JP5398003B2 - 太陽電池の吸収層に酸化物層を堆積させる方法、および太陽電池の生産方法 - Google Patents
太陽電池の吸収層に酸化物層を堆積させる方法、および太陽電池の生産方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000000151 deposition Methods 0.000 title claims abstract description 8
- 238000010521 absorption reaction Methods 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 6
- 239000006096 absorbing agent Substances 0.000 claims abstract description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 28
- 239000011787 zinc oxide Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 238000000168 high power impulse magnetron sputter deposition Methods 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 229910003437 indium oxide Inorganic materials 0.000 claims description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 3
- 229910001887 tin oxide Inorganic materials 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- 229910004613 CdTe Inorganic materials 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910052793 cadmium Inorganic materials 0.000 claims description 2
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000011777 magnesium Substances 0.000 claims description 2
- PNHVEGMHOXTHMW-UHFFFAOYSA-N magnesium;zinc;oxygen(2-) Chemical compound [O-2].[O-2].[Mg+2].[Zn+2] PNHVEGMHOXTHMW-UHFFFAOYSA-N 0.000 claims description 2
- 229910021424 microcrystalline silicon Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 150000003346 selenoethers Chemical class 0.000 claims description 2
- 229940071182 stannate Drugs 0.000 claims description 2
- 125000005402 stannate group Chemical group 0.000 claims description 2
- GZCWPZJOEIAXRU-UHFFFAOYSA-N tin zinc Chemical compound [Zn].[Sn] GZCWPZJOEIAXRU-UHFFFAOYSA-N 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 230000002745 absorbent Effects 0.000 claims 1
- 239000002250 absorbent Substances 0.000 claims 1
- 150000003568 thioethers Chemical class 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 5
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 4
- 229910052951 chalcopyrite Inorganic materials 0.000 description 4
- 238000000224 chemical solution deposition Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BPASUENMPUEIAD-UHFFFAOYSA-N [Mg++].[S--].[S--].[Zn++] Chemical compound [Mg++].[S--].[S--].[Zn++] BPASUENMPUEIAD-UHFFFAOYSA-N 0.000 description 1
- ARFXHFBYPGMAAM-UHFFFAOYSA-N [Zn+2].[Se-2].[Mg+2].[Se-2] Chemical compound [Zn+2].[Se-2].[Mg+2].[Se-2] ARFXHFBYPGMAAM-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3628—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a sulfide
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3668—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
- C03C17/3678—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties specially adapted for use in solar cells
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
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- H01J37/32—Gas-filled discharge tubes
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Description
Claims (19)
- 少なくとも1つの吸収層を有する太陽電池に対して、透明且つ伝導性の酸化物層を少なくとも1つ堆積させる方法であって、
前記堆積は、パルス周波数が少なくとも100Hzのパルスマグネトロンスパッタリング方法によって実行され、
電力密度は、少なくとも0.5kW/cm 2 であり、
前記太陽電池は、CIGS、CdTe、アモルファスSi、微晶質Si、多結晶シリコン、または単結晶シリコンから形成される薄膜の吸収層を有する、
方法。 - 前記パルス周波数は、1000Hzから100Hzの範囲内であり、500Hzから100Hzの範囲内であることが好ましい
請求項1に記載の方法。 - パルス長は200μs以下であり、10μsから200μsの範囲内であることが好ましく、30μsから150μsの範囲内であることが特に好ましい
請求項1または2に記載の方法。 - 前記スパッタリング方法は、高電力パルスマグネトロンスパッタリング(HPPMS)および/または高電力インパルスマグネトロンスパッタリング(HIPIMS)である
請求項1から3のいずれか1項に記載の方法。 - 電力密度は、少なくとも0.75kW/cm2であることが好ましく、少なくとも1kW/cm2であることが特に好ましい
請求項1から4のいずれか1項に記載の方法。 - 前記酸化物層は、前記太陽電池の前面コンタクト層として形成される
請求項1から5のいずれか1項に記載の方法。 - 前記前面コンタクト層の厚みは、100nmから1.5μmの範囲内であり、300nmから1000nmの範囲内であることが好ましく、400nmから800nmの範囲内であることが特に好ましい
請求項6に記載の方法。 - 前記前面コンタクト層は、酸化亜鉛、酸化インジウム、酸化スズ、亜鉛−スズの混合物(スズ酸塩)、酸化チタン、および/またはこれらの混合物を含む群から選択される酸化物を含む
請求項6または7に記載の方法。 - 前記酸化物はドーピングされている
請求項8に記載の方法。 - ドーピング材料は、アルミニウム、ガリウム、インジウム、ホウ素、フッ素、アンチモン、ニオブ、および/またはこれらの混合物を含む群から選択される
請求項9に記載の方法。 - 前記ドーピングは、原子単位で、0.2%から5%の範囲内である
請求項9または10に記載の方法。 - 前記酸化物層は、前記吸収層と前記吸収層の上に設けられる別の層との間のバッファ層として形成される
請求項1から5のいずれか1項に記載の方法。 - 前記バッファ層の厚みは、1nmから200nmの範囲内にあり、10nmから100nmの範囲内であることが好ましく、10nmから50nmの範囲内にあることが特に好ましい
請求項12に記載の方法。 - 前記バッファ層は、インジウム、タングステン、モリブデン、亜鉛、マグネシウム、酸化インジウム、亜鉛−マグネシウムの酸化物および/またはこれらの混合物等の硫化物および/またはセレン化物を含む群から選択される材料を含む
請求項12または13に記載の方法。 - 前記バッファ層はカドミウムを含まない
請求項12から14のいずれか1項に記載の方法。 - 前記太陽電池は、CIGSから形成される吸収層を有する、
請求項1から15のいずれか1項に記載の方法。 - 前記太陽電池は、前記吸収層上に透明導電性酸化物から形成されるバッファ層と、前記バッファ層上に形成される透明導電性酸化物から形成される前面コンタクト層とを有する請求項16に記載の方法。
- 前記吸収層はCIGSから形成され、
前記酸化物層は、前記吸収層の上に設けられる別の層との間の透明導電性酸化物からなるバッファ層として形成される、
請求項1から15のいずれか1項に記載の方法。 - 請求項1から18のいずれか1項に記載の方法を用いた太陽電池の生産方法。
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PCT/EP2007/008480 WO2008040502A1 (de) | 2006-09-29 | 2007-09-28 | Verfahren zur abscheidung einer oxidschicht auf absorbern von solarzellen, solarzelle und verwendung des verfahrens |
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US20100055826A1 (en) * | 2008-08-26 | 2010-03-04 | General Electric Company | Methods of Fabrication of Solar Cells Using High Power Pulsed Magnetron Sputtering |
US20110253207A1 (en) * | 2008-11-05 | 2011-10-20 | Oerlikon Solar Ag, Truebbach | Solar cell device and method for manufacturing same |
FR2939788A1 (fr) * | 2008-12-12 | 2010-06-18 | Saint Gobain | Substrat a fonction verriere pour module photovoltaique |
US9249498B2 (en) | 2010-06-28 | 2016-02-02 | Micron Technology, Inc. | Forming memory using high power impulse magnetron sputtering |
EP2492251B1 (de) * | 2011-02-23 | 2017-01-04 | Schott Ag | Substrat mit Antireflexionsbeschichtung und Verahren zu dessen Herstellung |
DE102014108058A1 (de) | 2014-06-06 | 2015-12-17 | Schott Ag | Optisches Element mit hoher Kratzbeständigkeit |
KR101232717B1 (ko) | 2011-05-02 | 2013-02-13 | 한국생산기술연구원 | Ti-In-Zn-O 투명전극 및 이를 이용한 금속 삽입형 3층 구조 고전도도 투명전극과 이의 제조방법 |
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US9677168B2 (en) | 2013-10-08 | 2017-06-13 | TPK America, LLC | Touch panel and method for manufacturing the same |
US20150287843A1 (en) * | 2014-04-03 | 2015-10-08 | Tsmc Solar Ltd. | Solar cell with dielectric layer |
CN107002226B (zh) * | 2014-09-17 | 2021-03-12 | 欧瑞康表面解决方案股份公司,普费菲孔 | 制备具有改善的耐磨性的双层涂布的切割工具的方法 |
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