JP2016125292A5 - - Google Patents

Download PDF

Info

Publication number
JP2016125292A5
JP2016125292A5 JP2015000989A JP2015000989A JP2016125292A5 JP 2016125292 A5 JP2016125292 A5 JP 2016125292A5 JP 2015000989 A JP2015000989 A JP 2015000989A JP 2015000989 A JP2015000989 A JP 2015000989A JP 2016125292 A5 JP2016125292 A5 JP 2016125292A5
Authority
JP
Japan
Prior art keywords
door
processing apparatus
equipment
opening
closing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015000989A
Other languages
Japanese (ja)
Other versions
JP6566640B2 (en
JP2016125292A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2015000989A priority Critical patent/JP6566640B2/en
Priority claimed from JP2015000989A external-priority patent/JP6566640B2/en
Priority to PCT/JP2015/085512 priority patent/WO2016111141A1/en
Publication of JP2016125292A publication Critical patent/JP2016125292A/en
Publication of JP2016125292A5 publication Critical patent/JP2016125292A5/ja
Application granted granted Critical
Publication of JP6566640B2 publication Critical patent/JP6566640B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Description

上記処理装置においては、消耗品の交換や機器の保守点検等のために扉を開閉する際に、扉の開閉を検知することにより、扉の開閉と処理装置とのインターロックを取っている。
また、半導体製造装置等の処理装置に拘わらず、産業機械では同様の開閉可能な扉が設けられている装置及び設備が一般的に作られており、処理液飛散・処理用ガス漏洩防止等のみの目的ではなく、製品の製造工程上の製品品質を保つ為と、機械的な動作・電気的な動作に対して、人間の安全を確保する目的でも扉の設置とその開閉検知、ロックが行われている。 In the above processing apparatus, when the door is opened and closed for replacement of consumables, maintenance and inspection of equipment, etc., the opening and closing of the door is detected and the processing apparatus is interlocked.
Further, regardless of the processing apparatus such as a semiconductor manufacturing device, similar reclosable device door is provided and equipment in industrial machinery have been made generally, the treatment liquid scattering-treatment gas leakage prevention only In order to maintain product quality in the product manufacturing process, and to ensure human safety against mechanical and electrical operations, door installation, opening / closing detection, and locking are performed. It has been broken.

JP2015000989A 2015-01-06 2015-01-06 Substrate polishing equipment Active JP6566640B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015000989A JP6566640B2 (en) 2015-01-06 2015-01-06 Substrate polishing equipment
PCT/JP2015/085512 WO2016111141A1 (en) 2015-01-06 2015-12-18 Door opening and closing detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015000989A JP6566640B2 (en) 2015-01-06 2015-01-06 Substrate polishing equipment

Publications (3)

Publication Number Publication Date
JP2016125292A JP2016125292A (en) 2016-07-11
JP2016125292A5 true JP2016125292A5 (en) 2017-11-30
JP6566640B2 JP6566640B2 (en) 2019-08-28

Family

ID=56355843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015000989A Active JP6566640B2 (en) 2015-01-06 2015-01-06 Substrate polishing equipment

Country Status (2)

Country Link
JP (1) JP6566640B2 (en)
WO (1) WO2016111141A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7184453B2 (en) * 2018-05-17 2022-12-06 株式会社ディスコ Conveyor system
JP2020067002A (en) * 2018-10-22 2020-04-30 株式会社不二工機 Control valve for variable capacity type compressor
JP7109863B2 (en) * 2018-11-30 2022-08-01 株式会社ディスコ Conveyor system
CN111515871B (en) * 2020-05-09 2020-12-29 湖北华磁电子科技有限公司 Soft magnetic ferrite magnetic core surface grinding device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4673914A (en) * 1984-03-20 1987-06-16 Lee Ki Chang Keyless automobile door lock/unlock, ignition switching and burglar alarm system
JPH0637511Y2 (en) * 1989-09-29 1994-09-28 三菱自動車エンジニアリング株式会社 Door open / close detector
JP2521024Y2 (en) * 1990-11-08 1996-12-25 株式会社岡村製作所 Locking and unlocking device for unit storage
JP3052184B2 (en) * 1995-07-19 2000-06-12 スガツネ工業株式会社 Automatic locking device for opening and closing members
JP2003011668A (en) * 2001-06-29 2003-01-15 Fujikura Ltd Device for detecting opening/closing of automobile door
JP2004232352A (en) * 2003-01-30 2004-08-19 Alpha Corp Jim lock controller
JP5368651B1 (en) * 2013-04-23 2013-12-18 正人 福島 Locking device and intrusion prevention device

Similar Documents

Publication Publication Date Title
JP2016125292A5 (en)
IL259969B (en) Feature selection and automated process window monitoring through outlier detection
EP3246888A4 (en) Paralysis detection and alarming apparatus and processing method thereof
EP3385108A4 (en) System and method for preventing abnormal opening of contactor through real-time operation detection
IL301514A (en) Cannabis products and industrial methods for production thereof
ZA202005548B (en) Ethylene production process and chemical complex
LT3386164T (en) Context sensitive rule-based alerts for fraud monitoring
SG10201700178XA (en) Closure device for the vacuum-tight closure of an opening in a wall
GB2539067B (en) Apparatus and method for the detection and monitoring of the condition of pipeline components
IL248003A0 (en) Sealing plug for closing holes in walls and the like
HK1218164A1 (en) Security inspection equipment and radiation detection method
GB2566625A (en) Containers with tamper indicative hatch for sample removal
PT3327435T (en) Production and/or monitoring process of an aquifer comprising at least one dissolved gas
EP3439237A4 (en) Exception monitoring and alarming method and device
FR3027700B1 (en) METHOD OF AUTHENTICATING THE CLOSURE ASSEMBLY OF A CONTAINER
IL277826A (en) Event statistic generation method and apparatus for intrusion detection
EP3729343A4 (en) Automated detection of anomalous industrial process operation
IL233615A0 (en) Method and devices for discharging contaminants out of a seal chamber
PT3541218T (en) Seam seal and method for forming the same on stretch denim and other fabric products
MX2018015716A (en) Methods for analyzing respirable particles in bulk materials.
JP2014214863A5 (en)
PL3032021T3 (en) Device for electrically locking/unlocking and/or electrically opening/closing a closure and closure provided with said device
HUE055741T2 (en) Method and device for the production of various chemical products
HK1232203A1 (en) Elevator door opening/closing device and repair method for elevator door opening/closing device
SI3017922T1 (en) Method for monitoring the machinery space of a processing machine, especially of a moulder, and processing machine, in particular a moulder, for carrying out such a method