CN105659076A - 热敏感层气体传感器 - Google Patents
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Abstract
本发明涉及一种具有热敏感层的传感器,包括:承载敏感层(12)的绝缘基底(10);采用被配置为与敏感层(12)电接触的两个相邻的导电道形式的两个互补测量电极(E1、E2);以及采用被布置在基底上的用于均匀加热敏感层的有源区的电阻道的形式的加热元件(14)。电阻道(14ˊ)包括至少三个超过电阻道长度的匀称间隔的电力供应点,且为每个位列偶数的点供应第一电源电压(0),而为每个位列奇数的点供应第二电源电压(Vhˊ)。
Description
技术领域
本发明涉及分子传感器,特别是采用热敏感层运行的气体传感器。
背景技术
这种类型的传感器的敏感层通常包括半导体氧化物,根据将要检测的分子来选择半导体氧化物的性质和操作温度。敏感层的电阻率依据由氧化层吸附的分子浓度而变化。
图1A和1B示意性地示出常规热敏感层传感器的顶视图和沿着轴AA的截面,例如,如在以下论文中所描述的:[IDewaPutuHermida等人的“DevelopmentofCoGasSensingBasedSnO2Thinfilm”,InternationalJournalofEngineering&TechnologyIJET-IJENS第13卷No:.01]和[GeorgeF.Fine等人的“MetalOxideSemi-ConductorGasSensorsinEnvironmentalMonitoring”,Sensors2010,10,5469-5502]。
传感器包括绝缘基底10,在该绝缘基底10上表面上承载基于半导体氧化物的敏感层12。以导电道E1和E2形式的两个互补电极被设置为与敏感层12电接触。电极E1和E2被配置为测量位于电极之间的敏感层带的电阻率的变化。为了改进灵敏度,期望增加两个电极的相邻长度。为此,通常将电极道形成为叉指式梳,如图所示。
每个电极包括放置在传感器的外围处、敏感层的有源区(activearea)外面的接触端子。电极E1的端子被设定为地电压(0V),且电极E2的端子被设定为测量电压M,大约1V。传感器通过测量在两个电极端子之间流过的电流而运行。
为了对敏感层12加热,提供与敏感层电隔离并且例如被放置在基底10的底表面上的电阻道14。道14被配置为均匀加热敏感层的有源区,即在电极的相对的指之间的区域。道14通常处于蛇纹线的形式,如图所示。于地(0V)和电压Vh之间供电,调节电压Vh以实现期望温度。
热敏感层传感器的结构和其中所使用的材料,特别地非常适于使用集成电路技术来制造。传感器尺寸很小,以致敏感层可以被加热到高达350℃,而功耗只有30mW。然而,已注意到,这种传感器的敏感层比其它技术中制造的传感器老化更快。
发明内容
因此,期望延长使用集成电路制造技术而生产的热敏感层传感器的寿命。
该需要通过包括以下的热敏感层传感器来解决:承载敏感层的绝缘基底;被配置为与敏感层电接触的以两个相邻的导电道形式的两个互补测量电极;以及用于均匀加热敏感层的有源区的以布置在基底上的电阻道形式的加热元件。电阻道包括至少三个匀称间隔的超过电阻道长度的电力供应点,且每个位列奇数的点由第一电源电压供电,而每个位列偶数的点由第二电源电压供电。
根据实施例,投射到电阻道的平面上的电极的导电道的版图,保持在限定电阻道周围的边界的外面。
根据实施例,电阻道和电极的导电道共面。
根据实施例,在敏感层的有源区中电阻道和电极的导电道的方向变化具有非零曲率半径。
根据实施例,电阻道包括连续的U形弧,而两个导电道平行于电阻道,进入每个弧,最远离电阻道的导电道在退出弧时结束,而邻近电阻道的导电道在退出弧时在最远的导电道的末端周围形成U形转弯以返回到弧中。
根据实施例,电阻道与导电道共面,而且还与敏感层电接触,邻近电阻道的导电道被设定为地电压,以使得在电阻道和相邻的导电道之间在敏感层中流过的任何电流不干扰在导电道之间流过的电流。
附图说明
根据本发明的特定实施例的以下描述,其它优点和特性将变得更为显而易见,该特定实施例仅出于示例性目的而提供并且在附图中表示,在附图中:
前文描述的图1A和1B,示意性示出常规热敏感层传感器的顶视图和截面;
图2示意性示出提高传感器寿命的传感器加热元件的电阻道的实施例;
图3示意性示出电阻道的另一实施例和适用电极的实施例;以及
图4示出用于图3类型的若干结构的串联技术。
具体实施方式
发明人已发现尤其是当使用集成电路制造技术来生成传感器时,小型热传感器的敏感层主要在为电阻道供电的高电压(Vh)侧上劣化,图1A所示的区域D中。发明人将该效应归于由敏感层所承受的电场。事实上,电阻道的电源电压Vh可相当高,高达5.7V,且在集成电路技术中在电阻道和电极的导电道之间的距离可特别小,以使得在电阻道处于最高电压的一侧上在每个电极与电阻道的交叉点处建立强电场。确实在这些道交叉点处发生对敏感层的最先损害。
为避免由电场导致的这种劣化,将电阻道移离电极事实上并不能解决问题,因为加热效率会降低,且会要求增加电阻道的电源电压。
图2示意性示出加热元件的电阻道配置14',其降低了电场而不降低加热效率。此处以蛇形线形式的电阻道,除了在每个端处的电力供应端子外,还包括一个或多个沿电阻道长度匀称间隔的中间供应点。例如,在图2中,在对端处端子计数的所有五个供应点中,电阻道包括三个中间供电点。位列奇数的点由电源电压中的第一电源电压供电,如地(0V),而位列偶数的点由第二电源电压供电,高压Vh'供电。为此,位列奇数的点可被连接到由第一电压供电的共用的低电阻率线路20,而位居偶数的点可被连接到由第二电压供电的共用的低电阻率线路22。
采用示出的配置,在提供相同的加热功率的同时,相对于仅两个电力供应端子所需要的电压Vh,电压Vh'可以是该电压Vh除以四。事实上,蛇形线的每段具有总电阻的四分之一,且从其端子看到常规电源电压的四分之一:电流相对常规配置没有变化,所以消耗的功率相同。因此,电场可除以电阻道中所使用的段数。
为简化传感器的制造,期望使电极的道和电阻道共面。这允许使道形成单独掩模级。在这种情况下,如图2所示,供应端子优选位于传感器的边上,以避免使电力供应道布线穿过传感器的有源带,或在该区域中放置过孔。然后,电力供应端子可被连接到布置在传感器有源区外面的金属道和过孔。
图3示意性示出另一传感器的实施例。此处,电阻道14'包括两个相对于穿过中央供应点的纵轴对称的蛇形线的段,此处由电压Vh'供电。如果每个段都具有奇数个弧,如图所示,则端供应点(此处为0V)位于传感器与中央点相同的一边。
采用此配置,电阻道的中央部分传递两段中的每一段的电流,且因此看到每段电流两倍的电流。如果中央部分具有与电阻道的其余部分相同的电阻率,则将消耗其余部分四倍的功率。为使加热功率均匀,可调整中央部分的尺寸以呈现道的其余部分的电阻率的四分之一。
图3中还示出示例性的电极E1和E2的布线配置,以使其可在与电阻道14'相同的平面中制成。另外,该电极布线被配置为进一步降低由敏感层所承受的电场。
如图1B所示的常规的电极布线配置,具有许多曲率半径接近于零的方向变化。这导致在每个方向变化处电场的局部增强。
为降低这种效应,如图3所示,电极E1、E2的道和电阻道14'的方向变化,跟随诸如圆弧的非零曲率半径。电阻道14'的蛇形线路径可由连续的“U”形弧形成。关于电极,还试图避免具有许多直角和尖端的梳状路径。因此,两个电极E1、E2的道保持与电阻道14'平行,并且穿透每个弧。当退出弧时,离电阻道最远的电极(此处为E2)终止,而邻近电阻道的电极(此处为E1)在电极E2的尖端周围实现U形转弯以返回到弧中。该布线配置有助于增加电极的相对面的长度,而不使用梳模式。
采用该电极版图技术,由蛇形线的每个弧形成一对电极道E1、E2。对的每个道的起点被连接到传感器的边上的端子,在传感器的有源带外面,道可从该端子供电并且必要时通过过孔连接到其它弧的对等(peer)道。
在电阻道14'的起始处,如图所示,电极对E1、E2在与电阻道相同的侧处开始,并从外面平行地跟随第一弧直到下一个弧,在此处开始以上描述的模式。电阻道的端处的模式可为对称。
图3的配置允许实现电极的道和电阻道处于同一平面与敏感层接触。如果电阻道14'与敏感层电接触,则该电阻道14'将在敏感层中产生电极的可干扰测量的杂散电流。
为防止这种情况,局部绝缘体可被沉积在敏感层和电阻道之间,或者敏感层可被局部地沉积在电极上。这将不利地影响敏感层的加热效率。
图3所示的电极的电力供应配置避免了当与敏感层电接触时由电阻道产生的杂散电流的效应。邻近电阻道的电极E1的道为接地(0V),而更远的电极E2的道由测量电压M供应。然后,任何趋于在电极的道E1和电阻道14之间在敏感层中流动的电流流向地,而不能到达电极的道E2。
在这种情况下,可以互换地采用沉积于结构下方或上方的敏感层来应用图3的道结构。优选将敏感层沉积于上方,因为其然后对环境暴露出更大的表面积。
图3的配置可在更传统的结构中使用,其中电阻道14'被放置在与电极E1、E2不同平面中。那么该结构仍然提供低电场的好处。可保持电阻道和电极的比例和位置,以使投射到电阻道的平面上的电极道的版图保持在限定电阻道周围的边界外面,换言之,在传感器的有源带中避免了电阻道与电极道的交叉。
图4示出一种用于将图3所示的类型的若干结构串联的示例性技术。通过共同使用电极E2的侧面部分可将图3类型的两个结构接合。因此可以将电阻道电源电压Vh'降低到等于段的数量的一个因数,以解决期望应用的需要。
这种配置允许通过将不同的结构连接在一起,或单独使用不同的结构,将整个结构作为单个的传感器使用,因此实现了提供若干不同信号(例如,基于每个蛇形线的温度)的“多传感器”配置,例如“电子鼻”装置。
Claims (7)
1.一种热敏感层传感器,包括:
绝缘基底(10),承载敏感层(12);
以两个相邻导电道的形式的两个互补测量电极(E1、E2),被配置为与所述敏感层(12)电接触;以及
以电阻道的形式的加热元件(14),被布置在所述基底上,用于均匀加热所述敏感层的有源区;
其中所述电阻道(14')包括至少三个超过所述电阻道长度的匀称间隔的电力供应点,且每个位列奇数的点由相同的第一电源电压(0)供电,而每个位列偶数的点由相同的第二电源电压(Vh’)供电。
2.根据权利要求1所述的传感器,包括:
第一共用电源线路(20),被连接到所述电阻道的所述位列奇数的点;以及
第二共用电源线路(22),被连接到所述电阻道的所述位列偶数的点。
3.根据权利要求1所述的传感器,其中投射到所述电阻道的平面上的所述电极的所述导电道的版图,保持在限定所述电阻道周围的边界外面。
4.根据权利要求3所述的传感器,其中所述电阻道和所述电极的所述导电道共面。
5.根据权利要求3所述的传感器,其中在所述敏感层的所述有源区中所述电阻道和所述电极的所述导电道的方向变化具有非零的曲率半径。
6.根据权利要求5所述的传感器,其中所述电阻道包括连续的U形弧,且所述两个导电道与所述电阻道平行,进入每个弧,最远离所述电阻道的所述导电道当退出弧时结束,而邻近所述电阻道的所述导电道当退出弧时在所述最远的导电道的末端周围形成U形转弯以返回到所述弧中。
7.根据权利要求6所述的传感器,其中所述电阻道与所述导电道共面,而且还与所述敏感层电接触,邻近所述电阻道的所述导电道被设置为地电压,以致在所述电阻道和所述相邻的导电道之间的所述敏感层中流过的任何电流不干扰在所述导电道之间流过的电流。
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CN110494743A (zh) * | 2017-04-11 | 2019-11-22 | 应美盛公司 | 气体传感方法及装置 |
CN111434255A (zh) * | 2019-01-14 | 2020-07-21 | 湖南中烟工业有限责任公司 | 并联分层发热结构及其应用的低温烟具 |
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