JP6611443B2 - 光学フィルタおよび光学装置 - Google Patents

光学フィルタおよび光学装置 Download PDF

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Publication number
JP6611443B2
JP6611443B2 JP2015056418A JP2015056418A JP6611443B2 JP 6611443 B2 JP6611443 B2 JP 6611443B2 JP 2015056418 A JP2015056418 A JP 2015056418A JP 2015056418 A JP2015056418 A JP 2015056418A JP 6611443 B2 JP6611443 B2 JP 6611443B2
Authority
JP
Japan
Prior art keywords
optical
optical filter
wavelength
multilayer film
incident angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015056418A
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English (en)
Japanese (ja)
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JP2016177067A (ja
JP2016177067A5 (https=
Inventor
慧 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2015056418A priority Critical patent/JP6611443B2/ja
Priority to US15/071,334 priority patent/US9891358B2/en
Publication of JP2016177067A publication Critical patent/JP2016177067A/ja
Publication of JP2016177067A5 publication Critical patent/JP2016177067A5/ja
Application granted granted Critical
Publication of JP6611443B2 publication Critical patent/JP6611443B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
    • G02B5/1885—Arranged as a periodic array

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • Projection Apparatus (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)
JP2015056418A 2015-03-19 2015-03-19 光学フィルタおよび光学装置 Expired - Fee Related JP6611443B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015056418A JP6611443B2 (ja) 2015-03-19 2015-03-19 光学フィルタおよび光学装置
US15/071,334 US9891358B2 (en) 2015-03-19 2016-03-16 Optical filter and optical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015056418A JP6611443B2 (ja) 2015-03-19 2015-03-19 光学フィルタおよび光学装置

Publications (3)

Publication Number Publication Date
JP2016177067A JP2016177067A (ja) 2016-10-06
JP2016177067A5 JP2016177067A5 (https=) 2018-04-26
JP6611443B2 true JP6611443B2 (ja) 2019-11-27

Family

ID=56924882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015056418A Expired - Fee Related JP6611443B2 (ja) 2015-03-19 2015-03-19 光学フィルタおよび光学装置

Country Status (2)

Country Link
US (1) US9891358B2 (https=)
JP (1) JP6611443B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11156753B2 (en) 2017-12-18 2021-10-26 Viavi Solutions Inc. Optical filters
TWI820663B (zh) * 2022-03-31 2023-11-01 國家中山科學研究院 高繞射效率和寬頻譜介電光柵結構
WO2024224245A1 (en) * 2023-04-28 2024-10-31 3M Innovative Properties Company Optical stack including microstructures on an optical film

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4915463A (en) * 1988-10-18 1990-04-10 The United States Of America As Represented By The Department Of Energy Multilayer diffraction grating
JPH04319903A (ja) * 1991-04-19 1992-11-10 Matsushita Electric Ind Co Ltd ダイクロイックミラー
JP4228058B2 (ja) * 2003-11-21 2009-02-25 彰 ▲さい▼藤 発色体とその製造方法
JP4853945B2 (ja) * 2006-02-23 2012-01-11 彰 齋藤 表示装置の製造方法
JP2007334318A (ja) 2006-05-15 2007-12-27 Sony Corp 光フィルタおよび色分離プリズム
JP2008058561A (ja) 2006-08-31 2008-03-13 Sony Corp 光学フィルタ及び色分解プリズム
US8116002B2 (en) * 2007-08-27 2012-02-14 Lumella Inc. Grating device with adjusting layer
DE102007054701A1 (de) * 2007-11-14 2009-05-28 Schott Ag Farbfilter und Verfahren zu dessen Herstellung
US9791623B2 (en) * 2009-11-30 2017-10-17 Board Of Regents, The University Of Texas System Multilevel leaky-mode resonant optical devices
JP6287099B2 (ja) * 2013-05-31 2018-03-07 旭硝子株式会社 Ｅｕｖリソグラフィ用反射型マスクブランク

Also Published As

Publication number Publication date
JP2016177067A (ja) 2016-10-06
US9891358B2 (en) 2018-02-13
US20160274283A1 (en) 2016-09-22

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