JP6549854B2 - 太陽電池の製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims description 141
- 238000000034 method Methods 0.000 claims description 76
- 239000004065 semiconductor Substances 0.000 claims description 32
- 238000006243 chemical reaction Methods 0.000 claims description 23
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 18
- 239000010935 stainless steel Substances 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 11
- 238000005240 physical vapour deposition Methods 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 5
- 239000010408 film Substances 0.000 description 58
- 239000010409 thin film Substances 0.000 description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 36
- 229910052710 silicon Inorganic materials 0.000 description 34
- 239000010703 silicon Substances 0.000 description 34
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 22
- 230000015572 biosynthetic process Effects 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- 238000004544 sputter deposition Methods 0.000 description 17
- 239000004809 Teflon Substances 0.000 description 10
- 229920006362 Teflon® Polymers 0.000 description 10
- 239000011521 glass Substances 0.000 description 10
- 239000012212 insulator Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 239000000969 carrier Substances 0.000 description 6
- 238000002425 crystallisation Methods 0.000 description 6
- 230000008025 crystallization Effects 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910003437 indium oxide Inorganic materials 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000010445 mica Substances 0.000 description 3
- 229910052618 mica group Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 238000005289 physical deposition Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Description
これらの材料は絶縁性が高く、仕掛太陽電池基板の温度上昇を防ぐことができる。また、製膜中にプラズマなどの放電にさらされても分解せず安定な材料である。
また、シート抵抗が1Ω/□以下のとき、交換工程を行うことが好ましい。例えば、金属層として用いるAgの場合、16nm程度製膜されるとシート抵抗が1Ω/□となる。金属層にCuを用いる場合、17nm程度の膜厚でシート抵抗が1Ω/□となる。
以下に、図7を参照しつつ、本発明の太陽電池として用いられる光電変換層について説明する。
ここで、「一導電型」について説明する。
シリコン系薄膜の製膜方法としては、プラズマCVD法が好ましい。シリコン系薄膜の形成条件としては、基板温度100〜300℃、圧力20〜2600Pa、高周波パワー密度0.004〜0.8W/cm2が好ましく用いられる。シリコン系薄膜の形成に使用する原料ガスとしては、SiH4、Si2H6等のシリコン含有ガスまたは、それらのガスとH2を混合したものが用いられる。
2.アモルファス半導体層
2−1.第一の真性シリコン系薄膜
2−2.p型シリコン系薄膜
2−3.第二の真性シリコン系薄膜
2−4.n型シリコン系薄膜
3.導電層
4.透明導電層
5−1.光入射面側透明導電層
5−2.裏面側透明導電層
6.金属極
7.集電極層
8.導電層
9.仕掛太陽電池基板
10.太陽電池セル
11.トレイ
12.保持具
13.支持体
14.コンベア
15.ターゲット
Claims (7)
- 結晶半導体基板上に非晶質半導体層が形成された光電変換層を含む仕掛太陽電池基板の上に、導電層を形成する太陽電池の製造方法であって、
導電性基材と、該導電性基材上に位置する絶縁性の少なくとも1つの支持体とを有するトレイ上に、前記仕掛太陽電池基板が配置される配置工程と、
物理蒸着法により、前記仕掛太陽電池基板上に導電層が製膜される製膜工程と、
を、この順に有し、
前記配置工程において、前記仕掛太陽電池基板が、前記導電性基材に接触しないように前記支持体上に配置され、
前記製膜工程後に、前記仕掛太陽電池基板が配置される領域のうち、トレイにおける少なくとも支持体上の導電層が製膜されていない領域の面積が、前記仕掛太陽電池基板の面積に占める割合の数値、および、前記支持体に製膜された、前記仕掛太陽電池基板と接する部分に存在する導電層のシート抵抗の数値のうち、少なくとも一方の数値を測定し、測定した前記数値が所定値以下に達した場合にだけ、前記導電性基材上の前記支持体を他の支持体に交換する交換工程をさらに有する、太陽電池の製造方法。 - 前記支持体は、仕掛太陽電池基板を配置する配置領域と、前記配置領域よりも外側の非配置領域に跨るように、前記トレイの導電性基材上に形成されており、
前記交換工程において、
前記仕掛太陽電池基板が配置される領域のうち、トレイにおける少なくとも支持体上の導電層が製膜されていない領域の面積が、仕掛太陽電池基板の面積の80%以下となった後に、他の支持体に交換されることを特徴とする、請求項1に記載の太陽電池の製造方法。 - 前記交換工程において、
前記支持体は、仕掛太陽電池基板と接する部分の一部に導電層が製膜されており、
前記仕掛太陽電池基板と接する部分の導電層のシート抵抗が1Ω/□以下になった後で、他の支持体に交換されることを特徴とする、請求項1または2に記載の太陽電池の製造方法。 - 前記トレイの導電性基材が、ステンレス、アルミおよびカーボンから選ばれる少なくとも1つから形成されている、請求項1〜3のいずれか1項に記載の太陽電池の製造方法。
- 前記トレイは、複数の仕掛太陽電池基板を載置可能な複数の保持部材を有することを特徴とする請求項1〜4のいずれか1項に記載の太陽電池の製造方法。
- 前記結晶半導体基板が結晶シリコン基板であり、前記非晶質半導体層が非晶質シリコン層であることを特徴とする、請求項1〜5のいずれか1項に記載の太陽電池の製造方法。
- 前記導電層が、透明導電層を含み、
前記製膜工程において、前記非晶質半導体層上に前記透明導電層が形成される、請求項1〜6のいずれか1項に記載の太陽電池の製造方法。
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JP6549854B2 true JP6549854B2 (ja) | 2019-07-24 |
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JP7459059B2 (ja) * | 2019-03-29 | 2024-04-01 | 株式会社カネカ | 太陽電池の製造方法および太陽電池 |
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JPH05230651A (ja) * | 1992-02-24 | 1993-09-07 | Nikon Corp | スパッタ成膜基板ホルダ− |
JP2002313891A (ja) * | 2001-04-16 | 2002-10-25 | Matsushita Electric Ind Co Ltd | 基板搬送用トレーおよびその製造方法 |
JP4107971B2 (ja) * | 2003-01-17 | 2008-06-25 | 三洋電機株式会社 | 光起電力装置およびその製造方法 |
JP2006299362A (ja) * | 2005-04-22 | 2006-11-02 | Optrex Corp | スパッタ成膜装置 |
US20100151680A1 (en) * | 2008-12-17 | 2010-06-17 | Optisolar Inc. | Substrate carrier with enhanced temperature uniformity |
JP2013221176A (ja) * | 2012-04-17 | 2013-10-28 | Panasonic Corp | 薄膜製造方法および薄膜製造装置 |
JP6048667B2 (ja) * | 2013-03-12 | 2016-12-21 | パナソニックIpマネジメント株式会社 | スパッタ装置 |
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