JP6540912B2 - 電子部品及びその製造方法 - Google Patents
電子部品及びその製造方法 Download PDFInfo
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- JP6540912B2 JP6540912B2 JP2018554844A JP2018554844A JP6540912B2 JP 6540912 B2 JP6540912 B2 JP 6540912B2 JP 2018554844 A JP2018554844 A JP 2018554844A JP 2018554844 A JP2018554844 A JP 2018554844A JP 6540912 B2 JP6540912 B2 JP 6540912B2
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- 229920005989 resin Polymers 0.000 claims description 91
- 239000002184 metal Substances 0.000 claims description 46
- 229910052751 metal Inorganic materials 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 21
- 238000009792 diffusion process Methods 0.000 claims description 19
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- 238000007747 plating Methods 0.000 claims description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 7
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000001723 curing Methods 0.000 description 3
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- 238000010438 heat treatment Methods 0.000 description 3
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- 229910045601 alloy Inorganic materials 0.000 description 2
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- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 239000011810 insulating material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
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- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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- H03—ELECTRONIC CIRCUITRY
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Description
図1(a)〜図1(c)〜図6を参照して、第1の実施形態の電子部品の製造方法及び第1の実施形態に係る電子部品を説明する。
図7(a)及び図7(b)〜図9(a)及び図9(b)を参照して、第2の実施形態に係る電子部品の製造方法を説明する。
図10は、本発明に係る電子部品の変形例を説明するための部分切欠き拡大正面断面図である。
図12は、本発明の第3の実施形態に係る電子部品の正面断面図である。
2…接着材
3…金属シート
4…積層体
5…仮固定用粘着剤
6…電子部品素子
6a…圧電体
6b…樹脂層
6d…IDT電極
6e,6f…側面
6g…一方主面
6h,6i…側面
6j…他方主面
7a,7b…端子
8…レジストパターン
8a,8b…開口
9,10,10A,10B…貫通電極
11…樹脂構造体
11a…第1の面
11b…第2の面
12,13…配線
15…電子部品素子
15a…電子部品素子本体
15b,15c…電極ランド
15d,15e…金属バンプ
16…電子部品
21…レジストパターン
21a,21b…開口
22,23…貫通電極
24…樹脂構造体
25…電子部品
31…電子部品
32…電子部品素子
32a…Si半導体チップ
32b…拡散防止膜
33…ゲート電極
34…配線
35…貫通電極
41,51,61,62…電子部品
42a〜42c…端子電極
43a〜43c…金属バンプ
52,55a,55b…配線
53a〜53d…絶縁層
54a〜54d…絶縁層
Claims (13)
- 対向し合う第1の面と第2の面を有する樹脂構造体と、
前記樹脂構造体に内蔵されており、一方主面と対向している他方主面と、前記一方主面と前記他方主面を結ぶ複数の側面とを有し、前記樹脂構造体における前記第1の面で露出している電子部品素子と、
前記樹脂構造体における前記第1の面と前記第2の面とを結ぶように樹脂構造体を貫通している貫通電極と、
を備え、
前記貫通電極が、前記電子部品素子における前記複数の側面のうち少なくとも1つの前記側面に接触している、電子部品。 - 前記貫通電極が複数設けられており、
複数の前記貫通電極が、前記電子部品素子における前記複数の側面のうちのいずれかの前記側面に接触している、請求項1に記載の電子部品。 - 前記複数の貫通電極のうち、少なくとも1つの貫通電極と、残りの少なくとも1つの貫通電極とが、前記電子部品素子における異なる前記側面に接触している、請求項2に記載の電子部品。
- 前記電子部品素子において、前記複数の側面が、対向し合う一対の前記側面を有しており、
前記少なくとも1つの貫通電極が、前記一対の側面のうちの一方の前記側面に接触しており、
前記残りの少なくとも1つの貫通電極が、前記一対の側面のうちの他方の前記側面に接触している、請求項3に記載の電子部品。 - 前記樹脂構造体における前記第1の面または前記第2の面に設けられており、前記貫通電極に電気的に接続されている配線をさらに備える、請求項1〜4のいずれか1項に記載の電子部品。
- 前記電子部品素子の少なくとも前記複数の側面に設けられた拡散防止膜をさらに有し、前記貫通電極が前記拡散防止膜に接触している、請求項1〜5のいずれか1項に記載の電子部品。
- 前記電子部品素子が、Si半導体チップであり、
前記Si半導体チップにおける複数の側面のうちのいずれかの側面上の前記拡散防止膜に、前記貫通電極が接触している、請求項6に記載の電子部品。 - 前記樹脂構造体の前記第1の面または前記第2の面に実装された他の電子部品素子をさらに備える、請求項1〜6のいずれか1項に記載の電子部品。
- 前記樹脂構造体の前記第1の面または第2の面に、他の電子部品が実装されている、請求項1〜8のいずれか1項に記載の電子部品。
- 粘着剤を用いて、金属シート上に電子部品素子を仮固定する工程と、
前記電子部品素子における複数の側面のうちのいずれかの前記側面に接している部分に開口を有し、該開口に前記金属シートが露出している、レジストパターンを形成する工程と、
前記レジストパターンにおける前記開口内において、めっきにより金属膜を形成し、前記電子部品素子の前記側面に接触している貫通電極を形成する工程と、
前記レジストパターンを剥離する工程と、
前記電子部品素子及び前記貫通電極を封止するように、樹脂材料を前記金属シート上に付与する工程と、
前記樹脂材料を硬化させて、樹脂構造体を形成する工程と、
前記金属シートを除去する工程と、
を備える、電子部品の製造方法。 - 前記樹脂材料を付与した後に、プレスする工程をさらに備える、請求項10に記載の電子部品の製造方法。
- 前記金属シートを除去した後に、前記樹脂構造体を薄くし、前記貫通電極を前記樹脂構造体の対向し合う第1の面と第2の面に露出させる、請求項10または11に記載の電子部品の製造方法。
- 前記樹脂構造体の前記第1の面または前記第2の面に、前記貫通電極に電気的に接続されるように配線を設ける工程をさらに備える、請求項12に記載の電子部品の製造方法。
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