JP6566640B2 - 基板研磨装置 - Google Patents

基板研磨装置 Download PDF

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Publication number
JP6566640B2
JP6566640B2 JP2015000989A JP2015000989A JP6566640B2 JP 6566640 B2 JP6566640 B2 JP 6566640B2 JP 2015000989 A JP2015000989 A JP 2015000989A JP 2015000989 A JP2015000989 A JP 2015000989A JP 6566640 B2 JP6566640 B2 JP 6566640B2
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JP
Japan
Prior art keywords
door
opening
doors
closing
electromagnetic coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015000989A
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English (en)
Japanese (ja)
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JP2016125292A5 (https=
JP2016125292A (ja
Inventor
桂介 坂田
桂介 坂田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2015000989A priority Critical patent/JP6566640B2/ja
Priority to PCT/JP2015/085512 priority patent/WO2016111141A1/ja
Publication of JP2016125292A publication Critical patent/JP2016125292A/ja
Publication of JP2016125292A5 publication Critical patent/JP2016125292A5/ja
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Publication of JP6566640B2 publication Critical patent/JP6566640B2/ja
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Classifications

    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B41/00—Locks with visible indication as to whether the lock is locked or unlocked
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
    • E05B47/00—Operating or controlling locks or other fastening devices by electric or magnetic means
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F7/00—Accessories for wings not provided for in other groups of this subclass

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Main Body Construction Of Washing Machines And Laundry Dryers (AREA)
JP2015000989A 2015-01-06 2015-01-06 基板研磨装置 Active JP6566640B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015000989A JP6566640B2 (ja) 2015-01-06 2015-01-06 基板研磨装置
PCT/JP2015/085512 WO2016111141A1 (ja) 2015-01-06 2015-12-18 扉の開閉検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015000989A JP6566640B2 (ja) 2015-01-06 2015-01-06 基板研磨装置

Publications (3)

Publication Number Publication Date
JP2016125292A JP2016125292A (ja) 2016-07-11
JP2016125292A5 JP2016125292A5 (https=) 2017-11-30
JP6566640B2 true JP6566640B2 (ja) 2019-08-28

Family

ID=56355843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015000989A Active JP6566640B2 (ja) 2015-01-06 2015-01-06 基板研磨装置

Country Status (2)

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JP (1) JP6566640B2 (https=)
WO (1) WO2016111141A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7184453B2 (ja) * 2018-05-17 2022-12-06 株式会社ディスコ 搬送システム
JP2020067002A (ja) * 2018-10-22 2020-04-30 株式会社不二工機 可変容量型圧縮機用制御弁
JP7109863B2 (ja) * 2018-11-30 2022-08-01 株式会社ディスコ 搬送システム
CN111515871B (zh) * 2020-05-09 2020-12-29 湖北华磁电子科技有限公司 一种软磁铁氧体磁芯表面打磨装置
JP7774846B2 (ja) * 2021-11-10 2025-11-25 株式会社タカゾノ 薬剤供給装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4673914A (en) * 1984-03-20 1987-06-16 Lee Ki Chang Keyless automobile door lock/unlock, ignition switching and burglar alarm system
JPH0637511Y2 (ja) * 1989-09-29 1994-09-28 三菱自動車エンジニアリング株式会社 扉の開閉検出装置
JP2521024Y2 (ja) * 1990-11-08 1996-12-25 株式会社岡村製作所 ユニット収納庫の施解錠装置
JP3052184B2 (ja) * 1995-07-19 2000-06-12 スガツネ工業株式会社 開閉部材の感震自動ロック装置
JP2003011668A (ja) * 2001-06-29 2003-01-15 Fujikura Ltd 自動車用ドアの開閉検知装置
JP2004232352A (ja) * 2003-01-30 2004-08-19 Alpha Corp 箱錠制御装置
JP5368651B1 (ja) * 2013-04-23 2013-12-18 正人 福島 施錠装置及び侵入防止装置

Also Published As

Publication number Publication date
WO2016111141A1 (ja) 2016-07-14
JP2016125292A (ja) 2016-07-11

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