JP6622171B2 - 加熱硬化型シリコーン組成物、ダイボンド材及び光半導体装置 - Google Patents
加熱硬化型シリコーン組成物、ダイボンド材及び光半導体装置 Download PDFInfo
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- JP6622171B2 JP6622171B2 JP2016218394A JP2016218394A JP6622171B2 JP 6622171 B2 JP6622171 B2 JP 6622171B2 JP 2016218394 A JP2016218394 A JP 2016218394A JP 2016218394 A JP2016218394 A JP 2016218394A JP 6622171 B2 JP6622171 B2 JP 6622171B2
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- 239000000203 mixture Substances 0.000 title claims description 77
- 229920001296 polysiloxane Polymers 0.000 title claims description 65
- 239000004065 semiconductor Substances 0.000 title claims description 58
- 230000003287 optical effect Effects 0.000 title claims description 55
- 239000000463 material Substances 0.000 title claims description 52
- 125000000962 organic group Chemical group 0.000 claims description 39
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 37
- -1 siloxane units Chemical group 0.000 claims description 32
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 27
- 229920001187 thermosetting polymer Polymers 0.000 claims description 27
- 229910052697 platinum Inorganic materials 0.000 claims description 19
- 125000004432 carbon atom Chemical group C* 0.000 claims description 18
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 17
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 12
- 239000003054 catalyst Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 150000001451 organic peroxides Chemical class 0.000 claims description 9
- 229920006136 organohydrogenpolysiloxane Polymers 0.000 claims description 9
- 239000012933 diacyl peroxide Substances 0.000 claims description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 7
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 7
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 238000001723 curing Methods 0.000 description 31
- 239000000853 adhesive Substances 0.000 description 14
- 230000001070 adhesive effect Effects 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 229910052760 oxygen Inorganic materials 0.000 description 13
- 150000002978 peroxides Chemical class 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 230000005764 inhibitory process Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 9
- 239000003085 diluting agent Substances 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 125000003342 alkenyl group Chemical group 0.000 description 7
- 229920001577 copolymer Polymers 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 5
- 238000007259 addition reaction Methods 0.000 description 5
- 125000000217 alkyl group Chemical group 0.000 description 5
- 229920001843 polymethylhydrosiloxane Polymers 0.000 description 5
- 150000003254 radicals Chemical class 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000006087 Silane Coupling Agent Substances 0.000 description 4
- 125000001931 aliphatic group Chemical group 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- 230000007062 hydrolysis Effects 0.000 description 4
- 238000006460 hydrolysis reaction Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 229910004283 SiO 4 Inorganic materials 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 125000003710 aryl alkyl group Chemical group 0.000 description 3
- 238000002788 crimping Methods 0.000 description 3
- 125000005388 dimethylhydrogensiloxy group Chemical group 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- KWEKXPWNFQBJAY-UHFFFAOYSA-N (dimethyl-$l^{3}-silanyl)oxy-dimethylsilicon Chemical compound C[Si](C)O[Si](C)C KWEKXPWNFQBJAY-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004954 Polyphthalamide Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000013006 addition curing Methods 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- 229940106691 bisphenol a Drugs 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 125000000753 cycloalkyl group Chemical group 0.000 description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 229910021485 fumed silica Inorganic materials 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 238000006459 hydrosilylation reaction Methods 0.000 description 2
- 239000011256 inorganic filler Substances 0.000 description 2
- 229910003475 inorganic filler Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 125000005375 organosiloxane group Chemical group 0.000 description 2
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920006375 polyphtalamide Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 125000003944 tolyl group Chemical group 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 125000005023 xylyl group Chemical group 0.000 description 2
- JXCAHDJDIAQCJO-UHFFFAOYSA-N (1-tert-butylperoxy-2-ethylhexyl) hydrogen carbonate Chemical compound CCCCC(CC)C(OC(O)=O)OOC(C)(C)C JXCAHDJDIAQCJO-UHFFFAOYSA-N 0.000 description 1
- WRXCBRHBHGNNQA-UHFFFAOYSA-N (2,4-dichlorobenzoyl) 2,4-dichlorobenzenecarboperoxoate Chemical compound ClC1=CC(Cl)=CC=C1C(=O)OOC(=O)C1=CC=C(Cl)C=C1Cl WRXCBRHBHGNNQA-UHFFFAOYSA-N 0.000 description 1
- FVQMJJQUGGVLEP-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy 2-ethylhexaneperoxoate Chemical compound CCCCC(CC)C(=O)OOOC(C)(C)C FVQMJJQUGGVLEP-UHFFFAOYSA-N 0.000 description 1
- QEQBMZQFDDDTPN-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy benzenecarboperoxoate Chemical compound CC(C)(C)OOOC(=O)C1=CC=CC=C1 QEQBMZQFDDDTPN-UHFFFAOYSA-N 0.000 description 1
- TUGAMVVIFZLKTI-UHFFFAOYSA-N (3-methoxy-3-methylbutoxy)peroxycarbonyl (3-methoxy-3-methylbutyl)peroxy carbonate Chemical compound COC(C)(C)CCOOOC(=O)OC(=O)OOOCCC(C)(C)OC TUGAMVVIFZLKTI-UHFFFAOYSA-N 0.000 description 1
- NLBJAOHLJABDAU-UHFFFAOYSA-N (3-methylbenzoyl) 3-methylbenzenecarboperoxoate Chemical compound CC1=CC=CC(C(=O)OOC(=O)C=2C=C(C)C=CC=2)=C1 NLBJAOHLJABDAU-UHFFFAOYSA-N 0.000 description 1
- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 1
- NOBYOEQUFMGXBP-UHFFFAOYSA-N (4-tert-butylcyclohexyl) (4-tert-butylcyclohexyl)oxycarbonyloxy carbonate Chemical compound C1CC(C(C)(C)C)CCC1OC(=O)OOC(=O)OC1CCC(C(C)(C)C)CC1 NOBYOEQUFMGXBP-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- FYRCDEARNUVZRG-UHFFFAOYSA-N 1,1,5-trimethyl-3,3-bis(2-methylpentan-2-ylperoxy)cyclohexane Chemical compound CCCC(C)(C)OOC1(OOC(C)(C)CCC)CC(C)CC(C)(C)C1 FYRCDEARNUVZRG-UHFFFAOYSA-N 0.000 description 1
- VBQCFYPTKHCPGI-UHFFFAOYSA-N 1,1-bis(2-methylpentan-2-ylperoxy)cyclohexane Chemical compound CCCC(C)(C)OOC1(OOC(C)(C)CCC)CCCCC1 VBQCFYPTKHCPGI-UHFFFAOYSA-N 0.000 description 1
- NALFRYPTRXKZPN-UHFFFAOYSA-N 1,1-bis(tert-butylperoxy)-3,3,5-trimethylcyclohexane Chemical compound CC1CC(C)(C)CC(OOC(C)(C)C)(OOC(C)(C)C)C1 NALFRYPTRXKZPN-UHFFFAOYSA-N 0.000 description 1
- BEQKKZICTDFVMG-UHFFFAOYSA-N 1,2,3,4,6-pentaoxepane-5,7-dione Chemical compound O=C1OOOOC(=O)O1 BEQKKZICTDFVMG-UHFFFAOYSA-N 0.000 description 1
- KOMNUTZXSVSERR-UHFFFAOYSA-N 1,3,5-tris(prop-2-enyl)-1,3,5-triazinane-2,4,6-trione Chemical compound C=CCN1C(=O)N(CC=C)C(=O)N(CC=C)C1=O KOMNUTZXSVSERR-UHFFFAOYSA-N 0.000 description 1
- AYMDJPGTQFHDSA-UHFFFAOYSA-N 1-(2-ethenoxyethoxy)-2-ethoxyethane Chemical compound CCOCCOCCOC=C AYMDJPGTQFHDSA-UHFFFAOYSA-N 0.000 description 1
- QYLFHLNFIHBCPR-UHFFFAOYSA-N 1-ethynylcyclohexan-1-ol Chemical compound C#CC1(O)CCCCC1 QYLFHLNFIHBCPR-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- NRVDNSHWNQZNDC-UHFFFAOYSA-N 2,2-bis(tert-butylperoxy)decane Chemical compound CCCCCCCCC(C)(OOC(C)(C)C)OOC(C)(C)C NRVDNSHWNQZNDC-UHFFFAOYSA-N 0.000 description 1
- CRJIYMRJTJWVLU-UHFFFAOYSA-N 2,4,4-trimethylpentan-2-yl 3-(5,5-dimethylhexyl)dioxirane-3-carboxylate Chemical compound CC(C)(C)CCCCC1(C(=O)OC(C)(C)CC(C)(C)C)OO1 CRJIYMRJTJWVLU-UHFFFAOYSA-N 0.000 description 1
- DPGYCJUCJYUHTM-UHFFFAOYSA-N 2,4,4-trimethylpentan-2-yloxy 2-ethylhexaneperoxoate Chemical compound CCCCC(CC)C(=O)OOOC(C)(C)CC(C)(C)C DPGYCJUCJYUHTM-UHFFFAOYSA-N 0.000 description 1
- WZJUBBHODHNQPW-UHFFFAOYSA-N 2,4,6,8-tetramethyl-1,3,5,7,2$l^{3},4$l^{3},6$l^{3},8$l^{3}-tetraoxatetrasilocane Chemical compound C[Si]1O[Si](C)O[Si](C)O[Si](C)O1 WZJUBBHODHNQPW-UHFFFAOYSA-N 0.000 description 1
- DMWVYCCGCQPJEA-UHFFFAOYSA-N 2,5-bis(tert-butylperoxy)-2,5-dimethylhexane Chemical compound CC(C)(C)OOC(C)(C)CCC(C)(C)OOC(C)(C)C DMWVYCCGCQPJEA-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- PJABOTZVAHGVAF-UHFFFAOYSA-N 2-(2-cyclohexylpropan-2-yl)-7,7-dimethyloctaneperoxoic acid Chemical compound CC(C)(C)CCCCC(C(=O)OO)C(C)(C)C1CCCCC1 PJABOTZVAHGVAF-UHFFFAOYSA-N 0.000 description 1
- CHKCPIUYSMYEEW-UHFFFAOYSA-N 2-(2-cyclohexylpropan-2-ylperoxy)-2-ethylhexanoic acid Chemical compound CCCCC(CC)(C(O)=O)OOC(C)(C)C1CCCCC1 CHKCPIUYSMYEEW-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- IEMBFTKNPXENSE-UHFFFAOYSA-N 2-(2-methylpentan-2-ylperoxy)propan-2-yl hydrogen carbonate Chemical compound CCCC(C)(C)OOC(C)(C)OC(O)=O IEMBFTKNPXENSE-UHFFFAOYSA-N 0.000 description 1
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 1
- HWSSEYVMGDIFMH-UHFFFAOYSA-N 2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOC(=O)C(C)=C HWSSEYVMGDIFMH-UHFFFAOYSA-N 0.000 description 1
- XKBHBVFIWWDGQX-UHFFFAOYSA-N 2-bromo-3,3,4,4,5,5,5-heptafluoropent-1-ene Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(Br)=C XKBHBVFIWWDGQX-UHFFFAOYSA-N 0.000 description 1
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- GTELLNMUWNJXMQ-UHFFFAOYSA-N 2-ethyl-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical class OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.CCC(CO)(CO)CO GTELLNMUWNJXMQ-UHFFFAOYSA-N 0.000 description 1
- MNOVHWSHIUHSAZ-UHFFFAOYSA-N 2-ethylhexoxyperoxycarbonyl 2-ethylhexylperoxy carbonate Chemical compound CCCCC(CC)COOOC(=O)OC(=O)OOOCC(CC)CCCC MNOVHWSHIUHSAZ-UHFFFAOYSA-N 0.000 description 1
- TVWBTVJBDFTVOW-UHFFFAOYSA-N 2-methyl-1-(2-methylpropylperoxy)propane Chemical compound CC(C)COOCC(C)C TVWBTVJBDFTVOW-UHFFFAOYSA-N 0.000 description 1
- YMMLZUQDXYPNOG-UHFFFAOYSA-N 2-methylpentan-2-yl 7,7-dimethyloctaneperoxoate Chemical compound CCCC(C)(C)OOC(=O)CCCCCC(C)(C)C YMMLZUQDXYPNOG-UHFFFAOYSA-N 0.000 description 1
- WXDJDZIIPSOZAH-UHFFFAOYSA-N 2-methylpentan-2-yl benzenecarboperoxoate Chemical compound CCCC(C)(C)OOC(=O)C1=CC=CC=C1 WXDJDZIIPSOZAH-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- BQARUDWASOOSRH-UHFFFAOYSA-N 2-tert-butylperoxypropan-2-yl hydrogen carbonate Chemical compound CC(C)(C)OOC(C)(C)OC(O)=O BQARUDWASOOSRH-UHFFFAOYSA-N 0.000 description 1
- KFGFVPMRLOQXNB-UHFFFAOYSA-N 3,5,5-trimethylhexanoyl 3,5,5-trimethylhexaneperoxoate Chemical compound CC(C)(C)CC(C)CC(=O)OOC(=O)CC(C)CC(C)(C)C KFGFVPMRLOQXNB-UHFFFAOYSA-N 0.000 description 1
- NECRQCBKTGZNMH-UHFFFAOYSA-N 3,5-dimethylhex-1-yn-3-ol Chemical compound CC(C)CC(C)(O)C#C NECRQCBKTGZNMH-UHFFFAOYSA-N 0.000 description 1
- ODMBLKQTVUQJFT-UHFFFAOYSA-N 3,7-dimethyloct-6-enyl 2-methylprop-2-enoate Chemical compound CC(C)=CCCC(C)CCOC(=O)C(C)=C ODMBLKQTVUQJFT-UHFFFAOYSA-N 0.000 description 1
- QPBVYDIIQIYFQO-UHFFFAOYSA-N 3,7-dimethyloct-6-enyl prop-2-enoate Chemical compound CC(C)=CCCC(C)CCOC(=O)C=C QPBVYDIIQIYFQO-UHFFFAOYSA-N 0.000 description 1
- FRIBMENBGGCKPD-UHFFFAOYSA-N 3-(2,3-dimethoxyphenyl)prop-2-enal Chemical compound COC1=CC=CC(C=CC=O)=C1OC FRIBMENBGGCKPD-UHFFFAOYSA-N 0.000 description 1
- ZIFLDVXQTMSDJE-UHFFFAOYSA-N 3-[[dimethyl-[3-(2-methylprop-2-enoyloxy)propyl]silyl]oxy-dimethylsilyl]propyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC[Si](C)(C)O[Si](C)(C)CCCOC(=O)C(C)=C ZIFLDVXQTMSDJE-UHFFFAOYSA-N 0.000 description 1
- XTMHZQHIQLSLMK-UHFFFAOYSA-N 3-[dimethylsilyloxy(dimethyl)silyl]propyl 2-methylprop-2-enoate Chemical compound C[SiH](C)O[Si](C)(C)CCCOC(=O)C(C)=C XTMHZQHIQLSLMK-UHFFFAOYSA-N 0.000 description 1
- MKTOIPPVFPJEQO-UHFFFAOYSA-N 4-(3-carboxypropanoylperoxy)-4-oxobutanoic acid Chemical compound OC(=O)CCC(=O)OOC(=O)CCC(O)=O MKTOIPPVFPJEQO-UHFFFAOYSA-N 0.000 description 1
- NFWPZNNZUCPLAX-UHFFFAOYSA-N 4-methoxy-3-methylaniline Chemical compound COC1=CC=C(N)C=C1C NFWPZNNZUCPLAX-UHFFFAOYSA-N 0.000 description 1
- SAPGBCWOQLHKKZ-UHFFFAOYSA-N 6-(2-methylprop-2-enoyloxy)hexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCCOC(=O)C(C)=C SAPGBCWOQLHKKZ-UHFFFAOYSA-N 0.000 description 1
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
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Images
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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Description
(A)下記一般式(1)で表される構造を分子中に少なくとも1つ有するオルガノ(ポリ)シロキサン:100質量部、
(B)ジアシルパーオキサイド、パーオキシエステルから選ばれる1種以上を含む有機過酸化物:0.1〜30質量部、
(C)一分子中にケイ素原子に結合した水素原子を少なくとも2個含有するオルガノハイドロジェンポリシロキサン:0.1〜20質量部、
(D)白金系触媒:(A)成分に対して(D)成分中の白金の質量換算で0.01〜1,000ppmとなる量、
を含有することを特徴とする加熱硬化型シリコーン組成物を提供する。
(A)下記一般式(1)で表される構造を分子中に少なくとも1つ有するオルガノ(ポリ)シロキサン:100質量部、
(B)ジアシルパーオキサイド、パーオキシエステルから選ばれる1種以上を含む有機過酸化物:0.1〜30質量部、
(C)一分子中にケイ素原子に結合した水素原子を少なくとも2個含有するオルガノハイドロジェンポリシロキサン:0.1〜20質量部、
(D)白金系触媒:(A)成分に対して(D)成分中の白金の質量換算で0.01〜1,000ppmとなる量、
を含有することを特徴とする加熱硬化型シリコーン組成物を提供する。
(A)成分のオルガノ(ポリ)シロキサンは、下記一般式(1)で表される構造を分子中に少なくとも1つ有するオルガノ(ポリ)シロキサンである。尚、本発明においてオルガノ(ポリ)シロキサンとは、1分子中にシロキサン結合(−Si−O−Si−)が1つであるオルガノシロキサン、及び/又は、1分子中に2つ以上のシロキサン結合を含むオルガノポリシロキサンをいう。
好ましくは下式に示す化合物、
より具体的には、1,3−ビス(3−メタクリロキシプロピル)テトラメチルジシロキサンと1,1,3,3−テトラメチルジシロキサンを酸触媒存在下で平衡化反応する事によって得られる(3−メタクリロキシプロピル)−1,1,3,3−テトラメチルジシロキサンと、脂肪族不飽和基(例えば、エチレン性不飽和基、及びアセチレン性不飽和基が挙げられる。)を含むオルガノ(ポリ)シロキサンとを、白金触媒存在下でヒドロシリル化反応させるとよく、この方法で本発明に好適なものを製造することができるが、前記の合成方法に制限されるものではない。また、脂肪族不飽和基を含むオルガノ(ポリ)シロキサンは、脂肪族不飽和基を有するオルガノアルコキシシランを含むアルコキシシランの(共)加水分解縮合など公知の方法で製造することができ、市販のものを用いても良い。
(B)成分のジアシルパーオキサイド、パーオキシエステルから選ばれる1種以上を含む有機過酸化物は、本発明の加熱硬化型シリコーン組成物を所望の形状に成形した後に、加熱処理を加えて架橋反応により硬化させるために配合される成分であり、目的とする接続温度、接続時間、ポットライフ等により適宜選択される。
(C)成分のオルガノハイドロジェンポリシロキサンは、架橋剤として作用する成分であり、(A)成分とヒドロシリル化反応を起こし、本組成物の硬化に寄与する。該オルガノハイドロジェンポリシロキサンは、一分子中に少なくとも2個のケイ素原子結合水素原子(すなわち、SiH基)を有し、好ましくは3〜500個、より好ましくは3〜200個、特に好ましくは3〜150個有する。一分子中のケイ素原子数(または重合度)は、好ましくは2〜200個、より好ましくは3〜150個のものが使用される。前記のSiH基は、分子鎖末端および分子鎖非末端のいずれに位置していてもよく、この両方に位置するものであってもよい。
(D)成分の白金系触媒は、本組成物の硬化を促進するための触媒であり、例えば、白金および白金化合物が挙げられ、具体例としては、塩化白金酸、塩化白金酸のアルコール溶液、白金のオレフィン錯体、白金のアルケニルシロキサン錯体、白金のカルボニル錯体等が挙げられる。本組成物における(D)成分の含有量は、有効量でよく、具体的には、(A)成分に対して(D)成分中の白金金属成分が白金換算にして、質量基準0.01〜1,000ppm、好ましくは0.1〜500ppmとなる量である。
本発明の加熱硬化型シリコーン組成物は、特定の用途において所望されるような硬化または未硬化特性を改変させる他の成分も含ませ得る。例えば、(メタ)アクリロキシプロピルトリメトキシシラン、トリアルキル−またはトリアリル−イソシアヌレート、グリシドキシプロピルトリメトキシシラン、ビニルトリメトキシシラン等のような接着促進剤を、約20質量%までの量で含ませ得る。他の任意成分としては、約30質量%までの量の非(メタ)アクリルシリコーン希釈剤または可塑剤を含ませ得る。非(メタ)アクリルシリコーン類としては、100〜500cspの粘度を有するトリメチルシリル末端化オイル、およびシリコーンゴムが挙げられる。非(メタ)アクリルシリコーン類は、ビニル基のような共硬化性基を含み得る。
まず、パッケージ基板の筐体1の第1のリード電極3上に、本発明の加熱硬化型シリコーン組成物からなるダイボンド材を定量転写し、その上に光半導体素子2を搭載する。次に、ダイボンド材を加熱硬化させて硬化物5とする。次に、光半導体素子2の電極と第1のリード電極3を金線6を用いて電気的に接続し、光半導体素子2の電極と第2のリード電極4を金線7を用いて電気的に接続し、光半導体素子2が搭載されたパッケージ基板を得る。次いで、封止樹脂8を定量塗布し、塗布された封止樹脂を公知の硬化条件下で公知の硬化方法により、硬化させることによってパッケージ基板を封止することができる。本発明のダイボンド材を硬化して得られる硬化物を有する光半導体デバイスとしては、例えば、LED、半導体レーザー、フォトダイオード、フォトトランジスタ、太陽電池、CCD等が挙げられる。
下記成分を用意し、表1、2に示す組成のシリコーン組成物を調製した。
(A−1)
下記シロキサン単位からなり、
ジアシルパーオキサイドとしてDi−(3−methylbenzoyl)peroxide, Benzoyl(3−methylbenzoyl)peroxide and Dibenzol peroxideの40%キシレン溶液(商品名:ナイパーBMT−K40、日本油脂株式会社製)をそのまま用いた。
パーオキシエステルとしてt−Butyl peroxybenzoate(商品名:パーブチルZ、日本油脂株式会社製)をそのまま用いた。
下記シロキサン単位からなり、
M:(CH3)3SiO1/2
D:(CH3)2SiO2/2
DH:(CH3)SiHO2/2
M:D:DH=2:32:66で表される、25℃での粘度が150mPa・sの直鎖状オルガノポリシロキサン
白金含有量が0.5質量%の、白金1,3−ジビニル−1,1,3,3−テトラメチルジシロキサン錯体のトルエン溶液
粘度調整剤:ヒュームドシリカ(商品名レオシロールDM−30S トクヤマ社製)
接着性向上剤: 側鎖にエポキシ基を含有する環状シリコーンオイル(商品名:X−40−2670、信越化学工業株式会社製)
反応制御剤:3−メチル−1−ドデシン−3−オール
得られた組成物を2mm厚みのセルに流し込み、150℃×2時間の条件で硬化し、硬化物を調製した。その後、上島製作所製デュロメータタイプDにより硬度を測定した。
得られた組成物をアルミシャーレに流し込み、150℃×2時間の条件で大気下で硬化し、硬化物を調製した。得られた硬化物の表面タックを指触にて評価した。
LED用パッケージ基板として、光半導体素子を載置する凹部を有し、その底部に銀メッキされた第1のリード電極と第2のリード電極が設けられたLED用パッケージ基板[SMD5050(I−CHIUN PRECISION INDUSTRY CO.,社製、樹脂部PPA(ポリフタルアミド))]、光半導体素子として、Bridgelux社製 BXCD33を、それぞれ用意した。
上記の方法で得られた光半導体パッケージのうち10個を、25℃の室内でボンドテスター(Dage社製 Series4000)を用いてダイシェア強度の測定を行い、得られた測定値の平均値をMPaで示した。
上記の方法で得られた光半導体パッケージにおいて、25℃の室内で、先端の尖った針にてチップ周辺をこすり、酸素による表面硬化阻害の有無を確認した。
得られた結果を表3、4に示す。
5…ダイボンド材(硬化物)、 6、7…金線、 8…封止樹脂、 10…光半導体装置。
Claims (6)
- (A)下記一般式(1)で表される構造を分子中に少なくとも1つ有するオルガノ(ポリ)シロキサン:100質量部、
(B)ジアシルパーオキサイド、パーオキシエステルから選ばれる1種以上を含む有機過酸化物:0.1〜30質量部、
(C)一分子中にケイ素原子に結合した水素原子を少なくとも2個含有するオルガノハイドロジェンポリシロキサン:0.1〜20質量部、
(D)白金系触媒:(A)成分に対して(D)成分中の白金の質量換算で0.01〜1,000ppmとなる量、
を含有することを特徴とする加熱硬化型シリコーン組成物。 - 前記(A)成分のオルガノ(ポリ)シロキサンのZ1が−R4−であり、Z2が酸素原子であることを特徴とする請求項1に記載の加熱硬化型シリコーン組成物。
- 前記(A)成分のオルガノ(ポリ)シロキサンのZ1が−R4−O−又は、−R4(CH3)2Si−O−であり、Z2が置換又は非置換で同一又は異なってもよい炭素原子数1〜10の2価の有機基であることを特徴とする請求項1に記載の加熱硬化型シリコーン組成物。
- 前記(A)成分のオルガノ(ポリ)シロキサンは、該オルガノ(ポリ)シロキサンを構成する全シロキサン単位のうち0.1mol%以上の(SiO2)単位を有するものであることを特徴とする請求項1から請求項3のいずれか1項に記載の加熱硬化型シリコーン組成物。
- 請求項1から請求項4のいずれか1項に記載の加熱硬化型シリコーン組成物からなるものであることを特徴とするダイボンド材。
- 請求項5に記載のダイボンド材を硬化して得られる硬化物を有するものであることを特徴とする光半導体装置。
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