JP6505086B2 - 加熱式感応層ガスセンサ - Google Patents
加熱式感応層ガスセンサ Download PDFInfo
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- JP6505086B2 JP6505086B2 JP2016517492A JP2016517492A JP6505086B2 JP 6505086 B2 JP6505086 B2 JP 6505086B2 JP 2016517492 A JP2016517492 A JP 2016517492A JP 2016517492 A JP2016517492 A JP 2016517492A JP 6505086 B2 JP6505086 B2 JP 6505086B2
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- 238000010438 heat treatment Methods 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 4
- 230000000295 complement effect Effects 0.000 claims description 3
- 230000005684 electric field Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
- G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
- G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/006—Heaters using a particular layout for the resistive material or resistive elements using interdigitated electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/03—Heaters specially adapted for heating hand held tools
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/037—Heaters with zones of different power density
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
Claims (6)
- 加熱式感応層センサであって、
感応層(12)を支える絶縁性基板(10)と、
前記感応層(12)と電気接触するように構成される2つの隣接する導電性トラックの形態の2つの相補的な測定電極(E1、E2)と、
前記感応層(12)の活性領域を一様に加熱するために前記基板上に配列される抵抗性トラック(14’)の形態の加熱素子(14)であって、前記抵抗性トラック(14’)が、前記抵抗性トラック(14’)の長さにわたって規則的に間隔をおいて配置される少なくとも3つの電力供給ポイントを含み、前記抵抗性トラック(14’)が、前記電力供給ポイント間において複数のセグメントに分割される、加熱素子(14)と、
前記抵抗性トラック(14’)の奇数番目のポイントに接続される第1の共通供給ライン(20)と、
前記抵抗性トラック(14’)の偶数番目のポイントに接続される第2の共通供給ライン(22)であって、前記第1の共通供給ライン(20)と前記第2の共通供給ライン(22)との間に印加される供給電圧が、最大で、前記抵抗性トラック(14’)の複数のセグメントの数で割られる5.7Vである、第2の共通供給ライン(22)と、
を備える、センサ。 - 前記抵抗性トラック(14’)の平面上に突き出る前記電極(E1、E2)の導電性トラックのレイアウトが、前記抵抗性トラック(14’)の外にとどまる、請求項1に記載のセンサ。
- 前記抵抗性トラック(14’)及び前記電極(E1、E2)の導電性トラックが同一平面上にある、請求項2に記載のセンサ。
- 前記感応層(12)の活性領域での前記抵抗性トラック(14’)及び前記電極(E1、E2)の導電性トラックの方向変化部がゼロでない曲率半径を有する、請求項2に記載のセンサ。
- 前記抵抗性トラック(14’)が連続的にU字形弧状部を備え、前記2つの隣接する導電性トラックが、前記抵抗性トラック(14’)と平行して延びて各弧状部に入り、前記抵抗性トラック(14’)から最も遠い導電性トラックが、前記弧状部を出るときに終端し、前記抵抗性トラック(14’)に隣接する導電性トラックが、前記弧状部を出ると前記最も遠い導電性トラックの端の周りでUターンして前記弧状部に戻る、請求項4に記載のセンサ。
- 前記抵抗性トラック(14’)が、前記導電性トラックと同一平面上にあり、また、前記感応層(12)と電気接触し、前記抵抗性トラック(14’)に隣接する導電性トラックが、前記抵抗性トラック(14’)と前記隣接する導電性トラックとの間の、前記感応層(12)に流れるどのような電流も前記導電性トラック間に流れる電流を乱さないように、グラウンド電圧に設定される、請求項5に記載のセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1359494 | 2013-10-01 | ||
FR1359494A FR3011331B1 (fr) | 2013-10-01 | 2013-10-01 | Capteur a gaz a couche sensible chauffee |
PCT/FR2014/052445 WO2015049445A1 (fr) | 2013-10-01 | 2014-09-29 | Capteur a gaz a couche sensible chauffee |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016534326A JP2016534326A (ja) | 2016-11-04 |
JP6505086B2 true JP6505086B2 (ja) | 2019-04-24 |
Family
ID=49713273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016517492A Active JP6505086B2 (ja) | 2013-10-01 | 2014-09-29 | 加熱式感応層ガスセンサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US10753897B2 (ja) |
EP (2) | EP3052928A1 (ja) |
JP (1) | JP6505086B2 (ja) |
KR (2) | KR102229409B1 (ja) |
CN (1) | CN105659076B (ja) |
FR (1) | FR3011331B1 (ja) |
WO (1) | WO2015049445A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10598621B2 (en) * | 2017-04-11 | 2020-03-24 | Invensense, Inc. | Gas sensing device with chemical and thermal conductivity sensing |
EP3550295B1 (en) * | 2018-04-05 | 2022-07-13 | Alpha M.O.S. | Gas sensor with a configurable heating element, and methods exploiting the configurability |
CN111434255A (zh) * | 2019-01-14 | 2020-07-21 | 湖南中烟工业有限责任公司 | 并联分层发热结构及其应用的低温烟具 |
USD953183S1 (en) | 2019-11-01 | 2022-05-31 | Nvent Services Gmbh | Fuel sensor |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0663994B2 (ja) * | 1987-03-05 | 1994-08-22 | フィガロ技研株式会社 | センサ |
JPH04329291A (ja) * | 1991-05-02 | 1992-11-18 | Ngk Spark Plug Co Ltd | セラミックスヒータ及びその製造方法 |
JPH0517557U (ja) * | 1991-07-18 | 1993-03-05 | フイガロ技研株式会社 | ガスセンサ |
CN2188207Y (zh) * | 1994-01-18 | 1995-01-25 | 山东大学 | 热稳定半导体式气体传感器 |
DE19618935C2 (de) * | 1996-05-10 | 2002-11-28 | Siemens Ag | Gassensor und Verfahren zur Herstellung eines Gassensors |
EP0945722A3 (de) * | 1998-03-26 | 2001-10-17 | Siemens Aktiengesellschaft | Halbleitergassensor |
DE60213231T2 (de) * | 2001-05-31 | 2007-06-14 | Respironics, Inc. | Heizvorrichtung für optischen gassensor |
US20040075528A1 (en) * | 2002-10-22 | 2004-04-22 | Oak-Mitsui, Inc. | Printed circuit heaters with ultrathin low resistivity materials |
US7622824B2 (en) * | 2002-12-04 | 2009-11-24 | Orr Raymond K | Distributed power supply arrangement |
WO2006005332A2 (de) * | 2004-07-06 | 2006-01-19 | Aceos Gmbh | Festelektrolyt-gassenor mit heizelement |
DE102004034192A1 (de) * | 2004-07-14 | 2006-02-09 | Heraeus Sensor Technology Gmbh | Hochtemperaturstabiler Sensor |
EP1844316B1 (de) * | 2005-01-21 | 2018-08-29 | Robert Bosch Gmbh | Sensorelement für partikelsensoren und verfahren zum betrieb desselben |
DE102005053120A1 (de) * | 2005-11-08 | 2007-05-10 | Robert Bosch Gmbh | Sensorelement für Gassensoren und Verfahren zum Betrieb desselben |
DE102005057566A1 (de) * | 2005-12-02 | 2007-06-06 | Robert Bosch Gmbh | Sensorelement für einen Gassensor zur Messung einer physikalischen Eigenschaft eines Messgases |
DE102006020113A1 (de) * | 2006-04-29 | 2007-11-08 | Paragon Ag | Sensor |
US7525640B2 (en) * | 2006-11-07 | 2009-04-28 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR100812996B1 (ko) * | 2006-12-07 | 2008-03-13 | 한국전자통신연구원 | 마이크로 가스 센서 및 그 제조방법 |
KR101862417B1 (ko) * | 2010-02-25 | 2018-05-29 | 스토너릿지 인코포레이티드 | 수트 센서 시스템 |
US8651737B2 (en) * | 2010-06-23 | 2014-02-18 | Honeywell International Inc. | Sensor temperature sensing device |
-
2013
- 2013-10-01 FR FR1359494A patent/FR3011331B1/fr active Active
-
2014
- 2014-09-29 KR KR1020167011657A patent/KR102229409B1/ko active IP Right Grant
- 2014-09-29 JP JP2016517492A patent/JP6505086B2/ja active Active
- 2014-09-29 KR KR1020207036643A patent/KR102325261B1/ko active IP Right Grant
- 2014-09-29 EP EP14789318.4A patent/EP3052928A1/fr active Pending
- 2014-09-29 EP EP20210986.4A patent/EP3816617A3/fr active Pending
- 2014-09-29 WO PCT/FR2014/052445 patent/WO2015049445A1/fr active Application Filing
- 2014-09-29 CN CN201480054767.0A patent/CN105659076B/zh active Active
- 2014-09-29 US US15/026,751 patent/US10753897B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2015049445A1 (fr) | 2015-04-09 |
EP3816617A2 (fr) | 2021-05-05 |
KR102229409B1 (ko) | 2021-03-18 |
KR20160065947A (ko) | 2016-06-09 |
US10753897B2 (en) | 2020-08-25 |
CN105659076B (zh) | 2018-10-09 |
FR3011331A1 (fr) | 2015-04-03 |
CN105659076A (zh) | 2016-06-08 |
EP3052928A1 (fr) | 2016-08-10 |
FR3011331B1 (fr) | 2017-02-17 |
US20160238548A1 (en) | 2016-08-18 |
KR102325261B1 (ko) | 2021-11-11 |
JP2016534326A (ja) | 2016-11-04 |
KR20200144592A (ko) | 2020-12-29 |
EP3816617A3 (fr) | 2021-08-04 |
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