JP3040051B2 - Ultrasound imaging equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic image inspection apparatus, and more particularly, to an ultrasonic image inspection apparatus capable of obtaining a plurality of measurement images by one scan.

[0002]

2. Description of the Related Art An ultrasonic image inspecting apparatus (which includes an ultrasonic image searching apparatus using a focusing probe), which is one of the ultrasonic measuring apparatuses, has a structure in which the inside of a subject is B
It can be displayed as a scope image or a C-scope image. In order to obtain a clearer image, this type of imaging apparatus uses various measurement conditions such as the acoustic characteristics of an ultrasonic probe (hereinafter referred to as a probe), the speed of sound in a medium, and the temperature inside a subject at that time. It is necessary to perform a focusing operation for inputting and setting the focus of the probe at a desired depth position in the subject and a setting operation of a gate position and a gate width in accordance with the input.

[0003] In this type of device, the inspection target is
For example, when inspecting an electronic component such as an IC, it is necessary to obtain an interface image of a thin sample at a high resolution, such as a measurement of a bonding surface between a semiconductor chip and a lead frame.
In such a case, it is necessary to use an ultrasonic flaw detector excellent in amplification characteristics at a high frequency using a narrow-band probe having a high resonance frequency. In particular, focusing of the probe, gate position, and gate width are required. It is necessary to set the gate width appropriately, and in particular, it is required to set the gate width as small as possible.

In the inspection of an IC, the distribution of air bubbles in the molding resin, the bonding interface between the silicon chip and the molding resin, the bonding interface between the lead frame and the molding resin, the bonding interface between the silicon chip and the die pad, etc. In many cases, a subject is imaged and inspected at a plurality of depths.
Therefore, in order to evaluate a larger number of subjects, there is a demand to shorten the total drawing time while maintaining the image quality. In order to meet this demand, the following inspection methods have been conventionally performed. 1. A method of sequentially scanning a plurality of planes by increasing the main scanning speed and shortening the rendering time of one image. 2. A method in which a plurality of gates are electrically generated, reflected waves at different positions in the depth direction are sampled, and a plurality of images are obtained by one measurement scan.

[0005]

Normally, scanning is performed in the forward path and the return path. However, in the first method, the scanning is performed from the transmission of the ultrasonic wave until the reflected wave returns to the probe again. The measurement position is shifted due to the influence of the movement of the probe or the backlash of the scanning mechanism, so that the data sampling position is shifted between the forward path and the return path, and the image quality is degraded. If sampling is performed in only one direction so as not to impair the image quality, the return path becomes completely wasted time and the drawing time cannot be reduced.

Further, in the latter method, in this type of apparatus using a focus type probe, since only one point is focused, the depth in the depth direction sampled simultaneously is measured. Another image has a problem that the image is blurred out of focus. SUMMARY OF THE INVENTION An object of the present invention is to solve such a problem of the related art, and it is possible to reduce the total measurement time while maintaining the image quality on the inspection surface of the same subject having different depths. It is an object of the present invention to provide an ultrasonic image inspection apparatus capable of performing the above.

[0007]

A feature of the ultrasonic image inspection apparatus according to the present invention for achieving the above object is to detect an object having a plurality of surfaces to be inspected therein by using a focus type probe. The level of the echo obtained from the subject within the range of the gate set in accordance with the focal position is detected and used as a measured value, and display data is generated based on the measured value to obtain an inspection object corresponding to the scanning. In an ultrasonic image inspection apparatus for displaying a measurement image of a surface on a screen of a display, an XY image at least along an inspection target surface with respect to a subject is provided.
Main scan and sub-scan in the direction and the depth of the subject
Scanning in the Z direction along the direction
Scanning device having scanning and return scanning, and controlling the scanning device
Then, in the scanning in the XY directions, the scanning inclined in the Z direction is performed.
Display data based on the measured values
Tilt measurement display that displays a measurement image on the display screen
Means for the selected image portion in the measurement image
Focus on the position in the Z direction where the measurement was taken
Acquisition and storage of a plurality of units according to the selection of the video part
Focusing position acquisition means and a plurality of stored focusings
Assign a focusing position corresponding to the first inspection target surface of which the XY plane corresponding to the allowed positions as inspection target surface scan of the forward, fit focus corresponding to the second inspection target surface
Predetermined pitch in the sub-scanning by assigning so positioned scan back
Scans the first and second inspection target surfaces, generates display data of the first inspection target surface based on the measurement data in the forward scan, and performs the second inspection based on the measurement data in the return scan. child generates display data of the target surface
Scans the first and second inspection target surfaces respectively
One XY scan of the image corresponding to the one
And a probe control / image processing means which is obtained and displayed individually.

[0008]

As described above, the focus position is switched for the forward scan and the return scan in the plane scan, and the forward scan is performed.
Since the data of the second inspection surface is obtained on the first inspection surface and the return, even if the forward and return sampling positions are different, separate video data is obtained. In this case, by aligning the measurement data in the same scanning direction to form one image, it is possible to suppress or eliminate the shift in the scanning line before and after the measurement point in the direction perpendicular to the scanning direction, thereby increasing the speed. Even if two-dimensional scanning is performed, high-quality inspection images can be obtained, and two inspection images can be obtained by one plane scan. The sharpness of the image can be freely set by the pitch in the sub-scanning direction, and two clear measurement images can be easily obtained by scanning one screen .
In the inspection of an inspection target surface, for example, I
When inspecting electronic components such as C,
Can be up. Moreover, even if high-speed scanning is performed, display data is generated as an image of a different inspection surface for the forward and return images, and displayed separately, so that the conventional problem does not occur.

[0009]

FIG. 1 is a block diagram of an ultrasonic image inspection apparatus according to an embodiment of the present invention. FIG. 2 is a flowchart of the measurement process, FIG. 3 is an explanatory diagram of the focusing, and FIG.
(A) and (b) are explanatory diagrams showing the relationship between an echo waveform and a gate width, FIG. 5 is an explanatory diagram of a measurement image at the time of inclined scanning when the gate width is reduced, and FIG. 6 is a gate width. FIG. 7 is an explanatory view of a measurement image at the time of oblique scanning when FIG. 7 is widened, FIG. 7 is an explanatory view of the relationship between the height of the probe and the position of its focal point at the time of reciprocal scanning, and FIG. FIG. 9 is an explanatory diagram of a display state. In FIG. 1, reference numeral 20 denotes an ultrasonic image inspection apparatus, and reference numeral 1 denotes a scanning mechanism having an XYZ moving mechanism. The focus type probe 3 is attached to the scanning mechanism 1 and performs main scanning of the subject 17 in the Y direction and sub scanning in the X direction.

[0010] The ultrasonic image inspection apparatus 20 obtains a measurement value at which an A-scope image is obtained at each measurement point by this XY scanning, and based on this, displays display data of the B-scope image and display data of the C-scope image. Generate B scope image or C
Display the scope image. The subject 17 in this embodiment is an electronic component such as an IC, and as shown in FIG. 3, a surface of a lead frame or an IC chip which is a specific surface to be inspected at two places at a certain depth from the surface. And a bonding surface with a ceramic substrate or pad to which the substrate is adhered. Here, images of these two locations are obtained simultaneously.

The scanning mechanism 1 is controlled by a scan control device 2, and the scan control device 2 is connected to an image processing device (probe control / image processing means) via an interface 8.
T) is controlled by 11. The probe 3 is connected to the ultrasonic flaw detector 4. The ultrasonic flaw detector 4 is a pulsar
It is composed of a receiver and the like. That is, the probe 3 is driven by sending a pulse signal from the transmission terminal to the probe 3 at a predetermined measurement cycle in response to a control signal from the image processing apparatus 11. The subject 17 responds to the ultrasonic waves generated at this time.
The probe 3 converts the echo obtained from the
The converted electric signal is received from the probe 3 as an echo reception signal at its reception terminal. Then, the signal is amplified and further detected, and the obtained signal is sent to the peak detection circuit 5 and the time measurement circuit 6.

A peak detection circuit 5 gates a predetermined position from the detected echo reception signal to detect a peak value of a necessary echo portion, and outputs the peak value to an A / D conversion circuit 7. The gate position depends on a setting signal received from the image processing device 11 via the interface 8. The peak detection circuit 5 sets the gate by detecting, for example, a surface echo and counting the time according to the setting signal.

The time measuring circuit 6 is a circuit for measuring the elapsed time after the detection of the surface echo. The time measuring circuit 6 calculates the elapsed time from the surface echo to the data measurement for each measurement data, and calculates the elapsed time via the interface 8. To send to.
The A / D conversion circuit 7 converts the analog signal of the peak value obtained according to the control signal from the image processing device 11 into, for example,
It is converted into a digital value in 256 stages of 8 bits. This digital value is stored in the microprocessor (MP) of the image processing device 11.
U) 9 is sent to the bus 14 as input data so that it can be processed.

In the above configuration, the ultrasonic image inspection apparatus 2
0 indicates that the probe 3
Scans the subject 17 on the XY plane by so-called reciprocating scanning in the Y direction, in which the scanning is performed in the X direction after scanning one line in the Y direction, and scanning is performed in the Y direction in the opposite direction. In this scanning, a peak value is detected by the peak detection circuit 5 for each measurement point assigned at a predetermined pitch, and the MPU 9 captures the peak value in the form of a digital value. The MPU 9 sequentially stores the data of these peak values in the memory 1 corresponding to each measurement point.
0 is stored.

In the measurement for focusing at two places, which will be described later, in the X direction or Y direction in the XY plane scanning,
The scanning in the Z direction is also performed in accordance with the scanning of one line in the direction, and the inclined scanning, which is inclined in the depth direction (Z direction), is performed. A specific example of the tilt scanning will be described later.
When the MPU 9 stores the measurement data in the memory 10, an area for storing identification information corresponding to each measurement point is provided in the memory 10, and measurement areas obtained from each measurement point corresponding to the identification information are provided. Data and the like can be stored.

An operation panel (not shown), a memory 10 storing various programs and data, an image memory 12, a display 13 and the like are connected to the bus 14 in addition to the microprocessor 9. The display 13 has a touch screen 15 mounted on the screen. The touch screen 15 is connected to the bus 14 via a touch screen interface 16. Therefore, the touch position is changed to MP by interrupt processing.
Read by U9. The touch screen 15 provides positional information on the screen of the selected display video portion in the present invention.

The memory 10 has a slope scanning program 10a, a depth position switching plane scanning program 10b,
Focusing program 10c, sound velocity calculation program 10
Various programs such as d, a gate operation setting program 10e, and a display processing program are stored. And
In the parameter storage area 10f, the inclination scanning function Zs
= F (x), Zs = f (y), etc. are stored.

The slope operation program 10a sets the initial position of the probe especially when the initial position is not specified. When this is executed by the MPU 9, M
The PU 9 has a positional relationship between the focal length of the probe 3 and the subject 17 previously input from the operation panel (usually, since the subject 17 is arranged at the bottom of a predetermined water tank, its thickness and the like are input from the operation panel. This determines the positional relationship.) First, at the measurement start point,
The probe 3 is positioned by calculating the Z coordinate position (height) of the probe 3 so that the focal point is positioned immediately below the surface of the subject 17 (see position A in FIG. 3).

If the position is specially set, the probe 3 is positioned in the Z direction according to the position setting. Except in such a case, this position becomes the reference position (initial position) for the tilt scanning. Then, at the start of the measurement, the MPU 9 updates the measurement point in the Y direction (or the X direction) from the coordinate position of the measurement point in the Y direction (or the X direction) according to the update of the measurement point in the Y direction (or the X direction). An operation is performed in accordance with (Zs = f (x)) to calculate a position coordinate Zs of the Z coordinate. Further, M
The PU 9 scans the Z-direction along with the scanning in the Y-direction (or X-direction).
Control of tilt scanning for scanning in the Z direction is performed according to the calculation result of the coordinates. At this time, the coordinates in the Z direction at which the probe 3 is positioned are determined by the values calculated by the above-described tilt scanning function.

The following description focuses on an example in which scanning in the depth direction is performed in accordance with scanning in the Y direction. The same applies to the case where scanning in the depth direction is performed in accordance with scanning in the X direction. In this case, the inclination scanning function is Zs = f
Since it is only (x) and there is no substantial difference, the explanation is omitted. Here, the gradient scanning function f
When (y) is a linear function, the probe 3 moves in the Z direction (height direction) at a predetermined pitch in accordance with the coordinate update in the Y direction. As a result, the probe 3 normally approaches the subject 17 at a predetermined pitch in accordance with the scanning in the Y direction. As a result, the subject 17 receives a plane scan inclined from the side by the probe 3.

The subject 17 has two adjacent bonding surfaces 17.
This will be described in detail with reference to FIG. 3 by taking the case of having a and 17b as an example. When the reference position is at the reference position, the subject surface is in focus (position A), and the focus position gradually decreases. Then, it is aligned with the joining surface 17a (position B), is aligned with the joining surface 17b (position C), and further focuses on the inside of the subject 17 (position D). FIG. 4A shows the relationship between the echo waveform and the gate at the position B, and FIG. 4B shows the relationship between the echo waveform and the gate at the position C. Here, T is a launch wave, S is a surface echo, Fa is a reflected echo from the joint surface 17a, Fb is a reflected echo from the joint surface 17b, G and G 'are gates, and these are time axes t.
Are shown along.

Then, the focusing program 10c is
Display 1 specified by touch screen 15
The measurement point closest to the X-coordinate position on the screen of screen 3 (when the pixel of the display image and the measurement point correspond one-to-one, the pixel is specified so that it matches the measurement position. ) Is obtained, and the Z coordinate on the scanning of the probe 3 is obtained from the tilt scanning function f (x), and the probe 3 is positioned at that position.

Depth position switching plane scanning program 10b
Is a two-dimensional scanning program, in which scanning is performed at a first focal point, and scanning is performed at a second focal position. That is, the MPU 9 executes this program to execute M
The PU 9 is set at a position where the Z coordinate (height) of the probe 3 is different between going and returning. First, a forward main scan is performed at a predetermined pitch in the Y direction while fixed at the first height (Z coordinate), and the height of the probe is moved from the first position to the second position, and X Sub-scan in the direction. And
The main scanning is performed at a predetermined pitch in the -Y direction. In addition,
The slope scanning program 10a is also a plane scanning program 10b.
The measurement pitches in the X direction and the Y direction are also measured at a preset distance. The measurement pitch in the Y direction may be the same as the measurement pitch in the X direction, or may be coarser.

The sound speed calculation program 10e is a program for calculating the sound speed of the subject 17 from the data measured by the tilt scanning and the time measured by the time measurement circuit 6 for the data. As a specific example with reference to FIGS. 3 and 4, the water distance at the focal point on the surface of the subject 17 (in this case, the focal length of the probe 3 is known) and the focal point on the joining surface 17a When the focal length is sufficiently large compared to the transducer diameter of the probe between the difference dz from the water distance at the time, the difference df between the focal depth inside the subject 17 and the sound speed C17 of the subject and the sound speed Cw of the water. There is a method of calculating the speed of sound by utilizing the fact that (C17 / Cw) and (dz / df) are substantially equal.

This is because, since the incidental conditions are usually satisfied, they are equally placed.
Using the fact that the elapsed time tsf up to 7a is (2 × df / C17), the formula is modified. Then, the sound speed C
17 is obtained as the square root of (2 × Cw × dz / tsf).

The elapsed time tsf is determined by the time measurement circuit 6
The ultrasonic measurement is always measured and stored, and the corresponding value may be extracted and used later, or may be measured after a position to be measured is specified. Then, the time tp of the gate position from the surface wave S from the elapsed time tsf is set in a range including the defect wave Fa. This setting may be automatically calculated as tp = tsf-ta (where ta is a set value), or the time value ta is manually adjusted by an operation from the operation panel to select the gate position tp. You may.

The gate operation setting program 10e is a program for calculating the width of the gates G, G 'and the like (see FIG. 4). When the sound speed of the subject 17 is unknown, the gate is set to a wide width (gate G ′), and after the sound speed of the subject 17 is determined, the gate is set to a narrow width (gate G). If the sound speed is determined, the accurate refractive index can be calculated, so that the focal position inside the subject can be accurately predicted. And
If the focal position can be accurately predicted, the measurement can be reliably performed without missing the focal position even if the gate width is narrow.

By the way, the image obtained by the above-described oblique scanning is a plane image (herein, referred to as an oblique image) which is seen through in the depth direction in which the focal point of the probe 3 gradually becomes deeper with the forward scanning. become. Each pixel of this image and the coordinate position on the Z-axis of the scanning mechanism (Z-coordinate value on scanning), that is, the interval between the subject 17 and the probe 3 are associated with each other by the inclination function f (y). I have. Therefore, the Z coordinate on the previous scan can be easily obtained. Note that the calculation of the Z coordinate does not depend on the inclination function f (y).
The position (height) of the Z coordinate of the probe 3 may be stored in the memory 10 in correspondence with the measurement of each measurement point, and a correspondence between the measurement point and the height of the probe 3 may be adopted. When the measurement points correspond to pixels, data of the height of the probe 3 may be stored in the memory 10 corresponding to the display pixels of the display 13.

Next, a description will be given, with reference to the flowchart of FIG.
First, the processing of FIG. 2 starts when the simultaneous measurement function key is input at a plurality of locations, and in that step, initial information such as the focal length of the probe 3 and the thickness of the subject 17 is input from the operation panel. On the other hand, in a predetermined area of the memory 10, setting values most frequently used as an ultrasonic image inspection apparatus are stored in advance with respect to the generation cycle of the transmission pulse of the ultrasonic flaw detector 4 and the gate width G ′ of the peak detection circuit 5. I have.

Therefore, at this time, the MPU 9 refers to the setting data and sets necessary setting data for various circuits via the interface 8. For example, at this time, the gate width for peak detection is set to a period of about 0.1 μs to several μs. These set values are variable, but there is no functional problem even if the set values are not changed. Therefore, there is no need to change the wide gate width G 'to another value unless there is knowledge about ultrasonic measurement. .

The gate position is set in accordance with the focal position of the probe 3 and is set as the time after the detection of the surface echo. For the set time, in the case of the tilt scanning in the Y direction, each measurement position of the Z coordinate determined by the tilt function according to the scanning distance in the Y direction is obtained, and the focal position of the probe 3 is determined based on the obtained position. To calculate the time for gate setting. The gate operation setting program 10e also performs such processing. The calculation result is provided to the peak detection circuit 5 via the interface 8 by the MPU 9 corresponding to the tilt scanning.

In the next step, the probe 3 is first positioned at the measurement start position (initial position). That is, the distance between the subject 17 and the probe 3 is set as a reference position in the height direction of the probe 3 so that the focal point of the probe 3 is equal to the distance immediately below the surface thereof (see position A in FIG. 3). In a step, the process enters a loop for waiting for the input of a measurement start key on the operation panel, and detects whether or not to start scanning by inputting the key.

When the key is pressed, in the next step, the slope scanning program 10a is started to start the slope scanning measurement, and the slope scanning program 10a of the MPU 9 is started.
As a result, the subject 17 is subjected to tilt scanning together with updating of the measurement point in the Y direction (update of the measurement position). As a result, X
Each time the scanning of one line in the direction is completed, the pitch moves in the Y direction by one pitch, and the distance between the subject 17 and the probe 3 gradually approaches to perform the inclined scanning.

The multi-gradation data of the peak value obtained corresponding to each measurement point in accordance with the XY scanning of the tilt scanning in the Y direction is calculated based on the XY coordinates of the current scanning position in each case. Is stored as the display data at the address of the image memory 12 corresponding to. The display data stored in the image memory 12 is then transferred to the video memory of the display 13, and the image is displayed under the control of a controller built in the display 13. The image displayed at this time is a flaw detection image when the tilt scanning is performed in the depth direction.

By the way, since this is a measurement image under the gate G 'having a wide width, the inside of the subject 17
When the two bonding surfaces 17a and 17b are close to each other, the reflected echoes Fa and Fb from these surfaces enter the gate G 'at the same time and cannot be distinguished sharply. For this reason, in this measurement image, the position B (where the bonding surface 17
Although a) is relatively clear, the position C (joining surface 17b) is blurred due to the influence from the joining surface 17b.

In the next step, the focusing program 10c is started, and the operator designates a clear display position on the screen to perform focusing. Originally, it is desired to designate the position B and the position C as targets. However, since the position of the position B is also in a state where the gate width is wide, it is not always possible to designate the position reliably and the position C is also blurred. If the touch screen 15 is touched corresponding to the position B which is a relatively clear display position, the process proceeds to a step. Then, an interrupt signal due to this touch is input to the MPU 9 via the interface 16. As a result, in this step, the MPU 9 performs a focusing process.

That is, when receiving the interrupt signal, the MPU 9 determines the display coordinates of the position B displayed on the display 13 from the position signal from the touch screen 15, extracts its Y coordinate, and extracts the extracted measurement position. , The Z coordinate on the scan is calculated according to the inclination function f (y), and the probe 3 is positioned at that position. When the image is clear,
Although the focus position can be almost certainly selected, it is also possible that the focus position is shifted by touching. Therefore, here, this position is set to the probe 3 with respect to the bonding surface 17a corresponding to the position B.
It is supposed that the height position is in focus.

In the next step, a loop for waiting for an input of a key on the operation panel is entered, and it is determined whether or not two simultaneous measurements are to be made, based on the input key. In the case where the image of the touch position in FIG. 6 is clear and only the joint surface 17a is measured, it is not necessary to perform the tilt measurement again since the focusing has already been completed. In this case, the process proceeds to step (14). . In the case of simultaneous measurement of two places of the joint surface 17a and the joint surface 17b,
If the YES condition is satisfied, the process proceeds to the step for performing the inclination measurement again.

In the step, the sound velocity calculation program 10
d is started. Then, first, the elapsed time tsf for the currently focused joint surface 17a is measured. Next, in step S10, the sound speed calculation program 10d calculates the sound speed C17 of the subject 17 by the method described above. Further, the gate calculation setting program 10e resets the gate to the gate G having a small width based on the fact that the sound speed C17 is found. Even if the width of the gate is narrow, the refractive index and the like become clear when the sound speed is determined, so that the focal position can be accurately predicted. Therefore, the gate can be surely corresponded to the focal position. Further, since the width of the gate is narrow, the defect echoes Fa, F
b are clearly separated (see FIG. 4G).

In step (10) and step (11), the same processing as in step and step is repeated, the inclination is measured again, and the inspection image of the slope is displayed again. Here, the entire surface is re-measured in order to use the same program. However, only the portion after the position B focused at the step may be re-measured and displayed again. In this case, the program is slightly complicated, but the processing time is shortened and the working efficiency is good. Then, at this stage, the height of the probe specified earlier is stored in the memory as the first focal position. In this way, the flaw detection image measured and displayed under the gate G having a narrow width has improved resolution. Therefore, as shown in FIG.
Each of b is clearly displayed. That is, not only the position B corresponding to the bonding surface 17a but also the bonding surface 17b
, A clear display also appears at the position C corresponding to.

When the position B and the position C have become clear in this way, in steps (12) and (13), the touch screen 15
, The operator sequentially specifies clear display positions B and C on the screen. Thereby, the focus positions of the display position B and the display position C are stored in the memory. At this time,
Assume that the display position B is specified first, and then the display position C is specified. The first designated display position B is assigned to the outgoing scan as the first probe position. The next designated display position C is assigned to the return scan as the second probe position. As described above, when only the portion after the position B is re-measured and re-displayed,
In FIG. 5, the touched position becomes the next probe position (focal position). At this time, only the position C is touched, and this is stored in the memory as the second probe position.

In the next step (14a), the MPU 9
Whether or not to start scanning is detected by an input waiting loop of a scan measurement start key on the operation panel. When this key is input, in the next step (15a), the depth position switching plane scanning program 10b is started, and the MPU 9 fixes the probe 3 at the first probe position for the forward scanning. Then, a plane scan by normal XY scanning is performed from the measurement start position. When the main scanning of one line in the Y direction is completed, the probe 3 is moved to a second probe position, which is the second probe position, and is fixed in height, and one pitch of sub scanning is performed in the X direction. At the same time, return scanning in the −Y direction is performed. By such repetition, scanning is performed at the focal length corresponding to the display position B, and an image of the going is collected. On the return, scanning is performed at a focal length corresponding to the display position B, and a return image is collected. When the XY scanning in the predetermined range is completed, the next step (16)
In a), outgoing data and returning data are individually extracted, and two images are displayed at the top and bottom of one screen as shown in FIG. However, the width of this image in the X direction is １ ／.

As described above, when focusing at two locations, the operator can measure the depth to be measured from the obtained focusing image (which results in a slope image inclined with respect to the XY plane). A clear part of the vicinity of
Simply touch two places on the touch screen 15 to get 2
Focusing at the point is completed. The MPU 9 obtains the position of the measurement point in the X direction from the position coordinates in the X direction of the pixels corresponding to the two touched places, and from this measurement position in the X direction, the inclination function Zs = f (x) (or Zs = f ( y)) to determine the measurement positions in the Z direction, and determine the MP position according to the coordinate values.
U9 controls the movement of the Z-axis of the scanning mechanism 1 so that the forward and backward heights of the probe 3 are acquired, and the interval between the probe 3 and the subject 17 is set in each of the forward and backward directions.

If two clear images are obtained in the first tilt scanning, the tilt scanning with a narrow gate width is not necessary, and may be omitted. If only one point is clear, it is stored in the memory as the first focal position, and the next tilt scan is performed after that, and the second focus scan is performed.
If the focal positions are determined and sequentially stored in the memory, the range of the second inclined scanning is reduced, so that the time can be reduced. Further, each of the displayed images may be displayed on another screen. In such a case, the image at the first focus position is obtained by converting the same data as the data acquired in the forward scan into data for the return scan.
It is sufficient to construct display data for one screen as Y-direction scanning for lines, and the image at the second focal position is obtained by converting the same data as the data collected in the returning scanning into data for the outgoing scanning, for two lines. By constructing display data for one screen as the Y-direction scanning, each image can be displayed in the size of one screen. As described above, if the tilt scanning is performed with a wide gate width which is wide and then the tilt scanning is performed with a narrow gate width, it is possible to perform one-time focusing by bringing the reflecting surfaces close to each other as in a multilayer structure or the like. Is effective when it is difficult to obtain a clear image of a target portion. Therefore, even in the case where there is a large reflective portion in addition to the measurement target before and after the measurement target position in the depth direction, even without specific technical knowledge about ultrasonic waves, electronic measuring instruments, etc., it is extremely easy. Focusing of the ultrasonic image inspection device can be performed.

As described above, the method of designating focused coordinates in the embodiment is based on the touch screen. However, this is not limited to the touch screen, but may be performed using a mouse, a keyboard (particularly, a cursor movement key or the like) or the like. It may be a coordinate input. The tilt function in the embodiment determines the measurement position in the Z direction, which is the depth direction, in accordance with scanning in either the X or Y direction. The tilt function is only one specific example of the relation information for obtaining the correspondence between the position of the obtained measured value in the Z direction and the display data on the screen generated from the obtained measured value. This may be any information as long as it is relational information that can determine the position in the depth direction from which the measured value is taken from the position of the image selected on the screen, and does not need to be a function. . For example, the measurement position coordinates may be managed in the form of a table corresponding to the identification information provided corresponding to the measurement points.

In the embodiment, a two-dimensional image is obtained by two-dimensional scanning in the X and Y directions. However, if the image obtained by scanning one line or several lines in the Y direction or the X direction is clear, the image is designated accordingly. You can also. Therefore, when simultaneously measuring three or more inspection surfaces, each line of the reciprocal scanning is allocated and scanned every N times (N is an integer of 3 or more), and each measurement data is obtained every N lines. A display image may be constructed by extracting each image as data. The same holds true not only when the probe approaches the subject but also when the probe is gradually separated from the closest approach. The directions of X, Y, and Z are determined relative to the subject and are not absolute.

In the embodiment, the inclination scanning is performed to obtain the focus position, and the height of the reciprocating scanning probe is obtained by selecting an image. However, the height of the reciprocating probe is, for example, that of an oscilloscope. Observation of the reflected waveform may be made manually. Further, in the embodiment, the peak value of the echo is detected. However, this is not limited to the peak.
What is necessary is just to detect an echo level.

[0048]

As can be understood from the above description, according to the present invention, in the forward scan and the return scan in the plane scan, the focus position is switched each time, the first inspection surface and the return scan are performed. Since data of the second inspection surface is obtained, a plurality of inspection images can be obtained simultaneously by one plane scan. Since the sharpness of the image can be freely set by the pitch in the sub-scanning direction, two clear measurement images can be easily obtained by scanning one screen .
In the inspection of objects with elephant surfaces, for example, electronic devices such as ICs
Improve the inspection efficiency when inspecting parts.
Can be.

[Brief description of the drawings]

FIG. 1 is a block diagram of an ultrasonic image inspection apparatus according to one embodiment of the present invention.

FIG. 2 is a flowchart of the measurement process.

FIG. 3 is an explanatory diagram of the focusing.

4A is an example of an echo waveform at a position B, and FIG. 4B is an example of an echo waveform at a position C.

FIG. 5 is an explanatory diagram of a measurement image at the time of oblique scanning when the gate width is reduced.

FIG. 6 is an explanatory diagram of a measurement image at the time of oblique scanning when the gate width is widened.

FIG. 7 is an explanatory diagram of the relationship between the height of the probe and the position of its focal position during reciprocal scanning.

FIG. 8 is an explanatory diagram of a screen display state of a plurality of measurement videos. FIG. 6 is an example of the displayed video.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Scanning mechanism, 2 ... Scan control device, 3 ... Probe
4: Ultrasonic flaw detector, 5: Peak detection circuit, 5a: Gate position adjustment circuit, 6: Time measurement circuit, 7: A / D conversion circuit, 8: Interface, 9: Microprocessor (M
PU), 10 ... memory, 10a ... inclination scanning program,
10b: Depth position switching plane scanning program, 10c: Focusing program, 10d: Sound velocity calculation program, 1
0e: Gate operation setting program, 10f: Parameter storage area, 11: Image processing device, 12: Image memory, 1
3 ... Display, 14 ... Bus, 15 ... Touch screen, 16 ... Touch screen interface, 17 ... Subject, 17a, 17b ... Bonding surface, 20 ... Ultrasonic measurement device.

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Toshiyuki Nanaharu 650 Kandate-cho, Tsuchiura-shi, Ibaraki Hitachi Construction Machinery Engineering Co., Ltd. (56) References JP-A-5-18946 (JP, A) -1333057 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01N 29/00-29/28

Claims (1)

(57) [Claims] An object having a plurality of inspection surfaces inside is scanned by a focus type probe to detect an echo level obtained from the object within a range of a gate set corresponding to a focal position. In the ultrasonic image inspection apparatus that generates a display data based on the measurement value and displays a measurement image of the inspection target surface obtained in response to scanning on a screen of a display , At least along the surface to be inspected
Performing a main scan and a sub-scan in the X and Y directions;
Scanning in the Z direction along the depth direction of the main scanning and
A scanning device having a forward scan and a return scan; and controlling the scanning device to perform a forward scan in the XY direction.
A scan inclined in the Z direction is performed, and based on the obtained measurement values,
And generates the display data, and displays the display screen.
Tilt measurement display means for displaying a measurement image thereon, and measurement for a video portion selected in the measurement image
The position in the Z direction where the value was sampled is the focusing position
Acquire and store multiple units according to the selection of the video part
Focusing position acquiring means for performing the focusing, and XY corresponding to the plurality of stored focusing positions.
Assign a focusing position corresponding to the first inspection target surface of which the surface as the inspection target surface scan of the forward, focusing position corresponding to the second inspection target surface of the <br/> way home The sub-scan is set to a predetermined pitch by assigning it to scanning.
Scanning the first and second inspection target surfaces to generate display data of the first inspection target surface based on the measurement data in the forward scan, and based on the measurement data in the return scan. The first and second inspection pairs are generated by generating display data of the second inspection target surface .
An ultrasonic image characterized by comprising a probe control / image processing means for obtaining an image corresponding to the image obtained when each of the elephant surfaces is scanned by one XY scan and individually displaying the images. Inspection equipment.