JP2020180902A - Probe movable range setting device and movable range setting method - Google Patents

Abstract

To set the x-axis, y-axis and z-axis movable ranges of a probe at ultrasonic inspection time in a pre-stage before inspecting a test object.SOLUTION: A probe movable range setting device comprises: an x-axis movable range setting unit 101 for setting the x-axis movable range in the x-axis direction of a probe by movement of the probe in the x-axis direction which is the extending direction of a surface of a test object; a y-axis movable range setting unit 111 for setting the y-axis movable range in the y-axis direction of the probe by movement of the probe in the y-axis direction which is the extending direction of the surface of the test object and orthogonal to the x-axis direction; and a z-axis movable range setting unit 121 for setting the z-axis movable range in the z-axis direction of the probe by movement of the probe in the z-axis direction which is the height direction of the test object.SELECTED DRAWING: Figure 4

Description

The present invention relates to a probe movable range setting device and a movable range setting method.

The technique described in Patent Document 1 is known as a technique relating to an ultrasonic inspection apparatus. Patent Document 1 is carried out by an ultrasonic image inspection device that scans an inspected object having an inspection target portion with a focal probe and displays an image of the inspection target portion on a display device. A step of setting the probe at a reference position with respect to the subject, a step of sequentially capturing an echo signal from the subject while moving the probe in the depth direction of the subject to be inspected, and a step of sequentially capturing the echo signal captured. A step of creating using the data related to the above, a step of setting a detection gate at a position corresponding to the inspection target part data related to the echo signal corresponding to the inspection target part, and the step of setting the detection gate using the inspection target part data. It is characterized by comprising a step of creating a three-dimensional cross-sectional image and a step of detecting a focal position corresponding to the inspection target portion by detecting a peak value of the cross-sectional image and positioning the probe. The method of detecting the focal position of the ultrasonic image inspection device is described.

Japanese Patent No. 3869289 (see claim 1 in particular)

In the technique described in Patent Document 1, the probe is moved in the z-axis direction while performing ultrasonic irradiation (paragraph 0023). However, this movement does not set the movable range (z-axis movable range) of the probe in the z-axis direction at the time of ultrasonic inspection in the stage before inspecting the object to be inspected. Further, Patent Document 1 does not describe setting the movable range (x-axis movable range and y-axis movable range) of the probe in the x-axis direction and the y-axis direction at the time of ultrasonic inspection.

The present invention is a probe movable range setting device and a movable range setting method that can set the x-axis movable range, the y-axis movable range, and the z-axis movable range of the probe at the time of ultrasonic inspection in the stage before inspecting the inspected object. The challenge is to provide.

The probe movable range setting device according to the present embodiment is an ultrasonic inspection device that performs ultrasonic inspection on an object to be inspected having a joint surface, and determines the movable range of the probe that irradiates the inspected object with ultrasonic waves. In the movable range setting device to be set, in the stage before inspecting the inspected object, the probe moves in the x-axis direction which is the extending direction of the surface of the inspected object in the x-axis direction of the probe. The y-axis of the probe is caused by the movement of the probe in the x-axis movable range setting unit that sets the x-axis movable range and the y-axis direction that is the extending direction of the surface of the object to be inspected and is orthogonal to the x-axis. By moving the y-axis movable range setting unit that sets the y-axis movable range in the direction and the probe in the z-axis direction that is the height direction of the inspected object, the probe can be moved in the z-axis direction. It is characterized by including a z-axis movable range setting unit for setting a range. Other solutions will be described later in the form for carrying out the invention.

According to the present invention, a probe movable range setting device and a movable range that can set the x-axis movable range, the y-axis movable range, and the z-axis movable range of the probe at the time of ultrasonic inspection in the stage before inspecting the inspected object. Can provide a setting method.

It is a block diagram of the ultrasonic inspection apparatus which concerns on this embodiment. It is a perspective view of the ultrasonic inspection apparatus main body part provided in the ultrasonic inspection apparatus which concerns on this embodiment. It is sectional drawing of the ultrasonic inspection apparatus main body part provided in the ultrasonic inspection apparatus which concerns on this embodiment. It is a block diagram of the movable range setting device of the probe which concerns on this embodiment. It is a figure explaining the lowermost end position and the uppermost end position at the time of setting the z-axis movable range. It is a figure explaining the surface feedback signal and the interface feedback signal acquired during the downward movement of a probe. It is a figure explaining the joint surface x-axis first end and the joint surface x-axis second end set while the probe is moving in the x-axis direction. It is a figure explaining the setting method of the predetermined length in the x-axis movable range. It is a top view of the object to be inspected which shows the x-axis movable range and the y-axis movable range set by the movable range setting device of this embodiment. It is a top view of the inspection target holder provided in the ultrasonic inspection apparatus of this embodiment, and is the figure which shows the relationship between the position of the object to be inspected, and the ultrasonic irradiation range set by the irradiation range setting part. It is a flowchart of the ultrasonic inspection method including the movable range setting method of the probe which concerns on this embodiment. It is a flowchart explaining the movable range setting method of the probe which concerns on this Embodiment, and is the flowchart which shows the specific content of the z-axis movable range setting step. It is a flowchart explaining the movable range setting method of the probe which concerns on this Embodiment, and is the flowchart which shows the specific content of the x-axis movable range setting step. It is a flowchart explaining the movable range setting method of the probe which concerns on this Embodiment, and is the flowchart which shows the specific content of the y-axis movable range setting step.

Hereinafter, embodiments (the present embodiment) for carrying out the present invention will be described with reference to the drawings. However, the present invention is not limited to the following examples, and can be arbitrarily modified and carried out without departing from the gist of the present invention. It is also possible to combine a plurality of embodiments. The same members shall be designated by the same reference numerals, and redundant description shall be omitted.

FIG. 1 is a block diagram of the ultrasonic inspection apparatus 200 according to the present embodiment. The ultrasonic inspection device 200 performs an ultrasonic inspection on an inspected object 300 having a joint surface 301a. The object to be inspected 300 is, for example, a semiconductor component, and the bonding surface 301a is, for example, the bonding surface between the silicon chip and the mold resin in the semiconductor component. In the object 300 to be inspected, the positions (that is, heights) of the joint surfaces 301a and the surfaces 301b (described later) in the z-axis direction are the same over the entire x-axis direction and y-axis direction. According to the ultrasonic inspection apparatus 200, defects (for example, voids) on the joint surface 301a of the inspected object 300 such as a semiconductor part can be detected.

The ultrasonic inspection device 200 includes an ultrasonic inspection device main body 201 and a movable range setting device 100. The movable range setting device 100 sets the movable range of the probe 202 (described later) at the time of ultrasonic inspection of the inspected object 300 in the ultrasonic inspection apparatus main body 201 in the stage before inspecting the inspected object 300. Is. The pre-stage is the most recent stage of inspection. Hereinafter, the term "ultrasonic inspection" refers to an ultrasonic inspection performed for detecting defects inside the object to be inspected 300 by moving the probe 202 within a set movable range, unless otherwise specified. Since ultrasonic waves are irradiated directly under the probe 202, the movable range of the probe 202 in the x-axis, y-axis and z-axis directions is the irradiation range of the ultrasonic waves in the x-axis direction, y-axis direction and z-axis direction. Match. Therefore, the ultrasonic irradiation range is set by setting the movable range of the probe 202.

The ultrasonic inspection device main body 201 includes a probe 202, a drive device 203, and an arithmetic processing unit 204. The probe 202 irradiates the object to be inspected 300 with ultrasonic waves. The drive device 203 moves the probe 202 in the x-axis, y-axis, and z-axis directions. The drive device 203 is, for example, an actuator.

The arithmetic processing unit 204 arithmetically processes the peak of either the transmitted wave or the reflected wave from the inspected object 300 acquired by irradiating the inspected object 300 with ultrasonic waves. When the ultrasonic inspection apparatus main body 201 is a transmission type, the peak of the transmitted wave is processed, and when the main body 201 is of the reflection type, the peak of the reflected wave is calculated. Defects on the joint surface 301a can be detected by the peak arithmetic processing by the arithmetic processing unit 204. In addition, the state of the joint surface 301a can be visualized by the arithmetic processing unit 204. Although not shown, the arithmetic processing device 204 includes a CPU, a ROM, a RAM, and an I / F. Then, the arithmetic processing device 204 is embodied by executing the program recorded in the ROM by the CPU.

FIG. 2 is a perspective view of the ultrasonic inspection device main body 201 provided in the ultrasonic inspection device 200 according to the present embodiment. The ultrasonic inspection device main body 201 may be either a transmission type that receives a transmitted wave from the subject 300 that has been irradiated with ultrasonic waves, or a reflection type that receives the reflected wave from the subject 300. The ultrasonic inspection device main body 201 includes a water tank 7 for storing water 6. A mounting table 60 is arranged in the water 6. The object to be inspected 300 is placed on the mounting table 60. The object 300 to be inspected is arranged between the probe 202 (transmitting probe) and the probe 252 (receiving probe) that irradiate ultrasonic waves. The mounting table 60 is made of a material that transmits ultrasonic waves, for example, a plastic material such as polyethylene, polymethylpentene, or acrylic resin.

The mounting component 55 fixes the x-axis scanning section 51 and the z-axis scanning section 53, and the mounting component 56 fixes the x-axis scanning section 51 and the z-axis scanning section 54. The mounting component 55 and the mounting component 56 are integrated with each other by fasteners such as screws. As shown by the arrows in FIG. 2, the probes 202 and 252 attached to the x-axis scanning unit 51 move in the x-axis direction by driving the x-axis scanning unit 51 in the x-axis direction. The y-axis scanning unit 52 is fixed to the x-axis scanning unit 51. As shown by the arrows in FIG. 2, the probes 202 and 252 connected via the x-axis scanning unit 51 and the like move in the y-axis direction by driving the y-axis scanning unit 52 in the y-axis direction. The probe holder 57 is a holder for fixing the probe 202, and is driven in the z-axis direction via the z-axis scanning unit 53. The L-shaped metal fitting 58 is a metal fitting for fixing the probe 252. As shown by the arrows in FIG. 2, the probes 202 and 252 move in the z-axis direction by driving the z-axis scanning units 53 and 54 in the z-axis direction.

The x-axis scanning unit 51, the y-axis scanning unit 52, and the z-axis scanning units 53 and 54 are connected to a drive device 203 (see FIG. 1), which is not shown in FIG. 2, respectively. The x-axis scanning unit 51, the y-axis scanning unit 52, and the z-axis scanning units 53 and 54 move in the x-axis direction, the y-axis direction, and the z-axis direction by the drive device 203, respectively. The probes 202 and 252 follow and move unless otherwise specified.

Encoders (not shown) are connected to the x-axis scanning unit 51, the y-axis scanning unit 52, and the z-axis scanning units 53 and 54, respectively. The encoder grasps the x-axis direction position, the y-axis direction position, and the z-axis direction position of the probes 202 and 252 that are moved by driving the x-axis scanning unit 51, the y-axis scanning unit 52, and the z-axis scanning unit 53, 54. ..

FIG. 3 is a cross-sectional view of the ultrasonic inspection device main body 201 provided in the ultrasonic inspection device 200 according to the present embodiment. The probe 202 moves in the z-axis direction by driving the z-axis scanning unit 53 as shown by the arrow in FIG. Further, the probe 252 moves in the z-axis direction by driving the z-axis scanning unit 54 as shown by the arrow in FIG. That is, in the z-axis direction, the probe 202 and the probe 252 can move independently.

FIG. 4 is a block diagram of the movable range setting device 100 of the probe 202 according to the present embodiment. The movable range setting device 100 may be integrally configured with the above-mentioned arithmetic processing unit 204, or may be configured separately. When the movable range setting device 100 is configured as a separate body, the movable range setting device 100 includes a CPU, a ROM, a RAM, and an I / F, although none of them is shown. Then, the movable range setting device 100 is embodied by executing the program recorded in the ROM by the CPU.

The movable range setting device 100 sets the movable range of the probe 202 that irradiates the inspected body 300 with ultrasonic waves in the ultrasonic inspection device 200 that performs the ultrasonic inspection on the inspected object 300 having the joint surface 301a. It is a thing. The movable range setting device 100 can move the probe 202 within the set x-axis movable range, y-axis movable range, and z-axis movable range. The ultrasonic inspection can be performed only in the x-axis direction and the y-axis direction of the object to be inspected 300. Therefore, it is not necessary to perform ultrasonic irradiation in the absent region of the object to be inspected 300, and the ultrasonic inspection can be performed quickly.

The movable range setting device 100 includes an x-axis movable range setting unit 101, a y-axis movable range setting unit 111, and a z-axis movable range setting unit 121. The movable range setting device 100 sets the x-axis movable range by the x-axis movable range setting unit 101 and y-axis movable by moving the probe 202 in the z-axis movable range set by the z-axis movable range setting unit 121. The range setting unit 111 sets the y-axis movable range. Therefore, in the following description, the z-axis movable range setting unit 121 will be described first, and then the x-axis movable range setting unit 101 and the y-axis movable range setting unit 111 will be described.

The z-axis movable range setting unit 121 sets the z-axis movable range of the probe 202 in the z-axis direction by moving the probe 202 in the z-axis direction which is the height direction of the object to be inspected 300. The z-axis movable range setting unit 121 can set the z-axis movable range. By moving the probe 202 within the z-axis movable range, contact of the probe 202 with the inspected object 300 can be suppressed.

The z-axis movable range setting unit 121 includes a lowermost end position setting unit 122 and an uppermost end position setting unit 123. The lowermost position setting unit 122 sets the lowermost position, which is the position in the z-axis direction, which is the position at the closest distance where the probe 202 does not interfere with any position of the surface 301b of the inspected object 300. By setting the lowermost position, contact of the probe 202 with the inspected object 300 can be suppressed. The uppermost end position setting unit 123 sets the uppermost end position, which is a position higher than the lowermost end position by the size of the focal length of the probe 202. By setting the uppermost position, the time to set the reference position can be shortened. The z-axis movable range setting unit 121 sets between the lowermost end position and the uppermost end position as the z-axis movable range. By moving the probe 202 in the z-axis movable range, the surface feedback signal and the interface feedback signal described later are acquired. The lowermost position and the uppermost position will be described with reference to FIG.

FIG. 5 is a diagram for explaining the lowermost end position and the uppermost end position when the z-axis movable range is set. For example, the position of the probe 202 in the z-axis direction is the position at the closest distance from the initial position where the tip position of the probe 202 does not interfere with any position of the surface 301b of the inspected object 300 while visually observing by the user. It is lowered to the lowest position. The lowermost position is, for example, a position where the length L1 from the surface 301b of the object to be inspected 300 is, for example, several mm (for example, about 1 mm, 2 mm, 3 mm).

FIG. 5A shows a state in which the probe 202 is arranged at the lowermost position. The lowermost position setting unit 122 can set the lowermost position of the probe 202, for example, triggered by the user pressing a setting button (not shown). However, for example, a distance measuring device (laser light irradiation device or the like) for measuring the distance from the probe 202 to the surface 301b of the object to be inspected 300 is attached to the probe 202 and automatically lowered to the lowermost position based on the measured distance. The lowest end position may be set.

After setting the lowermost position, the uppermost position setting unit 123 raises the probe 202 to the uppermost position, which is a position higher by the size of the focal length L2 of the probe 202, as shown in FIG. 5 (b). Move to. The movement of the probe 202 is performed via the drive device 203 (see FIG. 1). An example of irradiating the ultrasonic wave 202b from the vibrator surface 202a while moving upward is shown in the figure, but it may not be performed.

During the upward movement of the probe 202, the focal position of the probe 202 passes through the junction surface 301a and the surface 301b. Therefore, although the details will be described later, the surface feedback signal and the interface feedback signal (both of which are referred to FIG. 6) described later can be acquired while lowering the probe 202 from the uppermost end position. If either the surface feedback signal or the interface feedback signal cannot be acquired, the set lowermost position may be too high. Therefore, for example, the operator may be notified that the set lowermost position is further lowered, and the operator may be urged to move the probe 202 downward. As a result, the surface feedback signal and the interface feedback signal can be acquired between the newly set lowermost position and the uppermost position.

Returning to FIG. 4, the z-axis movable range setting unit 121 includes a reference position setting unit 124 and a joint surface position setting unit 125.

The reference position setting unit 124 lowers the probe 202 from the uppermost position while irradiating the inspected object 300 with ultrasonic waves, and acquires that the peak of the surface feedback signal generated due to the surface 301b of the inspected object 300 is maximized. The position in the z-axis direction corresponding to the position is set as the reference position. Further, the joint surface position setting unit 125 lowers the probe 202 from the reference position while irradiating the object 300 with ultrasonic waves, and the z-axis direction corresponding to the acquisition position of the interface feedback signal generated by the joint surface 301a. The position is set as the joint surface position. The acquisition of the surface feedback signal and the interface feedback signal may be performed by raising (moving up and down) the probe 202 as necessary in addition to lowering the probe 202. The surface feedback signal and the interface feedback signal will be described with reference to FIG.

FIG. 6 is a diagram illustrating a surface feedback signal and an interface feedback signal acquired during the downward movement of the probe 202. During the downward movement of the probe 202 from the topmost position, the focal point F of the probe 202 passes through the surface 301b and the junction surface 301a. Therefore, for example, in the probe 252 (not shown in FIG. 6) that receives the transmitted wave of ultrasonic waves when the focal point F of the probe 202 passes through the surface 301b, the surface generated due to the surface 301b of the object 300 to be inspected. The feedback signal is acquired. Therefore, the reference position setting unit 124 sets the position in the z-axis direction of the probe 202 as the reference position when the peak of the surface feedback signal is acquired at the maximum position. By setting the reference position, the position in the z-axis direction of the probe 202 that focuses on the surface 301b can be set. The set reference position is used when setting the x-axis movable range and the y-axis movable range described later.

Further, for example, when the focal point F of the probe 202 passes through the joint surface 301a, the probe 252 (not shown in FIG. 6) that receives the transmitted wave of ultrasonic waves acquires the interface feedback signal generated by the joint surface 301a. Will be done. The joint surface position setting unit 125 sets the position in the z-axis direction of the probe 202 when the peak of the interface feedback signal is acquired at the maximum position as the joint surface position. By setting the joint surface position, the position in the z-axis direction of the probe 202 that focuses on the joint surface 301a can be set. The set joint surface position is used when setting the x-axis movable range and the y-axis movable range, which will be described later.

A surface feedback signal and an interface feedback signal (both are examples of information) can be obtained by moving the probe 202 within the z-axis movable range set between the uppermost position and the lowermost position (both refer to FIG. 5). .. Specifically, when the probe 202 moves in the z-axis movable range while irradiating ultrasonic waves, a peak of either a transmitted wave or a reflected wave from the inspected object 300 is acquired. When the ultrasonic inspection apparatus main body 201 is a transmission type, a transmitted wave is acquired, and when the ultrasonic inspection device main body 201 is a reflection type, a reflected wave is acquired. Then, based on the acquired peak, the z-axis direction position of the surface 301b of the inspected object 300 and the z-axis direction position of the joint surface 301a can be determined. As a result, the x-axis movable range and the y-axis movable range, which will be described later, can be set. That is, the x-axis movable range and the y-axis movable range can be set based on the information acquired when the z-axis movable range is set.

After setting the z-axis movable range, the position condition determination unit 131 (see FIG. 4) described later determines the success or failure of the position condition described later based on the positions of the probe 202 in the x-axis direction and the y-axis direction when the z-axis movable range is set. Judgment is made. The irradiation range of ultrasonic waves on the mounting table 60 is set depending on the success or failure of the position condition. However, the point that the ultrasonic wave irradiation is performed on the inspected object 300 is the same regardless of the success or failure of the positional condition. Therefore, for convenience, the x-axis movable range setting unit 101 and the y-axis movable range setting unit 111 will be described first, and then the position condition determination unit 131 will be described.

Returning to FIG. 4, the x-axis movable range setting unit 101 can move the probe 202 in the x-axis direction by moving the probe 202 in the x-axis direction, which is the extending direction of the surface 301b of the inspected object 300. It sets the range. The x-axis movable range and the y-axis movable range described later are set based on the information (for example, surface feedback signal and interface feedback signal) obtained by moving the probe 202 in the z-axis movable range set as described above. , Will be done. The x-axis movable range setting unit 101 can set the x-axis movable range. By setting the x-axis movable range, ultrasonic inspection in the x-axis direction can be performed with high accuracy.

The x-axis movable range setting unit 101 includes a joint surface x-axis first end setting unit 102 and a joint surface x-axis second end setting unit 103. The joint surface x-axis first end setting unit 102 irradiates the probe 202 arranged at the joint surface position with ultrasonic waves from one outside of the joint surface 301a toward the other outside of the joint surface 301a in the x-axis direction. The position in the x-axis direction corresponding to the acquisition position of the first interface feedback signal is set as the joint surface x-axis first end x1 (see FIG. 7). After detecting the first interface feedback signal, the joint surface x-axis second end setting unit 103 determines the position in the x-axis direction in which the interface feedback signal cannot be acquired while the probe 202 arranged at the joint surface position continues to move. It is set as the second end of the shaft x2 (see FIG. 7). The joint surface x-axis first end x1 and the joint surface x-axis second end x2 will be described with reference to FIG. 7.

FIG. 7 is a diagram illustrating a joint surface x-axis first end x1 and a joint surface x-axis second end x2 set during movement of the probe 202 in the x-axis direction. In the x-axis direction, the focal point F of the ultrasonic waves 202b irradiated from the probe 202 coincides with the joint surface 301a due to the ultrasonic irradiation from the probe 202 arranged at the joint surface position. Even if ultrasonic waves are irradiated from the probe 202 at a position x0 inside the object to be inspected 300 and outside the joint surface 301a in the x-axis direction, the interface feedback signal (FIG. 6) is not acquired.

However, if the probe 202 is moved in the x-axis direction while irradiating ultrasonic waves from one outside of the joint surface 301a toward the other outside of the joint surface 301a without changing the position in the z-axis direction, the ultrasonic waves 202b The peak of the first interface feedback signal is acquired when the focal point F of is overlapped with the junction surface 301a. More specifically, for example, the positive end point (the end of the inspected body 300) facing from the negative end point on the x-axis of the inspected body 300 (the position on the negative side in the x-axis direction of the end of the inspected body 300). It can be moved in the x-axis direction while irradiating ultrasonic waves to the position on the plus side in the x-axis direction). Then, the joint surface x-axis first end setting unit 102 sets the position of the probe 202 in the x-axis direction when the peak of the first interface feedback signal is acquired as the joint surface x-axis first end x1.

When the probe 202 is further moved in the x-axis direction from the first end x1 of the joint surface x-axis, the focal point F of the ultrasonic wave 202b reaches the end point of the joint surface 301a in the x-axis direction and enters a region where the joint surface 301a does not exist. That is, the peak of the interface feedback signal is acquired up to the end point of the joint surface 301a in the x-axis direction, but the interface feedback signal is not acquired in the region where the joint surface 301a does not exist. Therefore, the joint surface x-axis second end setting unit 103 joins the x-axis direction position where the peak of the interface feedback signal was finally acquired, that is, the x-axis direction position of the probe 202 where the interface feedback signal cannot be acquired. The surface x-axis second end x2 is set.

By setting the area between the joint surface x-axis first end x1 and the joint surface x-axis second end x2 as the x-axis movable range, the x-axis movable range setting unit 101 sets the joint surface x-axis first end x1 and the joint surface. The probe 202 can be moved to and from the second end x2 of the x-axis. As a result, the probe 202 can be moved in the x-axis direction so that the focal point F of the probe 202 overlaps the joint surface 301a during the ultrasonic inspection, and a defect on the joint surface 301a can be detected.

After setting the joint surface x-axis second end x2 by the joint surface x-axis second end setting unit 103, the moving direction of the probe 202 may be reversed (that is, folded back). By inversion, if ultrasonic irradiation is started in the middle of the joint surface 301a, the position where the interface feedback signal cannot be acquired again can be set as the x-axis end of the joint surface 301a.

In this example, the joint surface x-axis first end x1 and the joint surface x-axis second end x2 of the probe 202 are set at positions corresponding to both ends of the joint surface 301a in the x-axis direction. Therefore, the so-called margin is 0. However, for example, the rectangular object to be inspected 300 may be placed obliquely in the top view so as to have an angle with respect to each side of the rectangular mounting table 60 in the top view. In this case, there is a possibility that the focal points F of the ultrasonic waves 202b do not overlap at the time of the ultrasonic inspection, especially at the end of the joint surface 301a. Therefore, it is preferable to set the x-axis movable range after setting the so-called margin. Specifically, the x-axis movable range setting unit 101 is located at a position separated by a predetermined length α from the joint surface x-axis first end x1 in the outer direction (minus direction) of the joint surface 301a, and the joint surface x-axis second end. It is preferable to set the x-axis movable range between x2 and a position separated by a predetermined length α in the outer direction (plus direction) of the joint surface 301a. As a result, even when the object to be inspected 300 is placed at an angle to the mounting table 60 during the ultrasonic inspection, the entire area of the joint surface 301a of the object to be inspected 300 can be ultrasonically inspected.

Returning to FIG. 4, in order to set the margin in the x-axis direction, the x-axis movable range setting unit 101 includes the surface x-axis first end setting unit 104, the surface x-axis second end setting unit 105, and the x-axis margin. A setting unit 106 is provided. The surface x-axis first end setting unit 104 irradiates the probe 202 arranged at the reference position in the x-axis direction with ultrasonic waves from one outside of the inspected object 300 toward the other outside of the inspected object 300. The position in the x-axis direction corresponding to the acquisition position of the first surface feedback signal is set as the surface x-axis first end x11 (see FIG. 8). After detecting the first surface feedback signal, the surface x-axis second end setting unit 105 determines the position in the x-axis direction where the surface feedback signal cannot be acquired while the probe 202 placed at the reference position continues to move. It is set as the end x12 (see FIG. 8). In the x-axis margin setting unit 106, each end of the x-axis movable range is between the surface x-axis first end x11 and the joint surface x-axis first end x1, and the surface x-axis second end x12 and the joint surface x. A predetermined length α is set so as to be located between the second end of the shaft x2. A method of setting the predetermined length α will be described with reference to FIG.

FIG. 8 is a diagram illustrating a method of setting a predetermined length α in the x-axis movable range. FIG. 8 also shows the joint surface x-axis first end x1 and the joint surface x-axis second end x2. When ultrasonic waves are irradiated by the probe 202 arranged at the reference position in the x-axis direction, the focal point F of the ultrasonic waves 202b emitted from the probe 202 coincides with the surface 301b of the inspected object 300. Even if ultrasonic waves are irradiated from the probe 202 at the position x10 outside the inspected object 300 in the x-axis direction, the surface feedback signal (see FIG. 6) is not acquired because the surface 301b is absent. However, if the probe 202 is moved in the x-axis direction without changing its position in the z-axis direction, the peak of the first surface feedback signal is acquired when the focal point F of the ultrasonic wave 202b overlaps the surface 301b. Therefore, the surface x-axis first end setting unit 104 sets the x-axis direction position of the probe 202 when the peak of the first surface feedback signal is acquired as the surface x-axis first end x11.

When the probe 202 is further moved from the surface x-axis first end x11 in the x-axis direction, the focal point F of the ultrasonic 202b passes through the joint surface x-axis first end x1 and reaches the end point (end) of the surface 301b. To reach. After that, the ultrasonic wave 202b is irradiated to the region where the surface 301b of the object to be inspected 300 does not exist. That is, the peak of the surface feedback signal is acquired up to the end point of the surface 301b in the x-axis direction, but the surface feedback signal is not acquired in the region where the surface 301b does not exist. Therefore, the surface x-axis second end setting unit 105 sets the surface x at the x-axis direction position where the peak of the surface feedback signal was finally acquired, that is, the x-axis direction position of the probe 202 where the surface feedback signal cannot be acquired. Set as the second end of the shaft x12.

By moving the probe 202 between the surface x-axis first end x11 and the surface x-axis second end x12, the focal point F can be overlapped with the surface 301b of the inspected object 300.

After setting the surface x-axis second end x12 by the surface x-axis second end setting unit 105, the moving direction of the probe 202 may be reversed (that is, folded back). By inversion, if ultrasonic irradiation is started in the middle of the surface 301b, the position where the surface feedback signal cannot be acquired again can be set as the x-axis end of the surface 301b.

In the x-axis margin setting unit 106 (see FIG. 4), each end of the x-axis movable range is between the surface x-axis first end x11 and the joint surface x-axis first end x1 and the surface x-axis second end. A predetermined length α is set so as to be located between x12 and the second end x2 of the joint surface x-axis. Specifically, for example, the x-axis margin setting unit 106 includes a surface x-axis first end x11 and a joint surface x-axis first end x1, for example, x21, which is a midpoint position, and a surface x-axis second end x12. A predetermined length α is set so that an x-axis movable range is formed between the joint surface x-axis second end x2 and, for example, x22, which is a midpoint position. However, the predetermined length α is not limited to each midpoint position.

FIG. 9 is a top view of the inspected object 300 showing the x-axis movable range and the y-axis movable range set by the movable range setting device 100 of the present embodiment. The ultrasonic irradiation range 401 shown in FIG. 9 is shown based on the x-axis movable range set by the above method and the y-axis movable range set by the y-axis movable range setting unit 11 described later.

During the ultrasonic inspection, the ultrasonic irradiation of the object to be inspected 300 is performed on the ultrasonic irradiation range 401 (including the joint surface 301a) surrounded by the thick solid line in FIG. For example, ultrasonic irradiation is performed in the ultrasonic irradiation range 401 by moving the probe 202 having a fixed y-axis direction position in the x-axis direction over the entire x-axis movable range, and then shifting the y-axis direction position and x again. It can be done in the entire axial direction. Then, by repeating these operations over the entire y-axis movable range, ultrasonic irradiation can be performed over the entire area of the ultrasonic irradiation range 401 (so-called cross scan).

The ultrasonic irradiation range 401 exists inside the inspected body 300, and the outside of the inspected body 300 (that is, the non-existent portion of the inspected body 300) is not irradiated with ultrasonic waves. On the other hand, the ultrasonic irradiation range 401 includes the entire rectangular joint surface 301a when viewed from above. The ultrasonic irradiation range 401 is formed with a margin of a predetermined length α from the joint surface 301a toward the outside of the inspected object 300 in each of the x-axis direction and the y-axis direction. Since the x-axis movable range has a margin, it is possible to irradiate ultrasonic waves with a margin in the x-axis direction of the joint surface 301a during ultrasonic inspection, and the end portion of the joint surface 301a is sufficiently provided. Can be inspected.

The predetermined length α may change depending on the state in which the object to be inspected 300 is placed. Therefore, it is preferable to set the predetermined length for each object to be inspected 300. Further, the predetermined length may be the same or different in the x-axis direction and the y-axis direction.

Returning to FIG. 4, the y-axis movable range setting unit 111 moves the probe 202 in the extending direction of the surface 301b of the inspected object 300 and in the y-axis direction orthogonal to the x-axis, so that the y-axis movable range setting unit 111 of the probe 202 It sets the y-axis movable range in the direction. By setting the y-axis movable range, ultrasonic inspection in the y-axis direction can be performed with high accuracy. The y-axis movable range can be set in the same manner as the above-mentioned x-axis movable range setting method except that the axes to be set are different. Therefore, for the sake of simplification of the description, the description overlapping with the above description will be omitted in the following description.

The y-axis movable range setting unit 111 includes a joint surface y-axis first end setting unit 112 and a joint surface y-axis second end setting unit 113.

The joint surface y-axis first end setting unit 112 is the same as the joint surface x-axis first end setting unit 102 except that the x-axis is set to the y-axis. That is, the joint surface y-axis first end setting unit 112 transmits ultrasonic waves from one outside of the joint surface 301a toward the other outside of the joint surface 301a with the probe 202 arranged at the joint surface position in the y-axis direction. It is moved while irradiating, and the y-axis direction position corresponding to the acquisition position of the first interface feedback signal is set as the first end of the y-axis of the joint surface (not shown). More specifically, for example, the positive end point (the end of the inspected body 300) facing from the negative end point on the y-axis of the inspected body 300 (the position on the negative side in the y-axis direction of the end of the inspected body 300). It can be moved in the y-axis direction while irradiating ultrasonic waves to the positive side position in the y-axis direction).

The joint surface y-axis second end setting unit 113 is the same as the joint surface x-axis second end setting unit 103 except that the x-axis is set to the y-axis. That is, after the first interface feedback signal is detected, the junction surface y-axis second end setting unit 113 joins the position in the y-axis direction in which the interface feedback signal cannot be acquired while the probe 202 arranged at the junction surface position continues to move. It is set as the second end of the surface y-axis (not shown).

By providing the joint surface y-axis first end setting unit 112 and the joint surface y-axis second end setting unit 113, the probe 202 can be moved in the y-axis direction so that the focal point F of the probe 202 overlaps with the joint surface 301a during ultrasonic inspection. And can detect defects on the joint surface 301a.

The y-axis movable range setting unit 111 sets a margin in the y-axis movable range in the same manner as the x-axis movable range setting unit 101 described above. That is, the y-axis movable range setting unit 111 is located at a position separated by a predetermined length from the first end of the y-axis of the joint surface in the outer direction (minus direction) of the joint surface 301a and on the joint surface 301a from the second end of the y-axis of the joint surface. The y-axis movable range is set between a position separated by a predetermined length in the outer direction (plus direction). For margin setting, the y-axis movable range setting unit 111 includes a surface y-axis first end setting unit 114, a surface y-axis second end setting unit 115, and a y-axis margin setting unit 116.

The surface y-axis first end setting unit 114 is the same as the surface x-axis first end setting unit 104 except that the x-axis is set to the y-axis. That is, the surface y-axis first end setting unit 114 transmits ultrasonic waves from one outside of the inspected body 300 toward the other outside of the inspected body 300 with the probe 202 arranged at the reference position in the y-axis direction. It is moved while irradiating, and the position in the y-axis direction corresponding to the acquisition position of the first surface feedback signal is set as the first end of the surface y-axis (not shown).
The surface y-axis second end setting unit 115 is the same as the surface x-axis second end setting unit 105, except that the x-axis is set to the y-axis. That is, after the first surface feedback signal is detected, the surface y-axis second end setting unit 115 sets the y-axis direction position at which the surface feedback signal cannot be acquired while the probe 202 arranged at the reference position continues to move. It is set as the second end (not shown).
The y-axis margin setting unit 116 is the same as the x-axis margin setting unit 106 described above, except that the x-axis is set to the y-axis. That is, in the y-axis margin setting unit 116, each end of the y-axis movable range is between the surface y-axis first end and the joint surface y-axis first end, and the surface y-axis second end and the joint surface y-axis. A predetermined length is set so as to be located between the second end and the second end.

By providing the surface y-axis first end setting unit 114, the surface y-axis second end setting unit 115, and the y-axis margin setting unit 116, it is possible to provide a margin in the y-axis movable range. Since the y-axis movable range has a margin, it is possible to irradiate ultrasonic waves with a margin in the y-axis direction of the joint surface 301a during ultrasonic inspection, and the end portion of the joint surface 301a is sufficiently provided. Can be inspected.

The movable range setting device 100 includes a position condition determination unit 131. The position condition determination unit 131 determines whether or not the inspected object 300 is placed on the center of the mounting table 60 (not limited to the exact center and may have a certain width). As described above, this determination is made after the z-axis movable range is set and before the x-axis movable range and the y-axis movable range are set. Therefore, the probe 202 used for setting the z-axis movable range is arranged above the object to be inspected 300. Therefore, in the position condition determination unit 131, the position of the probe 202 is the center of the mounting table 60 of the inspected object 300 in the x-axis direction in the x-axis direction, and the position in the y-axis direction is the mounting table of the inspected object 300. It is determined whether or not the position condition centered in the y-axis direction of 60 is satisfied. The x-axis direction position and the y-axis direction position of the probe 202 can be grasped as coordinates, for example, by an encoder (not shown) as described above.

The mounting table 60 usually coincides with the position where the probe 202 can move, and the entire area of the mounting table 60 can be irradiated with ultrasonic waves. Therefore, if the object to be inspected 300 does not protrude from the mounting table 60, the positions of the joint surface 301a and the surface 301b for setting the movable range are determined regardless of the position of the mounting table 60 on which the object to be inspected 300 is placed. it can. However, for example, when the object to be inspected 300 is arranged near one of the four corners of the rectangular mounting table 60 in a top view, the object to be inspected 300 does not exist near the remaining three corners, so that ultrasonic waves are generated. There is no need to irradiate. Therefore, by changing the ultrasonic irradiation position according to the placement position of the inspected object 300 by the position condition determination unit 131, the ultrasonic wave is not irradiated to the non-existent area of the inspected object 300, and the movable range can be set. The time required can be reduced.

The movable range setting device 100 includes an irradiation range setting unit 132. The irradiation range setting unit 132 sets the ultrasonic irradiation range 402 (see FIG. 10) in the x-axis direction and the y-axis direction when the position condition determination unit 131 determines that the position condition is not satisfied. is there. By irradiating the set ultrasonic irradiation range 402 with ultrasonic waves, the x-axis direction position and the y-axis direction position of the joint surface 301a described with reference to FIG. 7 are set. As a result, the movable range is set by the x-axis movable range setting unit 101 and the y-axis movable range setting unit 111. When the position condition is satisfied, ultrasonic irradiation is performed with the entire area of the mounting table 60 as the ultrasonic irradiation range 402.

The irradiation range setting unit 132 includes an x-axis direction distance determination unit 133 and a y-axis direction distance determination unit 134. The x-axis direction distance determining unit 133 determines the distance of the shortest portion of the distance from the probe 202 to the end of the mounting table 60 in the x-axis direction. The y-axis direction distance determining unit 134 determines the distance of the shortest portion of the distance from the probe 202 to the end of the mounting table 60 (an example of the mounting table) in the y-axis direction. The irradiation range setting unit 132 sets the ultrasonic irradiation range 401 based on the determined distance in the x-axis direction and the distance in the y-axis direction.

FIG. 10 is a top view of the mounting table 60 provided in the ultrasonic inspection device 200 of the present embodiment, and shows the relationship between the position of the object to be inspected 300 and the ultrasonic irradiation range 402 set by the irradiation range setting unit 132. It is a figure which shows. FIG. 10 shows, as an example, a state in which the object to be inspected 300 is placed near the lower left corner of the mounting table 60 in a top view.

The x-axis direction distance determination unit 133 (see FIG. 4) calculates the distances X1 and X2 in the x-axis direction from the position P of the probe 202 to the two opposing ends 60a and 60b of the mounting table 60. The distances X1 and X2 can be calculated based on the x-axis direction position of the probe 202 grasped by the above encoder. The x-axis direction distance determination unit 133 determines the shorter of the calculated distances X1 and X2. In the example shown in FIG. 10, the x-axis direction distance determination unit 133 adopts X1 which is shorter than X2.

The y-axis direction distance determination unit 134 (see FIG. 4) calculates the distances Y1 and Y2 in the y-axis direction from the position P of the probe 202 to the two opposing ends 60c and 60d of the mounting table 60. The distances Y1 and Y2 can be calculated based on the y-axis direction position of the probe 202 grasped by the above encoder. The y-axis direction distance determination unit 134 determines the shorter of the calculated distances Y1 and Y2. In the example shown in FIG. 10, the y-axis direction distance determination unit 134 adopts Y1 which is shorter than Y2.

The irradiation range setting unit 132 sets the ultrasonic irradiation range 402 based on the adopted distances X1 and Y1. Specifically, the irradiation range setting unit 132 is within a range twice the distance X1 determined by the x-axis direction distance determination unit 133, with the x-axis direction position (P) of the probe 202 as the midpoint, and The ultrasonic irradiation range 402 is set within a range twice the distance Y1 determined by the y-axis direction distance determination unit 134, with the y-axis direction position (P) of the probe 202 as the midpoint. Therefore, the ultrasonic irradiation range 402 increases as the mounting position of the object to be inspected 300 is closer to the center of the mounting table 60, and becomes smaller as it is closer to the four corners.

Then, the x-axis movable range setting unit 101 makes the joint surface x-axis first end x1 and the joint surface x-axis second end x2 by ultrasonic irradiation in the ultrasonic irradiation range 402 set by the irradiation range setting unit 132. Set. Further, the y-axis movable range setting unit 111 is subjected to ultrasonic irradiation in the ultrasonic irradiation range 402 set by the irradiation range setting unit 132, and the joint surface y-axis first end and the joint surface y-axis second end (both). (Not shown) is set. By doing so, it is possible to reduce the setting time of the joint surface x-axis first end x 1 and the like as compared with the ultrasonic irradiation of the entire mounting table 60.

Returning to FIG. 4, the movable range setting device 100 includes a storage unit 135. The storage unit 135 is set by the x-axis movable range set by the x-axis movable range setting unit 101, the y-axis movable range set by the y-axis movable range setting unit 111, and the z-axis movable range setting unit 121. It stores the z-axis movable range. By providing the storage unit 135, the probe 202 can be moved within the stored movable range during the ultrasonic inspection, and the inspected object 300 can be ultrasonically inspected.

According to the movable range setting device 100 of the probe 202 having the above configuration, the x-axis movable range, the y-axis movable range, and the z-axis movable range of the probe 202 at the time of ultrasonic inspection are before the inspection of the inspected object 300. Can be set.

FIG. 11 is a flowchart of an ultrasonic inspection method including a method of setting the movable range of the probe 202 according to the present embodiment. The movable range setting method of the probe 202 of the present embodiment can be executed by the movable range setting device 100. The method of setting the movable range of the probe 202 of the present embodiment is the method of setting the movable range of the probe 202 in the ultrasonic inspection apparatus 200 that performs ultrasonic inspection on the inspected body 300 having the joint surface 301a in the stage before inspecting the inspected body 300. This is a method of setting the movable range of the probe 202 for irradiating the 300 with ultrasonic waves. That is, the method of setting the movable range of the probe 202 of the present embodiment is to irradiate ultrasonic waves from the probe 202 on the surface 302b of the object to be inspected 300 to detect defects in the joint surface 301a in the ultrasonic inspection apparatus 200 to be inspected. This is a probe movable range setting method for setting the movable range of the probe 202 before inspecting the body 300.

The probe movable range setting method of the present embodiment includes a z-axis movable range setting step S1, a position condition determination step S2, an irradiation range setting step S3, an x-axis movable range setting step S4, and a y-axis movable range setting step. Includes S5. The movable range setting method of the probe 202 of the present embodiment sets the movable range of the probe 202 when the ultrasonic inspection device 200 inspects the inspected object 300 by performing these processes. In FIG. 11, since scanning in the x-axis direction and scanning in the y-axis direction are usually performed in parallel (so-called cross scan), the x-axis movable range setting step S4 and the y-axis movable range setting step S5 are It is described in parallel.

The z-axis movable range setting step S1 is a step of setting the z-axis movable range of the probe 202 in the z-axis direction by moving the probe 202 in the z-axis direction which is the height direction of the object to be inspected 300. The z-axis movable range setting step S1 can be executed by the z-axis movable range setting unit 121. The position condition determination step S2 is a step of determining whether or not the above position condition is satisfied. The position condition determination step S2 can be executed by the position condition determination unit 131. The irradiation range setting step S3 is performed when the position condition is not satisfied. The irradiation range setting step S3 is executed by the irradiation range setting unit 132.

The x-axis movable range setting step S4 is a step of setting the x-axis movable range of the probe 202 in the x-axis direction by moving the probe 202 in the x-axis direction, which is the extending direction of the surface 302b of the inspected object 300. is there. The x-axis movable range setting step S4 can be executed by the x-axis movable range setting unit 101. In the y-axis movable range setting step S5, the probe 202 is movable in the y-axis direction by moving the probe 202 in the y-axis direction orthogonal to the x-axis as well as the extending direction of the surface 302b of the inspected object 300. This is the step to set the range. The y-axis movable range setting step S5 can be executed by the y-axis movable range setting unit 111.

The ultrasonic inspection method of the present embodiment includes inspection step S6 in which the ultrasonic inspection of the inspected object 300 is performed by moving the probe 202 within the movable range set in these steps. In the inspection step S6, ultrasonic irradiation is performed by moving the probe 202 in the set x-axis movable range and y-axis movable range, and the ultrasonic inspection of the inspected object 300 is performed. As a result, defects on the joint surface 301a of the object to be inspected 300 can be quickly detected.

FIG. 12 is a flowchart for explaining the movable range setting method of the probe 202 according to the present embodiment, and is a flowchart showing the specific contents of the z-axis movable range setting step S1. The z-axis movable range setting step S1 includes the lowermost end position setting step S11, the uppermost end position setting step S12, the reference position setting step S13, and the joint surface position setting step S14.

The lowest end position setting step S11 can be executed by the lowest end position setting unit 122. In the lowermost position setting step S11, the probe 202 is placed at a position where the tip position of the probe 202 is a predetermined gap from the surface 301b of the inspected object 300 (the position at the closest distance that does not interfere with the surface 302b of the inspected object 300). ), Stops, and sets the position as the lowermost position of the probe 202 in the z-axis direction, thereby setting the lower limit of the z-axis movable range of the probe 202.

The uppermost position setting step S12 can be executed by the uppermost position setting unit 123. In the uppermost position setting step S12, the probe 202 is moved upward from the lowermost position by the amount corresponding to the focal length of the probe 202 and stopped, and the position is stopped at the uppermost position of the probe 202 in the z-axis direction. This is a step of setting the upper limit of the z-axis movable range of the probe 202 by setting as.

The reference position setting step S13 can be executed by the reference position setting unit 124. In the reference position setting step S13, the surface feedback signal is acquired by irradiating the surface 301b of the inspected object 300 with ultrasonic waves while moving the probe 202 from the uppermost end position downward on the z-axis, and the peak of the surface feedback signal is detected. Then, it is a step of setting the position in the z-axis direction of the probe 202 corresponding to the position where the peak is maximized as the reference position.

The joint surface position setting step S14 can be executed by the joint surface position setting unit 125. In the joint surface position setting step S14, the probe 202 is further moved downward on the z-axis while irradiating ultrasonic waves to acquire an interface feedback signal, detecting the peak of the interface feedback signal, and setting the peak at the maximum position. This is a step of setting the position of the corresponding probe 202 in the z-axis direction as the joint surface position.

By these steps, the positions of the surface 301b and the joint surface 301a of the inspected object 300 in the z-axis direction can be determined.

FIG. 13 is a flowchart for explaining the method of setting the movable range of the probe according to the present embodiment, and is a flowchart showing the specific contents of the x-axis movable range setting step S4. In the x-axis movable range setting step S4, the probe 202 is set at the joint surface position and moves while irradiating ultrasonic waves from the negative-direction end point on one x-axis of the object 300 to the opposite positive-direction end point. , The predetermined length α (margin) is added in the minus direction of the position where the interface feedback signal is first acquired, and the predetermined length α (margin) is added in the plus direction of the position where the interface feedback signal cannot be acquired. This is the step of setting the axial movable range.

The x-axis movable range setting step S4 includes a joint surface x-axis first end setting step S41, a joint surface x-axis second end setting step S42, a surface x-axis first end setting step S43, and a surface x-axis second end setting step S44. , And the x-axis margin setting step S45. The joint surface x-axis first end setting step S41 can be executed by the joint surface x-axis first end setting unit 102. The joint surface x-axis second end setting step S42 can be executed by the joint surface x-axis second end setting unit 103. The surface x-axis first end setting step S43 can be executed by the surface x-axis first end setting unit 104. The surface x-axis second end setting step S44 can be executed by the surface x-axis second end setting unit 105. The x-axis margin setting step S45 can be executed by the x-axis margin setting unit 106. With these steps, the x-axis movable range can be set.

FIG. 14 is a flowchart for explaining the method of setting the movable range of the probe according to the present embodiment, and is a flowchart showing the specific contents of the y-axis movable range setting step S5. In the y-axis movable range setting step S5, the probe 202 is set at the joint surface position, and the probe 202 faces from the negative end point on the y-axis of the inspected object 300 (the y-axis negative side position of the end of the inspected object 300). Move to the positive end point (the position on the positive side in the y-axis direction of the 300 end of the object to be inspected) while irradiating ultrasonic waves, and set a predetermined length α (margin) in the negative direction of the position where the interface feedback signal was first acquired. This is a step of adding and adding a predetermined length α (margin) in the plus direction of the position where the interface feedback signal cannot be acquired to set the y-axis movable range.

The y-axis movable range setting step S5 includes a joint surface y-axis first end setting step S51, a joint surface y-axis second end setting step S52, a surface y-axis first end setting step S53, and a surface y-axis second end setting step S54. , And the y-axis margin setting step S55. The joint surface y-axis first end setting step S51 can be executed by the joint surface y-axis first end setting unit 112. The joint surface y-axis second end setting step S52 can be executed by the joint surface y-axis second end setting unit 113. The surface y-axis first end setting step S53 can be executed by the surface y-axis first end setting unit 114. The surface y-axis second end setting step S54 can be executed by the surface y-axis second end setting unit 115. The y-axis margin setting step S55 can be executed by the y-axis margin setting unit 116. With these steps, the y-axis movable range can be set.

According to the method for setting the movable range of the probe 202 including the above steps, the x-axis movable range, the y-axis movable range, and the z-axis movable range of the probe 202 at the time of ultrasonic inspection are set in the stage before the inspection of the inspected object 300. Can be set.

100 Movable range setting device 101 x-axis movable range setting unit 102 Joint surface x-axis first end setting unit 103 Joint surface x-axis second end setting unit 104 Surface x-axis first end setting unit 105 Surface x-axis second end setting unit 106 x-axis margin setting unit 111 y-axis movable range setting unit 112 Joint surface y-axis first end setting unit 113 Joint surface y-axis second end setting unit 114 Surface y-axis first end setting unit 115 Surface y-axis second end setting unit Section 116 y-axis margin setting section 121 z-axis movable range setting section 122 Bottom edge position setting section 123 Top limit position setting section 124 Reference position setting section 125 Joint surface position setting section 131 Position condition determination section 132 Irradiation range setting section 133 x-axis Directional distance determination unit 134 y-axis direction distance determination unit 135 Storage unit 200 Ultrasonic inspection device 201 Ultrasonic inspection device Main unit 202 Probe 203 Drive device 204 Arithmetic processing device 252 Probe 300 Inspected object 301a Joint surface 301b Surface 401 Ultrasonic irradiation Range 402 Ultrasonic irradiation range 51 x-axis scanning part 52 y-axis scanning part 53 z-axis scanning part 54 z-axis scanning part 55 Mounting parts 56 Mounting parts 57 Probe holder 58 L-shaped metal fittings 6 Water 7 Water tank F Focus L1 Length L2 Focus Distance S1 z-axis movable range setting step S11 lowest end position setting step S12 uppermost upper end position setting step S13 reference position setting step S14 joint surface position setting step S2 position condition determination step S3 irradiation range setting step S4 x-axis movable range setting step S41 joining Surface x-axis first end setting step S42 Joint surface x-axis second end setting step S43 Surface x-axis first end setting step S44 Surface x-axis second end setting step S45 x-axis margin setting step S51 Joint surface y-axis first end Setting step S52 Joint surface y-axis second end setting step S53 Surface y-axis first end setting step S54 Surface y-axis second end setting step S55 y-axis margin setting step S6 Inspection step

The probe movable range setting device according to the present embodiment is an ultrasonic inspection device that performs ultrasonic inspection on an object to be inspected having a joint surface, and determines the movable range of the probe that irradiates the inspected object with ultrasonic waves. In the movable range setting device to be set, in the stage before inspecting the inspected object, the probe moves in the z-axis direction, which is the height direction of the inspected object, so that the probe moves in the z-axis direction. The x-axis movable range setting unit that sets the z-axis movable range, and after setting the z-axis movable range , the probe moves in the x-axis direction, which is the extending direction of the surface of the inspected object, to x the probe. The x-axis movable range setting unit that sets the x-axis movable range in the axial direction, and after setting the z-axis movable range, the extending direction of the surface of the object to be inspected and the y-axis direction orthogonal to the x-axis. The probe is provided with a y-axis movable range setting unit that sets the y-axis movable range in the y-axis direction of the probe, and the z-axis movable range setting unit does not interfere with the surface of the object to be inspected. The lowermost position setting unit for setting the lowermost position, which is the position in the z-axis direction, which is the closest distance position, and the probe at the lowermost position have a large focal distance of the probe from the lowermost position. It is provided with an uppermost end position setting unit that moves the probe to a higher position and sets the position of the probe after the movement as the uppermost end position, and is movable on the z-axis between the lowermost end position and the uppermost end position. It is characterized by being set as a range . Other solutions will be described later in the form for carrying out the invention.

The probe movable range setting device according to the present embodiment is an ultrasonic inspection device that performs ultrasonic inspection on an object to be inspected having a joint surface, and determines the movable range of the probe that irradiates the inspected object with ultrasonic waves. In the movable range setting device to be set, in the stage before inspecting the inspected object, the probe moves in the z-axis direction, which is the height direction of the inspected object, so that the probe moves in the z-axis direction. The x-axis movable range setting unit that sets the z-axis movable range, and after setting the z-axis movable range, the probe moves in the x-axis direction, which is the extending direction of the surface of the inspected object, to x the probe. The x-axis movable range setting unit that sets the x-axis movable range in the axial direction, and after setting the z-axis movable range, the extending direction of the surface of the object to be inspected and the y-axis direction orthogonal to the x-axis. The probe is provided with a y-axis movable range setting unit that sets the y-axis movable range in the y-axis direction of the probe, and the z-axis movable range setting unit does not interfere with the surface of the object to be inspected. The lowermost position setting unit for setting the lowermost position, which is the position in the z-axis direction, which is the closest distance position, and the probe at the lowermost position have a large focal distance of the probe from the lowermost position. The probe is moved to a higher position by a large amount, and the probe is moved from the uppermost position while irradiating the object to be inspected with an uppermost position setting unit that sets the position of the probe after the movement as the uppermost position. The reference position setting unit that lowers and sets the z-axis direction position corresponding to the acquisition position where the peak of the surface feedback signal generated due to the surface of the object to be inspected is maximized as the reference position, and the ultrasonic waves are inspected. The probe is lowered from the reference position while irradiating the body, and the z-axis direction position corresponding to the acquisition position where the peak of the interface feedback signal generated due to the joint surface is maximized is set as the joint surface position. A position setting unit is provided, and the area between the lowermost position and the uppermost position is set as the z-axis movable range. Other solutions will be described later in the form for carrying out the invention.

Claims (14)

In an ultrasonic inspection device that performs ultrasonic inspection on an object to be inspected having a joint surface, it is a movable range setting device that sets the movable range of a probe that irradiates the object to be inspected with ultrasonic waves.
In the stage before inspecting the inspected object, the x-axis movable range in the x-axis direction of the probe is set by moving the probe in the x-axis direction which is the extending direction of the surface of the inspected object. Movable range setting part and
A y-axis movable range setting unit that sets the y-axis movable range of the probe in the y-axis direction by moving the probe in the y-axis direction that is in the extending direction of the surface of the object to be inspected and is orthogonal to the x-axis. When,
The probe is provided with a z-axis movable range setting unit that sets the z-axis movable range of the probe in the z-axis direction by moving the probe in the z-axis direction, which is the height direction of the object to be inspected. A device for setting the movable range of the probe. The movable range setting device is movable on the x-axis by the x-axis movable range setting unit based on the information obtained by the movement of the probe in the z-axis movable range set by the z-axis movable range setting unit. The movable range setting device for a probe according to claim 1, wherein the range is set and the y-axis movable range is set by the y-axis movable range setting unit. The movable range setting device is based on the peak of either the transmitted wave or the reflected wave from the inspected object acquired when the probe moves in the z-axis movable range while irradiating ultrasonic waves, and the x-axis The movable range setting device for a probe according to claim 2, wherein the x-axis movable range is set by the movable range setting unit, and the y-axis movable range is set by the y-axis movable range setting unit. .. The z-axis movable range setting unit is
A lowermost position setting unit for setting the lowermost position, which is a position in the z-axis direction, which is the closest position that does not interfere with the surface of the object to be inspected.
It is provided with an uppermost end position setting unit that sets the uppermost end position, which is a position higher than the lowermost end position by the size of the focal length of the probe.
The movable range setting device for a probe according to any one of claims 1 to 3, wherein the range between the lowermost position and the uppermost position is set as the z-axis movable range. The z-axis movable range setting unit lowers the probe from the uppermost position while irradiating the object to be inspected with ultrasonic waves, and the peak of the surface feedback signal generated due to the surface of the object to be inspected is the maximum. The movable range setting device for a probe according to claim 4, further comprising a reference position setting unit that sets a position in the z-axis direction corresponding to the acquisition position as a reference position. The z-axis movable range setting unit lowers the probe from the reference position while irradiating the object to be inspected with ultrasonic waves, and at an acquisition position where the peak of the interface feedback signal generated due to the joint surface is maximized. The movable range setting device for a probe according to claim 5, further comprising a joint surface position setting unit that sets a corresponding z-axis direction position as a joint surface position. The x-axis movable range setting unit is
In the x-axis direction, the probe placed at the joint surface position is moved from one outside of the joint surface toward the other outside of the joint surface while irradiating ultrasonic waves to obtain the first interface feedback signal. A joint surface x-axis first end setting unit that sets the x-axis direction position corresponding to the acquisition position as the joint surface x-axis first end.
After the first detection of the interface feedback signal, the x-axis direction position where the interface feedback signal cannot be acquired while the probe placed at the joint surface position continues to move is set as the joint surface x-axis second end. It is equipped with an x-axis second end setting unit and
The y-axis movable range setting unit is
In the y-axis direction, the probe placed at the joint surface position is moved from one outside of the joint surface toward the other outside of the joint surface while irradiating ultrasonic waves to obtain the first interface feedback signal. A joint surface y-axis first end setting unit that sets the y-axis direction position corresponding to the acquisition position as the joint surface y-axis first end.
After the first detection of the interface feedback signal, the y-axis direction position where the interface feedback signal cannot be acquired while the probe placed at the joint surface position continues to move is set as the joint surface y-axis second end. The movable range setting device for a probe according to claim 6, further comprising a y-axis second end setting unit. Positional condition that the position of the probe is the center of the mounting table of the inspected object in the x-axis direction in the x-axis direction and the position in the y-axis direction of the center of the previously described stand of the inspected object in the y-axis direction. The movable range setting device for a probe according to claim 7, further comprising a position condition determination unit for determining whether or not the condition is satisfied. When the position condition is not satisfied, the ultrasonic irradiation range in the x-axis direction and the ultrasonic irradiation range in the y-axis direction for setting the movable range by the x-axis movable range setting unit and the y-axis movable range setting unit. Equipped with an irradiation range setting unit to set
The irradiation range setting unit is
In the x-axis direction, a distance determining unit in the x-axis direction that determines the distance of the shortest portion of the distance from the probe to the end of the above-mentioned stand, and
A y-axis direction distance determining unit for determining the distance of the shortest portion of the distance from the probe to the end of the above-mentioned stand in the y-axis direction is provided.
The x-axis direction position of the probe is the center point, the range is twice the distance determined by the x-axis direction distance determination unit, and the y-axis direction position of the probe is the center point. The range of twice the distance determined by the y-axis direction distance determination unit is set as the ultrasonic irradiation range.
The x-axis movable range setting unit sets the first end of the joint surface x-axis and the second end of the joint surface x-axis by ultrasonic irradiation in the ultrasonic irradiation range, and the y-axis movable range setting unit. The movable range of the probe according to claim 8, wherein the first end of the joint surface y-axis and the second end of the joint surface y-axis are set by ultrasonic irradiation in the ultrasonic irradiation range. Setting device. The x-axis movable range setting unit sets between the first end of the joint surface x-axis and the second end of the joint surface x-axis as the x-axis movable range, and also
The y-axis movable range setting unit is characterized in that the area between the first end of the y-axis of the joint surface and the second end of the y-axis of the joint surface is set as the y-axis movable range, according to claims 7 to 9. The probe movable range setting device according to any one item. The x-axis movable range setting unit is predetermined at a position separated by a predetermined length from the first end of the joint surface x-axis in the outer direction of the joint surface and in the outer direction of the joint surface from the second end of the joint surface x-axis. The x-axis movable range is set between the position and the position separated by a length, and the x-axis movable range is set.
The y-axis movable range setting unit is predetermined at a position separated by a predetermined length from the first end of the y-axis of the joint surface in the outer direction of the joint surface and in the outer direction of the joint surface from the second end of the y-axis of the joint surface. The movable range setting device for a probe according to any one of claims 7 to 9, wherein the y-axis movable range is set between the positions separated by a length. The x-axis movable range setting unit is
In the x-axis direction, the probe placed at the reference position is moved from one outside of the inspected object toward the other outside of the inspected object while irradiating ultrasonic waves, and the first surface feedback signal is obtained. The surface x-axis first end setting unit that sets the x-axis direction position corresponding to the acquisition position of the surface as the surface x-axis first end,
After the first detection of the surface feedback signal, the surface x-axis position in which the surface feedback signal cannot be acquired while the probe placed at the reference position continues to move is set as the surface x-axis second end. Two-end setting part and
Each end of the x-axis movable range is between the surface x-axis first end and the joint surface x-axis first end, and the surface x-axis second end and the joint surface x-axis second end. The x-axis margin setting unit that sets the predetermined length so that it is located between
In the y-axis direction, the probe placed at the reference position is moved from one outside of the inspected object toward the other outside of the inspected object while irradiating ultrasonic waves, and the first surface feedback signal is obtained. The surface y-axis first end setting unit that sets the y-axis direction position corresponding to the acquisition position of the surface as the surface y-axis first end,
After the first detection of the surface feedback signal, the y-axis direction position where the surface feedback signal cannot be acquired while the probe placed at the reference position continues to move is set as the surface y-axis second end. Two-end setting part and
Each end of the y-axis movable range is between the surface y-axis first end and the joint surface y-axis first end, and between the surface y-axis second end and the joint surface y-axis second end. The movable range setting device for a probe according to claim 11, further comprising a y-axis margin setting unit that sets the predetermined length so as to be located between them. Any one of claims 1 to 12, characterized in that it includes a storage unit that stores the set x-axis movable range, the set y-axis movable range, and the set z-axis movable range. The probe movable range setting device described in 1. In an ultrasonic inspection device that detects defects on the joint surface by irradiating ultrasonic waves from the probe on the surface of the object to be inspected, the movable range of the probe that sets the movable range of the probe before inspecting the object to be inspected. It ’s a setting method,
The probe is stopped by moving the tip position of the probe downward from the initial position to the position of a predetermined gap from the surface of the object to be inspected, and the position is the lowermost position of the probe in the z-axis direction. By setting as, the lowermost position setting step for setting the lower limit of the z-axis movable range of the probe and the lowermost position setting step.
By moving the probe upward by the amount corresponding to the size of the focal length of the probe from the lowermost position and stopping, and setting that position as the uppermost position of the probe in the z-axis direction. The uppermost position setting step for setting the upper limit of the z-axis movable range of the probe, and
While moving the probe downward from the uppermost position on the z-axis, the surface of the object to be inspected is irradiated with the ultrasonic waves to obtain a surface feedback signal, and the peak of the surface feedback signal is detected to detect the peak of the surface feedback signal. A reference position setting step for setting the position in the z-axis direction of the probe corresponding to the position where the peak is maximized as a reference position, and
While further moving the probe downward on the z-axis, the ultrasonic waves are irradiated to obtain an interface feedback signal, the peak of the interface feedback signal is detected, and the probe corresponding to the position where the peak is maximized. The joint surface position setting step for setting the position in the z-axis direction as the joint surface position, and
The probe was set at the joint surface position and moved from the negative end point on the x-axis of the inspected object to the opposite positive end point while irradiating ultrasonic waves, and first obtained the interface feedback signal. An x-axis movable range setting step of adding a predetermined length in the negative direction of the position and adding a predetermined length in the positive direction of the position where the interface feedback signal cannot be acquired to set the x-axis movable range, and
The probe was set at the joint surface position and moved from the negative end point on the y-axis of the inspected object to the opposite positive end point while irradiating ultrasonic waves, and first obtained the interface feedback signal. A y-axis movable range setting step of adding a predetermined length in the negative direction of the position and adding a predetermined length in the positive direction of the position where the interface feedback signal cannot be acquired to set the y-axis movable range.
A method for setting a movable range of a probe, which comprises setting a movable range of the probe when the ultrasonic inspection apparatus inspects the object to be inspected by performing the above-mentioned processing.

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