JP6566640B2 - Substrate polishing equipment - Google Patents

Description

The present invention relates to a substrate polishing apparatus provided with a detection device that detects and locks the opening and closing of a door provided on a housing of various devices, a housing that forms a predetermined space inside, a partition wall that partitions the space, and the like. is there.

  Since various processing apparatuses used in the manufacturing process of a semiconductor device process a semiconductor substrate using a processing liquid or a processing gas, the processing apparatus includes a housing for making the inside a sealed space partitioned from the external environment. In this way, the dispersion of the processing liquid and the leakage of the processing gas are prevented. Since various consumables are used in the processing apparatus, they must be periodically replaced. In addition, since the processing apparatus is a collection of various precision devices, maintenance and inspection of the devices are required. Therefore, a plurality of doors that can be opened and closed are provided in the housing of the processing apparatus.

In the above processing apparatus, when the door is opened and closed for replacement of consumables, maintenance and inspection of equipment, etc., the opening and closing of the door is detected and the processing apparatus is interlocked.
Further, regardless of the processing apparatus such as a semiconductor manufacturing device, similar reclosable device door is provided and equipment in industrial machinery have been made generally, the treatment liquid scattering-treatment gas leakage prevention only In order to maintain product quality in the product manufacturing process, and to ensure human safety against mechanical and electrical operations, door installation, opening / closing detection, and locking are performed. It has been broken.

  FIG. 7 is a schematic perspective view showing a conventional example of a detection device that detects opening and closing of a door. In FIG. 7, the two adjacent left and right doors 3, 3 are of a double door type that rotates in the opposite direction and opens forward. A rectangular opening 31 is formed in the portion covered by the two doors 3, 3, and one door switch corresponding to one door 3 is formed at the upper end of the opening 31. 35 is installed. The opening 31 is not limited to a rectangular shape, and may have another shape. Each door switch 35 is connected to a control unit (not shown) via an electric wire 36.

  In the detection apparatus configured as shown in FIG. 7, the opening and closing of the doors 3 and 3 are detected by the door switches 35 and 35, and the opening and closing signals are output from the door switches 35 and 35.

JP 2010-87255 A JP 2000-3950 A JP 2000-164480 A

In the conventional detection apparatus as shown in FIG. 7, since a door switch and an electrically controlled lock mechanism are provided for one door, there are problems as listed below.
(1) Two door switches and their peripheral parts are required for two doors, and the number of parts increases.
(2) It is necessary to connect power supply / signal transmission wires, and the number of wires is the same as the number of door switches.
(3) When the output contacts of two or more door switches are connected in series, a circuit for connecting the signal output circuit of the door switch in series other than the door switch installation part is required.
(4) When the output contacts of the two door switches are connected in parallel, a circuit for connecting the signal output circuit of the door switch in parallel other than the door switch installation portion is required.
(5) It is necessary to provide one door opening / closing detection I / O and electric control type locking mechanism control operation I / O per door.

The present invention has been made in view of the above-described circumstances. With respect to a plurality of doors, the opening and closing of each door can be detected with a single door switch, and each door can be detected with a single electrically controlled lock mechanism. It is an object of the present invention to provide a substrate polishing apparatus provided with a door open / close detection device capable of locking.

To achieve the above object, the present onset Ming, the opening and closing of two or more doors installed in the opening of the housing for a closed space partitioned inner space of polishing process of the substrate from the external environment A substrate polishing apparatus provided with a door opening / closing detection device for detecting, wherein a common single door switch is provided for the two or more doors, and the door switch corresponds to each of the two or more doors. Two or more door opening / closing detection units, and the output circuits of the two or more door opening / closing detection units are connected in series or in parallel in the door switch, and one door switch is provided with a single control input. A door lock coil portion that locks the two or more doors by operating the electromagnetic coil, and the door lock coil portion includes the one electromagnetic coil and an electromagnetic coil shaft that moves by the operation of the electromagnetic coil. The electromagnetic coil shaft , Characterized by comprising two or more locking lever that engages a locking key secured to each of the two or more doors through operation of the electromagnetic coil.
According to the present invention, by providing a circuit in which two or more door opening / closing detectors are connected in series or in parallel inside the door switch, one door switch can perform opening / closing detection output of two or more doors. it can.

According to the present invention, one electromagnetic coil can be operated and one or more doors can be locked by one point of control input into the electric control type lock mechanism.

According to the present invention, when the electromagnetic coil is turned on, the electromagnetic coil shaft is pushed by the attractive force of the electromagnetic coil, and the two or more locking levers are respectively engaged with the lock key, for example, fitted in the hole of the lock key. Combined. Thereby, the lock mechanism is in a locked state.

According to a preferred aspect of the present invention, the door switch includes a contact of an output circuit of the door opening / closing detection unit on a primary side or a secondary side of the door lock coil unit.
According to the electric control type door lock mechanism of the present invention, when a door lock command is input to the electric control type lock mechanism, the contact of the door open / close detection output circuit is inserted on the primary side or the secondary side of the electromagnetic coil circuit for locking. Thus, the door locking operation according to the door opening / closing condition can be performed only with the internal circuit.

  According to a preferred aspect of the present invention, the contacts of the output circuits of the two or more door opening / closing detection units are connected in series or in parallel.

The present invention has the following effects.
(1) With respect to multiple doors, it is possible to detect the opening and closing of each door with a single door switch, and it is possible to lock each door with a single electrically controlled lock mechanism, reducing the number of parts. Yes.
(2) Opening / closing of each door can be detected with a single door switch for a plurality of doors, and each door can be locked with a single electric control type lock mechanism. A serial connection / parallel connection circuit can be provided inside the control-type lock mechanism, eliminating the need for an external circuit and a power supply / signal transmission wire. Moreover, although the electric wire connection had to be made in the vicinity of each door switch or the electric control type lock mechanism, the connection at one place becomes possible.
(3) With respect to a plurality of doors, the opening / closing of each door can be detected with one door switch, and each door can be locked with one electric control type lock mechanism. The control operation I / O can also be operated at one point. Further, depending on the detection / operation conditions, it is possible to divide the I / O by detecting with a door switch of a plurality of types of circuits, or providing an electrically controlled lock mechanism.

FIG. 1 is a schematic perspective view showing an overall configuration of a polishing apparatus provided with a door open / close detection device according to the present invention. FIG. 2 is a view showing a main part of the housing, and is a perspective view showing a door provided in the housing and its periphery. 3 (a) and 3 (b) are schematic views showing a comparison between a conventional door opening / closing detection device and a door opening / closing detection device according to the present invention, and FIG. 3 (a) is a conventional door opening / closing detection device. FIG. 3B shows a door opening / closing detection device according to the present invention. 4 (a) and 4 (b) are diagrams showing a comparison between a conventional electric control type door lock mechanism and an electric control type door lock mechanism according to the present invention, and FIG. 4 (a) shows a conventional electric control type. FIG. 4B is a circuit diagram showing the door lock mechanism, and FIG. 4B is a circuit diagram showing the electrically controlled door lock mechanism according to the present invention. 5 (a) and 5 (b) are schematic views showing the mechanical structure of a lock mechanism suitably used for the single-coil circuit electrically controlled door lock mechanism shown on the upper side of FIG. 4 (b). FIG. 5A shows the unlocked state of the lock mechanism, and FIG. 5B shows the locked state of the lock mechanism. 6 (a), 6 (b), and 6 (c) create operating conditions for the conventional electric control type door lock mechanism shown in FIGS. 4 (a) and 4 (b) and the electric control type door lock mechanism according to the present invention. FIG. 6A is a circuit diagram showing a conventional electric control type door lock mechanism, and FIGS. 6B and 6C are electric control type door lock mechanisms according to the present invention. FIG. FIG. 7 is a schematic perspective view showing a conventional example of a detection device that detects opening and closing of a door.

Hereinafter, an embodiment of a substrate polishing apparatus provided with a door open / close detection device according to the present invention will be described with reference to FIGS. 1 to 6, the same or corresponding components are denoted by the same reference numerals, and redundant description is omitted.

Figure 1 is a schematic perspective view showing a Migaku Ken apparatus provided with a closing detection device of a door according to the present invention (CMP apparatus). In the present embodiment, a polishing apparatus will be described as a processing apparatus having a door opening / closing device. However , the door opening / closing detection device can be applied to a door provided on a housing or a partition wall of various devices. Also, it can be applied to a gate for restricting access to the production line.

  FIG. 1 is a schematic perspective view showing the overall configuration of the polishing apparatus. As shown in FIG. 1, the entire polishing apparatus is covered with a substantially rectangular parallelepiped housing 1, and the interior of the polishing apparatus is isolated from the external environment. At one end of the polishing apparatus, there is provided a load / unload unit 2 for placing a cassette for stocking a substrate such as a semiconductor wafer. The load / unload unit 2 can be equipped with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod). On the outer surface of the housing 1, a plurality of doors 3 for maintaining the polishing unit and the cleaning unit housed in the housing 1 are installed.

  In the polishing apparatus shown in FIG. 1, the substrate is taken out from the load / unload unit 2 by the transfer mechanism in the housing 1 and transferred to the polishing unit, and the polishing unit (slurry) is supplied to the polishing pad in the polishing unit. The substrate is polished by pressing against the polishing pad. The polished substrate is transported to the cleaning section by the transport mechanism, and is cleaned and dried by the cleaning liquid in the cleaning section. The cleaned substrate is returned to the load / unload unit 2 by the transport mechanism. In a polishing apparatus (CMP apparatus), a product (substrate) to be processed by automatic conveyance is loaded.

  Thus, since the polishing apparatus processes the substrate using a processing liquid such as a polishing liquid or a cleaning liquid, the polishing apparatus includes a housing 1 for making the inside a sealed space that is partitioned from the external environment. Gas leakage caused by scattering or volatilization of the processing liquid is prevented. Since various consumables are used in the polishing apparatus, they must be periodically replaced. In addition, since the polishing apparatus is a collection of various precision devices, maintenance and inspection of the devices are required. Therefore, the housing 1 of the polishing apparatus is provided with a plurality of doors 3 that can be opened and closed. The door 3 is also used when a product (substrate) to be processed is manually input.

FIG. 2 is a view showing the main part of the housing 1, and is a perspective view showing the door 3 provided in the housing 1 and its periphery.
As shown in FIG. 2, the housing 1 is provided with a plurality of doors 3. The plurality of doors 3 are fixed to the housing 1 by hinges 4 at one side end. In the example shown in FIG. 2, the two adjacent left and right doors 3 and 3 rotate in opposite directions and open to the front. It is a double-spread type. The plurality of doors 3 and 3 may be sliding doors that slide sideways to open and close.

3 (a) and 3 (b) are schematic views showing a comparison between a conventional door opening / closing detection device and a door opening / closing detection device according to the present invention, and FIG. 3 (a) is a conventional door opening / closing detection device. FIG. 3B shows a door opening / closing detection device according to the present invention.
In the conventional door open / close detection device, as shown in the lower perspective view of FIG. 3 (a), the adjacent left and right doors 3, 3 rotate in opposite directions and open forward. It has become. A rectangular opening 31 is formed in the portion covered by the two doors 3, 3, and one door switch corresponding to one door 3 is formed at the upper end of the opening 31. 35 is installed. The two door switches 35 and 35 are connected to each other via an electric wire 36 and a cable 37.
As shown in the upper circuit diagram of FIG. 3 (a), the two door switches 35, 35 are provided with door opening / closing detectors 35S, 35S each having a contact that can be opened and closed. The contact of the door opening / closing detection unit 35S is closed, and when each door 3 is opened, the contact of each door opening / closing detection unit 35S is opened. Each door opening / closing detection part 35 can detect opening / closing of the door 3 by opening / closing of this contact. The two door opening / closing detectors 35 </ b> S and 35 </ b> S are connected to each other via an electric wire 36 and a cable 37.

In the door opening / closing detection device of the present invention, as shown in the lower perspective view of FIG. 3B, the upper end of the short-shaped closing portion 31 covered by the two adjacent left and right doors 3,3. In the section, a single door switch 5 is installed. An electric wire 6 is connected to the door switch 5.
As shown in the circuit diagram on the upper side of FIG. 3B, the single door switch 5 includes two or more (two in the illustrated example) door opening / closing detectors 5S made of contacts that can be opened and closed. The door opening / closing detection unit 5S described above is a series connection circuit (a circuit diagram on the left side of FIG. 3B) or a parallel connection circuit (a circuit diagram on the right side of FIG. 3B). When each door 3 is closed, the contact of each door opening / closing detection unit 5S in the series connection circuit or the parallel connection circuit is closed, and when each door 3 is opened, the contact of each door opening / closing detection unit 5S is opened. The door switch 5 can detect the opening / closing of the door 3 by opening / closing the contact. Thus, according to the present invention, by providing a circuit in which two or more door opening / closing detectors 5S are connected in series or in parallel inside the door switch 5, one door switch 5 can be used to connect two or more doors. Open / close detection output can be performed.

4 (a) and 4 (b) are diagrams showing a comparison between a conventional electric control type door lock mechanism and an electric control type door lock mechanism according to the present invention, and FIG. 4 (a) shows a conventional electric control type. FIG. 4B is a circuit diagram showing the door lock mechanism, and FIG. 4B is a circuit diagram showing the electrically controlled door lock mechanism according to the present invention.
In the conventional electric control type door lock mechanism, as shown in FIG. 4A, when there are two doors, the two door switches 35 and 35 provided with the door opening / closing detector 35S are provided. The configuration is the same as that shown in FIG. In FIG. 4A, the two door opening / closing detection units 35S are displayed as the door opening / closing detection unit A and the door opening / closing detection unit B, and are distinct from each other, but have the same configuration. And door lock coil part 35L is installed adjacent to each door opening and closing detection part 35S. In FIG. 4 (a), the two door lock coil portions 35L are distinguished from the door lock coil portion A and the door lock coil portion B, but have the same configuration. The door lock coil part A and the door lock coil part B can individually input control inputs (input 1, input 2), operate the electromagnetic coil in each door lock coil part, and lock the two doors. it can. Thus, conventionally, when there are two doors, it is necessary to install two electrically controlled locking mechanisms. That is, as many control inputs as the number of lock mechanisms are required.

  In the electrically controlled door lock mechanism according to the present invention, as shown in FIG. 4 (b), when there are two or more doors, two or more door opening / closing detectors 5S are connected in series inside the door switch 5. Providing a circuit is similar to the configuration shown in FIG. In FIG. 4B, the two door opening / closing detection units 5S are displayed as the door opening / closing detection unit A and the door opening / closing detection unit B, and are distinct from each other, but have the same configuration. Then, adjacent to the door opening / closing detection part 5S, is a single door lock coil part 5L (shown as door lock coil part A / B in the illustrated example) provided (circuit diagram on the upper side of FIG. 4B)? Alternatively, two or more door lock coil portions 5L connected in parallel (two shown as door lock coil portion A and door lock coil portion B in the illustrated example) are provided (the lower circuit in FIG. 4B). Figure). In the case of the single coil circuit shown in the upper side of FIG. 4 (b), one control input (input 1) is input to the door lock coil portion A / B to operate one electromagnetic coil, and two doors Can be locked. In the case of the parallel coil connection circuit shown in the lower side of FIG. 4B, one point of control input (input 1) is input to the door lock coil part A and the door lock coil part B, and two electromagnetic coils are connected. Operate and lock the two doors. Thus, according to the present invention, one electromagnetic coil can be operated by one control input into the electric control type lock mechanism, and two or more doors can be locked, or one point can be locked. With the control input, two or more doors can be locked simultaneously using two or more electromagnetic coils connected in parallel.

5 (a) and 5 (b) are schematic views showing the mechanical structure of a lock mechanism suitably used for the single-coil circuit electrically controlled door lock mechanism shown on the upper side of FIG. 4 (b). FIG. 5A shows the unlocked state of the lock mechanism, and FIG. 5B shows the locked state of the lock mechanism.
5A and 5B, the upper diagram is a partial cross-sectional plan view of the lock mechanism, and the lower diagram is a partial cross-sectional side view of the lock mechanism.

As shown in FIGS. 5A and 5B, an electromagnetic coil shaft 52 is fitted to the electromagnetic coil 51 in the door lock coil portion. The electromagnetic coil shaft 52 is formed with two flange portions 52F1 and 52F2 having a larger diameter than the shaft portion so as to sandwich the electromagnetic coil 51, and two locking levers protruding in a hook shape radially outward from the shaft portion. 52L1 and 52L2 are formed. A compression coil spring 53 is interposed between the electromagnetic coil 51 and the flange portion 52F1. An electromagnetic coil operation input wiring 54 is connected to the electromagnetic coil 51.
On the other hand, lock keys 55A and 55B are fixed to the two doors 3 (see FIG. 3B). 3B, for example, the lock key 55A is fixed to the left door 3, and the lock key 55B is fixed to the right door 3. In FIG. 3B, the lock keys 55A and 55B are The illustration is omitted. 5A and 5B, only the lock keys 55A and 55B are shown, and the door 3 is not shown.

Next, the operation of the lock mechanism configured as shown in FIGS. 5A and 5B will be described.
(1) Unlocked state shown in FIG. 5A When the electromagnetic coil 51 is OFF, the urging force of the compression coil spring 53 causes the electromagnetic coil shaft 52 to be pushed to the left as indicated by the arrow, and the two locking levers 52L1 , 52L2 are separated from the lock keys 55A, 55B, respectively, and the lock mechanism is unlocked.
(2) Locked state shown in FIG. 5 (b) When the electromagnetic coil 51 is turned ON, the electromagnetic coil shaft 52 is pushed to the right as shown by the arrow by the attractive force of the electromagnetic coil 51, and the two locking levers 52L1, 52L2 is fitted in the holes of the lock keys 55A and 55B, respectively. Thereby, the lock mechanism is in a locked state.
As shown in FIGS. 5A and 5B, when there is one electromagnetic coil, a plurality of locks can be performed by a mechanical structure using an electromagnetic coil shaft or the like. The shape of the electromagnetic coil shaft in the illustrated example is an example, and any shape having a catching structure may be used.

6 (a), 6 (b), and 6 (c) create operating conditions for the conventional electric control type door lock mechanism shown in FIGS. 4 (a) and 4 (b) and the electric control type door lock mechanism according to the present invention. FIG. 6A is a circuit diagram showing a conventional electric control type door lock mechanism, and FIGS. 6B and 6C are electric control type door lock mechanisms according to the present invention. FIG.
In the conventional electric control type door lock mechanism, as shown in FIG. 6A, relays 38 are respectively connected to the external circuits on the input side of the door lock coil portion A and the door lock coil portion B shown in FIG. Is installed. In this way, the relay 38 is installed as an external circuit of the door switch 35, the relay 38 is operated according to the door opening / closing conditions, and control input (input 1, input) is individually applied to the door lock coil portion A and the door lock coil portion B. 2) is input, the electromagnetic coil in each door lock coil part is operated, and two doors can be locked.

  In the electric control type door lock mechanism according to the present invention, in the first mode shown in FIG. 6B, the door open / close is connected to the internal circuit on the input side of the door lock coil portion A / B shown in FIG. Detection unit contact A and door opening / closing detection unit contact B are provided in series connection (left side of FIG. 6 (b)) or parallel connection (right side of FIG. 6 (b)), and the door is locked according to the door opening / closing conditions. It is configured to operate.

  In the second mode shown in FIG. 6 (c), the door open / close detection part contact A and the door open / close detection part are provided in the internal circuits on the input side of the door lock coil part A and the door lock coil part B shown in FIG. 4 (b). The contact B is provided in series connection (left side of FIG. 6 (c)) or parallel connection (right side of FIG. 6 (c)), and is configured to perform a door locking operation according to the door opening / closing conditions. . 6 (b) and 6 (c), the door opening / closing detection unit contacts A and B may be provided on the secondary side of the electromagnetic coil.

  As shown in FIGS. 6B and 6C, according to the electric control type door lock mechanism according to the present invention, when a door lock command is input to the electric control type lock mechanism, the primary side of the electromagnetic coil circuit for locking is used. Alternatively, by inserting a contact of the door opening / closing detection output circuit on the secondary side, the door locking operation corresponding to the door opening / closing condition can be performed only by the internal circuit.

  Although the embodiment of the present invention has been described so far, the present invention is not limited to the above-described embodiment, and it is needless to say that the present invention may be implemented in various different forms within the scope of the technical idea.

DESCRIPTION OF SYMBOLS 1 Housing 2 Load / unload part 3 Door 5,35 Door switch 5S, 35S Door opening / closing detection part 6,36 Electric wire 31 Opening part 35L Door lock coil part 37 Cable 38 Relay 51 Electromagnetic coil 52L1, 52L2 Lock lever 52 Electromagnetic coil Shaft 53 Compression coil spring 55A, 55B Lock key

Claims (3)

Substrate polishing apparatus provided with a door open / close detection device that detects the opening / closing of two or more doors installed in an opening of a housing for making an internal space for polishing a substrate into a sealed space partitioned from an external environment Because
Provide a single door switch common to the two or more doors,
The door switch includes two or more door opening / closing detectors corresponding to each of the two or more doors, and output circuits of the two or more door opening / closing detectors are connected in series or in parallel in the door switch. And
The door switch includes a door lock coil portion that operates one electromagnetic coil with a single control input to lock the two or more doors, and the door lock coil portion includes the one electromagnetic coil, An electromagnetic coil shaft that moves by the operation of the electromagnetic coil, the electromagnetic coil shaft having two or more locking levers that engage with lock keys respectively fixed to the two or more doors by the operation of the electromagnetic coil; A substrate polishing apparatus comprising the substrate polishing apparatus. The door switch, the primary side or secondary side of the door lock coil unit, according to claim 1 Symbol mounting substrate polishing apparatus characterized by comprising a contact of the output circuit of the door opening and closing detection unit. The substrate polishing apparatus according to claim 2 , wherein the contact points of the output circuits of the two or more door opening / closing detection units are connected in series or in parallel.

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