JP2016125292A5 - - Google Patents

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Publication number
JP2016125292A5
JP2016125292A5 JP2015000989A JP2015000989A JP2016125292A5 JP 2016125292 A5 JP2016125292 A5 JP 2016125292A5 JP 2015000989 A JP2015000989 A JP 2015000989A JP 2015000989 A JP2015000989 A JP 2015000989A JP 2016125292 A5 JP2016125292 A5 JP 2016125292A5
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JP
Japan
Prior art keywords
door
processing apparatus
equipment
opening
closing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015000989A
Other languages
English (en)
Japanese (ja)
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JP6566640B2 (ja
JP2016125292A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015000989A priority Critical patent/JP6566640B2/ja
Priority claimed from JP2015000989A external-priority patent/JP6566640B2/ja
Priority to PCT/JP2015/085512 priority patent/WO2016111141A1/ja
Publication of JP2016125292A publication Critical patent/JP2016125292A/ja
Publication of JP2016125292A5 publication Critical patent/JP2016125292A5/ja
Application granted granted Critical
Publication of JP6566640B2 publication Critical patent/JP6566640B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015000989A 2015-01-06 2015-01-06 基板研磨装置 Active JP6566640B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015000989A JP6566640B2 (ja) 2015-01-06 2015-01-06 基板研磨装置
PCT/JP2015/085512 WO2016111141A1 (ja) 2015-01-06 2015-12-18 扉の開閉検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015000989A JP6566640B2 (ja) 2015-01-06 2015-01-06 基板研磨装置

Publications (3)

Publication Number Publication Date
JP2016125292A JP2016125292A (ja) 2016-07-11
JP2016125292A5 true JP2016125292A5 (https=) 2017-11-30
JP6566640B2 JP6566640B2 (ja) 2019-08-28

Family

ID=56355843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015000989A Active JP6566640B2 (ja) 2015-01-06 2015-01-06 基板研磨装置

Country Status (2)

Country Link
JP (1) JP6566640B2 (https=)
WO (1) WO2016111141A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7184453B2 (ja) * 2018-05-17 2022-12-06 株式会社ディスコ 搬送システム
JP2020067002A (ja) * 2018-10-22 2020-04-30 株式会社不二工機 可変容量型圧縮機用制御弁
JP7109863B2 (ja) * 2018-11-30 2022-08-01 株式会社ディスコ 搬送システム
CN111515871B (zh) * 2020-05-09 2020-12-29 湖北华磁电子科技有限公司 一种软磁铁氧体磁芯表面打磨装置
JP7774846B2 (ja) * 2021-11-10 2025-11-25 株式会社タカゾノ 薬剤供給装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4673914A (en) * 1984-03-20 1987-06-16 Lee Ki Chang Keyless automobile door lock/unlock, ignition switching and burglar alarm system
JPH0637511Y2 (ja) * 1989-09-29 1994-09-28 三菱自動車エンジニアリング株式会社 扉の開閉検出装置
JP2521024Y2 (ja) * 1990-11-08 1996-12-25 株式会社岡村製作所 ユニット収納庫の施解錠装置
JP3052184B2 (ja) * 1995-07-19 2000-06-12 スガツネ工業株式会社 開閉部材の感震自動ロック装置
JP2003011668A (ja) * 2001-06-29 2003-01-15 Fujikura Ltd 自動車用ドアの開閉検知装置
JP2004232352A (ja) * 2003-01-30 2004-08-19 Alpha Corp 箱錠制御装置
JP5368651B1 (ja) * 2013-04-23 2013-12-18 正人 福島 施錠装置及び侵入防止装置

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