JP6515838B2 - カーボンナノチューブ付部材、その製造方法、およびその製造装置 - Google Patents

カーボンナノチューブ付部材、その製造方法、およびその製造装置 Download PDF

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JP6515838B2
JP6515838B2 JP2016035991A JP2016035991A JP6515838B2 JP 6515838 B2 JP6515838 B2 JP 6515838B2 JP 2016035991 A JP2016035991 A JP 2016035991A JP 2016035991 A JP2016035991 A JP 2016035991A JP 6515838 B2 JP6515838 B2 JP 6515838B2
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cnt
substrate
carbon nanotube
alignment film
catalyst
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JP2016035991A
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Japanese (ja)
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JP2017149627A (ja
JP2017149627A5 (enExample
Inventor
アウン 太田
アウン 太田
大島　久純
大島　　久純
野田　優
優 野田
悠 吉原
悠 吉原
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Waseda University
Denso Corp
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Waseda University
Denso Corp
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Priority to JP2016035991A priority Critical patent/JP6515838B2/ja
Priority to CN201680082654.0A priority patent/CN108698025B/zh
Priority to DE112016006495.0T priority patent/DE112016006495T5/de
Priority to PCT/JP2016/081204 priority patent/WO2017145439A1/ja
Priority to US16/078,809 priority patent/US20210179431A1/en
Publication of JP2017149627A publication Critical patent/JP2017149627A/ja
Publication of JP2017149627A5 publication Critical patent/JP2017149627A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74—Iron group metals
    • B01J23/745—Iron
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J15/00—Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor
    • B01J15/005—Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor in the presence of catalytically active bodies, e.g. porous plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/02—Boron or aluminium; Oxides or hydroxides thereof
    • B01J21/04—Alumina
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/0215—Coating
    • B01J37/0225—Coating of metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/08—Heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/168—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/20—Nanotubes characterized by their properties
    • C01B2202/24—Thermal properties
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/20—Nanotubes characterized by their properties
    • C01B2202/34—Length
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/20—Nanotubes characterized by their properties
    • C01B2202/36—Diameter
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Catalysts (AREA)
JP2016035991A 2016-02-26 2016-02-26 カーボンナノチューブ付部材、その製造方法、およびその製造装置 Expired - Fee Related JP6515838B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016035991A JP6515838B2 (ja) 2016-02-26 2016-02-26 カーボンナノチューブ付部材、その製造方法、およびその製造装置
CN201680082654.0A CN108698025B (zh) 2016-02-26 2016-10-21 带碳纳米管的部件及其制造方法
DE112016006495.0T DE112016006495T5 (de) 2016-02-26 2016-10-21 Kohlenstoffnanoröhre-Verbundelement, Verfahren zu seiner Herstellung und Vorrichtung zu seiner Herstellung
PCT/JP2016/081204 WO2017145439A1 (ja) 2016-02-26 2016-10-21 カーボンナノチューブ付部材、その製造方法、およびその製造装置
US16/078,809 US20210179431A1 (en) 2016-02-26 2016-10-21 Carbon nanotube attached member, method for manufacturing the same, and device for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016035991A JP6515838B2 (ja) 2016-02-26 2016-02-26 カーボンナノチューブ付部材、その製造方法、およびその製造装置

Publications (3)

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JP2017149627A JP2017149627A (ja) 2017-08-31
JP2017149627A5 JP2017149627A5 (enExample) 2018-04-19
JP6515838B2 true JP6515838B2 (ja) 2019-05-22

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JP2016035991A Expired - Fee Related JP6515838B2 (ja) 2016-02-26 2016-02-26 カーボンナノチューブ付部材、その製造方法、およびその製造装置

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US (1) US20210179431A1 (enExample)
JP (1) JP6515838B2 (enExample)
CN (1) CN108698025B (enExample)
DE (1) DE112016006495T5 (enExample)
WO (1) WO2017145439A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN207235347U (zh) * 2017-11-22 2018-04-13 深圳市蓝禾技术有限公司 无线充电器
JP7484471B2 (ja) * 2020-06-16 2024-05-16 富士通株式会社 カーボンナノチューブシート、電子機器及びカーボンナノチューブシートの製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040009353A1 (en) * 1999-06-14 2004-01-15 Knowles Timothy R. PCM/aligned fiber composite thermal interface
AUPQ304199A0 (en) * 1999-09-23 1999-10-21 Commonwealth Scientific And Industrial Research Organisation Patterned carbon nanotubes
JP2005075711A (ja) * 2003-09-03 2005-03-24 Toyota Motor Corp カーボンナノチューブの配向方法及び配向したカーボンナノチューブ
TWI276138B (en) * 2004-09-24 2007-03-11 Ind Tech Res Inst Array-like flat lighting source
US20070116631A1 (en) * 2004-10-18 2007-05-24 The Regents Of The University Of California Arrays of long carbon nanotubes for fiber spinning
JP2006306704A (ja) * 2005-03-30 2006-11-09 Sonac Kk 炭素膜の製造方法および炭素膜
JP4817296B2 (ja) * 2006-01-06 2011-11-16 独立行政法人産業技術総合研究所 配向カーボンナノチューブ・バルク集合体ならびにその製造方法および用途
US7868531B2 (en) * 2006-05-05 2011-01-11 Brother International Corporation Carbon nanotube arrays for field electron emission
JP2008303117A (ja) * 2007-06-08 2008-12-18 Denso Corp カーボンナノチューブ製造装置及びカーボンナノチューブの製造方法
US9318295B2 (en) * 2008-01-18 2016-04-19 The United States Of America As Represented By The Administrator Of The Nasa Carbon nanotube patterning on a metal substrate
JP2009208975A (ja) * 2008-02-29 2009-09-17 National Institute Of Advanced Industrial & Technology カーボンナノチューブ構造体及びその製造方法
JP5169589B2 (ja) * 2008-07-31 2013-03-27 株式会社デンソー 接着用シート、及びその製造方法
CN104192818A (zh) * 2008-12-30 2014-12-10 独立行政法人产业技术综合研究所 取向单层碳纳米管集合体、块状取向单层碳纳米管集合体、粉体状取向单层碳纳米管集合体、及其制造方法
JP5636654B2 (ja) * 2009-09-07 2014-12-10 富士通株式会社 カーボンナノチューブシート構造体およびその製造方法、半導体装置
CN103562131A (zh) * 2011-05-31 2014-02-05 日本瑞翁株式会社 取向碳纳米管集合体的制造装置及制造方法
US9028791B1 (en) * 2012-11-27 2015-05-12 Dream Matter, LLC System and method for manufacturing carbon nanotubes
CN103833001B (zh) * 2014-01-03 2015-08-12 南京康众光电科技有限公司 一种船槽式图案结构生长的碳纳米管生长方法及其发射体

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Publication number Publication date
DE112016006495T5 (de) 2018-11-15
CN108698025B (zh) 2021-08-17
JP2017149627A (ja) 2017-08-31
US20210179431A1 (en) 2021-06-17
CN108698025A (zh) 2018-10-23
WO2017145439A1 (ja) 2017-08-31

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