JP2017051277A5 - - Google Patents

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Publication number
JP2017051277A5
JP2017051277A5 JP2015175967A JP2015175967A JP2017051277A5 JP 2017051277 A5 JP2017051277 A5 JP 2017051277A5 JP 2015175967 A JP2015175967 A JP 2015175967A JP 2015175967 A JP2015175967 A JP 2015175967A JP 2017051277 A5 JP2017051277 A5 JP 2017051277A5
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JP
Japan
Prior art keywords
terminal portion
pressure
substrate
sensor chip
sensitive
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Application number
JP2015175967A
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English (en)
Japanese (ja)
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JP6540397B2 (ja
JP2017051277A (ja
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Priority claimed from JP2015175967A external-priority patent/JP6540397B2/ja
Priority to JP2015175967A priority Critical patent/JP6540397B2/ja
Application filed filed Critical
Priority to EP16844245.7A priority patent/EP3332702B1/en
Priority to PCT/JP2016/075435 priority patent/WO2017043384A1/ja
Priority to CN201680051684.5A priority patent/CN108024736B/zh
Publication of JP2017051277A publication Critical patent/JP2017051277A/ja
Priority to US15/914,711 priority patent/US10136858B2/en
Publication of JP2017051277A5 publication Critical patent/JP2017051277A5/ja
Publication of JP6540397B2 publication Critical patent/JP6540397B2/ja
Application granted granted Critical
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Anticipated expiration legal-status Critical

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JP2015175967A 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法 Active JP6540397B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2015175967A JP6540397B2 (ja) 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法
EP16844245.7A EP3332702B1 (en) 2015-09-07 2016-08-31 Method of inspecting pressure pulse wave sensor, and method of manufacturing pressure pulse wave sensor
PCT/JP2016/075435 WO2017043384A1 (ja) 2015-09-07 2016-08-31 圧脈波センサの検査方法及び圧脈波センサの製造方法
CN201680051684.5A CN108024736B (zh) 2015-09-07 2016-08-31 压力脉搏波传感器的检查方法及压力脉搏波传感器的制造方法
US15/914,711 US10136858B2 (en) 2015-09-07 2018-03-07 Method for inspecting pressure pulse wave sensor and method for manufacturing pressure pulse wave sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015175967A JP6540397B2 (ja) 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法

Publications (3)

Publication Number Publication Date
JP2017051277A JP2017051277A (ja) 2017-03-16
JP2017051277A5 true JP2017051277A5 (enExample) 2018-09-20
JP6540397B2 JP6540397B2 (ja) 2019-07-10

Family

ID=58239753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015175967A Active JP6540397B2 (ja) 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法

Country Status (5)

Country Link
US (1) US10136858B2 (enExample)
EP (1) EP3332702B1 (enExample)
JP (1) JP6540397B2 (enExample)
CN (1) CN108024736B (enExample)
WO (1) WO2017043384A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10928905B2 (en) 2017-10-09 2021-02-23 TacSense, Inc. Body motion and position sensing, recognition and analytics from an array of wearable pressure sensors
CN110255491A (zh) * 2019-06-27 2019-09-20 中国科学院微电子研究所 Mems压力传感器封装结构及封装方法
CN110763393A (zh) * 2019-09-21 2020-02-07 蚌埠市力业传感器有限公司 压力传感器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107142A (en) * 1980-01-31 1981-08-25 Toshiba Corp Property evaluation device for semiconductor pressure detection element
US4809536A (en) * 1986-11-06 1989-03-07 Sumitomo Electric Industries, Ltd. Method of adjusting bridge circuit of semiconductor pressure sensor
JPS63118629A (ja) * 1986-11-06 1988-05-23 Sumitomo Electric Ind Ltd 半導体圧力センサのブリツジ回路調整方法
JPH0225050A (ja) * 1988-07-13 1990-01-26 Fujikura Ltd 半導体圧力のセンサの特性測定方法
JP2798764B2 (ja) * 1990-01-09 1998-09-17 コーリン電子株式会社 半導体圧脈波センサ
JP2894798B2 (ja) * 1990-06-27 1999-05-24 日本硝子繊維株式会社 ゴム補強用ガラス繊維の処理剤
JP2863281B2 (ja) * 1990-07-06 1999-03-03 コーリン電子株式会社 接触圧センサ
US5179956A (en) 1990-07-06 1993-01-19 Colin Electronics Co., Ltd. Contact pressure sensor
US6159166A (en) * 1998-03-20 2000-12-12 Hypertension Diagnostics, Inc. Sensor and method for sensing arterial pulse pressure
FR2817756B1 (fr) * 2000-12-08 2008-10-31 Hospal Internat Marketing Man Dispositif pour la mesure de pression comportant un capteur d'effort motorise
JP4363157B2 (ja) 2002-11-29 2009-11-11 オムロンヘルスケア株式会社 脈波測定装置
CN2631047Y (zh) * 2003-03-14 2004-08-04 徐杏芬 发光二极管的热传导及光度提升结构的改进
US7686768B2 (en) 2005-11-23 2010-03-30 Vital Sensors Holding Company, Inc. Implantable pressure monitor
US7682313B2 (en) 2005-11-23 2010-03-23 Vital Sensors Holding Company, Inc. Implantable pressure monitor
JP6256058B2 (ja) * 2014-01-31 2018-01-10 オムロンヘルスケア株式会社 脈波検出装置

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