JP6540397B2 - 圧脈波センサの検査方法及び圧脈波センサの製造方法 - Google Patents

圧脈波センサの検査方法及び圧脈波センサの製造方法 Download PDF

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Publication number
JP6540397B2
JP6540397B2 JP2015175967A JP2015175967A JP6540397B2 JP 6540397 B2 JP6540397 B2 JP 6540397B2 JP 2015175967 A JP2015175967 A JP 2015175967A JP 2015175967 A JP2015175967 A JP 2015175967A JP 6540397 B2 JP6540397 B2 JP 6540397B2
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Japan
Prior art keywords
pressure
terminal portion
substrate
sensor chip
pulse wave
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JP2015175967A
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Japanese (ja)
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JP2017051277A5 (enExample
JP2017051277A (ja
Inventor
教子 鴫原
教子 鴫原
雄樹 加藤
雄樹 加藤
祐之 若宮
祐之 若宮
小椋　敏彦
敏彦 小椋
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Omron Healthcare Co Ltd
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Omron Healthcare Co Ltd
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Application filed by Omron Healthcare Co Ltd filed Critical Omron Healthcare Co Ltd
Priority to JP2015175967A priority Critical patent/JP6540397B2/ja
Priority to EP16844245.7A priority patent/EP3332702B1/en
Priority to PCT/JP2016/075435 priority patent/WO2017043384A1/ja
Priority to CN201680051684.5A priority patent/CN108024736B/zh
Publication of JP2017051277A publication Critical patent/JP2017051277A/ja
Priority to US15/914,711 priority patent/US10136858B2/en
Publication of JP2017051277A5 publication Critical patent/JP2017051277A5/ja
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/021—Measuring pressure in heart or blood vessels
    • A61B5/022—Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers
    • A61B5/0225—Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers the pressure being controlled by electric signals, e.g. derived from Korotkoff sounds
    • A61B5/02255—Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers the pressure being controlled by electric signals, e.g. derived from Korotkoff sounds the pressure being controlled by plethysmographic signals, e.g. derived from optical sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6843—Monitoring or controlling sensor contact pressure
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/021—Measuring pressure in heart or blood vessels
    • A61B5/022—Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/024—Measuring pulse rate or heart rate
    • A61B5/0245—Measuring pulse rate or heart rate by using sensing means generating electric signals, i.e. ECG signals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/1495—Calibrating or testing of in-vivo probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/04—Arrangements of multiple sensors of the same type
    • A61B2562/043—Arrangements of multiple sensors of the same type in a linear array
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Cardiology (AREA)
  • Molecular Biology (AREA)
  • Public Health (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Veterinary Medicine (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physiology (AREA)
  • Vascular Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Ophthalmology & Optometry (AREA)
  • Signal Processing (AREA)
  • Child & Adolescent Psychology (AREA)
  • Optics & Photonics (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
JP2015175967A 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法 Active JP6540397B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2015175967A JP6540397B2 (ja) 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法
EP16844245.7A EP3332702B1 (en) 2015-09-07 2016-08-31 Method of inspecting pressure pulse wave sensor, and method of manufacturing pressure pulse wave sensor
PCT/JP2016/075435 WO2017043384A1 (ja) 2015-09-07 2016-08-31 圧脈波センサの検査方法及び圧脈波センサの製造方法
CN201680051684.5A CN108024736B (zh) 2015-09-07 2016-08-31 压力脉搏波传感器的检查方法及压力脉搏波传感器的制造方法
US15/914,711 US10136858B2 (en) 2015-09-07 2018-03-07 Method for inspecting pressure pulse wave sensor and method for manufacturing pressure pulse wave sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015175967A JP6540397B2 (ja) 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法

Publications (3)

Publication Number Publication Date
JP2017051277A JP2017051277A (ja) 2017-03-16
JP2017051277A5 JP2017051277A5 (enExample) 2018-09-20
JP6540397B2 true JP6540397B2 (ja) 2019-07-10

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JP2015175967A Active JP6540397B2 (ja) 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法

Country Status (5)

Country Link
US (1) US10136858B2 (enExample)
EP (1) EP3332702B1 (enExample)
JP (1) JP6540397B2 (enExample)
CN (1) CN108024736B (enExample)
WO (1) WO2017043384A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10928905B2 (en) 2017-10-09 2021-02-23 TacSense, Inc. Body motion and position sensing, recognition and analytics from an array of wearable pressure sensors
CN110255491A (zh) * 2019-06-27 2019-09-20 中国科学院微电子研究所 Mems压力传感器封装结构及封装方法
CN110763393A (zh) * 2019-09-21 2020-02-07 蚌埠市力业传感器有限公司 压力传感器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107142A (en) * 1980-01-31 1981-08-25 Toshiba Corp Property evaluation device for semiconductor pressure detection element
US4809536A (en) * 1986-11-06 1989-03-07 Sumitomo Electric Industries, Ltd. Method of adjusting bridge circuit of semiconductor pressure sensor
JPS63118629A (ja) * 1986-11-06 1988-05-23 Sumitomo Electric Ind Ltd 半導体圧力センサのブリツジ回路調整方法
JPH0225050A (ja) * 1988-07-13 1990-01-26 Fujikura Ltd 半導体圧力のセンサの特性測定方法
JP2798764B2 (ja) * 1990-01-09 1998-09-17 コーリン電子株式会社 半導体圧脈波センサ
JP2894798B2 (ja) * 1990-06-27 1999-05-24 日本硝子繊維株式会社 ゴム補強用ガラス繊維の処理剤
JP2863281B2 (ja) * 1990-07-06 1999-03-03 コーリン電子株式会社 接触圧センサ
US5179956A (en) 1990-07-06 1993-01-19 Colin Electronics Co., Ltd. Contact pressure sensor
US6159166A (en) * 1998-03-20 2000-12-12 Hypertension Diagnostics, Inc. Sensor and method for sensing arterial pulse pressure
FR2817756B1 (fr) * 2000-12-08 2008-10-31 Hospal Internat Marketing Man Dispositif pour la mesure de pression comportant un capteur d'effort motorise
JP4363157B2 (ja) 2002-11-29 2009-11-11 オムロンヘルスケア株式会社 脈波測定装置
CN2631047Y (zh) * 2003-03-14 2004-08-04 徐杏芬 发光二极管的热传导及光度提升结构的改进
US7686768B2 (en) 2005-11-23 2010-03-30 Vital Sensors Holding Company, Inc. Implantable pressure monitor
US7682313B2 (en) 2005-11-23 2010-03-23 Vital Sensors Holding Company, Inc. Implantable pressure monitor
JP6256058B2 (ja) * 2014-01-31 2018-01-10 オムロンヘルスケア株式会社 脈波検出装置

Also Published As

Publication number Publication date
US10136858B2 (en) 2018-11-27
US20180192956A1 (en) 2018-07-12
EP3332702A1 (en) 2018-06-13
EP3332702B1 (en) 2020-05-27
CN108024736A (zh) 2018-05-11
EP3332702A4 (en) 2019-04-17
CN108024736B (zh) 2020-09-25
WO2017043384A1 (ja) 2017-03-16
JP2017051277A (ja) 2017-03-16

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