject 101. The position (first target position) of the ultrasonic probe 1 is determined. The first target position is a position in the ± Z direction where the distance between the tip surface of the first ultrasonic probe 1 and the surface to be inspected coincides with the focal length D1 of the first lens (FIG. 7B). )reference).
Similarly, the processing unit 35 performs the operations in the ± X direction, the ± Y direction, and the ± Z direction so that the focus of the second ultrasonic probe unit 2 is aligned with the predetermined interface C (surface to be inspected) of the subject 101. 2 Determine the position of the ultrasonic probe 2 (second target position). The second target position is a position where the distance between the tip surface of the second ultrasonic probe 2 and the inspection target surface coincides with the focal length D2 of the second lens in the ± Z direction (FIG. 7B). )reference).

  When the processing unit 35 performs the above-described processing, the position of the first ultrasonic probe unit 1 is appropriately adjusted to a position where the focus of the first lens matches the desired inspection target surface, and the second ultrasonic probe unit The position of 2 is appropriately adjusted to a position where the focus of the second lens matches a desired inspection target surface. As a result, even when a thick subject is inspected, both probes can be focused on a desired inspection target surface.

  The processing unit 35 also includes a first setting position, a second setting position, a first target position, a second target position, a focal length D1 of the first lens, a focal length D2 of the second lens, various programs and data, and various conditions. Various parameters are stored in the storage unit 37.

  Further, the processing unit 35 performs the first ultrasonic probe based on the transmission signal input from the receiver 34 (transmission signal when the ultrasonic wave passes through the subject 101 from the lower surface B to the upper surface A). The displacement of the transmission signal received by the unit 1 (for example, amplitude information of the transmission signal, time information of the transmission signal, etc.) is detected, and the detection signal is output to the image generation unit 36. Similarly, the processing unit 35 uses the second ultrasonic probe based on the transmission signal input from the receiver 34 (transmission signal when the ultrasonic wave passes through the subject 101 from the upper surface A to the lower surface B). The displacement of the transmission signal received by the touch unit 2 (for example, amplitude information of the transmission signal, time information of the transmission signal, etc.) is detected, and the detection signal is output to the image generation unit 36.

  The image generation unit 36 generates an image based on a signal (transmission signal) input from the processing unit 35. When the processing unit 35 performs the above-described processing, the positions of the first ultrasonic probe unit 1 and the second ultrasonic probe unit 2 are ± X direction, ± Y direction, and ± Z direction, respectively. It is adjusted to an appropriate position. Thereby, the image generation unit 36 can generate a high-resolution inspection image on a desired inspection target surface.

  The storage unit 37 can write and read various programs and data, and includes, for example, an HDD (Hard Disk Drive), an SSD (Solid State Drive), or the like. The storage unit 37 includes a first set position in the first ultrasonic probe unit 1, a second set position in the second ultrasonic probe unit 2, a first target position, a second target position, and a focal length D1 of the first lens. , The focal length D2 of the second lens, and the like are stored.

  The display unit 38 is configured by, for example, a liquid crystal display, an organic EL display, or the like. The display unit 38 displays calculation results, various inspection images, and the like on the display screen based on the data acquired from the image generation unit 36. The display unit 38 is, for example, a driving distance (first driving distance) from the first set position to the first target position in the first ultrasonic probe unit 1 and a second set position in the second ultrasonic probe unit 2. The driving distance to the second target position (second driving distance) and the like are displayed on the display screen. The first driving distance is a driving distance from the first set position to the first target position in the first ultrasonic probe 1. The second driving distance is a driving distance from the second set position to the second target position in the second ultrasonic probe 2.

  The control device 4 has an output side connected to the drive device 5 and an input side connected to the encoder 11, the encoder 21, and the position control device 3. Based on the signal input from the encoder 11, the control device 4 determines the current scanning position (± X direction scanning position, ± Y direction scanning position, ± Z direction scanning position) of the first ultrasonic probe 1. ) And a signal indicating the current scanning position of the first ultrasonic probe 1 is output to the position controller 3. Based on the signal input from the encoder 21, the control device 4 determines the current scanning position (± X direction scanning position, ± Y direction scanning position, ± Z direction scanning position) of the second ultrasonic probe 2. ) And a signal indicating the scanning position of the second ultrasonic probe 2 is output to the position controller 3.

The control device 4 generates a control signal for controlling the drive device 5 based on the position signal input from the position control device 3 and outputs the control signal to the drive device 5.
The control device 4 receives from the position control device 3 a position signal for controlling the position of the first ultrasonic probe unit 1 in the ± X direction, and the second ultrasonic probe unit 2 in the ± X direction. Based on the position signal for controlling the position, a control signal for controlling the X-axis scanning unit 51 is generated and output to the driving device 5.
Similarly, the control device 4 receives from the position control device 3 a position signal for controlling the position of the first ultrasonic probe unit 1 in the ± Y direction, and a second ultrasonic probe in the ± Y direction. Based on the position signal for controlling the position of the unit 2, a control signal for controlling the Y-axis scanning unit 52 is generated and output to the driving device 5.
Similarly, the control device 4 controls the first Z-axis scanning unit 53 based on the position signal input from the position control device 3 for controlling the position of the first ultrasonic probe unit 1 in the ± Z direction. A control signal for generating the signal is generated and output to the driving device 5.
Similarly, the control device 4 controls the second Z-axis scanning unit 54 based on a position signal input from the position control device 3 for controlling the position of the second ultrasonic probe unit 2 in the ± Z direction. A control signal for generating the signal is generated and output to the driving device 5.

The driving device 5 includes an X-axis scanning unit 51, a Y-axis scanning unit 52, a first Z-axis scanning unit 53, and a second Z-axis scanning unit 54, and includes the first ultrasonic probe unit 1 and the second supersonic unit. The acoustic probe 2 is driven.
The X-axis scanning unit 51 is driven and controlled in the ± X direction based on a control signal input from the control device 4 to move the first ultrasonic probe unit 1 and the second ultrasonic probe unit 2 in the ± X direction. To drive. The Y-axis scanning unit 52 is driven and controlled in the ± Y direction based on a control signal input from the control device 4, and moves the first ultrasonic probe 1 and the second ultrasonic probe 2 in the ± Y direction. To drive. The first Z-axis scanning unit 53 is driven and controlled in the ± Z direction based on a control signal input from the control device 4, and drives the first ultrasonic probe unit 1 in the ± Z direction. The second Z-axis scanning unit 54 is driven and controlled in the ± Z direction based on a control signal input from the control device 4 to drive the second ultrasonic probe unit 2 in the ± Z direction.

  Here, an example of a scanning method in the X-axis scanning unit 51, the Y-axis scanning unit 52, the first Z-axis scanning unit 53, and the second Z-axis scanning unit 54 will be described with reference to FIGS.

  The subject 101 is placed on the inspection object holder 102 and is disposed between the first ultrasonic probe 1 and the second ultrasonic probe 2. The inspection object holder 102 is made of a material that transmits ultrasonic waves, for example, a plastic material such as polyethylene or polymethylpentene, an acrylic resin, or the like.

  The mounting component 55 fixes the X-axis scanning unit 51 and the first Z-axis scanning unit, and the mounting component 56 fixes the X-axis scanning unit 51 and the second Z-axis scanning unit 54. The attachment component 55 and the attachment component 56 are integrated with each other by a fastener such as a screw. The probe holder 57 is a holder for fixing the first ultrasonic probe unit 1 and can be driven in the ± Z-axis direction via the first Z-axis scanning unit 53. The L-shaped metal fitting 58 is a metal fitting for fixing the second ultrasonic probe 2 and can be driven in the ± Z-axis direction via the second Z-axis scanning unit 54.

When the X-axis scanning unit 51 is driven in the arrow direction shown in FIG. 3, both the first ultrasonic probe unit 1 and the second ultrasonic probe unit 2 are driven in the ± X direction. When the Y-axis scanning unit 52 is driven in the arrow direction shown in FIG. 3, both the first ultrasonic probe unit 1 and the second ultrasonic probe unit 2 are driven in the ± Y direction. That is, the second ultrasonic probe 2 is driven following the first ultrasonic probe 1 in the ± X and ± Y directions.
On the other hand, when the first Z-axis scanning unit 53 is driven in the arrow direction shown in FIGS. 3 and 4, the first ultrasonic probe unit 1 is driven in the ± Z direction, and the second Z-axis scanning unit 54 is 3 and FIG. 4, the second ultrasonic probe 2 is driven in the ± Z direction. That is, in the ± Z direction, the first ultrasonic probe 1 and the second ultrasonic probe 2 can be driven independently.

  According to the position control apparatus 3 according to the present embodiment, the position of the first ultrasonic probe unit 1 is set to the position where the focus F1 is aligned with the upper surface A of the subject 101, and the position of the second ultrasonic probe unit 2 is set. , The position of the first ultrasonic probe 1 and the second ultrasonic probe 2 is set to the focus F1 and the focus F2 on the inspection target surface. The position is suitable. Thereby, since the focus of the 1st ultrasound probe part 1 and the focus of the 2nd ultrasound probe part 2 can be made to correspond in a desired inspection object surface, position control device 3 is S / N. A reception signal having a high ratio can be acquired, and a high-resolution inspection image can be generated.

  According to the ultrasound imaging system 100 according to the present embodiment, the position control device 3 allows the first ultrasound probe unit 1 and the second ultrasound probe unit 2 to be appropriate not only in the XY plane but also in the ± Z direction. Can be adjusted to any position. Thereby, even when a thick subject is inspected, the ultrasonic imaging system 100 capable of acquiring a high-resolution inspection image on a desired inspection target surface can be realized.

≪Modification≫
Next, a modification of the ultrasound imaging system 100 according to the present embodiment will be described with reference to FIG.

  In the ultrasound imaging system 100 shown in FIG. 1, the first ultrasound probe unit 1 can function as both a transmission probe and a reception probe, and the second ultrasound probe unit 2 The case where it can function as both a trusted probe and a receiving probe has been described as an example. However, the configuration of the ultrasound imaging system is not limited to this configuration.

For example, the first ultrasonic probe unit 1 may function as a transmission probe and a reception probe, and the second ultrasonic probe unit 2 may function as a reception-only probe. In this case, the pulser 33 is connected only to the first ultrasonic probe 1 and the receiver 34 is connected to the first ultrasonic probe 1 or the receiver 34 is connected to the second ultrasonic probe 2. What is necessary is just to provide the change-over switch which changes.
Further, for example, the first ultrasonic probe 1 may function as a reception-dedicated probe, and the second ultrasonic probe 2 may function as a transmission probe and a reception probe. In this case, the pulser 33 is connected only to the second ultrasonic probe 2 and the receiver 34 is connected to the first ultrasonic probe 1 or the receiver 34 is connected to the second ultrasonic probe 2. What is necessary is just to provide the change-over switch which changes.

  Hereinafter, with reference to FIG. 5, in the ultrasound imaging system according to the modification, the first ultrasound probe unit 1 functions as a transmission probe and a reception probe, and the second ultrasound probe unit 2 is received. The case where it functions as a dedicated probe will be described as an example.

  As shown in FIG. 5, the connection between the receiver 34 and the first contact e of the first ultrasonic probe 1 or the connection between the receiver 34 and the second contact f of the second ultrasonic probe 2 is switched. The connection between the receiver 34 and the first ultrasonic probe 1 or the second ultrasonic probe 2 is controlled by the changeover switch SW.

  The pulser 33 transmits a voltage pulse signal to the first ultrasonic probe 1 based on the timing signal input from the timing controller 32.

  The receiver 34 receives the reflected signal reflected from the subject 101 from the first ultrasonic probe 1 based on the timing signal input from the timing controller 32. For example, when the changeover switch SW is connected to the first contact e, the receiver 34 receives a reflected signal reflected from the upper surface A of the subject 101 from the first ultrasonic probe 1.

  Based on the timing signal input from the timing control unit 32, the receiver 34 receives a transmission signal that has passed through the subject 101 from the second ultrasound probe unit 2. For example, when the changeover switch SW is connected to the second contact f, the receiver 34 transmits the subject 101 from the second ultrasonic probe 2 (transmitted from the upper surface A to the lower surface B). Receive a signal.

  Based on the intensity of the reflected signal input from the receiver 34, the processing unit 35 adjusts the ± X direction, the ± Y direction, and the first ultrasonic probe unit 1 so that the focus of the first ultrasonic probe unit 1 is on the upper surface A of the subject 101. The position of the first ultrasonic probe 1 in the ± Z direction is determined. Further, the processing unit 35 performs the first super measurement in the ± X direction, the ± Y direction, and the ± Z direction so that the focus of the first ultrasonic probe unit 1 is aligned with a predetermined interface (examination target surface) of the subject 101. The position of the acoustic probe 1 is determined. Further, the processing unit 35 ± X so that the focus of the second ultrasonic probe unit 2 is aligned with a predetermined interface (examination target surface) of the subject 101 based on the intensity of the transmission signal input from the receiver 34. The position of the second ultrasonic probe 2 in the direction, ± Y direction, and ± Z direction is determined.

  That is, in the ultrasound imaging system according to the modification, when the transmission probe is focused on the upper surface A of the subject 101, the position control device 3 determines the position of the transmission probe based on the reflected signal. When the receiving probe is focused on the inspection target surface of the subject 101, the position control device 3 determines the position of the receiving probe based on the transmission signal.

  Also in the ultrasound imaging system according to the modification, the position control device 3 can adjust the first ultrasound probe 1 and the second ultrasound probe 2 to appropriate positions. Thereby, even when a thick subject is inspected, a high-resolution inspection image can be obtained on a desired inspection target surface.

  In the ultrasound imaging system according to the modification, when the subject 101 is thin, the receiver 34, the first ultrasound probe 1, and the second ultrasound probe 2 are not used. Can be connected via the first contact e, and the surface to be inspected can be visualized by a reflection method.

<< Operation of position control device >>
Next, with reference to FIGS. 6 and 7, the operation of the position control device 3 mounted in the ultrasound imaging system 100 according to the present embodiment will be described.

  FIG. 6 is a flowchart illustrating an example of a control method by the position control device 3 according to the present embodiment. FIG. 7 is a diagram illustrating an example of a scanning method by the first ultrasonic probe and the second ultrasonic probe according to the present embodiment.

  Hereinafter, in the ultrasound imaging system 100 according to the present embodiment, a case where the first ultrasound probe unit 1 functions as a transmission probe and the second ultrasound probe unit 2 functions as a reception probe will be described.

  In step S <b> 501, the position control device 3 drives and controls the X-axis scanning unit 51 and the Y-axis scanning unit 52 so that the first ultrasonic probe 1 is positioned immediately above the subject 101. The probe unit 1 is driven. Further, the position control device 3 drives and controls the X-axis scanning unit 51 and the Y-axis scanning unit 52, and the second ultrasonic probe so that the second ultrasonic probe unit 2 is located immediately below the subject 101. The unit 2 is driven.

  In step S <b> 502, the position control device 3 transmits a voltage pulse signal to the first ultrasonic probe unit 1, and based on the reflected signal reflected by the upper surface A of the subject 101, the first in the ± Z direction. The position of the ultrasonic probe 1 is determined. Then, the position control device 3 drives and controls the first Z-axis scanning unit 53, and the first ultrasonic probe unit is located at a position where the focal point F <b> 1 of the first ultrasonic probe unit 1 matches the upper surface A of the subject 101. 1 is driven (see FIG. 7A). When the focus of the first ultrasonic probe 1 is on the upper surface A of the subject 101, the intensity of the reflected signal received by the position control device 3 is maximized.

  In step S503, the position control device 3 transmits a voltage pulse signal to the second ultrasonic probe 2, and based on the reflected signal reflected by the lower surface B of the subject 101, the position control device 3 in the ± Z direction. 2 The position of the ultrasonic probe 2 is determined. Then, the position control device 3 drives and controls the second Z-axis scanning unit 54, and the second ultrasonic probe unit is located at a position where the focal point of the second ultrasonic probe unit 2 matches the lower surface B of the subject 101. 2 is driven (see FIG. 7A). When the focus of the second ultrasonic probe 2 is on the lower surface B of the subject 101, the intensity of the reflected signal received by the position control device 3 is maximized.

  In step S504, the position control device 3 drives and controls the first Z-axis scanning unit 53 so that the focal point F1 of the first ultrasonic probe unit 1 is aligned with the inspection target surface (predetermined interface C) of the subject 101. The first ultrasonic probe unit 1 is driven (see FIG. 7B).

  In step S505, the position control device 3 drives and controls the second Z-axis scanning unit 54, and the focal point F2 of the second ultrasonic probe unit 2 is at a position that matches the inspection target surface (predetermined interface C) of the subject 101. The second ultrasonic probe 2 is driven (see FIG. 7B).

  In step S <b> 506, the position control device 3 drives and controls the X-axis scanning unit 51 and the Y-axis scanning unit 52, and scans the inspection target surface by the first ultrasonic probe unit 1 and the second ultrasonic probe unit 2. Then, a voltage pulse signal for ultrasonic excitation is transmitted to the first ultrasonic probe unit 1.

  In step S <b> 507, the position control device 3 receives a transmission signal that has passed through the subject 101 from the upper surface A to the lower surface B from the second ultrasonic probe 2.

  In step S <b> 508, the position control device 3 generates an image based on the transmission signal received from the second ultrasonic probe unit 2.

  According to the above-described processing, the focal points of both probes can be substantially matched with each other on the desired inspection target surface. That is, the problem that occurred in the conventional transmission method that it is difficult to obtain a clear inspection image on the inspection target surface that is not focused by focusing not only the transmission probe but also the reception probe on the inspection target surface. Thus, a high-resolution inspection image can be generated on a desired inspection target surface.

  Here, referring to FIG. 7, the first ultrasonic probe 1 and the first ultrasonic probe 1 so that the focal points of the first ultrasonic probe 1 and the second ultrasonic probe 2 coincide on the desired inspection target surface. A case where the second ultrasonic probe 2 is adjusted to an appropriate position in the ± Z direction will be described.

  FIG. 7A is a schematic diagram illustrating a state in which the first ultrasonic probe 1 is located at the first set position and the second ultrasonic probe 2 is located at the second set position. FIG. 7B is a schematic diagram showing a state in which the first ultrasonic probe 1 is located at the first target position and the second ultrasonic probe 2 is located at the second target position.

  As shown in FIG. 7A, the position control device 3 drives and controls the first Z-axis scanning unit 53, and the position of the first ultrasonic probe unit 1 is changed to the first ultrasonic probe in the ± Z direction. The distance between the front end surface of the unit 1 and the upper surface A of the subject 101 is driven to a position (first set position) that matches the focal length D1 of the first lens. Further, the position control device 3 drives and controls the second Z-axis scanning unit 54 so that the position of the second ultrasonic probe unit 2 and the tip surface of the second ultrasonic probe unit 2 and the subject in the ± Z direction are controlled. 101 is driven to a position (second set position) where the distance from the lower surface B of the lens 101 matches the focal length D2 of the second lens.

  As shown in FIG. 7B, the position control device 3 drives and controls the first Z-axis scanning unit 53, and the position of the first ultrasonic probe unit 1 is changed to the first ultrasonic probe in the ± Z direction. The distance between the front end surface of the unit 1 and the surface to be inspected is driven to a position (first target position) that matches the focal length D1 of the first lens. Further, the position control device 3 drives and controls the second Z-axis scanning unit 54 so that the position of the second ultrasonic probe unit 2 and the tip surface of the second ultrasonic probe unit 2 and the inspection object in the ± Z direction Drive to a position (second target position) where the distance to the surface coincides with the focal length D2 of the second lens.

  At this time, the first drive distance (drive distance from the first set position to the first target position in the first ultrasonic probe 1) and the second drive distance (second set position in the second ultrasonic probe 2). The driving distance from the first target position to the second target position is equal to the distance from the upper surface A of the subject 101 to the lower surface B of the subject 101 (thickness of the subject 101). That is, the position control device 3 can focus both the transmitting probe and the receiving probe on a desired inspection target surface regardless of the thickness of the subject 101.

  In the state shown in FIG. 7B, when the first ultrasonic probe 1 transmits an ultrasonic wave to the subject 101, the ultrasonic wave passes through the portion as it is in a portion where there is no defect in the subject 101. . For this reason, the signal intensity of the transmitted signal that has passed through the subject 101 is increased in that portion. The second ultrasonic probe 2 receives a transmission signal having a high signal intensity.

  In the state shown in FIG. 7B, when the first ultrasonic probe 1 transmits ultrasonic waves to the subject 101, the ultrasonic waves are reflected by the defects in the portion where the defect exists in the subject 101. Is done. For this reason, the signal intensity of the transmitted signal that has passed through the subject 101 is reduced in that portion. The second ultrasonic probe 2 receives a transmission signal having a low signal intensity.

  That is, the position control device 3 can acquire a high-resolution inspection image on a desired inspection target surface based on the signal intensity of the transmission signal received from the second ultrasonic probe 2. Further, the position control device 3 not only acquires the inspection image of the defect existing on the desired inspection target surface, but also detects the inspection image of the defect present at the interface near the desired inspection target surface on the desired inspection target surface. It is possible to obtain an image having a slightly unclear outer edge from the inspection image of the existing defect.

≪Transmission signal waveform≫
Next, the waveform of the transmission signal will be described with reference to FIGS.

  As shown in FIG. 10A, when the interface h2 is defective and the focal point F1 of the first lens and the focal point F2 of the second lens are aligned with the interface h2, the waveform of the transmission signal is shown in FIG. It becomes a waveform. From the waveform shown in FIG. 11A, it can be seen that the amplitude e of the waveform is small, and a defect exists at a position where the focal point F1 of the first lens and the focal point F2 of the second lens match.

  As shown in FIG. 10B, when the interface h1 is defective and the focal point F1 of the first lens and the focal point F2 of the second lens are aligned with the interface h2, the waveform of the transmission signal is shown in FIG. It becomes a waveform. From the waveform shown in FIG. 11B, the amplitude f of the waveform is slightly large (f> e), and there is no defect at the position where the focal point F1 of the first lens and the focal point F2 of the second lens are aligned. It can be seen that a defect exists at any position 101.

  As shown in FIG. 10C, when there is no defect at the interface and the focal point F1 of the first lens and the focal point F2 of the second lens are aligned with the interface h2, the waveform of the transmission signal is the waveform shown in FIG. It becomes. From the waveform shown in FIG. 11C, the amplitude g of the waveform is very large (g> f), there is no defect at the position where the focal point F1 of the first lens and the focal point F2 of the second lens match, and It can be seen that no defect exists at any position of the subject 101.

  As shown in FIG. 10 (d), when the interface h1 is defective and the focal point F1 of the first lens and the focal point F2 of the second lens are aligned with the interface h1, the waveform of the transmission signal is shown in FIG. 11 (d). It becomes a waveform. From the waveform shown in FIG. 11D, it can be seen that the amplitude h of the waveform is small (h≈e), and there is a defect at the position where the focal point F1 of the first lens and the focal point F2 of the second lens match.

  By applying the ultrasound imaging system 100 according to the present embodiment, the operator inspects a defect existing in the deep portion of the subject, which has been difficult in the past, based on a high-resolution inspection image, The position of the defect can be easily identified. That is, it is possible to realize a particularly useful ultrasonic imaging system when an operator inspects a thick subject such as a semiconductor element having a multilayer structure.

DESCRIPTION OF SYMBOLS 1 1st ultrasonic probe part 2 2nd ultrasonic probe part 3 Position control apparatus 4 Control apparatus 5 Drive apparatus 33 Pulsar 34 Receiver 38 Display part (display apparatus)
100 Ultrasonic Imaging System 101 Subject A Upper Surface B Lower Surface C Predetermined Surface O1 First Lens Center Point O2 Second Lens Center Point a, e First Contact b, f Second Contact c Third Contact d First 4 contacts SW1 1st changeover switch SW2 2nd changeover switch SW changeover switch

Claims (12)

A first ultrasonic probe that transmits ultrasonic waves to the subject;
A second ultrasonic probe that is disposed to face the first ultrasonic probe and the subject so as to face up or down, and that receives a transmission signal transmitted through the subject;
A position control device for determining positions of the first ultrasonic probe and the second ultrasonic probe;
A control device for controlling the first ultrasonic probe unit and the second ultrasonic probe unit to positions determined by the position control device;
A display device that visualizes the surface to be examined in the subject ,
When the direction perpendicular to the surface of the subject is the ± Z direction, the direction orthogonal to the ± Z direction is the ± X direction, and the direction orthogonal to the ± Z direction and the ± X direction is the ± Y direction,
The position control device includes:
A process of determining a position of the first ultrasonic probe in the ± Z direction;
A process of determining the position of the second ultrasonic probe in the ± Z direction,
An ultrasonic imaging system characterized by that. A first ultrasonic probe that transmits ultrasonic waves to the subject, and a transmission signal that is disposed so as to face up or down across the first ultrasonic probe and the subject and transmitted through the subject comprising a processing unit for determining the position of the second ultrasonic probe unit for receiving,
When the direction perpendicular to the surface of the subject is the ± Z direction, the direction orthogonal to the ± Z direction is the ± X direction, and the direction orthogonal to the ± Z direction and the ± X direction is the ± Y direction,
The processor is
A process of determining a position of the first ultrasonic probe in the ± Z direction;
A process of determining the position of the second ultrasonic probe in the ± Z direction,
A position control device characterized by that. In the ± X direction and the ± Y direction, the second ultrasonic probe is driven following the first ultrasonic probe,
In the ± Z direction, the first ultrasonic probe and the second ultrasonic probe are driven independently.
The position control device according to claim 2 . The central point of the first lens in the first ultrasonic probe and the central point of the second lens in the second ultrasonic probe are arranged coaxially in the ± Z direction.
The position control device according to claim 2 or claim 3 , wherein The position controller is configured to drive the first ultrasonic probe and the second ultrasonic probe via a driving device.
A process of driving the first ultrasonic probe from a first set position to a first target position;
A process of driving the second ultrasonic probe from a second set position to a second target position;
The position control device according to claim 4 . A pulser for transmitting a pulse signal to the first ultrasonic probe and the second ultrasonic probe;
A receiver for receiving a reflected signal or a transmitted signal from the first ultrasonic probe and the second ultrasonic probe;
The pulser and the receiver are:
Shared by the first ultrasonic probe and the second ultrasonic probe;
The position control device according to any one of claims 2 to 5 , wherein A first changeover switch for switching connection between the pulsar and the first contact connected to the first ultrasonic probe, or connection between the pulsar and the second contact connected to the second ultrasonic probe; ,
A second switching switch for switching connection between the receiver and the third contact of the first ultrasonic probe, or connection between the receiver and the fourth contact of the second ultrasonic probe; ,
The receiver is
When the first changeover switch and the first contact point are connected and the second changeover switch and the third contact point are connected, the reflected signal is received from the first ultrasonic probe unit,
When the first changeover switch and the first contact are connected, and when the second changeover switch and the fourth contact are connected, the transmission signal is received from the second ultrasonic probe,
When the first changeover switch and the second contact point are connected, and when the second changeover switch and the third contact point are connected, the transmission signal is received from the first ultrasonic probe,
When the first changeover switch and the second contact point are connected, and the second changeover switch and the fourth contact point are connected, the reflected signal is received from the second ultrasonic probe.
The position control device according to claim 6 . A switch for switching connection between the receiver and a first contact connected to the first ultrasonic probe or a connection between the receiver and a second contact connected to the second ultrasonic probe; In addition,
The receiver is
When the changeover switch and the first contact point are connected, the reflected signal is received from the first ultrasonic probe unit,
When the changeover switch and the second contact are connected, the transmission signal is received from the second ultrasonic probe.
The position control device according to claim 6 . The processor is
A process of determining a first set position based on the signal intensity of the reflected signal transmitted from the pulser to the first ultrasonic probe and reflected from the upper surface of the subject;
A pulse signal is transmitted from the pulser to the second ultrasonic probe, and a process for determining a second set position is performed based on the signal intensity of the reflected signal reflected from the lower surface of the subject. The position control device according to any one of claims 6 to 8 , wherein A display device;
The display device displays a first driving distance in the first ultrasonic probe and a second driving distance in the second ultrasonic probe;
The position control device according to any one of claims 2 to 9 , wherein The sum of the first driving distance and the second driving distance is equal to the distance from the upper surface to the lower surface of the subject.
The position control device according to claim 10 . A first ultrasonic probe that transmits ultrasonic waves to the subject, and a transmission signal that is disposed so as to face up or down across the first ultrasonic probe and the subject and transmitted through the subject comprising the step of determining the position of the second ultrasonic probe unit for receiving,
When the direction perpendicular to the surface of the subject is the ± Z direction, the direction orthogonal to the ± Z direction is the ± X direction, and the direction orthogonal to the ± Z direction and the ± X direction is the ± Y direction,
Determining a position of the first ultrasonic probe in the ± Z directions;
A position control method comprising a step of determining a position of the second ultrasonic probe in the ± Z direction .

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