CN108024736B - 压力脉搏波传感器的检查方法及压力脉搏波传感器的制造方法 - Google Patents

压力脉搏波传感器的检查方法及压力脉搏波传感器的制造方法 Download PDF

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Publication number
CN108024736B
CN108024736B CN201680051684.5A CN201680051684A CN108024736B CN 108024736 B CN108024736 B CN 108024736B CN 201680051684 A CN201680051684 A CN 201680051684A CN 108024736 B CN108024736 B CN 108024736B
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Prior art keywords
pressure
terminal portion
substrate
sensor chip
pulse wave
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Chinese (zh)
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CN108024736A (zh
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鴫原教子
加藤雄树
若宫祐之
小椋敏彦
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Omron Healthcare Co Ltd
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Omron Healthcare Co Ltd
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/021Measuring pressure in heart or blood vessels
    • A61B5/022Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers
    • A61B5/0225Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers the pressure being controlled by electric signals, e.g. derived from Korotkoff sounds
    • A61B5/02255Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers the pressure being controlled by electric signals, e.g. derived from Korotkoff sounds the pressure being controlled by plethysmographic signals, e.g. derived from optical sensors
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/021Measuring pressure in heart or blood vessels
    • A61B5/022Measuring pressure in heart or blood vessels by applying pressure to close blood vessels, e.g. against the skin; Ophthalmodynamometers
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/02Detecting, measuring or recording for evaluating the cardiovascular system, e.g. pulse, heart rate, blood pressure or blood flow
    • A61B5/024Measuring pulse rate or heart rate
    • A61B5/0245Measuring pulse rate or heart rate by using sensing means generating electric signals, i.e. ECG signals
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value ; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue
    • A61B5/1495Calibrating or testing of in-vivo probes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/68Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6843Monitoring or controlling sensor contact pressure
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061Electrical connection means
    • G01L19/0069Electrical connection means from the sensor to its support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/145Housings with stress relieving means
    • G01L19/146Housings with stress relieving means using flexible element between the transducer and the support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/147Details about the mounting of the sensor to support or covering means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/04Arrangements of multiple sensors of the same type
    • A61B2562/043Arrangements of multiple sensors of the same type in a linear array
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12Manufacturing methods specially adapted for producing sensors for in-vivo measurements

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Cardiology (AREA)
  • Public Health (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • General Physics & Mathematics (AREA)
  • Physiology (AREA)
  • Vascular Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Ophthalmology & Optometry (AREA)
  • Signal Processing (AREA)
  • Child & Adolescent Psychology (AREA)
  • Optics & Photonics (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
CN201680051684.5A 2015-09-07 2016-08-31 压力脉搏波传感器的检查方法及压力脉搏波传感器的制造方法 Active CN108024736B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015175967A JP6540397B2 (ja) 2015-09-07 2015-09-07 圧脈波センサの検査方法及び圧脈波センサの製造方法
JP2015-175967 2015-09-07
PCT/JP2016/075435 WO2017043384A1 (ja) 2015-09-07 2016-08-31 圧脈波センサの検査方法及び圧脈波センサの製造方法

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CN108024736A CN108024736A (zh) 2018-05-11
CN108024736B true CN108024736B (zh) 2020-09-25

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CN201680051684.5A Active CN108024736B (zh) 2015-09-07 2016-08-31 压力脉搏波传感器的检查方法及压力脉搏波传感器的制造方法

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US (1) US10136858B2 (enExample)
EP (1) EP3332702B1 (enExample)
JP (1) JP6540397B2 (enExample)
CN (1) CN108024736B (enExample)
WO (1) WO2017043384A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10928905B2 (en) 2017-10-09 2021-02-23 TacSense, Inc. Body motion and position sensing, recognition and analytics from an array of wearable pressure sensors
CN110255491A (zh) * 2019-06-27 2019-09-20 中国科学院微电子研究所 Mems压力传感器封装结构及封装方法
CN110763393A (zh) * 2019-09-21 2020-02-07 蚌埠市力业传感器有限公司 压力传感器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107142A (en) * 1980-01-31 1981-08-25 Toshiba Corp Property evaluation device for semiconductor pressure detection element
US4809536A (en) * 1986-11-06 1989-03-07 Sumitomo Electric Industries, Ltd. Method of adjusting bridge circuit of semiconductor pressure sensor
JPS63118629A (ja) * 1986-11-06 1988-05-23 Sumitomo Electric Ind Ltd 半導体圧力センサのブリツジ回路調整方法
JPH0225050A (ja) * 1988-07-13 1990-01-26 Fujikura Ltd 半導体圧力のセンサの特性測定方法
JP2798764B2 (ja) * 1990-01-09 1998-09-17 コーリン電子株式会社 半導体圧脈波センサ
JP2894798B2 (ja) * 1990-06-27 1999-05-24 日本硝子繊維株式会社 ゴム補強用ガラス繊維の処理剤
JP2863281B2 (ja) * 1990-07-06 1999-03-03 コーリン電子株式会社 接触圧センサ
US5179956A (en) 1990-07-06 1993-01-19 Colin Electronics Co., Ltd. Contact pressure sensor
US6159166A (en) * 1998-03-20 2000-12-12 Hypertension Diagnostics, Inc. Sensor and method for sensing arterial pulse pressure
FR2817756B1 (fr) * 2000-12-08 2008-10-31 Hospal Internat Marketing Man Dispositif pour la mesure de pression comportant un capteur d'effort motorise
JP4363157B2 (ja) 2002-11-29 2009-11-11 オムロンヘルスケア株式会社 脈波測定装置
CN2631047Y (zh) * 2003-03-14 2004-08-04 徐杏芬 发光二极管的热传导及光度提升结构的改进
US7686768B2 (en) 2005-11-23 2010-03-30 Vital Sensors Holding Company, Inc. Implantable pressure monitor
US7682313B2 (en) 2005-11-23 2010-03-23 Vital Sensors Holding Company, Inc. Implantable pressure monitor
JP6256058B2 (ja) * 2014-01-31 2018-01-10 オムロンヘルスケア株式会社 脈波検出装置

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Publication number Publication date
US10136858B2 (en) 2018-11-27
US20180192956A1 (en) 2018-07-12
EP3332702A1 (en) 2018-06-13
EP3332702B1 (en) 2020-05-27
CN108024736A (zh) 2018-05-11
EP3332702A4 (en) 2019-04-17
WO2017043384A1 (ja) 2017-03-16
JP6540397B2 (ja) 2019-07-10
JP2017051277A (ja) 2017-03-16

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