JP2014214863A5 - - Google Patents

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Publication number
JP2014214863A5
JP2014214863A5 JP2013095346A JP2013095346A JP2014214863A5 JP 2014214863 A5 JP2014214863 A5 JP 2014214863A5 JP 2013095346 A JP2013095346 A JP 2013095346A JP 2013095346 A JP2013095346 A JP 2013095346A JP 2014214863 A5 JP2014214863 A5 JP 2014214863A5
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JP
Japan
Prior art keywords
opening
valve
gap
sealing member
seal member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2013095346A
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English (en)
Japanese (ja)
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JP2014214863A (ja
JP6172442B2 (ja
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Priority to JP2013095346A priority Critical patent/JP6172442B2/ja
Priority claimed from JP2013095346A external-priority patent/JP6172442B2/ja
Publication of JP2014214863A publication Critical patent/JP2014214863A/ja
Publication of JP2014214863A5 publication Critical patent/JP2014214863A5/ja
Application granted granted Critical
Publication of JP6172442B2 publication Critical patent/JP6172442B2/ja
Active legal-status Critical Current
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JP2013095346A 2013-04-30 2013-04-30 ゲートバルブ Active JP6172442B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013095346A JP6172442B2 (ja) 2013-04-30 2013-04-30 ゲートバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013095346A JP6172442B2 (ja) 2013-04-30 2013-04-30 ゲートバルブ

Publications (3)

Publication Number Publication Date
JP2014214863A JP2014214863A (ja) 2014-11-17
JP2014214863A5 true JP2014214863A5 (https=) 2016-06-02
JP6172442B2 JP6172442B2 (ja) 2017-08-02

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ID=51940823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013095346A Active JP6172442B2 (ja) 2013-04-30 2013-04-30 ゲートバルブ

Country Status (1)

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JP (1) JP6172442B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6209043B2 (ja) * 2013-09-30 2017-10-04 東京エレクトロン株式会社 ゲートバルブおよび基板処理装置
KR102193380B1 (ko) * 2016-12-19 2020-12-21 주식회사 원익아이피에스 기판 처리 장치
CN109323012B (zh) * 2018-12-10 2023-10-10 嘉兴科奥电磁技术有限公司 滑片式三通电磁阀
CN114464550A (zh) 2020-11-09 2022-05-10 东京毅力科创株式会社 基片处理系统
CN113932011A (zh) * 2021-11-23 2022-01-14 深圳市尊绅投资有限公司 一种应用于tft、pecvd工艺的腔体真空传输阀门密封组件

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03173784A (ja) * 1989-12-01 1991-07-29 Hitachi Ltd 真空容器
JP2005030459A (ja) * 2003-07-09 2005-02-03 Smc Corp 真空排気弁
JP2006005008A (ja) * 2004-06-15 2006-01-05 Matsushita Electric Ind Co Ltd プラズマ処理装置
JP2006194303A (ja) * 2005-01-12 2006-07-27 Nok Corp 耐プラズマ用シール

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